| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 07/16/2009 | US20090178915 Gas-exciting apparatus having electrode containing insulating coating layer and gas-exciting process |
| 07/15/2009 | EP2079096A1 Ion source with filament electric discharge |
| 07/15/2009 | EP2007175A9 Plasma generator and method of generating plasma using the same |
| 07/15/2009 | EP1856702A4 Plasma electric generation system |
| 07/15/2009 | EP1501649A4 Plasma-assisted sintering |
| 07/15/2009 | EP1423227B1 Riser(s) size reduction and/or metal quality improving in gravity casting of shaped products by moving electric arc |
| 07/15/2009 | CN101483968A Ejection type plasma gun and plasma processing device applying the same |
| 07/15/2009 | CN100513632C Thin film forming device and thin film forming method |
| 07/15/2009 | CN100513628C Nitriding method and device |
| 07/14/2009 | US7560144 Method of stabilizing film quality of low-dielectric constant film |
| 07/14/2009 | CA2444766C Method and apparatus for sequential plasma treatment |
| 07/14/2009 | CA2398194C Method for plasma jet welding |
| 07/09/2009 | WO2009085808A2 Apparatus and method for processing a substrate using inductively coupled plasma technology |
| 07/09/2009 | WO2009085709A1 Apparatus and method for controlling edge performance in an inductively coupled plasma chamber |
| 07/09/2009 | WO2009084486A1 Plasma treatment apparatus, heating device for the plasma treatment apparatus, and plasma treatment method |
| 07/09/2009 | US20090173360 Lithographic Apparatus, and Device Manufacturing Method |
| 07/09/2009 | DE112007002123T5 Bogenentladungsspannungsschätzung und Verwendung von Bogenentladungsspannungsschätzung in thermischen Prozessiersystemen Arc voltage estimation and use of arc voltage estimation in thermal Prozessiersystemen |
| 07/09/2009 | DE102008003475A1 Hochfrequenzgenerator für das elektrochirurgische Schneiden High-frequency generator for electrosurgical cutting |
| 07/08/2009 | CN101480111A Plasma processing apparatus, plasma processing method and photoelectric conversion element |
| 07/08/2009 | CN101480110A Method for depositing an amorphous carbon film with improved density and step coverage |
| 07/08/2009 | CN101478857A Plasma treatment apparatus |
| 07/08/2009 | CN101478856A Radio frequency automatic impedance matcher and implementing method thereof |
| 07/08/2009 | CN100512592C Plasma accelerator configuration |
| 07/08/2009 | CN100512591C Plasma processing apparatus |
| 07/08/2009 | CN100511583C Plasma processing device |
| 07/08/2009 | CN100510164C System and apparatus for control of sputter deposition process |
| 07/07/2009 | US7557511 Apparatus and method utilizing high power density electron beam for generating pulsed stream of ablation plasma |
| 07/07/2009 | US7557364 Charge neutralizing device |
| 07/07/2009 | US7557324 Backstream-preventing thermal spraying device |
| 07/02/2009 | WO2009082763A2 Method and apparatus for controlling plasma uniformity |
| 07/02/2009 | WO2009082753A2 Asymmetrical rf drive for electrode of plasma chamber |
| 07/02/2009 | WO2009082517A1 Plasma enhanced chemical vapor deposition of barrier coatings |
| 07/02/2009 | WO2009081911A1 Ion discharge device |
| 07/02/2009 | WO2009081897A1 Filming treatment jig, plasma cvd apparatus, and metal plate and osmium film forming method |
| 07/02/2009 | WO2009081761A1 Plasma source mechanism and film forming apparatus |
| 07/02/2009 | WO2009080662A1 Remote non-thermal atmospheric plasma treatment of temperature sensitive particulate materials and apparatus therefore |
| 07/02/2009 | US20090169769 Deposition apparatus and deposition method |
| 07/02/2009 | US20090169768 Substrate processing method and substrate processing apparatus |
| 07/02/2009 | US20090169767 Method for increasing the removal rate of photoresist layer |
| 07/02/2009 | US20090168945 Apparatus for magnetic and electrostatic confinement of plasma |
| 07/02/2009 | US20090166179 Induction Device |
| 07/02/2009 | US20090165815 Avoiding electrical shorts in packaging |
| 07/02/2009 | DE19943053B4 Plasmaanlage, insbesondere zur Herstellung von Halbleiterbauelementen A plasma plant, in particular for the production of semiconductor devices |
| 07/02/2009 | DE19628954B4 Vorrichtung zur Erzeugung von Plasma A device for generating plasma |
| 07/02/2009 | DE10211332B4 Vorrichtung und Verfahren zur Aktivierung von Gasen im Vakuum sowie Verwendung der Vorrichtung Apparatus and method for activation of gases in the vacuum as well as using the apparatus |
| 07/02/2009 | DE102008001514A1 Mikrowellen-erregtes Plasmaverarbeitungsgerät unter Verwendung einer von gezahnten Wellenleiter-Plasmareaktoren erregten linearen Mikrowellenplasmaquelle Microwave excited plasma processing apparatus using a magnet of toothed waveguide plasma reactors linear microwave plasma source |
| 07/02/2009 | DE102007061418A1 Method for generating hollow cathode arc discharge plasma in a working vacuum chamber and regulating material steam particles exposed to the hollow cathode arc discharge plasma, by reducing gas flow through the hollow cathode |
| 07/02/2009 | DE102007060807A1 Gasentladungsquelle, insbesondere für EUV-Strahlung Gas discharge source, in particular for EUV radiation |
| 07/02/2009 | CA2709717A1 Plasma enhanced chemical vapor deposition of barrier coatings |
| 07/01/2009 | EP2075822A2 Plasma reactor for treating substrates having large surfaces |
| 07/01/2009 | EP1502480A4 Plasma-assisted heat treatment |
| 07/01/2009 | EP1502012A4 Plasma-assisted engine exhaust treatment |
| 07/01/2009 | EP1402762A4 Plasma torch |
| 07/01/2009 | CN101472384A Atmos plasma reactor |
| 07/01/2009 | CN101472383A Microwave discharge inner conductor with long lifetime |
| 07/01/2009 | CN101472382A Plasma discharge cavity with low pollution |
| 07/01/2009 | CN100508689C Plasma processing device |
| 06/30/2009 | US7554053 Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system |
| 06/30/2009 | CA2517639C Electrode and electrode holder with threaded connection |
| 06/30/2009 | CA2497757C System and method for determining an operational condition of a torch |
| 06/30/2009 | CA2497207C Plasma treatment within dielectric fluids |
| 06/25/2009 | WO2009078361A1 Plasma sterilizer |
| 06/25/2009 | WO2009078094A1 Plasma processor |
| 06/25/2009 | US20090163355 Rf non-thermal plasma techniques for catalyst development to improve process efficiencies |
| 06/25/2009 | US20090162572 Systems and Methods for the Production of Highly Tetrahedral Amorphous Carbon Coatings |
| 06/25/2009 | US20090162570 Apparatus and method for processing a substrate using inductively coupled plasma technology |
| 06/25/2009 | US20090162562 Methods for Applying Thermal Barrier Coating Systems |
| 06/25/2009 | US20090162263 Atmospheric-pressure plasma reactor |
| 06/25/2009 | US20090159431 Method for Forming Tantalum Nitride Film |
| 06/25/2009 | US20090159425 Method of correcting baseline skew by a novel motorized source coil assembly |
| 06/25/2009 | US20090159424 Dual zone gas injection nozzle |
| 06/25/2009 | US20090159423 Asymmetrical RF Drive for Electrode of Plasma Chamber |
| 06/25/2009 | DE10004824B4 Verfahren zur Herstellung von Substraten, Magnetronquelle, Sputterbeschichtungskammer und Verwendung des Verfahrens A process for the production of substrates, magnetron Sputterbeschichtungskammer and use of the method |
| 06/24/2009 | EP2073611A2 Method for the treatment of articles. |
| 06/24/2009 | EP1269802B1 Plasma arc torch and method for extending the life of plasma arc torch consumable parts |
| 06/24/2009 | CN101467498A Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method |
| 06/24/2009 | CN101466194A Preionization atmos low-temperature plasma jet generator |
| 06/24/2009 | CN100505976C Plasma-assisted joining |
| 06/24/2009 | CN100505975C Plasma-assisted coating |
| 06/24/2009 | CN100505974C Radiation source, photoetching equipment and device manufacturing method |
| 06/24/2009 | CN100504605C Laser produced plasma radiation system with foil capturing |
| 06/23/2009 | US7550180 utilizing glow discharge produced by supplying high-frequency power into an inside-evacuated reactor through a high-frequency power supply means to treat the surface of a treatment target substrate; good efficiency; low cost |
| 06/23/2009 | US7550178 Method of dyeing or reforming injection, blow or compression molding |
| 06/23/2009 | CA2391911C Plasma processing apparatus with an electrically conductive wall |
| 06/18/2009 | WO2009074546A1 Method and device for the treatment of surfaces |
| 06/18/2009 | WO2009074021A1 Plasma processing apparatus and shield ring |
| 06/18/2009 | WO2009058185A3 Control of a laser inertial confinement fusion-fission power plant |
| 06/18/2009 | WO2009053614A3 Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma |
| 06/18/2009 | US20090156079 Antistatic breathable nonwoven laminate having improved barrier properties |
| 06/18/2009 | US20090155490 Method and device for the internal plasma treatment of hollow bodies |
| 06/18/2009 | US20090152097 Plasma generating device and plasma generating method |
| 06/18/2009 | US20090152094 Method of forming stable states of dense high-temperature plasma |
| 06/18/2009 | DE102008022719A1 Plasma burner for plasma applications e.g. powder coatings and welding and cutting, comprises toroidal cathode, plasma nozzle with connection to mounting plate comprising cooler, gas intake ports, and electrode acting as toroidal anode |
| 06/18/2009 | DE102008022718A1 Plasma torch for plasma applications e.g. powder coatings and welding and cutting, comprises a plasma nozzle, an anode, intake ports for process gas, and an electrode acting as cathode |
| 06/18/2009 | CA2705725A1 Method and device for the treatment of surfaces |
| 06/17/2009 | EP1729892B1 Method for coating a substrate using dielectric barrier discharge |
| 06/17/2009 | CN101460002A Method and apparatus for producing uniform processing rates |
| 06/11/2009 | WO2009054671A3 Capacitively coupled plasma reactor |
| 06/11/2009 | WO2007061579A3 Chamber components with polymer coatings and methods of manufacture |
| 06/11/2009 | US20090148625 Method for forming thin film |