| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 09/09/2009 | CN101529999A Electrode for a contact start plasma arc torch and contact start plasma arc torch employing such electrodes |
| 09/09/2009 | CN101529998A Hydrogen-lithium fusion device, method and applications |
| 09/09/2009 | CN101529997A Methods of and apparatus for accessing a process chamber using a dual zone gas injector wth improved optical access |
| 09/09/2009 | CN101529551A Method and apparatus for preventing instabilities in radio-frequency plasma processing |
| 09/09/2009 | CN101527262A Electrode unit, substrate processing apparatus, and temperature control method for electrode unit |
| 09/09/2009 | CN101527258A Cover part, process gas diffusing and supplying unit, and substrate processing apparatus |
| 09/08/2009 | US7586101 Ion sources for ion implantation apparatus |
| 09/08/2009 | US7585386 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 09/03/2009 | WO2009107888A1 Rotational antenna and semiconductor device including the same |
| 09/03/2009 | WO2007016999A3 Method for treating plasma under continuous atmospheric pressure of work pieces, in particular, material plates or strips |
| 09/03/2009 | US20090220039 Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
| 09/03/2009 | US20090218324 Direct real-time monitoring and feedback control of rf plasma output for wafer processing |
| 09/03/2009 | DE102008011015A1 Partikeltherapieanlage Particle therapy facility |
| 09/03/2009 | DE102007028293B4 Plasmareaktor, dessen Verwendung und Verfahren zur Herstellung einkristalliner Diamantschichten A plasma reactor, its use and methods for preparing single-crystal diamond films |
| 09/03/2009 | DE102005012360B4 Lichtbogendrahtbrenner Arc wire burner |
| 09/02/2009 | EP2096679A1 Method for manufacturing solar cell and apparatus for manufacturing solar cell |
| 09/02/2009 | EP2095694A1 Apparatus and method for treatment of wood, wood fibres and wood-based materials |
| 09/02/2009 | EP1099360B2 Electrode for a plasma arc torch having an improved insert configuration |
| 09/02/2009 | CN201303457Y Anode body of plasma generator |
| 09/02/2009 | CN201303456Y 等离子体射流装置 Plasma jet device |
| 09/02/2009 | CN101521980A Plasma processing apparatus and plasma processing method |
| 09/02/2009 | CN101521151A Microwave plasma processing apparatus and use method thereof |
| 09/02/2009 | CN101521147A Microwave plasma processing apparatus, dielectric window, and method for manufacturing the dielectric window |
| 09/02/2009 | CN101519774A Plasma processing apparatus |
| 09/02/2009 | CN100536634C Plasma processing device and method |
| 09/01/2009 | US7582845 Microwave plasma processing device and plasma processing gas supply member |
| 09/01/2009 | US7582844 Torch handle gas control |
| 09/01/2009 | US7582182 Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 09/01/2009 | US7581380 Air-breathing electrostatic ion thruster |
| 09/01/2009 | CA2601295C Method and apparatus for low energy electron enhanced etching and cleaning of substrates |
| 08/27/2009 | WO2009105386A1 Binary signal detection for identifying a torch assembly |
| 08/27/2009 | WO2009104972A1 Process for the use of alkali metal or alkali earth metal containing organic composites in the microwave-assisted plasma decomposition of carbon dioxide in the production of carbon |
| 08/27/2009 | WO2009104709A1 Plasma generator |
| 08/27/2009 | WO2009104579A1 Plasma discharge device and thin film laminate |
| 08/27/2009 | WO2009104379A1 Atomic layer deposition apparatus and atomic layer deposition method |
| 08/27/2009 | WO2009103265A1 Method and device for cleaning the waste gases of a processing system |
| 08/27/2009 | US20090215281 Hdp-cvd sion films for gap-fill |
| 08/27/2009 | US20090214402 Microplasma Array |
| 08/27/2009 | US20090212015 Plasma-Assisted Processing in a Manufacturing Line |
| 08/27/2009 | DE20122901U1 RF Plasma Reaktor RF plasma reactor |
| 08/27/2009 | CA2684421A1 Binary signal detection detection for identifying a torch assembly |
| 08/26/2009 | EP2092805A1 Plasma torch |
| 08/26/2009 | EP2092547A1 Method and apparatus for preventing instabilities in radio-frequency plasma processing |
| 08/26/2009 | EP1767068B1 Device for the treatment of a substrate by means of at least one plasma jet |
| 08/26/2009 | EP1263702B1 Treatment of fluorocarbon feedstocks |
| 08/26/2009 | EP1195077B1 Anode electrode for plasmatron structure |
| 08/26/2009 | CN101518162A Plasma generator and work processing apparatus provided with the same |
| 08/26/2009 | CN101518161A Radially enlarged type plasma generating apparatus |
| 08/26/2009 | CN101517713A Plasma cleaning process and plasma CVD method |
| 08/26/2009 | CN101516563A Water vapour plasma burner and method of wear detection and process control in the case of such a water vapour plasma burner |
| 08/26/2009 | CN101515545A Plasma processing apparatus and plasma processing method |
| 08/26/2009 | CN101515498A Inductance coupling coil and plasma processing device adopting same |
| 08/26/2009 | CN100534257C Plane Faraday screening system of radio frequency inductive coupled plasma source |
| 08/26/2009 | CN100533658C Plasma apparatus with device for reducing polymer deposition on a substrate and method for reducing polymer deposition |
| 08/26/2009 | CN100533651C Plasma apparatus and method for processing a substrate |
| 08/25/2009 | US7579051 discharging a function liquid onto a discharge surface, forming a droplet having a constricted part, the droplet becomes a conductive film by drying, by applying a current, forming a latent image section; easy manufactured; elector-optical device with high reliability |
| 08/25/2009 | US7578946 Plasma processing system and plasma processing method |
| 08/25/2009 | US7578944 Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
| 08/25/2009 | US7578301 Methods and apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system |
| 08/20/2009 | WO2009102358A1 Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events |
| 08/20/2009 | WO2009101927A1 Top board of microwave plasma processing device, plasma processing device and plasma processing method |
| 08/20/2009 | WO2009101367A2 Method for destroying no<sb>2</sb> by microwave plasma at atmospheric pressure |
| 08/20/2009 | WO2009101143A1 Plasma device for selective treatment of electropored cells |
| 08/20/2009 | WO2009100616A1 Atmospheric pressure plasma creating device |
| 08/20/2009 | WO2009082763A3 Method and apparatus for controlling plasma uniformity |
| 08/20/2009 | US20090208715 Index modified coating on polymer substrate |
| 08/20/2009 | US20090208670 Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| 08/20/2009 | US20090208669 Apparatus and method for application of a thin barrier layer onto inner surfaces of wafer containers |
| 08/20/2009 | US20090206063 Highly Ordered Structure Pyrolitic Graphite or Carbon-Carbon Composite Cathodes for Plasma Generation in Carbon Containing Gases |
| 08/20/2009 | US20090206062 Portable Plasma Sterilizer |
| 08/20/2009 | US20090205968 Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| 08/20/2009 | US20090205853 Method for applying a metal on a substrate |
| 08/20/2009 | DE102008009624A1 Verfahren und Vorrichtung zur Reinigung der Abgase einer Prozessanlage Method and apparatus for cleaning the exhaust gases of a process plant |
| 08/20/2009 | DE102006038134B4 Plasmabrennerkopf, Plasmabrennerschaft und Plasmabrenner Plasma torch head, shaft and plasma torch plasma torch |
| 08/19/2009 | EP2091306A1 Spin-polarization ion beam generator, scattering spectroscope using the spin-polarization ion beam, and specimen processing device |
| 08/19/2009 | EP2091305A2 Plasma reactor and plasma reaction apparatus |
| 08/19/2009 | EP1623481A4 Systems and methods for plasma containment |
| 08/19/2009 | EP1043762B1 Polycrystalline silicon thin film forming method and thin film forming apparatus |
| 08/19/2009 | CN201294215Y Bias voltage type plasma source and plasma processing mechanism containing the same |
| 08/19/2009 | CN101513136A Wearable autonomous material processing system |
| 08/19/2009 | CN101512735A Apparatus and method for dry etching |
| 08/19/2009 | CN101511146A Zero mass jet flow exciter of medium countercheck discharging plasma |
| 08/19/2009 | CN100530532C Plasma processing apparatus and plasma processing method |
| 08/19/2009 | CN100530530C Plasma processing apparatus and plasma processing method |
| 08/19/2009 | CN100530529C Double offset frequency plasma body reactor with electrostatic chuck voltage feedback control |
| 08/19/2009 | CN100530510C An electrodeless RF induction coupled plasma dischargable atomic source |
| 08/19/2009 | CN100530509C Electron cyclotron resonance (ECR) plasma source having a linear plasma discharge opening |
| 08/19/2009 | CN100530508C Method and apparatus for VHF plasma processing with load mismatch reliability and stability |
| 08/19/2009 | CN100529168C Method of producing flat panels for display of film transistor or plasma |
| 08/19/2009 | CA2621749A1 Decomposition of natural gas or methane using cold arc discharge |
| 08/18/2009 | US7576343 Method and apparatus for generating laser produced plasma |
| 08/18/2009 | US7576296 Thermal synthesis apparatus |
| 08/18/2009 | US7575987 Method of plasma doping |
| 08/18/2009 | US7574974 Device for production of a plasma sheet |
| 08/13/2009 | WO2009100345A2 Methods and apparatus for wafer area pressure control in an adjustable gap plasma chamber |
| 08/13/2009 | WO2009100343A2 Systems for detecting unconfined-plasma events |
| 08/13/2009 | WO2009100289A2 Methods and apparatus for changing area ratio in a plasma processing system |
| 08/13/2009 | WO2009100288A2 Electrode orientation and parallelism adjustment mechanism for plasma processing systems |
| 08/13/2009 | WO2009099660A2 Adjustable gap capacitively coupled rf plasma reactor including lateral bellows and non-contact particle seal |
| 08/13/2009 | WO2009099463A2 Plasma arc torch cutting component with optimized water cooling |