| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 10/14/2010 | CA2757903A1 Production method with thermal projection of a target |
| 10/13/2010 | EP1129466B1 Device and method for generating a local plasma by micro-structure electrode discharges with microwaves |
| 10/13/2010 | CN1825556B Wafer holder |
| 10/13/2010 | CN1425187B Method and apparatus for ionized physical vapor deposition |
| 10/13/2010 | CN101861641A Plasma processing apparatus and method for plasma processing semiconductor substrate |
| 10/13/2010 | CN101861048A Method for focusing plasma beam under magnetic lens |
| 10/13/2010 | CN101860255A Main pulse power supply in discharging plasma extreme ultraviolet light source |
| 10/12/2010 | US7812278 Method for testing plasma reactor multi-frequency impedance match networks |
| 10/12/2010 | US7811941 Device and method for etching a substrate using an inductively coupled plasma |
| 10/12/2010 | US7811641 forming a catalytic metal layer on a substrate;forming an insulation layer on the catalytic metal layer; andforming carbon nanotubes on the insulation layer |
| 10/07/2010 | WO2010115110A2 Plasma processing apparatus |
| 10/07/2010 | WO2010114961A2 Plasma processing apparatus |
| 10/07/2010 | WO2010113544A1 Insulator-interposed plasma processing device |
| 10/07/2010 | WO2010113358A1 Plasma etching apparatus |
| 10/07/2010 | WO2010112378A1 Method and beam generator for creating a bundled plasma beam |
| 10/07/2010 | WO2010080421A4 Controlling ion energy distribution in plasma processing systems |
| 10/07/2010 | WO2010047880A4 System for enhancing preignition conditions of thermonuclear fusion reactions |
| 10/07/2010 | US20100255268 Composition for mold sheet and method for preparing mold sheet using same |
| 10/07/2010 | US20100252412 Plasma processing apparatus and method for adjusting plasma density distribution |
| 10/07/2010 | US20100252411 Control method of plasma by magnetic field in an exhaust gas treating apparatus and an exhaust gas treating apparatus using the same |
| 10/07/2010 | US20100252068 Plasma Generation Method, Cleaning Method, and Substrate Processing Method |
| 10/07/2010 | DE102009015737A1 Magnetron-Beschichtungsmodul sowie Magnetron-Beschichtungsverfahren Magnetron coating module and magnetron coating process |
| 10/07/2010 | DE102009015510A1 Verfahren und Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls A method and beam generator for generating a plasma beam bundled |
| 10/06/2010 | EP2236193A1 Control method of plasma by magnetic field in an exhaust gas treating apparatus and an exhaust gas treating apparatus using the same |
| 10/06/2010 | EP2236015A2 Apparatus and method for a liquid cooled shield for improved piercing performance |
| 10/06/2010 | EP2235735A1 Method and apparatus for plasma surface treatment of a moving substrate |
| 10/06/2010 | CN201601886U 一种双输出匹配器及一种等离子体发生装置 A dual output matching filter and a plasma generating means |
| 10/06/2010 | CN1515018B Plasma processor |
| 10/06/2010 | CN101855949A Electrostatic ion accelerator arrangement |
| 10/06/2010 | CN101855948A High-voltage insulator arrangement, and ion accelerator arrangement comprising such a high-voltage insulator arrangement |
| 10/06/2010 | CN101855947A Plasma treatment device |
| 10/06/2010 | CN101855946A Plasma processing apparatus and method for adjusting plasma density distribution |
| 10/06/2010 | CN101855138A Drive arrangement in a spacecraft |
| 10/06/2010 | CN101854770A Water inflowing and returning device for plasma generator |
| 10/06/2010 | CN101853766A Plasma processing apparatus and plasma processing method |
| 10/06/2010 | CN101852444A Microwave plasma ignition device |
| 10/06/2010 | CN101207003B Inner lining of wafer processing chamber and wafer processing chamber containing said inner lining |
| 10/06/2010 | CN101026920B Plasma generation apparatus and work processing apparatus |
| 10/05/2010 | US7807233 Method of forming a TEOS cap layer at low temperature and reduced deposition rate |
| 10/05/2010 | US7807232 Using a plasma treatment in an oxidizing atmosphere (oxygen, nitrogen or others) to passivate the aluminum layer immediately after deposition and prior to rewinding the coated web into a roll; corrosion resistance; antipeeling agents; packaging |
| 10/05/2010 | US7807231 Process for forming thermal barrier coating resistant to infiltration |
| 10/05/2010 | US7807212 Plasma method for TiOx biomedical material onto polymer sheet |
| 10/05/2010 | US7807019 Radial antenna and plasma processing apparatus comprising the same |
| 10/05/2010 | US7806078 Plasma treatment apparatus |
| 10/05/2010 | CA2414253C Improved dielectric heating using inductive coupling |
| 09/30/2010 | WO2010111695A1 Plasma arc torch rotational assembly with rotational movement of an inner component |
| 09/30/2010 | WO2010111055A2 Anchoring inserts, electrode assemblies, and plasma processing chambers |
| 09/30/2010 | WO2010110256A1 Tuner and microwave plasma source |
| 09/30/2010 | WO2010110080A1 Microwave plasma processing apparatus |
| 09/30/2010 | WO2010109160A1 Improved air decontamination device and method |
| 09/30/2010 | WO2010108272A1 Plasma reactor for the synthesis of nanopowders and materials processing |
| 09/30/2010 | WO2010074464A3 High-voltage circuit insertion-type discharge element |
| 09/30/2010 | US20100248388 Solid Phase Extraction and Ionization Device |
| 09/30/2010 | US20100247883 corrosion resistant coating for copper substrate |
| 09/30/2010 | US20100247798 Conductive Inks and Manufacturing Method Thereof |
| 09/30/2010 | US20100244699 Inductive Plasma Applicator |
| 09/30/2010 | US20100243609 Plasma processing apparatus and plasma processing method |
| 09/30/2010 | DE102008047888B4 Schweißverfahren und Vorrichtung zur Durchführung des Verfahrens Welding method and apparatus for performing the method |
| 09/30/2010 | CA2756143A1 Plasma reactor for the synthesis of nanopowders and materials processing |
| 09/29/2010 | EP2234463A1 Plasma treatment apparatus, heating device for the plasma treatment apparatus, and plasma treatment method |
| 09/29/2010 | EP2234462A2 Reactor for reforming reactions |
| 09/29/2010 | EP2233203A1 Plasma reactor |
| 09/29/2010 | EP2233196A1 Apparatus for decreasing NOx by occlusion catalyst using plasma reactor |
| 09/29/2010 | EP2232958A2 Asymmetrical rf drive for electrode of plasma chamber |
| 09/29/2010 | CN201594110U System using power frequency sinusoidal voltage for ion source plasma measurement |
| 09/29/2010 | CN1813332B Sidewall magnet improving uniformity of inductively coupled plasma |
| 09/29/2010 | CN101849444A Flat antenna member and a plasma processing device provided with same |
| 09/29/2010 | CN101849443A Portable autonomous material processing system |
| 09/29/2010 | CN101849283A Apparatus for surface-treating wafer using high-frequency inductively-coupled plasma |
| 09/29/2010 | CN101848596A Cover fixer and cover fixing device for inductively coupled plasma processing device |
| 09/29/2010 | CN101848595A Method and device for generating monopole radio-frequency capacitance coupling low-temperature plasma under atmospheric pressure |
| 09/29/2010 | CN101848594A Plasma apparatus |
| 09/29/2010 | CN101847558A Plasma processing device and plasma processing method |
| 09/29/2010 | CN101441986B Surface treatment device and manufacture method of lower electrode assembly body of the device |
| 09/29/2010 | CN101207061B Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism |
| 09/29/2010 | CN101023714B Plasma processing apparatus |
| 09/29/2010 | CN101023713B Plasma processing apparatus |
| 09/28/2010 | US7803433 Amorphous carbon film forming method and device |
| 09/23/2010 | WO2010107843A2 Reactor lid assembly for vapor deposition |
| 09/23/2010 | WO2010107842A2 Showerhead for vapor deposition |
| 09/23/2010 | WO2010107835A2 Vapor deposition reactor system and methods thereof |
| 09/23/2010 | WO2010106712A1 Etching apparatus, analysis apparatus, etching treatment method, and etching treatment program |
| 09/23/2010 | WO2010078131A3 Method and apparatus for automated application of hardfacing material to rolling cutters of hybrid-type earth boring drill bits, hybrid drill bits comprising such hardfaced steel-toothed cutting elements, and methods of use thereof |
| 09/23/2010 | WO2010062101A3 Apparatus for normal pressure plasma ignition and method for normal pressure plasma ignition using same |
| 09/23/2010 | US20100240225 Microwave plasma processing apparatus, microwave plasma processing method, and microwave-transmissive plate |
| 09/23/2010 | US20100239783 Methods of forming molds and methods of forming articles using said molds |
| 09/23/2010 | US20100237050 Hybrid nozzle for plasma spraying silicon |
| 09/23/2010 | US20100236917 Plasma generating apparatus and plasma generating method |
| 09/23/2010 | DE19812558B4 Vorrichtung zur Erzeugung linear ausgedehnter ECR-Plasmen Apparatus for generating linear extended ECR plasmas |
| 09/23/2010 | DE102009017888A1 Method for controlling plasma density distribution in vacuum process for treating substrate, arranging multiple anodes adjacent to cathode in vacuum chamber, such that plasma area is defined |
| 09/23/2010 | DE102009015178A1 Vorrichtung und Verfahren für die plasmagestützte Oberflächenmodifizierung von Substraten im Vakuum Device and method for the plasma-assisted surface modification of substrates in vacuum |
| 09/23/2010 | DE102009011960A1 Verfahren zur Überwachung von Plasma-Entladungen A method for monitoring plasma discharges |
| 09/22/2010 | CN101843178A Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events |
| 09/22/2010 | CN101842881A Plasma treatment apparatus |
| 09/22/2010 | CN101842879A Plasma treatment apparatus and plasma treatment method |
| 09/22/2010 | CN101838800A Device and method for processing surface of material by atmospheric-pressure micro-discharge plasma |
| 09/22/2010 | CN101838789A Method of reducing stress in coatings produced by physical vapour deposition |
| 09/22/2010 | CN101162688B Plasma processing device and running processing method and method for manufacturing electric device |
| 09/21/2010 | US7799716 with yttria, scandia, dysprosia, ytterbia, or oxides of lanthanide or actinide; formed by controlled sintering or light plasma densification of agglomerated powder; thermal barrier coatings |
| 09/21/2010 | US7799374 providing substrate with metallic layer, defining holes in layer, oxidizing to form metallic oxide layer, removing portions of layer in holes to expose corresponding portions of metal layer, forming metal-salt catalyst layer on exposed portions of metal layer in holes, growing carbon nanotubes in holes |