Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
01/2010
01/14/2010US20100006419 Device for generation of pulsed corona discharge
01/14/2010US20100006417 Capacitively-coupled electrostatic (cce) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof
01/14/2010US20100006142 Deposition apparatus for improving the uniformity of material processed over a substrate and method of using the apparatus
01/13/2010EP2143307A1 Plasma die
01/13/2010EP2143306A1 Electrode for a plasma generator
01/13/2010EP2142679A2 Method and device for the plasma-assisted surface treatment of large-volume components
01/13/2010EP2060160B1 Plasma torch head, plasma torch shaft and plasma torch
01/13/2010CN201383492Y Microwave excitation small-sized plasma etching device
01/13/2010CN101626656A Radio frequency matching method and plasma processor
01/13/2010CN100580870C Heat-conducting gas supply mechanism, supply method and substrate processing device and method
01/12/2010US7645999 Method and apparatus for creating a plasma
01/12/2010US7645959 Nozzle for plasma torches
01/12/2010US7645495 Method and apparatus for treating a substrate
01/12/2010US7644680 Electrode assembly for non-equilibrium plasma treatment
01/07/2010WO2010002724A2 Peripherally engaging electrode carriers and assemblies incorporating the same
01/07/2010WO2010002722A2 Backside mounted electrode carriers and assemblies incorporating the same
01/07/2010WO2010002631A2 Processes for reconditioning multi-component electrodes
01/07/2010WO2010001938A1 Plasma processing device, plasma processing method, and mechanism for regulating temperature of dielectric window
01/07/2010WO2010001890A1 Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanism
01/07/2010WO2010001879A1 Plasma cvd device, method for depositing thin film, and method for producing magnetic recording medium
01/07/2010WO2010001724A1 Power source device
01/07/2010WO2010001723A1 Power source device
01/07/2010WO2010001583A1 Plasma processing device and method for monitoring state of discharge in plasma processing device
01/07/2010WO2010001036A2 Electron cyclotron resonance ion generator
01/07/2010US20100003599 Method for producing current collector for non-aqueous electrolyte secondary battery, method for producing electrode for non-aqueous electrolyte secondary battery, and non-aqueous electrolyte secondary battery
01/07/2010US20100003423 Plasma generating apparatus and film forming apparatus using plasma generating apparatus
01/07/2010US20100003419 Method of producing a shaped article having excellent barrier properties
01/07/2010US20100002823 Controlled fusion in a field reversed configuration and direct energy conversion
01/07/2010US20100001647 Method and Device for Igniting and Generating an Expanding Diffuse Microwave Plasma and Method and Device for Plasma Treating Surfaces and Substances by Using This Plasma
01/07/2010DE102004043967B4 Anordnung und Verfahren zur Plasmabehandlung eines Substrates Arrangement and method for plasma treatment of a substrate
01/06/2010EP2141968A2 Device for generating an atmospheric pressure plasma
01/06/2010EP2140739A1 Nozzle for a liquid-cooled plasma burner, arrangement thereof with a nozzle cap and liquid-cooled plasma burner comprising such an arrangement
01/06/2010EP2140543A2 Magnetron plasma system
01/06/2010CN101622912A Plasma processing apparatus and method for using plasma processing apparatus
01/06/2010CN100578732C Vacuum processing apparatus
01/05/2010US7642533 Extreme ultraviolet light source
12/2009
12/31/2009US20090325328 Plasma processing apparatus and plasma processing method
12/31/2009US20090324892 Laminate and Method for Depositing Carbon Film
12/31/2009US20090324849 Method for sealing pores in a porous substrate
12/31/2009US20090321336 Filter for water potabilization and a process for realization of the filter
12/31/2009DE19756774B4 Mikrowellenplasmaquelle Microwave plasma source
12/31/2009DE102008028167A1 Plasma jet production device for treatment or activation of through holes of e.g. printed circuit boards, has auxiliary electrode spaced from receiver, where side of receiver is turned away from front side opening of tube
12/31/2009DE102004001099B4 Oxidationsverfahren mit hochdichtem Plasma Oxidation process with high-density plasma
12/30/2009WO2009158556A2 Methods for automatically characterizing a plasma
12/30/2009WO2009158192A2 Rf power delivery system in a semiconductor apparatus
12/30/2009WO2009156390A1 Method and device for applying a coating, in particular a self-cleaning and/or antimicrobial, photocatalytic coating, onto a surface
12/30/2009WO2009125951A3 Plasma processing apparatus and method for plasma processing
12/30/2009EP2139303A1 Plasma generating apparatus and plasma film forming apparatus
12/30/2009EP2139302A1 High-voltage plasma producing apparatus
12/30/2009EP2139301A1 Plasma generating body and reaction apparatus
12/30/2009EP2139300A1 Plasma electron temperature measuring method and device
12/30/2009EP2138603A1 Plasma generation equipment rendered electrically neutral on the periphery of plasma gun
12/30/2009EP1161309B1 A method for a repetitive ion beam processing with a by carbon containing ion beam
12/30/2009CN100576966C Control method of plasma treatment device and plasma treatment device
12/30/2009CN100576438C Plasma confinement baffle and flow equalizer for enhanced magnetic control of plasma radial distribution
12/30/2009CN100575246C Microwave power cell, chemical reactor and power converter
12/30/2009CN100574956C Processes for welding bottom metal and forming low oxide coatings during welding process
12/29/2009US7638727 Plasma-assisted heat treatment
12/29/2009US7638103 capable of simultaneously generating different states of plasma upon application of voltage between the pair of electrodes due to the different arrangement patterns of the through-holes in the conductive films;
12/29/2009CA2507319C Method and device for microwave plasma deposition of a coating on a thermoplastic container surface
12/24/2009US20090317640 Method of forming a gas barrier layer, a gas barrier layer formed by the method, and a gas barrier film
12/24/2009US20090317566 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
12/24/2009US20090317310 uses two electrodes to create an electric field from a high voltage power supply, a dielectric material is disposed between two electrodes to prevent arcing and to promote formation of a non-thermal plasma fuel injector, converts a liquid fuel into a dispersed mist, injects into reactive species
12/24/2009US20090314629 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
12/24/2009US20090314520 Method and Apparatus for Spraying on a Track, in Particular a Conductor Track, and Electrical Component with a Conductor Track
12/24/2009US20090314469 Condensing Heat Exchanger with Hydrophilic Antimicrobial Coating
12/24/2009DE102008029681A1 Verfahren und Vorrichtung zum Aufbringen einer Schicht, insbesondere einer selbstreinigend und/oder antimikrobiell wirkenden photokatalytischen Schicht, auf eine Oberfläche Method and apparatus for applying a layer, in particular a self-cleaning and / or antimicrobial photocatalytic layer on a surface
12/24/2009DE102008028166A1 Device for producing atmospheric cold plasma jet, has discharge tube, which has wall made up of dielectric material and central electrode, which is arranged centrically inside discharge tube in longitudinal direction
12/23/2009WO2009155352A2 Matching circuit for a complex radio frequency (rf) waveform
12/23/2009WO2009154037A1 Method of measuring nitrogen atoms, device for measuring nitrogen atoms and plasma processing device
12/23/2009WO2009152670A1 Radio frequency electrode and apparatus for film formation
12/23/2009EP2136392A1 Plasma processing apparatus, plasma processing method, and storage medium
12/23/2009EP2135625A1 Microwave plasma sterilizing device and method
12/23/2009EP2135493A1 A plasma system
12/23/2009EP1494512B1 Ecr plasma source and ecr plasma device
12/23/2009CN201366574Y Plasma cutting machine with guide arc switching circuit
12/23/2009CN101611656A A surface dielectric barrier discharge plasma unit and a method of generating a surface plasma
12/23/2009CN101610632A Plasma torch with combination of coolant and working gas
12/23/2009CN101609799A Plasma-etching method and plasma-etching apparatus
12/23/2009CN101609792A Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
12/23/2009CN101609790A Processing device
12/23/2009CN101609788A Etching system and method of manufacturing semiconductor device
12/23/2009CN101609780A Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
12/23/2009CN101609779A Focus ring and plasma processing apparatus
12/23/2009CN100574003C Microwave resonance cavity
12/23/2009CN100573829C Silicon slice etching equipment
12/23/2009CN100573827C Electromagnetic field supply apparatus and plasma processing device
12/23/2009CN100573816C Reaction cavity lining and reaction cavity including the same
12/23/2009CN100572262C Method for preparing hydogen-enriched mixed gas by water-contained alcohol and its plasma recombiner
12/22/2009US7635824 Plasma generating electrode, plasma generation device, and exhaust gas purifying device
12/22/2009CA2440603C Controlled fusion in a field reversed configuration and direct energy conversion
12/17/2009WO2009151538A1 Showerhead electrode assemblies for plasma processing apparatuses
12/17/2009WO2009151318A1 Device and method for the production of ozone, radicals and /or uv radiation
12/17/2009WO2009151270A2 Plasma source
12/17/2009WO2009151009A2 Plasma processing apparatus
12/17/2009WO2009150978A1 Plasma processing device and plasma processing method
12/17/2009WO2009150971A1 Plasma processing apparatus and plasma processing method
12/17/2009WO2009150970A1 Plasma processing apparatus and plasma processing method
12/17/2009WO2009150968A1 Plasma processing apparatus, plasma processing method, and electronic device manufacturing method
12/17/2009WO2009150907A1 Plasma processing apparatus and high frequency power supplying mechanism
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