Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05H - Plasma technique; Production of accelerated electrically- charged particles or of neutrons; Production or acceleration of neutral molecular or atomic beams › H05H 1 - Generating plasma; Handling plasma
Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
06/2010
06/09/2010CN201504358U Constant plasma generator
06/09/2010CN201504357U Durable cathode of plasma generator
06/09/2010CN201503847U Plasma processing device
06/09/2010CN101731025A Enhancing gas-phase reaction in a plasma using high intensity and high power ultrasonic acoustic waves
06/09/2010CN101731024A Plasma source
06/09/2010CN101730375A Inductively coupled plasma processing device and plasma processing method
06/09/2010CN101730374A Plasma system
06/09/2010CN101730373A Preparation of fog gas, as well as method and device for forming new materials by discharge of fog gas
06/09/2010CN101726864A Method for modifying hydrophility of plasmons at surface of fluorine and silicon hard corneal contact lens
06/09/2010CN101313390B Microwave introduction device
06/08/2010US7734135 Method and device for manufacturing optical preforms, as well as the optical fibres obtained therewith
06/08/2010US7730745 Vitrification furnace with dual heating means
06/03/2010WO2010062579A2 Process kit having reduced erosion sensitivity
06/03/2010WO2010062345A2 Lower electrode assembly of plasma processing chamber
06/03/2010WO2010062101A2 Apparatus for normal pressure plasma ignition and method for normal pressure plasma ignition using same
06/03/2010WO2010062040A2 Plasma treatment apparatus and plasma antenna
06/03/2010WO2010060887A1 Electronegative plasma thruster with optimized injection
06/03/2010WO2010033924A3 Etch reactor suitable for etching high aspect ratio features
06/03/2010WO2010030718A3 Technique for monitoring and controlling a plasma process with an ion mobility spectrometer
06/03/2010WO2009158556A4 Methods for automatically characterizing a plasma
06/03/2010US20100136262 Inductive plasma source with high coupling efficiency
06/03/2010US20100136261 Modulation of rf returning straps for uniformity control
06/03/2010US20100136246 Method for producing surfaces and substrates having said surfaces so formed
06/03/2010US20100133979 RC plasma jet and method
06/03/2010US20100133386 Plasma flow control actuator system and method
06/02/2010EP2191925A1 Method of, device and computer program for keyhole plasma welding with activ change of the penetrating curring during welding
06/02/2010EP2191700A1 Electrostatic ion accelerator arrangement
06/02/2010EP2191699A1 High-voltage insulator arrangement, and ion accelerator arrangement comprising such a high-voltage insulator arrangement
06/02/2010DE102008044203A1 Verfahren und Vorrichtung zum Plasma-Stichlochschweißen Method and apparatus for plasma keyhole welding
06/02/2010CN201499364U Novel plasma generating device
06/02/2010CN101720503A Plasma processing apparatus
06/02/2010CN101720500A Inductively coupled dual zone processing chamber with single planar antenna
06/02/2010CN101720163A Medium barrier glow discharge reactor at atmospheric pressure
06/02/2010CN101719755A Method and device for checking lost steps of stepping motor and impedance matching device
06/02/2010CN101716363A Efficient table type plasma air sterilization and purification instrument
06/02/2010CN101339895B Gas distribution device and plasma processing apparatus applying the same
06/02/2010CN101320679B Plasma processing system
06/02/2010CN101315880B Gas distribution device and plasma processing apparatus adopting the same
06/02/2010CN101315877B Substrate processing sytstem and apparatus
06/02/2010CN101231943B Plasma processing apparatus
06/02/2010CN101179010B Process chamber having gate slit opening and closing apparatus
06/02/2010CN101162685B Apparatus and method of semiconductor plasma process
06/02/2010CN101060074B Method for etching wafer in plasma etching cell
06/01/2010USRE41362 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
06/01/2010US7727460 Plasma arc reactor for the production of fine powders
06/01/2010CA2429377C Configurable nozzle baffle apparatus and method
05/2010
05/27/2010WO2010059526A1 Disbanded cascaded array for generating and moving plasma clusters for active airflow control
05/27/2010WO2010059357A2 Extended chamber liner for improved mean time between cleanings of process chambers
05/27/2010WO2010059210A2 Systems and methods for drive laser beam delivery in an euv light source
05/27/2010WO2010058648A1 Surface modification process using microplasma and bonding process using microplasma
05/27/2010WO2010058642A1 Plasma processing device and plasma processing method
05/27/2010WO2010057853A1 Method for atmospheric coating of nanosurfaces
05/27/2010WO2010057463A1 Ion drive for a spacecraft
05/27/2010WO2010036489A3 Microwave plasma containment shield shaping
05/27/2010US20100127624 Method and Apparatus for Multibarrier Plasma Actuated High Performance Flow Control
05/27/2010US20100127191 Systems and methods for drive laser beam delivery in an euv light source
05/27/2010US20100126847 Apparatus and Method for Controlling Plasma Density Profile
05/27/2010DE102009006132A1 Düse für einen flüssigkeitsgekühlten Plasmabrenner, Düsenkappe für einen flüssigkeitsgekühlten Plasmabrenner sowie Plasmabrennerkopf mit derselben/denselben Nozzle for a liquid-cooled plasma torch nozzle cap for a liquid-cooled plasma torch and plasma torch head with the same / same
05/27/2010DE102008058212A1 Ionenantrieb für ein Raumfahrzeug Ion propulsion for a spacecraft
05/27/2010CA2733715A1 Disbanded cascaded array for generating and moving plasma clusters for active airflow control
05/26/2010EP2189047A1 Applicator of microwave plasma generator and microwave plasma generator including this applicator
05/26/2010EP2188180A1 Drive arrangement in a spacecraft
05/26/2010CN201491393U Device applied to plasma
05/26/2010CN201491363U Novel power supply of plasma cutting machine
05/26/2010CN1996546B The real-time control system and control method for the ion source in gas
05/26/2010CN1777346B Plama treatment device
05/26/2010CN1630925B Device for applying electromagnetic microwave radiation in a plasma cavity
05/26/2010CN101038849B Plasma processing apparatus, plasma processing method and focus ring
05/20/2010WO2010055669A1 Electrode circuit, film formation device, electrode unit, and film formation method
05/20/2010WO2010055190A1 Plasma reactor
05/20/2010US20100124616 Method of forming an abradable coating
05/20/2010US20100124023 Method for plating film on a heat dissipation module
05/20/2010US20100123368 Film formation method, film formation device, piezoelectric film, piezoelectric device, liquid discharge device and piezoelectric ultrasonic transducer
05/20/2010DE102008057020A1 Zündvorrichtung für Arc Quellen Igniter for Arc sources
05/20/2010DE102008052216B3 Plasma-Induktionsschalter und Verfahren zum Schalten hoher Spannungen Plasma induction switch and method for switching high voltages
05/20/2010DE102008027461A1 Vorrichtung und Verfahren zur mikrostrukturierten Plasmabehandlung Apparatus and method for microstructured plasma treatment
05/20/2010DE102006037144B4 ECR-Plasmaquelle ECR plasma source
05/19/2010EP2187713A2 Magnetic and electrostatic confinement of plasma in a field reversed configuration
05/19/2010EP2187712A2 Magnetic and electrostatic confinement of plasma in a field reversed confirguration
05/19/2010CN1953636B Plasma accelerator
05/19/2010CN101207001B Exhaust device and reaction chamber containing the same
05/19/2010CN101206999B Inner lining and reaction chamber containing the same
05/18/2010US7719199 Controlled fusion in a field reversed configuration and direct energy conversion
05/18/2010US7719198 Power supply circuit for plasma generation, plasma generating apparatus, plasma processing apparatus and plasma processed object
05/14/2010WO2010054112A2 Plasma resistant coatings for plasma chamber components
05/14/2010WO2010053387A1 A method and reactor for thermal decomposition of water
05/14/2010WO2010052435A1 Method and system for increasing the lifespan of a plasma
05/14/2010WO2010021890A3 Edge rings for electrostatic chucks
05/14/2010WO2010019197A3 A composite showerhead electrode assembly for a plasma processing apparatus
05/14/2010WO2010017373A3 Plasma processes for producing silanes and derivatives thereof
05/14/2010WO2010011643A3 Apparatus for multiple frequency power application
05/14/2010WO2010002722A3 Backside mounted electrode carriers and assemblies incorporating the same
05/14/2010WO2009062205A3 Nozzle head with increased shoulder thickness
05/13/2010US20100119843 Plasma resistant coatings for plasma chamber components
05/13/2010US20100119732 Hydrogenated amorphous carbon coating
05/13/2010US20100119728 Methods of making multilayered, hydrogen-containing thermite structures
05/13/2010US20100116790 Device and method for locally producing microwave plasma
05/13/2010US20100116457 Method for producing a latent heat storage material
05/12/2010EP2183045A1 A gas reformulation system comprising means to optimize the effectiveness of gas conversion
05/12/2010EP1143496B1 Plasma etching method
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