Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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07/01/2010 | WO2010073532A1 Plasma processing device |
07/01/2010 | WO2010073223A1 High-performance plasma torch |
07/01/2010 | WO2010036707A3 Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring |
07/01/2010 | US20100166982 Metal line of semiconductor device having a diffusion barrier and method for forming the same |
07/01/2010 | US20100166815 Method for Preparation of a Nanocomposite Material by Vapour Phase Chemical Deposition |
07/01/2010 | US20100164381 Long linear-type microwave plasma source using variably-reduced-height rectangular waveguide as plasma reactor |
07/01/2010 | US20100164353 Wide area atmosphere pressure plasma jet apparatus |
07/01/2010 | US20100163534 Atmospheric-plasma processing method for processing materials |
07/01/2010 | US20100163403 Plasma processing apparatus and operation method thereof |
07/01/2010 | DE102008062731A1 Elektrode für einen Plasmabrenner Electrode for a plasma torch |
07/01/2010 | DE102008062619A1 Mikrowellenplasmaquelle und Verfahren zur Bildung eines linear langgestreckten Plasma bei Atmosphärendruckbedingen A microwave plasma source and method of forming a linear elongated plasma at atmospheric pressure condition |
06/30/2010 | EP2201593A2 Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma |
06/30/2010 | EP2200777A1 Shielding gas flow controller for a welding apparatus |
06/30/2010 | CN201518555U 等离子体针装置 Plasma needle device |
06/29/2010 | US7744967 laser beam and flux of metallic powder, whereof the nature is the same as that of the metallic piece, is applied to piece to produce layer of metal, monocrystalline or directionally solidified, from the piece, wherein laser beam and flux of powder are applied coaxially on piece; gas turbine motor blades |
06/29/2010 | US7744966 Production process of perpendicular magnetic recording medium |
06/29/2010 | US7744964 Vacuum roll coated security thin film interference products with overt and/or covert patterned layers |
06/29/2010 | US7744721 Plasma processing apparatus |
06/24/2010 | WO2010071785A2 Plasma confinement structures in plasma processing systems |
06/24/2010 | WO2010071074A1 Ion implantation apparatus, ion implantation method, and semiconductor device |
06/24/2010 | WO2010070051A1 Method of monitoring the wear of at least one of the electrodes of a plasma torch |
06/24/2010 | WO2010005540A4 Clamped monolithic showerhead electrode |
06/24/2010 | US20100159157 Robotically applied hardfacing with pre-heat |
06/24/2010 | US20100159156 Thin film forming apparatus and thin film forming method |
06/24/2010 | US20100156300 Plasma excitation module |
06/24/2010 | US20100156008 Programmable System and Method of Spark Plasma Sintering |
06/24/2010 | US20100155222 Application of dense plasmas generated at atmospheric pressure for treating gas effluents |
06/24/2010 | DE102008063725A1 Preparation of chlorine from hydrogen chloride, using oxygen-containing gas, comprises exposing gas mixture comprising hydrogen chloride and oxygen to a heterogenous catalyzed thermal oxidation and subsequently to non-thermal plasma effect |
06/24/2010 | CA2745984A1 Method of monitoring the wear of at least one of the electrodes of a plasma torch |
06/23/2010 | EP2198677A1 Device for injecting a liquid load to be mixed/converted inside a plasma needle or a gaseous flow |
06/23/2010 | CN201515548U Plasma torch used for chemical vapor deposition |
06/23/2010 | CN201515547U Combined plasma discharge device |
06/23/2010 | CN201514924U Plasma confinement device and plasma treatment device utilizing the same |
06/23/2010 | CN201510839U Industrial plasma dehumidification equipment |
06/23/2010 | CN1761816B Spacecraft thruster |
06/23/2010 | CN1638052B Method of manufacturing thin film |
06/23/2010 | CN101755322A Plasma reactor |
06/23/2010 | CN101754570A Method for realizing impedance matching in radio frequency transmission and impedance matching device |
06/23/2010 | CN101754569A Plasma processing apparatus and operation method of the same |
06/23/2010 | CN101754568A Plasma treatment device and radio frequency device thereof |
06/23/2010 | CN101754567A Matching device and plasma equipment |
06/23/2010 | CN101754566A Impedance matching box, impedance matching method and plasma processing system |
06/23/2010 | CN101754565A Electrode component and plasma treatment equipment using electrode component |
06/23/2010 | CN101754564A Plasma processing device |
06/23/2010 | CN101754563A Shell and injection-type plasma system thereof |
06/23/2010 | CN101754562A Atmospheric plasma generating device with function of electric arc control |
06/23/2010 | CN101745301A Plasma generating device |
06/23/2010 | CN101090259B High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck |
06/22/2010 | US7740917 Method for forming thin film and base and having thin film formed by such method |
06/22/2010 | US7740916 Method for the protection of extreme ultraviolet lithography optics |
06/22/2010 | US7740768 Simultaneous front side ash and backside clean |
06/22/2010 | US7740738 Inductively coupled antenna and plasma processing apparatus using the same |
06/17/2010 | WO2010068753A2 Immersive oxidation and etching process for cleaning silicon electrodes |
06/17/2010 | WO2010067670A1 Plasma processing apparatus |
06/17/2010 | WO2010067590A1 Microwave plasma treatment device |
06/17/2010 | WO2010067306A2 Device and method for generating a plasma flow |
06/17/2010 | WO2010066667A1 Disinfecting device for body areas |
06/17/2010 | WO2010066247A2 Microwave plasma source and method for forming a linearly extended plasma under atmospheric pressure conditions |
06/17/2010 | WO2010066151A1 Plasma processing device |
06/17/2010 | WO2010045943A3 System for thermally processing workpieces comprising a plasma and/or laser processing head that can be connected using a single shaft element |
06/17/2010 | WO2010033530A3 Non-thermal plasma synthesis with carbon component |
06/17/2010 | US20100151666 Novel Methods for Making and Using Halosilylgermanes |
06/17/2010 | US20100151149 Thin film deposition via a spatially-coordinated and time-synchronized process |
06/17/2010 | US20100149326 Plasma monitoring device and method |
06/17/2010 | US20100147464 Plasma treatment apparatus |
06/17/2010 | US20100146931 Method and apparatus for improving efficiency of a hall effect thruster |
06/16/2010 | EP2196071A2 Portable autonomous material processing system |
06/16/2010 | EP2195643A1 System for analysing a low pressure gas by optical emission spectroscopy |
06/16/2010 | EP2195472A1 Device for very high frequency plasma assisted cvd under atmospheric pressure, and applications thereof |
06/16/2010 | EP1384394B1 Method for the generation of far ultraviolet or soft x-ray radiation |
06/16/2010 | CN1956138B Adjustable electrode assembly for use in processing substrates of differing widths in a plasma processing system |
06/16/2010 | CN1732558B Method and device for plasma-etching organic material film |
06/16/2010 | CN1689132B Method and apparatus for producing uniform processing rates |
06/16/2010 | CN101743785A Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves |
06/16/2010 | CN101742809A plasma generating apparatus |
06/16/2010 | CN101742808A High-power v-shaped plasma torch |
06/16/2010 | CN101742807A Plasma generation apparatus and plasma treatment apparatus |
06/16/2010 | CN101740876A Plasma antenna and plasma process apparatus including the same |
06/16/2010 | CN101740303A plasma processing apparatus |
06/16/2010 | CN101740302A Plasma etching apparatus and etching method |
06/16/2010 | CN101738877A Method for removing photoresist and plasma processing equipment applying same |
06/16/2010 | CN101737785A Thermal plasma device for incinerating marine garbage |
06/16/2010 | CN101736326A Capacitively coupled plasma processing reactor |
06/16/2010 | CN101145508B Plasma processing device and method |
06/16/2010 | CN101038859B Plasma processing apparatus and electrode used therein |
06/15/2010 | US7737382 Device for processing welding wire |
06/10/2010 | WO2010065942A1 Arc recovery with over-voltage protection for plasma-chamber power supplies |
06/10/2010 | WO2010065474A2 Modulation of rf returning straps for uniformity control |
06/10/2010 | WO2010065473A2 Gas distribution blocker apparatus |
06/10/2010 | WO2010064818A2 Apparatus for generating atmospheric pressure plasma, and method for generating atmospheric pressure plasma using same |
06/10/2010 | WO2010064298A1 Member for plasma treatment apparatus and process for producing the member |
06/10/2010 | WO2010044895A3 Multiple phase rf power for electrode of plasma chamber |
06/10/2010 | WO2010034451A8 Plasma applicator and corresponding method |
06/10/2010 | WO2010033713A3 Large batch production of thin photovoltaic modules |
06/10/2010 | WO2010033712A3 Electrode system for large batch production of thin photovoltaic modules |
06/10/2010 | WO2010030529A3 Low sloped edge ring for plasma processing chamber |
06/10/2010 | US20100141147 Capacitively coupled plasma (ccp) generator with two input ports |
06/10/2010 | US20100139864 Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method |
06/10/2010 | US20100139691 Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method |
06/09/2010 | EP2193694A1 Microwave plasma generating devices and plasma torches |