Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
08/2010
08/24/2010US7781028 adsorbing substrates onto surface of plate, absorbing compound with metal alkoxide group on surface, removing via rinsing, hydrolyzing, absorbing
08/24/2010US7780786 Internal member of a plasma processing vessel
08/24/2010CA2476510C Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method
08/19/2010WO2010094002A2 Rf bus and rf return bus for plasma chamber electrode
08/19/2010WO2010093903A2 Optical pumping to sustain hot plasma
08/19/2010WO2010093256A1 Portable plasma torch system with cooling system for the electronic components using a second media
08/19/2010WO2010092758A1 Thin film forming apparatus and thin film forming method
08/19/2010WO2010092757A1 Atomic layer growing apparatus and thin film forming method
08/19/2010WO2010091696A1 Module for a plasma supply unit and plasma supply unit
08/19/2010WO2010091470A1 Plasma deposition
08/19/2010WO2010065473A3 Gas distribution blocker apparatus
08/19/2010US20100209665 Ultra smooth nanostructured diamond films and compositions and methods for producing same
08/19/2010US20100209622 Thin Film of Aluminum Nitride and Process for Producing the Thin Film of Aluminum Nitride
08/19/2010US20100209335 Ion cyclotron power converter and radio microwave generator
08/19/2010US20100209293 Sterilization method and apparatus
08/19/2010US20100208196 Surface Modification of Contact Lenses
08/19/2010US20100207528 Portable power supply apparatus for generating microwave-excited microplasmas
08/19/2010DE102004049445B4 Plasmabrenner Plasma torch
08/19/2010DE102004029959B4 Gasdurchlässige Plasmaelektrode, Verfahren zum Herstellen der gasdurchlässigen Plasmaelektrode und Parallelplatten-Reaktor Gas permeable plasma electrode, method of manufacturing the gas-permeable and parallel-plate electrode plasma reactor
08/18/2010EP2217365A1 Method and device for plasma reformation of fuel for power plant applications
08/18/2010EP1979106B1 Method and device for the continuous plasma treatment of materials, in particular for the descaling of a metal strand
08/18/2010CN1700404B Highly efficient compact capacitance coupled plasma reactor/generator and method
08/18/2010CN101810060A Method and device for treatment or coating of surfaces
08/18/2010CN101809724A Plasma processing apparatus and plasma processing method
08/18/2010CN101808459A Low-temperature plasma treatment device used for modifying inner surface of tubular high polymer material support
08/18/2010CN101808458A Plasma power supply apparatus
08/18/2010CN101807508A Substrate treatment apparatus
08/18/2010CN101805902A Handheld air-cooled plasma torch
08/18/2010CN101351871B Plasma processing apparatus
08/18/2010CN101276738B Plama processing apparatus
08/18/2010CN101162689B Focus ring and plasma processing apparatus
08/17/2010US7778382 CT imaging system with multiple peak x-ray source
08/17/2010US7776425 Nanoparticle coated nanostructured surfaces for detection, catalysis and device applications
08/17/2010US7776408 Method and apparatus for producing single crystalline diamonds
08/17/2010US7776407 ink jet printing; avoids spreading of ink droplets and deterioration of interface adhesion
08/17/2010US7776249 Method of making bipolar plate
08/17/2010CA2357963C Sterilization system employing low frequency plasma
08/12/2010WO2010091205A2 Ground return for plasma processes
08/12/2010WO2010090846A2 Particle reduction treatment for gas delivery system
08/12/2010WO2010090545A1 Formation method of high enthalpy gas jet based on pulse gas discharge
08/12/2010WO2010090127A1 Plasma processing apparatus, plasma processing method, and method of manufacturing chip provided with processed substrate
08/12/2010WO2010090058A1 Plasma processing device
08/12/2010WO2010089670A1 Systems and methods for compressing plasma
08/12/2010WO2010089175A1 Plasma coating system and method for coating or treating the surface of a substrate
08/12/2010WO2010067306A3 Device and method for generating a plasma flow
08/12/2010WO2010065474A3 Modulation of rf returning straps for uniformity control
08/12/2010WO2010062345A3 Lower electrode assembly of plasma processing chamber
08/12/2010WO2010047880A3 System for enhancing preignition conditions of thermonuclear fusion reactions
08/12/2010US20100204777 Inhibitory cell adhesion surfaces
08/12/2010US20100203253 Plasma system and method of producing a functional coating
08/12/2010US20100201272 Plasma generating system having nozzle with electrical biasing
08/12/2010US20100201271 Dc arc plasmatron and method of using the same
08/12/2010DE202008017836U1 Plasmadüse Plasma
08/12/2010CA2751736A1 Plasma source with integral blade and method for removing materials from substrates
08/12/2010CA2750789A1 Plasma coating system and method for coating or treating the surface of a substrate
08/11/2010EP2215330A1 Aerodynamic performance enhancements using discharge plasma actuators
08/11/2010CN201543958U Plasma arc cutting torch
08/11/2010CN1925074B Induction coupling coil and induction coupling plasma device
08/11/2010CN101803472A Plasma processing device
08/11/2010CN101803471A Microwave plasma generating devices and plasma torches
08/11/2010CN101802259A Device for very high frequency plasma assisted CVD under atmospheric pressure, and applications thereof
08/11/2010CN101802244A Atmospheric pressure plasma
08/11/2010CN101801583A Plasma torch, plasma torch nozzle, and plasma working machine
08/11/2010CN101801515A A gas reformulation system comprising means to optimize the effectiveness of gas conversion
08/11/2010CN101801153A Radio frequency power control system
08/11/2010CN101797395A High-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer
08/11/2010CN101797394A Radio-frequency inductance coupling plasma sterilizer
08/11/2010CN101290869B Plasma treatment apparatus
08/11/2010CN101241846B Techniques for improving etch rate uniformity
08/10/2010US7771798 plasma jet source produces a plasma, which emerges from plasma jet source in form of plasma jet and acts on substrate; precursor materials, which are modified or fused in the plasma jet and subsequently deposited on the substrate, are introduced into plasma
08/10/2010US7771797 Photocatalyst material producing method and photocatalyst material producing apparatus
08/10/2010US7771796 introducing in plasma processing chamber first gas having function of stabilizing plasma and second gas generating active hydrogen, both being introduced for predetermined period of time with no generation of plasma, generating plasma, and carrying out curing on low dielectric constant SiOCH film
08/10/2010US7771673 Plasma generating electrode and plasma reactor
08/05/2010WO2010088677A1 Passive power distribution for multiple electrode inductive plasma source
08/05/2010WO2010088267A2 Method and apparatus for etching
08/05/2010WO2010087648A2 Inductively coupled plasma-generating source electrode and substrate-processing apparatus comprising same
08/05/2010WO2010086950A1 Microwave plasma processing apparatus, dielectric board provided with slot board for microwave plasma processing apparatus, and method for manufacturing dielectric board
08/05/2010WO2010085941A2 Apparatus for modifying the surfaces of web, plate and sheet products using a device for generating plasma
08/05/2010WO2010062040A3 Plasma treatment apparatus and plasma antenna
08/05/2010US20100196624 Arrangement
08/05/2010US20100196208 Ignition or plasma generation apparatus
08/05/2010US20100194281 Passive Power Distribution for Multiple Electrode Inductive Plasma Source
08/05/2010US20100194280 Plasma Supply Device
08/05/2010US20100194279 Control of a plurality of plug coils via a single power stage
08/05/2010US20100194278 Flow manipulation with micro plasma
08/05/2010US20100192973 Extreme ultraviolet light source apparatus and cleaning method
08/05/2010DE202007019099U1 Vorrichtung zur Plasmabehandlung An apparatus for plasma treatment
08/05/2010DE102009010497A1 Mehrdüsiger rohrförmiger Plasma-Abscheidebrenner zur Herstellung von Vorformen als Halbzeuge für optische Fasern Mehrdüsiger tubular plasma deposition burner for producing preforms as semi-finished products for optical fibers
08/04/2010EP2212900A1 Method and device for producing a homogeneous discharge on non-insulating substrates
08/04/2010EP2211916A1 Microwave plasms sterilisation system and applicators therefor
08/04/2010EP2211915A1 Hydroxyl radical producing plasma sterilisation apparatus
08/04/2010EP1378000B1 Conductive collar surrounding semiconductor workpiece in plasma chamber
08/04/2010CN201541423U Plasma air-stream heat radiating device
08/04/2010CN101795528A inductively coupled plasma processing apparatus
08/04/2010CN101795527A Radiation source, lithographic apparatus and device manufacturing method
08/04/2010CN101794990A System and method for compensating direct current self-bias voltage
08/03/2010US7767275 Method for synthesizing self-aligned carbon nanomaterials on large area
08/03/2010US7767274 heating potassium borofluoride to release BF3, applying a plasma charge to the BF3 to create a plasma comprising one or more activated boron species and diffusing the plasma onto the metal surface ( Ti or Fe alloy) to form boride protective coating ; wear resistance
08/03/2010US7767270 irradiate a precursor gas to provide a cold plasma of selected target particles, such as atomic H or F, that are directed toward an array of CNTs in a second chamber, while suppressing transport of ultraviolet radiation, to attach the particles to the CNTs
08/03/2010US7767269 Plasma enhanced chemical vapor deposition in which the deposited phase A material is followed by a phase B material for exposure of the support and phase A material to a pulse of limited duration of an ionic bombardment with high energy density of selected energy density level
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