| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 12/09/2010 | US20100310884 Composite material and process for preparing a composite material |
| 12/09/2010 | US20100310788 Method and system for continuous or semi-continuous laser deposition |
| 12/09/2010 | US20100308730 Method and device for creating a micro plasma jet |
| 12/09/2010 | US20100308509 Methods of forming molds and methods of forming articles using said molds |
| 12/09/2010 | US20100308497 Tool for making microstructured articles |
| 12/09/2010 | DE112009000131T5 Plasma-Generator und Entladungsvorrichtung und Reaktor, der einen Plasma-Generator verwendet Plasma generator and reactor discharge device and that uses a plasma generator |
| 12/08/2010 | EP2259663A2 Plasma generator, plasma control method and method of producing substrate |
| 12/08/2010 | EP2259662A1 Abnormal discharge suppressing device for vacuum apparatus |
| 12/08/2010 | EP2258150A2 Method and apparatus for advanced frequency tuning |
| 12/08/2010 | EP1797746B1 Microwave plasma apparatus with vorticular gas flow |
| 12/08/2010 | CN1968715B Polymeric coupling agents and pharmaceutically-active polymers made therefrom |
| 12/08/2010 | CN1662337B Plasma arc torch tip, plasma arc torch and operation method thereof |
| 12/08/2010 | CN101911841A Plasma treatment apparatus, heating device for the plasma treatment apparatus, and plasma treatment method |
| 12/08/2010 | CN101911840A Asymmetrical RF drive for electrode of plasma chamber |
| 12/08/2010 | CN101910460A Plasma processing apparatus |
| 12/08/2010 | CN101488468B Wafer retaining system and semiconductor processing apparatus applying the system |
| 12/08/2010 | CN101346807B End point detectable plasma etching method and plasma etching apparatus |
| 12/08/2010 | CN101290873B Hollow anode plasma reactor and method |
| 12/08/2010 | CN101207965B Plasma generator and method for prolonging plasma generator cathode life |
| 12/08/2010 | CN101066000B Plasma nozzle array for providing uniform scalable microwave plasma generation |
| 12/08/2010 | CN101002509B Plasma processing apparatus |
| 12/07/2010 | US7846512 Method for producing patterns in a polymer layer |
| 12/07/2010 | US7846293 Plasma processing apparatus and method |
| 12/07/2010 | CA2476633C Thermal projection device |
| 12/02/2010 | WO2010093903A3 Optical pumping to sustain hot plasma |
| 12/02/2010 | WO2010088267A4 Method and apparatus for etching |
| 12/02/2010 | US20100305673 Ink Jet Printing of Implantable Electrodes |
| 12/02/2010 | US20100304561 Film forming method and substrate processing apparatus |
| 12/02/2010 | US20100304527 Methods of thermal processing a solar cell |
| 12/02/2010 | US20100304146 Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves |
| 12/02/2010 | US20100304047 Low Temperature Deposition of Silicon-Containing Films |
| 12/02/2010 | US20100304045 Method of and apparatus for treating or coating a surface |
| 12/02/2010 | US20100304044 Spectrally Selective Coatings And Associated Methods For Minimizing The Effects of Lightning Strikes |
| 12/02/2010 | US20100301753 Applicator of microwave plasma generator and microwave plasma generator including this applicator |
| 12/02/2010 | US20100301012 Device and method for producing microwave plasma with a high plasma density |
| 12/02/2010 | US20100300871 Pressurized plasma enhanced reactor |
| 12/02/2010 | DE102009020163A1 Method for interlayer free connection of two semiconductor substrates through bonding by pretreatment, involves producing plasma between bonding surface and electrode by corona discharge |
| 12/02/2010 | DE102007021388B4 MF-Leistungsgenerator MF power generator |
| 12/01/2010 | EP2257136A1 Plasma generator |
| 12/01/2010 | EP2256781A1 Toroidal Plasma Chamber |
| 12/01/2010 | EP2255916A1 Modular device for plasma cutting with plasma torch and cable for mutual connection to the plasma torch and a generator |
| 12/01/2010 | EP2255081A2 System, method and apparatus for lean combustion with plasma from an electrical arc |
| 12/01/2010 | EP2254722A1 Binary signal detection for identifying a torch assembly |
| 12/01/2010 | EP2254664A1 Plasma device for selective treatment of electropored cells |
| 12/01/2010 | EP1371905B1 Plasma igniter with assembled cathode |
| 12/01/2010 | CN201662163U Plasma air disinfecting and purifying air conditioner |
| 12/01/2010 | CN101904227A Plasma source mechanism and film forming apparatus |
| 12/01/2010 | CN101902872A Large-area flat-plate normal-pressure radio-frequency cold plasma system |
| 12/01/2010 | CN101902871A Hollow cathode arc chamber |
| 12/01/2010 | CN101341582B Light source device, substrate treating device, and substrate treating method |
| 12/01/2010 | CN101131547B Apparatus and method for treating substrates |
| 11/30/2010 | US7842356 Substrate processing methods |
| 11/30/2010 | US7842205 Manufacturing method by treating substrate introduced into treatment apparatus from transfer container |
| 11/25/2010 | WO2010134126A1 Plasma apparatus |
| 11/25/2010 | WO2010091205A3 Ground return for plasma processes |
| 11/25/2010 | US20100297435 Nanotubes and related manufacturing processes |
| 11/25/2010 | US20100297361 Plasma deposition source and method for depositing thin films |
| 11/25/2010 | US20100296979 Plasma generator |
| 11/25/2010 | US20100294744 Dual mode plasma arc torch |
| 11/25/2010 | DE4345602B4 Verfahren zum Zünden und Betreiben einer Niederspannungs-Bogenentladung, Vakuumbehandlungsanlage und Kathodenkammer hierfür sowie Verwendung des Verfahrens Method for starting and operating a low-voltage arc discharge, vacuum treatment plant and cathode chamber for this and using the method |
| 11/25/2010 | DE19628952C5 Vorrichtung zur Erzeugung von Plasma A device for generating plasma |
| 11/24/2010 | EP2253005A1 Large area, atmospheric pressure plasma for downstream processing |
| 11/24/2010 | EP1129478B1 Method and apparatus for improving accuracy of plasma etching process |
| 11/24/2010 | CN101897241A Device for injecting a liquid load to be mixed/converted inside a plasma needle or a gaseous flow |
| 11/24/2010 | CN101897240A Method and device for the treatment of surfaces |
| 11/24/2010 | CN101896034A Radio frequency power source system and plasma reaction chamber applying same |
| 11/24/2010 | CN101896033A Plasma processing apparatus and electrode for same |
| 11/24/2010 | CN101271859B Plasma processing apparatus and structure therein |
| 11/23/2010 | US7839223 Method and apparatus for advanced frequency tuning |
| 11/23/2010 | US7838792 Plasma processing apparatus capable of adjusting temperature of sample stand |
| 11/23/2010 | US7838086 gas flows through gap adjacent to confinement ring to provide physical confinement of plasma |
| 11/23/2010 | US7838085 generating plasma that includes ions of coating material to be deposited on surfaces of workpiece, securing using support, increasing ionization of said plasma within workpiece by applying hollow cathode techniques, including biasing and tuning pressure to induce oscillation of electrons |
| 11/23/2010 | US7838084 Chemisorbtion to form a monolayer on substrate within the deposition chamber from gaseous precursor; contacting with remote plasma oxygen or ozone and with remote plasma nitrogen; oxidation; forming porous silica, alumina, tin oxide, indium oxide and/or indium tin oxide from precursors |
| 11/18/2010 | WO2010132716A2 Anodized showerhead |
| 11/18/2010 | WO2010132069A1 Particle beam isotope generator apparatus, system, and method |
| 11/18/2010 | WO2010132068A1 Ecr particle beam source apparatus, system and method |
| 11/18/2010 | WO2010085941A3 Apparatus for modifying the surfaces of web, plate and sheet products using a device for generating plasma |
| 11/18/2010 | US20100292757 Method and device for plasma-supported surface treatment |
| 11/18/2010 | US20100291321 Dielectric Barrier Deposition Using Nitrogen Containing Precursor |
| 11/18/2010 | US20100291320 Method for manufacturing a treated surface and vacuum plasma sources |
| 11/18/2010 | US20100289437 Electrostatic ion accelerator arrangement |
| 11/18/2010 | US20100288399 Device and method for remelting metallic surfaces |
| 11/18/2010 | DE102009018912A1 Verfahren zur Erzeugung eines Plasmastrahls sowie Plasmaquelle A method of generating a plasma beam as well as the plasma source |
| 11/17/2010 | EP2251898A1 Atomic layer deposition apparatus and atomic layer deposition method |
| 11/17/2010 | EP0914496B1 Microwave applicator for an electron cyclotron resonance plasma source |
| 11/17/2010 | CN201639851U Anode structure of laminar flow plasma arc generator |
| 11/17/2010 | CN201639850U Screw rod adjustable plasma heating gun |
| 11/17/2010 | CN201639849U Directly adjusted plasma heating gun |
| 11/17/2010 | CN101889483A Control of a laser inertial confinement fusion-fission power plant |
| 11/17/2010 | CN101888860A Hydroxyl radical producing plasma sterilisation apparatus |
| 11/17/2010 | CN101888736A Gas distributor and apparatus using the same |
| 11/17/2010 | CN101887836A Method and device for regulating current distribution and plasma process equipment |
| 11/17/2010 | CN101884868A Method and complete equipment for purifying low-temperature plasma industrial waste gas |
| 11/16/2010 | US7833626 Film of carbon and silicon by a plasma CVD process; pistons and valve-system component parts making engines |
| 11/16/2010 | US7833587 in which discharge electrode and substrate are disposed opposite each other in vacuum film formation chamber into which gas for forming film containing substance has been introduced, and high-frequency electric power generated by feeding circuit through adjustable external cables |
| 11/11/2010 | WO2010129229A2 Arrangements for detecting discontinuity of flexible connections for current flow and methods thereof |
| 11/11/2010 | WO2010128878A1 Gas reactor |
| 11/11/2010 | WO2010128877A1 Device for recovering energy from flue gases |
| 11/11/2010 | WO2010098604A3 Annealing apparatus using plasma |
| 11/11/2010 | WO2010066247A3 Microwave plasma source and method for forming a linearly extended plasma under atmospheric pressure conditions |