| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 06/23/2011 | US20110151142 Pecvd multi-step processing with continuous plasma |
| 06/23/2011 | US20110148303 Efficient active source impedance modification of a power amplifier |
| 06/23/2011 | US20110148008 Micro-nano imprint mould and imprinting process |
| 06/22/2011 | EP2143307B1 Plasma nozzle |
| 06/22/2011 | EP2007673B1 Hydrogen production |
| 06/22/2011 | DE102010060591A1 Plasmagenerator Plasma generator |
| 06/22/2011 | DE102009059108A1 Elektrode mit Kühlrohr für eine Plasmaschneidvorrichtung Electrode with cooling tube for a plasma cutter |
| 06/22/2011 | CN1691505B Plasma power generator |
| 06/22/2011 | CN102106193A Plasma processing device and method for monitoring state of discharge in plasma processing device |
| 06/22/2011 | CN102106192A Field enhanced inductively coupled plasma (FE-ICP) reactor |
| 06/22/2011 | CN102106191A Workpiece support for a plasma reactor with controlled apportionment of RF power to a process kit ring |
| 06/22/2011 | CN102105677A Power supply control for spark plug of internal combustion engine |
| 06/22/2011 | CN102105216A Halogenated polysilane and plasma-chemical process for producing the same |
| 06/22/2011 | CN102104357A Motor control device and method, impedance matcher and plasma processing equipment |
| 06/22/2011 | CN102101213A Coupling device for a water vapour cutting device |
| 06/22/2011 | CN101681833B Micro wave plasma processing device, micro wave plasma processing method, and micro wave transmitting plate |
| 06/22/2011 | CN101638015B Method for improving surface energy of aluminum plate by using plasma |
| 06/22/2011 | CN101552188B Plasma processing apparatus |
| 06/22/2011 | CN101540273B Shower head and substrate processing apparatus |
| 06/22/2011 | CN101529551B Method and apparatus for preventing instabilities in radio-frequency plasma processing |
| 06/22/2011 | CN101490816B Plasma abnormal discharge diagnosis method, plasma abnormal discharge diagnosis system |
| 06/21/2011 | US7964857 Plasma source of directed beams and application thereof to microlithography |
| 06/21/2011 | US7963695 Rotatable boom cargo scanning system |
| 06/16/2011 | WO2011070819A1 Plasma ignition device, plasma ignition method, and plasma generation device |
| 06/16/2011 | WO2011028599A3 Direct drive arrangement to control confinement rings positioning and methods thereof |
| 06/16/2011 | US20110143163 Method for the production of an optimized bonding agent layer by means of partial evaporation of the bonding agent layer, and a layer system |
| 06/16/2011 | US20110143126 Polycarbonate blends having high heat distortion resistance and improved surface properties |
| 06/16/2011 | US20110143044 Process for the treatment of particles |
| 06/16/2011 | US20110143042 Methods for making near net shape airfoil leading edge protection |
| 06/16/2011 | US20110140607 System, method and apparatus for generating plasma |
| 06/16/2011 | US20110139175 Enhanced passivation process to protect silicon prior to high dose implant strip |
| 06/15/2011 | CN201869431U Inductively coupled plasma processor |
| 06/15/2011 | CN201869430U Radio frequency antenna used in plasma generator |
| 06/15/2011 | CN1809911B A high density plasma reactor |
| 06/15/2011 | CN102098865A Plasmatron |
| 06/15/2011 | CN102098864A Plasma generating device |
| 06/15/2011 | CN102098863A Electrode board for plasma processing equipment and method for removing process sediments |
| 06/15/2011 | CN102098862A Lower electrode device and plasma processing equipment using same |
| 06/15/2011 | CN101652498B Plasma generation device, and method and apparatus for forming film using the same |
| 06/15/2011 | CN101640091B Inductive coupling coil and plasma processing device adopting same |
| 06/15/2011 | CN101500369B Inductor coupling coil and inductor coupling plasma generation apparatus |
| 06/15/2011 | CN101378031B Substrate carrier plateform and substrate processing device |
| 06/15/2011 | CN101333654B Plasma discharge processing unit |
| 06/15/2011 | CN101223624B Ion source and plasma processing device |
| 06/14/2011 | US7959986 Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| 06/14/2011 | US7959985 Method of integrating PEALD Ta-containing films into Cu metallization |
| 06/14/2011 | US7959984 Methods and arrangement for the reduction of byproduct deposition in a plasma processing system |
| 06/09/2011 | WO2011068350A2 Apparatus and method for generating x-ray using electron cyclotron resonance ion source |
| 06/09/2011 | WO2011066769A1 Plasma-enhanced chemical vapor deposition system |
| 06/09/2011 | WO2011017314A3 Closed drift ion source with symmetric magnetic field |
| 06/09/2011 | US20110135552 Methods and apparatus for treating exhaust gas in a processing system |
| 06/09/2011 | US20110133651 Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities |
| 06/09/2011 | US20110133129 Method of tuning properties of thin films |
| 06/09/2011 | US20110132543 Brush type plasma surface treatment apparatus |
| 06/08/2011 | EP2329691A1 Plasma applicator and corresponding method |
| 06/08/2011 | EP2329521A2 Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring |
| 06/08/2011 | EP2000562B1 Electrode and vacuum processing apparatus |
| 06/08/2011 | CN1983518B Plasma processing apparatus and method |
| 06/08/2011 | CN102090153A Microwave plasma processing device |
| 06/08/2011 | CN102089867A Plasma processing apparatus |
| 06/08/2011 | CN102087487A Novel method for cleaning silicon wafer by normal pressure plasma free radical beam |
| 06/08/2011 | CN102085521A Normal-pressure dual-medium barrier type active radical cleaning system |
| 06/08/2011 | CN102085520A Normal-pressure dual-medium barrier flat-opening type active radical cleaning system |
| 06/08/2011 | CN101568996B Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber |
| 06/08/2011 | CN101551118B Plasma ignition device with long service life |
| 06/08/2011 | CN101347051B Plasma treatment device, and plasma treatment method |
| 06/07/2011 | US7956543 Optimization of the excitation frequency of a resonator |
| 06/07/2011 | US7955986 Capacitively coupled plasma reactor with magnetic plasma control |
| 06/07/2011 | US7955641 Method of making a piezoelectric device |
| 06/07/2011 | US7955581 Method of producing silicon oxide, negative electrode active material for lithium ion secondary battery and lithium ion secondary battery using the same |
| 06/07/2011 | US7955513 Apparatus and method for reactive atom plasma processing for material deposition |
| 06/03/2011 | WO2011065506A1 Plasma processor |
| 06/03/2011 | WO2011065171A1 Plasma processing device |
| 06/03/2011 | WO2011064958A1 Power-supply device |
| 06/03/2011 | WO2011064314A1 Method and device for the thermal destruction of organic compounds by means of an induction plasma |
| 06/03/2011 | WO2011064217A1 Method and device for polarizing a dbd electrode |
| 06/03/2011 | WO2011063798A2 Device and method for generating a pulsed anisothermal atmospheric pressure plasma |
| 06/03/2011 | WO2011042896A3 Method and system for plasma treatment of a liquid |
| 06/03/2011 | WO2011026127A3 A local plasma confinement and pressure control arrangement and methods thereof |
| 06/03/2011 | WO2011026126A3 A multi-peripheral ring arrangement for performing plasma confinement |
| 06/03/2011 | CA2781968A1 Method and device for the thermal destruction of organic compounds by means of an induction plasma |
| 06/02/2011 | US20110129619 Film formation method and apparatus |
| 06/02/2011 | US20110129618 Vertical film formation apparatus and method for using same |
| 06/02/2011 | US20110129617 Plasma system and method of producing a functional coating |
| 06/02/2011 | US20110129616 Oxygen-doping for non-carbon radical-component cvd films |
| 06/02/2011 | US20110129606 Primer coating for enhancing adhesion of liquid toner to polymeric substrates |
| 06/02/2011 | US20110127915 Plasma containment |
| 06/01/2011 | EP2328389A1 Plasma temperature control apparatus and plasma temperature control method |
| 06/01/2011 | EP1177112B1 Remote plasma generator |
| 06/01/2011 | EP1153425B1 Method for plasma etching with pulsed substrate electrode power |
| 06/01/2011 | DE112009001422T5 Plasma-Processing-Vorrichtung und Plasma-Vorrichtung-Verfahren Plasma processing apparatus and plasma process apparatus |
| 06/01/2011 | DE102009047220A1 Vorrichtung und Verfahren zur Erzeugung eines gepulsten Anisothermen Atmosphärendruck-Plasmas Apparatus and method for generating a pulsed anisothermal atmospheric-pressure plasma |
| 06/01/2011 | CN1728916B Ultra high speed uniform plasma processing system |
| 06/01/2011 | CN102084727A Temperature adjusting mechanism and semiconductor manufacturing apparatus using the same |
| 06/01/2011 | CN102084726A Clamped showerhead electrode assembly |
| 06/01/2011 | CN102084469A 等离子体处理装置 The plasma processing apparatus |
| 06/01/2011 | CN102084468A Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal |
| 06/01/2011 | CN102084024A Power source device |
| 06/01/2011 | CN102083751A Skull reactor |
| 06/01/2011 | CN102080619A Engine ignition device on basis of microwave plasma |