Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2012
07/04/2012CN101908502B Method for cleaning back surface of tungsten plug CMP for integrated circuit in ultra-large scale
07/04/2012CN101907807B Display device having oxide thin film transistor and fabrication method thereof
07/04/2012CN101905439B Polishing pad with internal in-situ generated gap and gap generating method
07/04/2012CN101901765B Method of manufacturing power semiconductor device
07/04/2012CN101894821B Conductor structure for packaging and routing semiconductor and combination structure thereof
07/04/2012CN101894780B Steering device
07/04/2012CN101894775B Method for detecting stability of spike anneal processing device
07/04/2012CN101889329B High lifetime consumable silicon nitride-silicon dioxide plasma processing components
07/04/2012CN101889196B Feature analyzing apparatus
07/04/2012CN101883979B Substrate surface inspecting apparatus and substrate surface inspecting method
07/04/2012CN101882724B Sealed power transmission device
07/04/2012CN101882568B Division mechanism
07/04/2012CN101878534B Semiconductor device and display device
07/04/2012CN101872817B Light-emitting diode packaging structure and manufacturing method thereof
07/04/2012CN101866859B Channel stress introducing method and field-effect transistor prepared through same
07/04/2012CN101866858B Manufacture method of sinking channel type PNPN field effect transistor
07/04/2012CN101859792B Organic light emitting diode display
07/04/2012CN101859774B Semiconductor device and its manufacturing method
07/04/2012CN101859769B Semiconductor device and method for fabricating the same
07/04/2012CN101859742B Device mounting structure, method of mounting device, liquid-jet head, and printer
07/04/2012CN101859711B Method for manufacturing amorphous oxide film
07/04/2012CN101859707B Semiconductor nanowires having mobility-optimized orientations
07/04/2012CN101853864B Method of wafer bonding
07/04/2012CN101853784B Method for transversely inducing and crystallizing low-temperature polycrystalline silicon film
07/04/2012CN101851742B Preparation method of compound semiconductor film
07/04/2012CN101847616B Barrier for through-silicon via
07/04/2012CN101847559B Faraday device used for detecting implantation dose of plasma
07/04/2012CN101841975B Method for manufacturing high-thermal conductivity circuit board by hot-pressing method and high-thermal conductivity circuit board
07/04/2012CN101841973B High-thermal conductivity circuit board preparation method based on metal base and circuit board
07/04/2012CN101840851B Ion implantation system and method
07/04/2012CN101840847B Substrate heat processing apparatus
07/04/2012CN101838797B Ion implantation method
07/04/2012CN101836283B Formation of a slot in a silicon substrate
07/04/2012CN101834126B Low-temperature polysilicon thin film material
07/04/2012CN101834122B Manufacturing method of polycrystalline silicon film material
07/04/2012CN101833244B Positive-working photosensitive resin composition, method for producing pattern-formed resin film, semiconductor device, display device, and method for producing the semiconductor device and the display device
07/04/2012CN101831246B Adhesive composition, circuit connecting material, connecting structure for circuit member, and semiconductor device
07/04/2012CN101830351B Clamping assembly, positioning equipment using same and method for moving object from positioning equipment
07/04/2012CN101821677B Composition for forming resist underlayer film and method of forming resist pattern from the same
07/04/2012CN101819956B 半导体器件 Semiconductor devices
07/04/2012CN101816065B Method and apparatus for shaping gas profile near bevel edge
07/04/2012CN101814428B Method for producing epitaxially coated silicon wafers
07/04/2012CN101814420B Substrate processing apparatus
07/04/2012CN101809748B Method for manufacturing field-effect transistor
07/04/2012CN101807558B Element sealing and bonding structure and process thereof
07/04/2012CN101803031B Semiconductor device manufacturing method and semiconductor device
07/04/2012CN101802718B Composition for forming silicon-containing fine pattern and method for forming fine pattern using the same
07/04/2012CN101800236B Semiconductor memory structure and manufacturing method thereof
07/04/2012CN101800213B Electrostatic discharge protection device, manufacturing method and drain used thereinto
07/04/2012CN101794709B Vacuum device and substrate processing device
07/04/2012CN101790779B High temperature ion implantation of nitride based hemts
07/04/2012CN101789378B Method for manufacturing semiconductor device
07/04/2012CN101788503B Bare chip defect detecting system for detecting defects at back face of bare chip and using method thereof
07/04/2012CN101779133B Apparatus and method for sensing leakage current of battery
07/04/2012CN101777549B Packaging module structure of compound semiconductor elements and production method thereof
07/04/2012CN101774155B Grinding wheel spindle inclination angle adjusting structure
07/04/2012CN101771089B Robust structure for hvpw schottky diode
07/04/2012CN101770130B Array substrate for electrophoresis type display device and method of manufacturing the same, method of repairing a line of the same
07/04/2012CN101767315B Method for prolonging service life of chemical mechanical polishing dresser
07/04/2012CN101758007B Apparatus for counteracting the counteracting force and a spreading machine with the apparatus
07/04/2012CN101752358B Compact semiconductor package with integrated bypass capacitor and method
07/04/2012CN101752317B Method for manufacturing semiconductor device
07/04/2012CN101752270B Method of forming stacked IC semiconductor crystal grain
07/04/2012CN101752262B Circuit board technique
07/04/2012CN101752245B Production method and oxidization system of semiconductor device
07/04/2012CN101746704B MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof
07/04/2012CN101740529B Heat radiation material, electronic device and method of manufacturing electronic device
07/04/2012CN101740343B High-accuracy composite disk structure and application thereof
07/04/2012CN101728364B 芯片封装体及制作方法 Chip package and method of making
07/04/2012CN101728290B Bonding method
07/04/2012CN101728273B Semiconductor device and method of fabricating the same
07/04/2012CN101728241B Method for reducing the peeling of film deposited on technique external member
07/04/2012CN101728232B Control method for preventing process gas from mixing from hardware
07/04/2012CN101728231B Automatic lifting mechanism of organic glass door for rapid heat-treatment furnace
07/04/2012CN101719503B Co-electrode thin SOI longitudinal bipolar transistor device and manufacturing method thereof
07/04/2012CN101714578B Ferroelectric capacitor, method of manufacturing ferroelectric capacitor, and ferroelectric memory
07/04/2012CN101714504B Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
07/04/2012CN101707203B 光电转换器件及其制造方法 The photoelectric conversion device and manufacturing method thereof
07/04/2012CN101697065B Development device and developing method
07/04/2012CN101694564B Lithographic apparatus and device manufacturing method
07/04/2012CN101689510B Semiconductor device, semiconductor device manufacturing method, display device and display device manufacturing method
07/04/2012CN101689496B Ashing apparatus
07/04/2012CN101689483B Nitride semi-conductor component layer structure on a group IV substrate surface
07/04/2012CN101679568B Photocurable composition and process for producing molded object having fine pattern in surface
07/04/2012CN101673682B Method for etching wafer
07/04/2012CN101667536B Method for etching an object to be processed
07/04/2012CN101657886B Wafer electroless plating system and associated methods
07/04/2012CN101657761B Photoresist developing solution
07/04/2012CN101656244B Multilayer interconnection packaging structure of silica-based embedded microwave multi chip module and manufacturing method
07/04/2012CN101652834B Trap apparatus, exhaust system, and treating system using the same
07/04/2012CN101651112B Foup opening/closing device and probe apparatus
07/04/2012CN101651109B Method for manufacturing organic light emitting display
07/04/2012CN101647105B A first inter-layer dielectric stack for non-volatile memory
07/04/2012CN101646697B Organic insulating material, varnish for resin film using the same, resin film and semiconductor device
07/04/2012CN101641763B Semiconductor device and method of manufacturing the same
07/04/2012CN101641644B Composition for forming under-resist film
07/04/2012CN101638806B Method for manufacturing silicon wafer
07/04/2012CN101635258B Method for preventing warpage of fresh high temperature oxidation (HTO) photo resist
07/04/2012CN101630693B Thin film transistor, method of fabricating the same, and organic light emitting diode display device including the thin film transistor
07/04/2012CN101622693B Method for forming amorphous carbon film, and method for manufacturing semiconductor device