Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2012
11/20/2012US8314428 Thin film transistor with LDD/offset structure
11/20/2012US8314427 Light emitting device and electronic equipment
11/20/2012US8314426 Semiconductor device and method of fabricating the same
11/20/2012US8314378 Apparatus and method for manufacturing light source device
11/20/2012US8314369 Managing thermal budget in annealing of substrates
11/20/2012US8314360 Apparatuses and methods for irradiating a substrate to avoid substrate edge damage
11/20/2012US8314192 Interpenetrating polymer network structure and polishing pad, and process for producing the same
11/20/2012US8314036 Methods of forming fine patterns of semiconductor device
11/20/2012US8314035 Method for the manufacture of an active matrix OLED display
11/20/2012US8314034 Feature size reduction
11/20/2012US8314033 Method of patterning a low-k dielectric film
11/20/2012US8314032 Semiconductor device and method for manufacturing the same
11/20/2012US8314031 Planarization process for pre-damascene structure including metal hard mask
11/20/2012US8314030 Method for fabricating semiconductor device
11/20/2012US8314029 Process for producing polyurethane foam
11/20/2012US8314028 Slurry compositions and methods of polishing a layer using the slurry compositions
11/20/2012US8314027 Wafer electroless plating system and associated methods
11/20/2012US8314026 Anchored conductive via and method for forming
11/20/2012US8314025 Method of forming semiconductor device having contact plug
11/20/2012US8314024 Device fabrication
11/20/2012US8314023 Methods involving memory with high dielectric constant antifuses adapted for use at low voltage
11/20/2012US8314022 Method for etching gate stack
11/20/2012US8314021 Method for fabricating semiconductor device with buried gates
11/20/2012US8314020 Method for patterning a metal layer and method for manufacturing semiconductor devices by using the same
11/20/2012US8314019 Metallization and its use in, in particular, an IGBT or a diode
11/20/2012US8314018 Method for manufacturing semiconductor device
11/20/2012US8314017 Method for manufacturing a low defect interface between a dielectric and a III-V compound
11/20/2012US8314016 Low-defect density gallium nitride semiconductor structures and fabrication methods
11/20/2012US8314015 Silicon surface modification for the electrochemical synthesis of silicon particles in suspension
11/20/2012US8314014 Laser processing apparatus and laser processing method
11/20/2012US8314013 Semiconductor chip manufacturing method
11/20/2012US8314012 Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
11/20/2012US8314011 Epitaxial lift off stack having a non-uniform handle and methods thereof
11/20/2012US8314010 Method of manufacturing a semiconductor device including thermal oxidation to form an insulating film
11/20/2012US8314009 Method for manufacturing SOI substrate and method for manufacturing semiconductor device
11/20/2012US8314008 Method of mounting MEMS integrated circuits directly from wafer film frame
11/20/2012US8314007 Process for fabricating a heterostructure with minimized stress
11/20/2012US8314006 Method for manufacturing bonded wafer
11/20/2012US8314005 Homogeneous porous low dielectric constant materials
11/20/2012US8314004 Semiconductor device manufacturing method
11/20/2012US8314003 Nonvolatile memory devices that use resistance materials and internal electrodes, and related methods and processing systems
11/20/2012US8314002 Semiconductor device having increased switching speed
11/20/2012US8314001 Vertical stacking of field effect transistor structures for logic gates
11/20/2012US8314000 LDMOS with double LDD and trenched drain
11/20/2012US8313999 Multi-gate semiconductor device with self-aligned epitaxial source and drain
11/20/2012US8313998 Method for manufacturing semiconductor device
11/20/2012US8313997 Method of manufacturing a semiconductor memory using two exposure masks to form a same wiring layer
11/20/2012US8313996 Reactive metal implated oxide based memory
11/20/2012US8313995 Method for manufacturing a semiconductor device
11/20/2012US8313994 Method for forming a high-K gate stack with reduced effective oxide thickness
11/20/2012US8313993 Semiconductor device and method for fabricating the same
11/20/2012US8313992 Method of patterning NAND strings using perpendicular SRAF
11/20/2012US8313991 Method for fabricating a high-K metal gate MOS
11/20/2012US8313990 Nanowire FET having induced radial strain
11/20/2012US8313989 SOI substrate and method for manufacturing the same
11/20/2012US8313988 Method for manufacturing thin film transistor and liquid crystal by treating a surface layer
11/20/2012US8313987 Anti-fuse memory cell
11/20/2012US8313986 Method of manufacturing power semiconductor device
11/20/2012US8313985 Atomic layer deposition encapsulation for power amplifiers in RF circuits
11/20/2012US8313984 Die substrate with reinforcement structure
11/20/2012US8313983 Fabrication method for resin-encapsulated semiconductor device
11/20/2012US8313982 Stacked die assemblies including TSV die
11/20/2012US8313981 Chip card, and method for the production thereof
11/20/2012US8313980 Semiconductor device and manufacturing method thereof
11/20/2012US8313979 Phase change memory cell having vertical channel access transistor
11/20/2012US8313977 Image sensor and method for manufacturing the same
11/20/2012US8313976 Method and apparatus for controllable sodium delivery for thin film photovoltaic materials
11/20/2012US8313975 Method for manufacturing photoelectric conversion device
11/20/2012US8313973 Method for producing a photovoltaic module
11/20/2012US8313970 Planar microshells for vacuum encapsulated devices and damascene method of manufacture
11/20/2012US8313969 Method of preparing luminescent nanocrystals, the resulting nanocrystals and uses thereof
11/20/2012US8313968 Fabrication of GaN and III-nitride alloys freestanding epilayers membranes using a nonbonding laser
11/20/2012US8313967 Cubic phase, nitrogen-based compound semiconductor films epitaxially grown on a grooved Si <001> substrate
11/20/2012US8313966 Method for fabricating optical semiconductor tubes and devices thereof
11/20/2012US8313965 Crystallization processing for semiconductor applications
11/20/2012US8313964 Singulation method and resulting device of thick gallium and nitrogen containing substrates
11/20/2012US8313963 Light emitting device
11/20/2012US8313960 Magnetic tunnel junction (MTJ) formation using multiple etching processes
11/20/2012US8313959 Hole first hardmask definition
11/20/2012US8313958 Magnetic microelectronic device attachment
11/20/2012US8313940 Self-addressable self-assembling microelectronic systems and devices for molecular biological analysis and diagnostics
11/20/2012US8313665 Showerhead electrode assemblies for plasma processing apparatuses
11/20/2012US8313612 Method and apparatus for reduction of voltage potential spike during dechucking
11/20/2012US8313611 Gas switching section including valves having different flow coefficients for gas distribution system
11/20/2012US8313610 Temperature control modules for showerhead electrode assemblies for plasma processing apparatuses
11/20/2012US8313609 Substrate processing apparatus and substrate processing method
11/20/2012US8313359 Chemical mechanical polishing apparatus
11/15/2012WO2012154951A1 Method and apparatus for parallel testing of semiconductor devices
11/15/2012WO2012154789A2 Methods for manufacturing high dielectric constant films
11/15/2012WO2012154764A2 Method for achieving smooth side walls after bosch etch process
11/15/2012WO2012154747A2 High pressure bevel etch process
11/15/2012WO2012154666A1 Semiconductor processing system having multiple decoupled plasma sources
11/15/2012WO2012154589A1 Semiconductor wafer bonding incorporating electrical and optical interconnects
11/15/2012WO2012154551A2 Growth of a uniformly doped silicon ingot by doping only the initial charge
11/15/2012WO2012154498A2 Removal of metal impurities from silicon surfaces for solar cell and semiconductor applications
11/15/2012WO2012154468A2 Deep ultra-violet light sources for wafer and reticle inspection systems
11/15/2012WO2012154454A2 Mitigation of silicide formation on wafer bevel
11/15/2012WO2012154429A2 Methods of dry stripping boron-carbon films
11/15/2012WO2012154428A2 Copper oxide removal techniques
11/15/2012WO2012154373A2 Surface dose retention of dopants by pre-amorphization and post-implant passivation treatments