Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
---|
11/28/2012 | CN101958266B Method for overcoming defects of silicon chip with STI and method for constructing STI on silicon chip |
11/28/2012 | CN101944494B Mold core fixing device of semiconductor packaging mold capable of quickly replacing mold core |
11/28/2012 | CN101937894B Semiconductor device including through-electrode and method of manufacturing the same |
11/28/2012 | CN101937887B Wafer structure and water processing method |
11/28/2012 | CN101931005B Semiconductor device, method of manufacturing the same and power-supply device using the same |
11/28/2012 | CN101930916B Method for forming groove |
11/28/2012 | CN101916715B In-situ dry clean chamber for front end of line fabrication |
11/28/2012 | CN101911259B Dicing/die bonding film |
11/28/2012 | CN101894808B Electronic device and method of manufacturing the same |
11/28/2012 | CN101887881B Interconnecting assembly, manufacture method and repairing method thereof |
11/28/2012 | CN101884097B Structure and method of forming a topside contact to a backside terminal of a semiconductor device |
11/28/2012 | CN101866857B Semiconductor device and manufacturing method thereof |
11/28/2012 | CN101861409B Sputtering apparatus and film forming method |
11/28/2012 | CN101859701B Substrate for semiconductor device, semiconductor device and manufacturing method thereof |
11/28/2012 | CN101849209B Composition for formation of top antireflective film, and pattern formation method using the composition |
11/28/2012 | CN101847589B Method for manufacturing a rigid power module suited for high-voltage applications |
11/28/2012 | CN101814461B Packaging substrate structure and chip packaging structure, as well as manufacturing method thereof |
11/28/2012 | CN101803008B Semiconductor device and method for manufacturing the same |
11/28/2012 | CN101794800B Solid-state imaging device and electronic device |
11/28/2012 | CN101788762B Pattern correction method, exposure mask, semiconductor device and manufacturing method of semiconductor device |
11/28/2012 | CN101778962B Method for thin film formation |
11/28/2012 | CN101752403B Display device and method for manufacturing the same |
11/28/2012 | CN101740325B Cleaning device for semiconductor base material |
11/28/2012 | CN101728242B Substrate processing apparatus |
11/28/2012 | CN101710212B Combined para-position structure of reinforcing panel and method thereof |
11/28/2012 | CN101681799B Erosion resistance enhanced quartz used in plasma etch chamber |
11/28/2012 | CN101663250B In-Ga-Zn-Sn type oxide sinter and target for physical film deposition |
11/28/2012 | CN101661892B Resin molded semiconductor device and manufacturing method thereof |
11/28/2012 | CN101632166B Post-seed deposition process |
11/28/2012 | CN101632162B Apparatus and method for punching out electronic component |
11/28/2012 | CN101621079B Field effect transistor, method of manufacturing the same, and semiconductor device |
11/28/2012 | CN101611496B Doped nanoparticle-based semiconductor junction |
11/28/2012 | CN101582380B High-pressure thyristor and production technique thereof |
11/28/2012 | CN101506939B Low-k damage avoidance during bevel etch processing |
11/28/2012 | CN101501820B Method for forming conductive film, thin film transistor, panel with thin film transistor, and method for manufacturing thin film transistor |
11/28/2012 | CN101484775B Surface inspection device |
11/28/2012 | CN101465278B Method for manufacturing a semiconductor device |
11/28/2012 | CN101450457B Polishing apparatus and polishing method |
11/28/2012 | CN101427362B Method for producing an integrated circuit |
11/28/2012 | CN101412472B 衬底输送装置 Substrate transport apparatus |
11/28/2012 | CN101409282B Thin film transistor substrate, display device having the same and method of manufacturing the same |
11/28/2012 | CN101395703B Method for processing, in particular, thin rear sides of a wafer, wafer-carrier arrangement and method for producing said type of wafer-carrier arrangement |
11/28/2012 | CN101372739B Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type |
11/28/2012 | CN101372090B Equipment for processing substrate |
11/28/2012 | CN101369588B Thin film transistor array panel and manufacturing method thereof |
11/28/2012 | CN101341574B Extended mainframe designs for semiconductor device manufacturing equipment |
11/28/2012 | CN101177199B Resonance type high-speed high-precision multi-station turning table |
11/28/2012 | CN101055425B Lithographic apparatus and device manufacturing method |
11/28/2012 | CN101044597B Laser irradiation method, laser irradiation apparatus, and manufacturing method of semiconductor device |
11/27/2012 | US8321821 Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same |
11/27/2012 | US8321815 Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method |
11/27/2012 | US8321711 Semiconductor device having a threshold voltage control function |
11/27/2012 | US8320099 Electrostatic chuck electrical balancing circuit repair |
11/27/2012 | US8319878 Solid-state imaging device and its production method |
11/27/2012 | US8319867 Solid-state imager device, drive method of solid-state imager device and camera apparatus |
11/27/2012 | US8319715 Active matrix type liquid crystal display device |
11/27/2012 | US8319347 Electronic device package and fabrication method thereof |
11/27/2012 | US8319339 Surface-mounted silicon chip |
11/27/2012 | US8319334 Embedded laminated device |
11/27/2012 | US8319328 Method of manufacturing a semiconductor device |
11/27/2012 | US8319316 Depletion MOS transistor and enhancement MOS transistor |
11/27/2012 | US8319315 Bipolar junction transistor devices |
11/27/2012 | US8319314 Semiconductor device |
11/27/2012 | US8319308 Semiconductor device and method for manufacturing of the same |
11/27/2012 | US8319304 Light detecting apparatus |
11/27/2012 | US8319296 Semiconductor device including carbon-containing electrode and method for fabricating the same |
11/27/2012 | US8319295 Use of F-based gate etch to passivate the high-k/metal gate stack for deep submicron transistor technologies |
11/27/2012 | US8319290 Trench MOS barrier schottky rectifier with a planar surface using CMP techniques |
11/27/2012 | US8319283 Laterally diffused metal oxide semiconductor (LDMOS) device with multiple gates and doped regions |
11/27/2012 | US8319281 Semiconductor device with insulated gate formed within grooved portion formed therein |
11/27/2012 | US8319277 Semiconductor device, method of manufacturing same, and apparatus for designing same |
11/27/2012 | US8319263 Magnetic tunnel junction device |
11/27/2012 | US8319260 Semiconductor devices having polysilicon gate layer patterns and methods of manufacturing the same |
11/27/2012 | US8319259 Semiconductor power switch having nanowires |
11/27/2012 | US8319257 Semiconductor device and layout design method therefor |
11/27/2012 | US8319240 Light-emitting device |
11/27/2012 | US8319230 Stackable optoelectronics chip-to-chip interconnects and method of manufacturing |
11/27/2012 | US8319229 Optical semiconductor device and method for manufacturing the same |
11/27/2012 | US8319224 EL display device and a method of manufacturing the same |
11/27/2012 | US8319223 Thin film transistor array panel using organic semiconductor and a method for manufacturing the same |
11/27/2012 | US8319219 Light-emitting device |
11/27/2012 | US8318825 Polishing pad and method of producing the same |
11/27/2012 | US8318614 Method for forming silicon nitride film, method for manufacturing nonvolatile semiconductor memory device, nonvolatile semiconductor memory device and plasma apparatus |
11/27/2012 | US8318613 Composition for manufacturing SiO2 resist layers and method of its use |
11/27/2012 | US8318612 Methods for improving the quality of group III-nitride materials and structures produced by the methods |
11/27/2012 | US8318611 Combinatorial plasma enhanced deposition techniques |
11/27/2012 | US8318610 Method for thin film device with stranded conductor |
11/27/2012 | US8318609 Method of depositing materials on a non-planar surface |
11/27/2012 | US8318608 Method of fabricating a nonvolatile charge trap memory device |
11/27/2012 | US8318607 Immersion lithography wafer edge bead removal for wafer and scanner defect prevention |
11/27/2012 | US8318606 Dielectric etching |
11/27/2012 | US8318605 Plasma treatment method for preventing defects in doped silicon oxide surfaces during exposure to atmosphere |
11/27/2012 | US8318604 Substrate comprising a nanometer-scale projection array |
11/27/2012 | US8318603 Method of forming patterns for semiconductor device |
11/27/2012 | US8318602 Nonvolatile semiconductor storage apparatus and method for manufacturing the same |
11/27/2012 | US8318601 Method for manufacturing thin film transistor and display device |
11/27/2012 | US8318598 Contacts and vias of a semiconductor device formed by a hard mask and double exposure |
11/27/2012 | US8318597 Manufacturing method of semiconductor device including Au bump on seed film |
11/27/2012 | US8318596 Pillar structure having a non-planar surface for semiconductor devices |
11/27/2012 | US8318595 Self-assembled electrical contacts |