Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2012
11/28/2012CN101958266B Method for overcoming defects of silicon chip with STI and method for constructing STI on silicon chip
11/28/2012CN101944494B Mold core fixing device of semiconductor packaging mold capable of quickly replacing mold core
11/28/2012CN101937894B Semiconductor device including through-electrode and method of manufacturing the same
11/28/2012CN101937887B Wafer structure and water processing method
11/28/2012CN101931005B Semiconductor device, method of manufacturing the same and power-supply device using the same
11/28/2012CN101930916B Method for forming groove
11/28/2012CN101916715B In-situ dry clean chamber for front end of line fabrication
11/28/2012CN101911259B Dicing/die bonding film
11/28/2012CN101894808B Electronic device and method of manufacturing the same
11/28/2012CN101887881B Interconnecting assembly, manufacture method and repairing method thereof
11/28/2012CN101884097B Structure and method of forming a topside contact to a backside terminal of a semiconductor device
11/28/2012CN101866857B Semiconductor device and manufacturing method thereof
11/28/2012CN101861409B Sputtering apparatus and film forming method
11/28/2012CN101859701B Substrate for semiconductor device, semiconductor device and manufacturing method thereof
11/28/2012CN101849209B Composition for formation of top antireflective film, and pattern formation method using the composition
11/28/2012CN101847589B Method for manufacturing a rigid power module suited for high-voltage applications
11/28/2012CN101814461B Packaging substrate structure and chip packaging structure, as well as manufacturing method thereof
11/28/2012CN101803008B Semiconductor device and method for manufacturing the same
11/28/2012CN101794800B Solid-state imaging device and electronic device
11/28/2012CN101788762B Pattern correction method, exposure mask, semiconductor device and manufacturing method of semiconductor device
11/28/2012CN101778962B Method for thin film formation
11/28/2012CN101752403B Display device and method for manufacturing the same
11/28/2012CN101740325B Cleaning device for semiconductor base material
11/28/2012CN101728242B Substrate processing apparatus
11/28/2012CN101710212B Combined para-position structure of reinforcing panel and method thereof
11/28/2012CN101681799B Erosion resistance enhanced quartz used in plasma etch chamber
11/28/2012CN101663250B In-Ga-Zn-Sn type oxide sinter and target for physical film deposition
11/28/2012CN101661892B Resin molded semiconductor device and manufacturing method thereof
11/28/2012CN101632166B Post-seed deposition process
11/28/2012CN101632162B Apparatus and method for punching out electronic component
11/28/2012CN101621079B Field effect transistor, method of manufacturing the same, and semiconductor device
11/28/2012CN101611496B Doped nanoparticle-based semiconductor junction
11/28/2012CN101582380B High-pressure thyristor and production technique thereof
11/28/2012CN101506939B Low-k damage avoidance during bevel etch processing
11/28/2012CN101501820B Method for forming conductive film, thin film transistor, panel with thin film transistor, and method for manufacturing thin film transistor
11/28/2012CN101484775B Surface inspection device
11/28/2012CN101465278B Method for manufacturing a semiconductor device
11/28/2012CN101450457B Polishing apparatus and polishing method
11/28/2012CN101427362B Method for producing an integrated circuit
11/28/2012CN101412472B 衬底输送装置 Substrate transport apparatus
11/28/2012CN101409282B Thin film transistor substrate, display device having the same and method of manufacturing the same
11/28/2012CN101395703B Method for processing, in particular, thin rear sides of a wafer, wafer-carrier arrangement and method for producing said type of wafer-carrier arrangement
11/28/2012CN101372739B Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type
11/28/2012CN101372090B Equipment for processing substrate
11/28/2012CN101369588B Thin film transistor array panel and manufacturing method thereof
11/28/2012CN101341574B Extended mainframe designs for semiconductor device manufacturing equipment
11/28/2012CN101177199B Resonance type high-speed high-precision multi-station turning table
11/28/2012CN101055425B Lithographic apparatus and device manufacturing method
11/28/2012CN101044597B Laser irradiation method, laser irradiation apparatus, and manufacturing method of semiconductor device
11/27/2012US8321821 Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same
11/27/2012US8321815 Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method
11/27/2012US8321711 Semiconductor device having a threshold voltage control function
11/27/2012US8320099 Electrostatic chuck electrical balancing circuit repair
11/27/2012US8319878 Solid-state imaging device and its production method
11/27/2012US8319867 Solid-state imager device, drive method of solid-state imager device and camera apparatus
11/27/2012US8319715 Active matrix type liquid crystal display device
11/27/2012US8319347 Electronic device package and fabrication method thereof
11/27/2012US8319339 Surface-mounted silicon chip
11/27/2012US8319334 Embedded laminated device
11/27/2012US8319328 Method of manufacturing a semiconductor device
11/27/2012US8319316 Depletion MOS transistor and enhancement MOS transistor
11/27/2012US8319315 Bipolar junction transistor devices
11/27/2012US8319314 Semiconductor device
11/27/2012US8319308 Semiconductor device and method for manufacturing of the same
11/27/2012US8319304 Light detecting apparatus
11/27/2012US8319296 Semiconductor device including carbon-containing electrode and method for fabricating the same
11/27/2012US8319295 Use of F-based gate etch to passivate the high-k/metal gate stack for deep submicron transistor technologies
11/27/2012US8319290 Trench MOS barrier schottky rectifier with a planar surface using CMP techniques
11/27/2012US8319283 Laterally diffused metal oxide semiconductor (LDMOS) device with multiple gates and doped regions
11/27/2012US8319281 Semiconductor device with insulated gate formed within grooved portion formed therein
11/27/2012US8319277 Semiconductor device, method of manufacturing same, and apparatus for designing same
11/27/2012US8319263 Magnetic tunnel junction device
11/27/2012US8319260 Semiconductor devices having polysilicon gate layer patterns and methods of manufacturing the same
11/27/2012US8319259 Semiconductor power switch having nanowires
11/27/2012US8319257 Semiconductor device and layout design method therefor
11/27/2012US8319240 Light-emitting device
11/27/2012US8319230 Stackable optoelectronics chip-to-chip interconnects and method of manufacturing
11/27/2012US8319229 Optical semiconductor device and method for manufacturing the same
11/27/2012US8319224 EL display device and a method of manufacturing the same
11/27/2012US8319223 Thin film transistor array panel using organic semiconductor and a method for manufacturing the same
11/27/2012US8319219 Light-emitting device
11/27/2012US8318825 Polishing pad and method of producing the same
11/27/2012US8318614 Method for forming silicon nitride film, method for manufacturing nonvolatile semiconductor memory device, nonvolatile semiconductor memory device and plasma apparatus
11/27/2012US8318613 Composition for manufacturing SiO2 resist layers and method of its use
11/27/2012US8318612 Methods for improving the quality of group III-nitride materials and structures produced by the methods
11/27/2012US8318611 Combinatorial plasma enhanced deposition techniques
11/27/2012US8318610 Method for thin film device with stranded conductor
11/27/2012US8318609 Method of depositing materials on a non-planar surface
11/27/2012US8318608 Method of fabricating a nonvolatile charge trap memory device
11/27/2012US8318607 Immersion lithography wafer edge bead removal for wafer and scanner defect prevention
11/27/2012US8318606 Dielectric etching
11/27/2012US8318605 Plasma treatment method for preventing defects in doped silicon oxide surfaces during exposure to atmosphere
11/27/2012US8318604 Substrate comprising a nanometer-scale projection array
11/27/2012US8318603 Method of forming patterns for semiconductor device
11/27/2012US8318602 Nonvolatile semiconductor storage apparatus and method for manufacturing the same
11/27/2012US8318601 Method for manufacturing thin film transistor and display device
11/27/2012US8318598 Contacts and vias of a semiconductor device formed by a hard mask and double exposure
11/27/2012US8318597 Manufacturing method of semiconductor device including Au bump on seed film
11/27/2012US8318596 Pillar structure having a non-planar surface for semiconductor devices
11/27/2012US8318595 Self-assembled electrical contacts