| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/11/2012 | US8329538 Shielded gate trench FET with an inter-electrode dielectric having a low-k dielectric therein |
| 12/11/2012 | US8329537 Method for fabricating rewritable three-dimensional memory device |
| 12/11/2012 | US8329536 Method for manufacturing semiconductor device with silicon nitride charge trapping film having varying hydrogen concentration |
| 12/11/2012 | US8329535 Multi-level-cell trapping DRAM |
| 12/11/2012 | US8329534 Method of forming contacts for a memory device |
| 12/11/2012 | US8329533 Stacked capacitor for double-poly flash memory |
| 12/11/2012 | US8329532 Process for the simultaneous deposition of crystalline and amorphous layers with doping |
| 12/11/2012 | US8329531 Strain memorization in strained SOI substrates of semiconductor devices |
| 12/11/2012 | US8329530 Method and system for providing contact to a first polysilicon layer in a flash memory device |
| 12/11/2012 | US8329529 Via contact structures and methods for integrated circuits |
| 12/11/2012 | US8329528 Semiconductor device and method of manufacturing semiconductor device |
| 12/11/2012 | US8329527 Methods of fomring array of nanoscopic MOSFET transistors |
| 12/11/2012 | US8329526 Cap removal in a high-k metal gate electrode structure by using a sacrificial fill material |
| 12/11/2012 | US8329525 Method for fabricating at least three metal-oxide semiconductor transistors having different threshold voltages |
| 12/11/2012 | US8329523 Array substrate for dislay device and method of fabricating the same |
| 12/11/2012 | US8329522 Method for fabricating semiconductor device |
| 12/11/2012 | US8329521 Method and device with gate structure formed over the recessed top portion of the isolation structure |
| 12/11/2012 | US8329520 Method for manufacturing semiconductor device using a laser annealing process |
| 12/11/2012 | US8329518 Methods for manufacturing thin film transistor array substrate and display panel |
| 12/11/2012 | US8329517 Pixel structure and method for manufacturing the same |
| 12/11/2012 | US8329516 Methods of manufacturing semiconductor devices |
| 12/11/2012 | US8329515 eFUSE enablement with thin polysilicon or amorphous-silicon gate-stack for HKMG CMOS |
| 12/11/2012 | US8329514 Methods for forming antifuses with curved breakdown regions |
| 12/11/2012 | US8329513 Methods of forming a memory array with a pair of memory-cell strings to a single conductive pillar |
| 12/11/2012 | US8329512 Patterning method for high density pillar structures |
| 12/11/2012 | US8329511 Nitride crystal with removable surface layer and methods of manufacture |
| 12/11/2012 | US8329510 Method of making a semiconductor chip assembly with a post/base heat spreader with an ESD protection layer |
| 12/11/2012 | US8329509 Packaging process to create wettable lead flank during board assembly |
| 12/11/2012 | US8329508 Semiconductor die packages using thin dies and metal substrates |
| 12/11/2012 | US8329507 Semiconductor package, integrated circuit cards incorporating the semiconductor package, and method of manufacturing the same |
| 12/11/2012 | US8329506 Semiconductor device and method for manufacturing the same |
| 12/11/2012 | US8329503 Photovoltaic solar concentrator |
| 12/11/2012 | US8329502 Conformal coating of highly structured surfaces |
| 12/11/2012 | US8329501 High-throughput printing of semiconductor precursor layer from inter-metallic microflake particles |
| 12/11/2012 | US8329500 Method of manufacturing photovoltaic device |
| 12/11/2012 | US8329499 Method of forming lateral overflow drain and channel stop regions in image sensors |
| 12/11/2012 | US8329498 Method of manufacturing a semiconductor wafer comprising an integrated optical filter |
| 12/11/2012 | US8329497 Backside illuminated imaging sensor with improved infrared sensitivity |
| 12/11/2012 | US8329496 Dithered scanned laser beam for scribing solar cell structures |
| 12/11/2012 | US8329495 Method of forming photovoltaic modules |
| 12/11/2012 | US8329494 Method for manufacturing solar cell |
| 12/11/2012 | US8329493 Stretchable circuit configuration |
| 12/11/2012 | US8329492 Micro electronic device and method for fabricating micro electromechanical system resonator thereof |
| 12/11/2012 | US8329491 Mechanical quantity sensor and method of manufacturing the same |
| 12/11/2012 | US8329490 Method of producing a solid-state image pickup apparatus, solid-state image pickup apparatus, and electronic apparatus |
| 12/11/2012 | US8329489 Method for manufacturing semiconductor light emitting device |
| 12/11/2012 | US8329488 Method of fabricating semiconductor substrate and method of fabricating light emitting device |
| 12/11/2012 | US8329486 Thin film transistor array panel and method for manufacturing the same |
| 12/11/2012 | US8329485 LED phosphor ink composition for ink-jet printing |
| 12/11/2012 | US8329484 Phosphor with Ce3+/Ce3+, Li+ doped luminescent materials |
| 12/11/2012 | US8329483 Bi-section semiconductor laser device, method for manufacturing the same, and method for driving the same |
| 12/11/2012 | US8329482 White-emitting LED chips and method for making same |
| 12/11/2012 | US8329481 Manufacturing method of nitride semiconductor light emitting elements |
| 12/11/2012 | US8329479 Information managing method, information managing apparatus and substrate processing system |
| 12/11/2012 | US8329478 Magnetic tunnel junction device and method for manufacturing the same |
| 12/11/2012 | US8329361 Reflective mask blank, method of manufacturing a reflective mask blank and method of manufacturing a reflective mask |
| 12/11/2012 | US8329360 Method and apparatus of providing overlay |
| 12/11/2012 | US8329123 Method for preparing of cerium oxide powder for chemical mechanical polishing and method for preparing of chemical mechanical polishing slurry using the same |
| 12/11/2012 | US8329054 Plasma processing apparatus and plasma processing method |
| 12/11/2012 | US8329051 Method for forming stair-step structures |
| 12/11/2012 | US8328982 Low-temperature, converging, reactive gas source and method of use |
| 12/11/2012 | US8328981 Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generated |
| 12/11/2012 | US8328980 Apparatus and methods for enhanced fluid delivery on bevel etch applications |
| 12/11/2012 | US8328940 Apparatus for transferring a substrate |
| 12/11/2012 | US8328939 Diffuser plate with slit valve compensation |
| 12/11/2012 | US8328928 Metal nanoink and process for producing the metal nanoink, and die bonding method and die bonding apparatus using the metal nanoink |
| 12/11/2012 | US8328892 High concentrate aqueous solution obtained by dissolving powdered 1 H-benzotriazole in the presence of an anionic surfactant, preferably sodium octyl sulfate, and optionally a polyacrylic acid; filtering out microparticles; improved storage stability and wear resistance; chemical mechanical polishing |
| 12/11/2012 | US8328585 Modulated deposition process for stress control in thick TiN films |
| 12/11/2012 | US8328494 In vacuum optical wafer heater for cryogenic processing |
| 12/11/2012 | US8327795 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus |
| 12/07/2012 | CA2793467A1 Method of manufacturing silicon carbide semiconductor device |
| 12/06/2012 | WO2012167282A1 High-efficiency silicon-compatible photodetectors based on ge quantumdots and ge/si hetero-nanowires |
| 12/06/2012 | WO2012167195A2 Chamber exhaust in-situ cleaning for processing apparatuses |
| 12/06/2012 | WO2012167141A2 Metal and silicon containing capping layers for interconnects |
| 12/06/2012 | WO2012167027A2 Protective layer for protecting tsv tips during thermo-compressive bonding |
| 12/06/2012 | WO2012166945A2 Vertical diodes for non-volatile memory device |
| 12/06/2012 | WO2012166911A2 Low void solder joint for multiple reflow applications |
| 12/06/2012 | WO2012166902A1 SEMI-AQUEOUS POLYMER REMOVAL COMPOSITIONS WITH ENHANCED COMPATIBILITY TO COPPER, TUNGSTEN, AND POROUS LOW-ĸ DIELECTRICS |
| 12/06/2012 | WO2012166856A2 Substrate cleaning method and substrate cleaning device |
| 12/06/2012 | WO2012166850A2 Methods for repairing low-k dielectrics using carbon plasma immersion |
| 12/06/2012 | WO2012166770A2 Heated wafer carrier profiling |
| 12/06/2012 | WO2012166745A1 Thick cubic boron nitride (cbn) layer and manufacturing process therefor |
| 12/06/2012 | WO2012166732A2 Method of forming high growth rate, low resistivity germanium film on silicon substrate |
| 12/06/2012 | WO2012166727A2 Substrate freeze dry apparatus and method |
| 12/06/2012 | WO2012166686A2 Electronic, optical and/or mechanical apparatus and systems and methods for fabricating same |
| 12/06/2012 | WO2012166618A2 Capping layer for reduced outgassing |
| 12/06/2012 | WO2012166528A2 Refillable ampoule with purge capability |
| 12/06/2012 | WO2012166483A2 Apparatuses including stair-step structures and methods of forming the same |
| 12/06/2012 | WO2012166451A2 Conductive structures, systems and devices including conductive structures and related methods |
| 12/06/2012 | WO2012166446A1 Non-polished glass wafer, thinning system and method for using the non-polished glass wafer to thin a semiconductor wafer |
| 12/06/2012 | WO2012166362A1 Gas distribution system for ceramic showerhead of plasma etch reactor |
| 12/06/2012 | WO2012166322A1 Apparatus and methods for supporting and controlling a substrate |
| 12/06/2012 | WO2012166313A2 Apparatus and methods for positioning a substrate using capacitive sensors |
| 12/06/2012 | WO2012166298A1 Low-temperature methods for spontaneous material spalling |
| 12/06/2012 | WO2012166265A2 Apparatus and methods for dry etch with edge, side and back protection |
| 12/06/2012 | WO2012166264A2 Dynamic ion radical sieve and ion radical aperture for an inductively coupled plasma (icp) reactor |
| 12/06/2012 | WO2012166256A1 Electrostatic chuck aln dielectric repair |
| 12/06/2012 | WO2012166052A1 Method and systems for semiconductor chip pick & transfer and bonding |
| 12/06/2012 | WO2012165903A2 Semiconductor light-emitting device, method for manufacturing same, and semiconductor light-emitting device package and laser-processing apparatus comprising same |
| 12/06/2012 | WO2012165898A2 Apparatus and method for manufacturing ingot |