Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2012
12/06/2012US20120309204 Gas distribution showerhead for inductively coupled plasma etch reactor
12/06/2012US20120309203 Plasma etching method and storage medium
12/06/2012US20120309202 Method for manufacturing semiconductor device
12/06/2012US20120309201 Critical dimension reduction and roughness control
12/06/2012US20120309200 Method for fabricating a bottom oxide layer in a trench
12/06/2012US20120309199 Manufacturing method for dual damascene structure
12/06/2012US20120309198 Use of spectrum to synchronize rf switching with gas switching during etch
12/06/2012US20120309197 Methods of forming semiconductor structures
12/06/2012US20120309196 Manufacturing method for dual damascene structure
12/06/2012US20120309195 Method for manufacturing semiconductor device
12/06/2012US20120309194 Method for providing high etch rate
12/06/2012US20120309193 Palladium precursor composition
12/06/2012US20120309192 Semiconductor process
12/06/2012US20120309191 Method of manufacturing semiconductor device
12/06/2012US20120309190 Copper interconnect formation
12/06/2012US20120309189 Methods for fabricating semiconductor devices
12/06/2012US20120309188 Method to improve adhesion for a silver filled oxide via for a non-volatile memory device
12/06/2012US20120309187 Conformal Coining of Solder Joints in Electronic Packages
12/06/2012US20120309186 Conductive structure for a semiconductor integrated circuit and method for forming the same
12/06/2012US20120309185 Method of forming metal gate structure
12/06/2012US20120309184 Semiconductor device and method of manufacturing the same
12/06/2012US20120309183 Semiconductor device and method of manufacturing the same
12/06/2012US20120309182 Method of Forming Sidewall Spacers Having Different Widths Using a Non-Conformal Deposition Process
12/06/2012US20120309181 Process for depositing electrode with high effective work function
12/06/2012US20120309180 Method of forming a retrograde material profile using ion implantation
12/06/2012US20120309179 Substrate treating apparatus and method of treating substrate
12/06/2012US20120309178 Method of manufacturing free-standing substrate
12/06/2012US20120309177 Trenched power semiconductor structure with reduced gate impedance and fabrication method thereof
12/06/2012US20120309176 Semiconductor device and manufacturing method thereof
12/06/2012US20120309175 Vapor-phase growth semiconductor substrate support susceptor, epitaxial wafer manufacturing apparatus, and epitaxial wafer manufacturing method
12/06/2012US20120309174 Method of manufacturing semiconductor device
12/06/2012US20120309173 Isolation for nanowire devices
12/06/2012US20120309172 Epitaxial Lift-Off and Wafer Reuse
12/06/2012US20120309171 Method for fabricating semiconductor device
12/06/2012US20120309170 Expandable film, dicing film, and method of producing semiconductor device
12/06/2012US20120309169 Laser processing method for wafer
12/06/2012US20120309168 Laser beam processing method for a wafer
12/06/2012US20120309167 Method of fabricating semiconductor device
12/06/2012US20120309166 Process for forming shallow trench isolation structure
12/06/2012US20120309165 Semiconductor device having gate trench and manufacturing method thereof
12/06/2012US20120309164 Method for manufacturing semiconductor device
12/06/2012US20120309163 Method of forming titanium oxide film having rutile crystalline structure
12/06/2012US20120309162 Method for ald deposition rate enhancement
12/06/2012US20120309160 Method for fabricating a dram capacitor
12/06/2012US20120309158 Method for fabricating semiconductor device
12/06/2012US20120309157 Semiconductor device and method for manufacturing the same
12/06/2012US20120309156 Method for manufacturing a semiconductor memory device
12/06/2012US20120309155 Semiconductor process
12/06/2012US20120309154 Vertical junction field effect transistor with mesa termination and method of making the same
12/06/2012US20120309153 Method to prevent surface decomposition of iii-v compound semiconductors
12/06/2012US20120309152 Method of Fabricating Semiconductor Devices
12/06/2012US20120309151 Method of Fabricating Semiconductor Devices
12/06/2012US20120309150 Method of fabricating semiconductor devices
12/06/2012US20120309149 Cross-hair cell based floating body device
12/06/2012US20120309148 Method for manufacturing a power semiconductor device
12/06/2012US20120309147 Semiconductor Component and Method for Producing a Semiconductor Component
12/06/2012US20120309146 Semiconductor device and method of manufacturing the same
12/06/2012US20120309145 Methods of manufacturing semiconductor devices
12/06/2012US20120309144 Methods of forming mosfet devices using nitrogen-injected oxide layers to form gate insulating layers having different thicknesses
12/06/2012US20120309143 Semiconductor device and manufacturing method thereof
12/06/2012US20120309142 Transistors for replacing metal-oxide-semiconductor field-effect transistors in nanoelectronics
12/06/2012US20120309141 Hetero-structured inverted-t field effect transistor
12/06/2012US20120309140 Manufacturing method for thin film semiconductor device, manufacturing method for thin film semiconductor array substrate, method of forming crystalline silicon thin film, and apparatus for forming crystalline silicon thin film
12/06/2012US20120309139 Method for manufacturing fin field-effect transistor
12/06/2012US20120309138 Semiconductor device and method of manufacturing the same
12/06/2012US20120309137 Method for fabricating mosfet on silicon-on-insulator with internal body contact
12/06/2012US20120309136 Manufacture methods of thin film transistor and array substrate and mask
12/06/2012US20120309135 Through-Substrate Vias
12/06/2012US20120309134 Implantable Microelectronic Device and Method of Manufacture
12/06/2012US20120309133 Electronic component mounting method
12/06/2012US20120309132 Curvilinear heat spreader/lid with improved heat dissipation
12/06/2012US20120309131 Semiconductor device and method of manufacturing same
12/06/2012US20120309130 Method of Manufacturing a Semiconductor Device
12/06/2012US20120309129 Semiconductor package for discharging heat and method for fabricating the same
12/06/2012US20120309128 Disabling electrical connections using pass-through 3d interconnects and associated systems and methods
12/06/2012US20120309127 Method for fabricating 3d integrated circuit device using interface wafer as permanent carrier
12/06/2012US20120309123 Method for manufacturing quantum cascade laser
12/06/2012US20120309121 Method of making semiconductor optical integrated device
12/06/2012US20120309118 Silicon wafer alignment method used in through-silicon-via interconnection
12/06/2012US20120309117 Method for manufacturing semiconductor device
12/06/2012US20120309116 Substrate Analysis Using Surface Acoustic Wave Metrology
12/06/2012US20120309115 Apparatus and methods for supporting and controlling a substrate
12/06/2012US20120309114 Methods for repairing low-k dielectrics using carbon plasma immersion
12/06/2012US20120309113 Quantum Tunneling Devices and Circuits with Lattice-Mismatched Semiconductor Structures
12/06/2012US20120309112 Ferroelectric memory device and fabrication process thereof, fabrication process of a semiconductor device
12/06/2012US20120308356 Substrate processing apparatus, substrate transfer method and substrate transfer device
12/06/2012US20120308346 Parallel single substrate processing system loader
12/06/2012US20120308341 Substrate processing apparatus and method of controlling substrate processing apparatus
12/06/2012US20120308177 Process for fabricating an integrated circuit comprising at least one coplanar waveguide
12/06/2012US20120308173 Method for manufacturing semiconductor optical modulator and semiconductor optical modulator
12/06/2012US20120308152 Apparatus for Forming Image for Pattern Matching
12/06/2012US20120307856 Semiconductor laser device and manufacturing method thereof
12/06/2012US20120307854 Semiconductor laser manufacturing method and semiconductor laser
12/06/2012US20120307581 Semiconductor device on which wafer-level burn-in test is performed and manufacturing method thereof
12/06/2012US20120307569 Printed Non-Volatile Memory
12/06/2012US20120307555 Phase change memory structures and methods
12/06/2012US20120307552 Process of producing a resistivity-change memory cell intended to function in a high-temperature environment
12/06/2012US20120307550 Asymmetric Static Random Access Memory Cell with Dual Stress Liner
12/06/2012US20120307541 Power converter, semiconductor device, and method for manufacturing power converter
12/06/2012US20120307534 Compound semiconductor device and method for manufacturing the same
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