Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2012
12/06/2012WO2012165861A2 Substrate processing system and substrate processing method using the same
12/06/2012WO2012165853A2 Etching treatment apparatus
12/06/2012WO2012165822A2 Apparatus and method for forming an encapsulation material for a light-emitting device
12/06/2012WO2012165612A1 Organic semiconductor material, and organic electronics device
12/06/2012WO2012165604A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device
12/06/2012WO2012165583A1 Cvd device, and cvd film production method
12/06/2012WO2012165551A1 Pressure-sensitive tape and semiconductor wafer-processing method
12/06/2012WO2012165513A1 Sic semiconductor device and process for producing same
12/06/2012WO2012165507A1 Phenolic resin and material for forming underlayer film for lithography
12/06/2012WO2012165473A1 Polymer and method for producing same
12/06/2012WO2012165416A1 Semiconductor device
12/06/2012WO2012165403A1 Organic thin film, manufacturing method therefor, and organic transistor using said thin film
12/06/2012WO2012165377A1 Method for treating substrate, device for treating substrate and storage medium
12/06/2012WO2012165376A1 Polishing agent and polishing method
12/06/2012WO2012165375A1 Resin composition, semiconductor device using same, and method of manufacturing semiconductor device
12/06/2012WO2012165344A1 Integrated circuit inspection device
12/06/2012WO2012165329A1 Trench gate power semiconductor device and method for manufacturing same
12/06/2012WO2012165313A1 Mounting method and mounting device
12/06/2012WO2012165310A1 Fluid pressure imprint device and imprint method
12/06/2012WO2012165288A1 Method for manufacturing solar cell
12/06/2012WO2012165273A1 Semiconductor device
12/06/2012WO2012165263A1 Method for forming gate insulating film, and device for forming gate insulating film
12/06/2012WO2012165205A1 Exposure device
12/06/2012WO2012165201A1 Easily releasable adhesive film
12/06/2012WO2012165177A1 Etching liquid composition and etching method
12/06/2012WO2012165174A1 Device and method for detecting degradation of resistance heating heater
12/06/2012WO2012165166A1 Method for manufacturing semiconductor device, substrate processing method, and substrate processing apparatus
12/06/2012WO2012165142A1 Alignment device, and alignment method
12/06/2012WO2012165141A1 Alignment device, and alignment method
12/06/2012WO2012165124A1 Method for manufacturing molybdenum oxide-containing thin film, starting material for forming molybdenum oxide-containing thin film, and molybdenum amide compound
12/06/2012WO2012165110A1 Ferroelectric film and piezoelectric element provided therewith
12/06/2012WO2012165108A1 Method for producing a silicon carbide substrate
12/06/2012WO2012165047A1 Oxide-type semiconductor material and sputtering target
12/06/2012WO2012165030A1 Bump position derivation method, bump forming position correction method, bump bonder, and bump appearance inspection device
12/06/2012WO2012165016A1 Cmp polishing liquid and method of polishing semiconductor substrate
12/06/2012WO2012165012A1 Resin composition
12/06/2012WO2012165008A1 Silicon carbide semiconductor device and method for manufacturing same
12/06/2012WO2012164994A1 Drawer device and storage device
12/06/2012WO2012164989A1 Semiconductor device and method for manufacturing same
12/06/2012WO2012164957A1 Electronic component mounting method, electronic component loading device and electronic component mounting system
12/06/2012WO2012164931A1 Resin application device and resin application method
12/06/2012WO2012164882A1 Substrate for display device and display device comprising same
12/06/2012WO2012164865A1 Bonded structure
12/06/2012WO2012164857A1 Plasma treatment device, conveyance carrier, and plasma treatment method
12/06/2012WO2012164849A1 Method for producing protein semiconductor
12/06/2012WO2012164848A1 Wire saw device, workpiece cutting method, and manufacturing method for wafer
12/06/2012WO2012164847A1 Compound semiconductor substrate, method for manufacturing same, and light emitting element using compound semiconductor substrate
12/06/2012WO2012164827A1 Vapor phase epitaxy method and light emitting element substrate manufacturing method
12/06/2012WO2012164824A1 Method for manufacturing microstructure, and microstructured die
12/06/2012WO2012164822A1 Method for manufacturing bonded wafer, and bonded soi wafer
12/06/2012WO2012164820A1 Method for adjusting position of polishing head in heightwise direction, and method for polishing workpiece
12/06/2012WO2012164817A1 Semiconductor element and method of manufacturing thereof
12/06/2012WO2012164750A1 Nitride electronic device and method for manufacturing nitride electronic device
12/06/2012WO2012164679A1 Biomolecule information analysis device
12/06/2012WO2012164649A1 Laser machining method
12/06/2012WO2012164641A1 Near-field optical defect inspection device
12/06/2012WO2012164631A1 Semiconductor print test method, program, and device for same
12/06/2012WO2012164626A1 Thin film semiconductor device manufacturing method, thin film semiconductor array substrate manufacturing method, crystal silicon thin film forming method, and crystal silicon thin film forming device
12/06/2012WO2012164455A1 Device for treating surfaces of wafer-shaped articles
12/06/2012WO2012164454A1 Method and apparatus for liquid treatment of wafer shaped articles
12/06/2012WO2012164163A1 A method and a structure for protecting a passivating layer
12/06/2012WO2012164082A1 Process for manufacturing a semiconductor device and an intermediate product for the manufacture of a semiconductor device
12/06/2012WO2012163854A1 Device and method for producing highly porous, crystalline surface coatings
12/06/2012WO2012163783A1 Method for producing an mos transistor
12/06/2012WO2012163702A1 Method for making patterns on the surface of a substrate using block copolymers
12/06/2012WO2012163676A1 Method for placing a semiconductor wafer on a susceptor at a specified angular orientation
12/06/2012WO2012163599A1 Semiconductor component and corresponding production method
12/06/2012WO2012163429A1 Process for manufacturing a semiconductor device and an intermediate product for the manufacture of a semiconductor device
12/06/2012WO2012163299A1 Epitaxial wafer and method for forming the same, and method for forming semiconductor structure
12/06/2012WO2012163154A1 Method for cleaning wafer after chemical-mechanical planarization
12/06/2012WO2012163049A1 Semiconductor structure and method for forming the same
12/06/2012WO2012163048A1 Semiconductor structure and method for forming the same
12/06/2012WO2012163047A1 Semiconductor structure and method for forming the same
12/06/2012WO2012163046A1 Semiconductor structure and method for forming the same
12/06/2012WO2012162963A1 Method for manufacturing semiconductor structure
12/06/2012WO2012162943A1 Method for manufacturing fin field-effect transistor
12/06/2012WO2012162934A1 Method for forming well region and semiconductor substratum
12/06/2012WO2012162914A1 Substrate transfer system and substrate transfer method
12/06/2012WO2012142408A3 Substrate holders and methods of substrate mounting
12/06/2012WO2012141823A3 Memory cells, methods of forming memory cells and methods of forming memory arrays
12/06/2012WO2012135363A3 Integrated circuit having chemically modified spacer surface
12/06/2012WO2012134230A3 Printing device and printing method
12/06/2012WO2012125610A3 Methods of forming at least one conductive element, methods of forming a semiconductor structure, methods of forming a memory cell and related semiconductor structures
12/06/2012WO2012125317A3 Methods and apparatus for conformal doping
12/06/2012WO2012121952A3 Electrode configurations for semiconductor devices
12/06/2012WO2012118952A3 Apparatus and process for atomic layer deposition
12/06/2012WO2012118947A3 Apparatus and process for atomic layer deposition
12/06/2012WO2012118899A3 Offset electrode tft structure
12/06/2012WO2012118616A3 Method and system for forming patterns using charged particle beam lithography
12/06/2012WO2012116259A3 Dry chemical cleaning for gate stack preparation
12/06/2012WO2012116207A3 Charge storage apparatus, systems and methods
12/06/2012WO2012109441A3 Wide process range library for metrology
12/06/2012WO2012108654A3 Fume-removing apparatus, and apparatus for manufacturing semiconductors using same
12/06/2012WO2012102892A3 Plasma treatment of silicon nitride and silicon oxynitride
12/06/2012US20120309277 Substrate holding apparatus, polishing apparatus, and polishing method
12/06/2012US20120309270 Polishing pad
12/06/2012US20120309208 Method for manufacturing semiconductor device
12/06/2012US20120309207 Fabrication method of semiconductor device
12/06/2012US20120309206 Stoichiometry Control Of Transition Metal Oxides In Thin Films
12/06/2012US20120309205 Capping layer for reduced outgassing
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