Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2013
03/14/2013WO2012154373A3 Surface dose retention of dopants by pre-amorphization and post-implant passivation treatments
03/14/2013WO2012151431A3 Wafer container with particle shield
03/14/2013WO2012148801A3 Semiconductor substrate processing system
03/14/2013WO2012148353A9 Substrate comprising si-base and inas-layer
03/14/2013WO2012145336A3 Adaptively tracking spectrum features for endpoint detection
03/14/2013WO2012145130A3 Select devices
03/14/2013WO2012142382A3 Dmos transistor with a slanted super junction drift structure
03/14/2013WO2012142374A3 Compositions and methods for selective polishing of silicon nitride materials
03/14/2013WO2012135036A3 Methods and systems for laser processing a workpiece using a plurality of tailored laser pulse shapes
03/14/2013WO2012128843A3 Improved sidewall image transfer process
03/14/2013WO2012125606A3 Wireless probe card verification system and method
03/14/2013WO2012122052A3 Methods for contact clean
03/14/2013US20130065404 Carbosilane Precursors For Low Temperature Film Deposition
03/14/2013US20130065403 Wafer carrier with thermal features
03/14/2013US20130065402 Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium
03/14/2013US20130065401 Methods for depositing metal-polymer composite materials atop a substrate
03/14/2013US20130065400 Etching method
03/14/2013US20130065399 Plasma processing method
03/14/2013US20130065398 Dry metal etching method
03/14/2013US20130065397 Methods to increase pattern density and release overlay requirement by combining a mask design with special fabrication processes
03/14/2013US20130065396 Apparatus including gas distribution member supplying process gas and radio frequency (rf) power for plasma processing
03/14/2013US20130065395 New metal precursors for semiconductor applications
03/14/2013US20130065394 Process for Forming Contact Plugs
03/14/2013US20130065393 Methods of forming self-aligned through silicon via
03/14/2013US20130065392 Method for forming a silicide layer at the bottom of a hole and device for implementing said method
03/14/2013US20130065391 Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
03/14/2013US20130065390 Chips having rear contacts connected by through vias to front contacts
03/14/2013US20130065389 Method of manufacturing semiconductor device
03/14/2013US20130065388 Substrate structure with compliant bump and manufacturing method thereof
03/14/2013US20130065387 Method and structure of monolithically integrated esd supperssion device
03/14/2013US20130065386 Multiple mold structure methods of manufacturing vertical memory devices
03/14/2013US20130065385 Method for preparing spacer to reduce coupling interference in mosfet
03/14/2013US20130065384 Method for manufacturing silicon carbide semiconductor device
03/14/2013US20130065383 Fabrication methods for T-gate and inverted L-gate structure for high frequency devices and circuits
03/14/2013US20130065382 Method of manufacturing silicon carbide semiconductor device
03/14/2013US20130065381 Vertical-type semiconductor devices and methods of manufacturing the same
03/14/2013US20130065380 Methods for manufacturing integrated circuit devices having features with reduced edge curvature
03/14/2013US20130065379 Method for manufacturing a semiconductor device
03/14/2013US20130065378 Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
03/14/2013US20130065376 Semiconductor capacitor
03/14/2013US20130065375 Methods of Forming Semiconductor Devices Having Capacitor and Via Contacts
03/14/2013US20130065374 Fluorine Implant Under Isolation Dielectric Structures to Improve Bipolar Transistor Performance and Matching
03/14/2013US20130065373 Methods and Systems for Forming Implanted Doped Regions for a Semiconductor Device Using Reduced Temperature Ion Implantation
03/14/2013US20130065372 Method for decreasing polysilicon gate resistance in a carbon co-implantation process
03/14/2013US20130065371 Methods for fabricating integrated circuits
03/14/2013US20130065370 Method for Fabricating Field Effect Transistor Devices with High-Aspect Ratio Mask
03/14/2013US20130065369 Three dimensional semiconductor memory device and method of fabricating the same
03/14/2013US20130065368 Non-volatile semiconductor device and method of fabricating embedded non-volatile semiconductor memory device with sidewall gate
03/14/2013US20130065367 Methods of Forming Highly Scaled Semiconductor Devices Using a Reduced Number of Spacers
03/14/2013US20130065366 Soi integrated circuit comprising adjacent cells of different types
03/14/2013US20130065365 Method for Manufacturing Semiconductor Substrate of Large-power Device
03/14/2013US20130065364 Manufacturing method of semiconductor device
03/14/2013US20130065363 Method for manufacturing a chip packaging structure
03/14/2013US20130065362 Flip chip package manufacturing method
03/14/2013US20130065361 Chip package structure and method for manufacturing the same
03/14/2013US20130065360 Method for producing chip stacks, and a carrier for carrying out the method
03/14/2013US20130065349 Deposition of Germanium Film
03/14/2013US20130065346 Reticle and manufacturing method of solid-state image sensor
03/14/2013US20130065344 Process of Forming a Microphone Using Support Member
03/14/2013US20130065343 Method for etching material longitudinally spaced from etch mask
03/14/2013US20130065341 Method for fabricating stacked nitride-compound semiconductor structure and method for fabricating nitride-compound semiconductor light emmiting device
03/14/2013US20130065339 Array substrate for liquid crystal display device and method of fabricating the same
03/14/2013US20130065337 Method for fabricating group-iii nitride semiconductor laser device
03/14/2013US20130065336 Method for fabricating group-iii nitride semiconductor laser device
03/14/2013US20130065334 Method of manufacturing laser diode device
03/14/2013US20130065330 Semiconductor integrated circuit device and method of manufacturing same
03/14/2013US20130065329 Superior Integrity of High-K Metal Gate Stacks by Preserving a Resist Material Above End Caps of Gate Electrode Structures
03/14/2013US20130065328 Focus control method for photolithography
03/14/2013US20130065326 Method for manufacturing semiconductor device
03/14/2013US20130064500 Semiconductor Laser with Test Pads
03/14/2013US20130064491 Optical modulator
03/14/2013US20130064261 Solid State Laser Device Using a Selected Crystal Orientation in Non-Polar or Semi-Polar GaN Containing Materials and Methods
03/14/2013US20130064017 Concurrent operation of plural flash memories
03/14/2013US20130064012 Semiconductor device and method of manufacturing semiconductor device
03/14/2013US20130064011 Stt-mram cell structure incorporating piezoelectric stress material
03/14/2013US20130064010 Memory cell having nonmagnetic filament contact and methods of operating and fabricating the same
03/14/2013US20130064005 Tunnel transistor, logical gate comprising the transistor, static random-access memory using the logical gate and method for making such a tunnel transistor
03/14/2013US20130064001 Resistance change nonvolatile memory device, semiconductor device, and method of manufacturing resistance change nonvolatile memory device
03/14/2013US20130063917 Printed circuit board including under-fill dam and fabrication method thereof
03/14/2013US20130063800 Mirror driving apparatus, method of driving same and method of manufacturing same
03/14/2013US20130063675 Thin film transistor substrate
03/14/2013US20130063329 Semiconductor device, display device, and method for manufacturing semiconductor device
03/14/2013US20130063328 Semiconductor device
03/14/2013US20130062996 Mems device fabricated with integrated circuit
03/14/2013US20130062839 Apparatus for treating surfaces of wafer-shaped articles
03/14/2013US20130062789 Manufacturing a filling of a gap region
03/14/2013US20130062786 Solder mask with anchor structures
03/14/2013US20130062785 Transistor structure and related transistor packaging method thereof
03/14/2013US20130062783 Chip packaging structure and manufacturing method for the same
03/14/2013US20130062782 Stacked semiconductor devices and fabrication method/equipment for the same
03/14/2013US20130062774 Semiconductor Device and Method for Forming the Same
03/14/2013US20130062773 Contact for a non-volatile memory and method therefor
03/14/2013US20130062772 Semiconductor device and method for fabricating the same
03/14/2013US20130062771 Design method of wiring layout, semiconductor device, program for supporting design of wiring layout, and method for manufacturing semiconductor device
03/14/2013US20130062769 Microstructure Modification in Copper Interconnect Structures
03/14/2013US20130062768 Method for the production of a substrate having a coating comprising copper, and coated substrate and device prepared by this method
03/14/2013US20130062761 Packaging Methods and Structures for Semiconductor Devices
03/14/2013US20130062760 Packaging Methods and Structures Using a Die Attach Film
03/14/2013US20130062757 No Flow Underfill or Wafer Level Underfill and Solder Columns
03/14/2013US20130062756 Substrate structure with compliant bump and manufacturing method thereof
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