H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1988
06/01/1988	EP0269349A2 Method of making an article comprising a buried SiO2 layer
06/01/1988	EP0269294A1 Method of manufacturing a bonded structure type semiconductor substrate
06/01/1988	EP0269235A2 High density high speed read only semiconductor memory device
06/01/1988	EP0269225A2 Thin film electrical devices with amorphous carbon electrodes and method of making same
06/01/1988	EP0269219A2 Improved photolithography process using two photoresist layers for device fabrication
06/01/1988	EP0269211A2 Semiconductor device having a metallic layer
06/01/1988	EP0269181A2 Variable shaped spot electron beam pattern generator
06/01/1988	EP0269128A2 Method for accurate suction/removal detection and suction/transfer apparatus for practicing the same
06/01/1988	EP0269097A2 Vacuum tweezers
06/01/1988	EP0269095A2 Integrated semiconductor circuit with at least two planes made of aluminium or aluminium compound and method of manufacturing the same
06/01/1988	EP0269063A2 Mullite ceramic multi-layered substrate and process for producing the same
06/01/1988	EP0269019A2 Method for producing a semiconductor device
06/01/1988	EP0269008A2 Semiconductor device with improved passivation film and process of fabrication thereof
06/01/1988	EP0268971A2 Electrical interconnect support system with low dielectric constant
06/01/1988	EP0268941A1 MOS field-effect transistor structure with extremely flat source/drain regions and silicides connection regions, and method of manufacturing these within an intergrated circuit
06/01/1988	EP0268859A2 Method of dividing semiconductor wafers
06/01/1988	EP0268654A1 Method for fabricating devices using chemical vapour deposition, and devices formed thereby
06/01/1988	EP0268599A1 Semi-conductor component
06/01/1988	EP0268595A1 Pattern transfer process for fabricating integrated-circuit devices.
06/01/1988	DE3739450A1 Verfahren zum ausbilden einer dotierten verbindungshalbleitereinkristallschicht A method of forming a doped compound semiconductor single crystal layer
06/01/1988	CN87105937A Surface treatment method of semiconductor direct bonding
06/01/1988	CN85100569B Single source vacuum deposit method to make vario-refraction-index film
05/1988
05/31/1988	US4748646 X-ray lithography system
05/31/1988	US4748591 Semiconductor memory
05/31/1988	US4748538 Semiconductor module
05/31/1988	US4748494 Lead arrangement for reducing voltage variation
05/31/1988	US4748492 Read only memory
05/31/1988	US4748491 Redundant circuit of semiconductor device and method of producing same
05/31/1988	US4748489 Integrated circuit semiconductor device having improved isolation region
05/31/1988	US4748488 Master-slice-type semiconductor integrated circuit device
05/31/1988	US4748487 Semiconductor memory device
05/31/1988	US4748485 Opposed dual-gate hybrid structure for three-dimensional integrated circuits
05/31/1988	US4748484 Heterojunction field effect transistor
05/31/1988	US4748482 Support member
05/31/1988	US4748478 Projection exposure apparatus
05/31/1988	US4748407 Method and apparatus for measuring time dependent signals with a particle probe
05/31/1988	US4748335 Of a specimen
05/31/1988	US4748327 Method of inspecting masks and apparatus thereof
05/31/1988	US4748315 Molecular beam source
05/31/1988	US4748135 Method of manufacturing a semiconductor device by vapor phase deposition using multiple inlet flow control
05/31/1988	US4748134 Isolation process for semiconductor devices
05/31/1988	US4748133 Deposition of amorphous silicon for the formation of interlevel dielectrics in semiconductor memory devices
05/31/1988	US4748132 Micro fabrication process for semiconductor structure using coherent electron beams
05/31/1988	US4748131 Metal oxide semiconductor
05/31/1988	US4748103 Mask-surrogate semiconductor process employing dopant protective region
05/31/1988	US4748085 Multilayer ceramic circuit board fired at a low temperature
05/31/1988	US4748053 Method of forming a uniform resist film by selecting a duration of rotation
05/31/1988	US4748050 Process for preparing thin film having high light transmittance
05/31/1988	US4747928 Substrate processing apparatus including wafer transporting and substrate cooling mechanisms
05/31/1988	US4747909 Method for manufacturing a perpendicular sidewalled metal layer on a substrate
05/31/1988	US4747908 Method of making a hermetically sealed multilayer electrical feedthru
05/31/1988	US4747907 Metal etching process with etch rate enhancement
05/31/1988	US4747608 Wafer chuck
05/31/1988	US4747533 Bonding method and apparatus
05/31/1988	US4747483 Protective chip carrier handler
05/31/1988	US4747368 Chemical vapor deposition apparatus with manifold enveloped by cooling means
05/31/1988	CA1237538A1 Lateral bipolar transistor
05/31/1988	CA1237537A1 Method of making mosfets using silicate glass layer as gate edge masking for ion implantation
05/31/1988	CA1237535A1 Process for producing multilayer ceramic circuit board with copper
05/31/1988	CA1237514A1 Pure green light emitting diodes and method of manufacturing the same
05/31/1988	CA1237513A1 Semiconductor laser and method of making the same
05/26/1988	DE3639604A1 Method for producing solder-reinforced conductor tracks
05/25/1988	EP0268472A2 Step-cut insulated gate static induction transistors and method of manufacturing the same
05/25/1988	EP0268426A2 High speed junction field effect transistor for use in bipolar integrated circuits
05/25/1988	EP0268404A2 Optical interconnection of devices on chips
05/25/1988	EP0268380A2 A liquid crystal display device having display and driver sections on a single board
05/25/1988	EP0268315A2 EEPROM memory cell with a single polysilicon level and a tunnel oxide zone
05/25/1988	EP0268301A2 Method and apparatus for writing a line on a patterned substrate
05/25/1988	EP0268298A2 Method of producing a Schottky-barrier field effect transistor
05/25/1988	EP0268288A2 Semiconductor memory device
05/25/1988	EP0268272A2 Method of removing electrical shorts and shunts from a thin-film semiconductor device
05/25/1988	EP0268266A2 Contacts of semiconductor devices
05/25/1988	EP0268230A2 Silicon carbide capillaries
05/25/1988	EP0268203A2 Process and arrangement for the modification of the image format in X-ray lithography
05/25/1988	EP0268136A2 Semiconductor arrangement
05/25/1988	EP0268116A1 Method of providing a planarized polymer coating on a substrate wafer
05/25/1988	EP0268027A1 Silicide to silicon bond
05/25/1988	EP0268021A2 Sloped contact etch process
05/25/1988	EP0157779B1 Latch-up immune, multiple retrograde well high density cmos fet
05/25/1988	EP0138963B1 Diethylberyllium dopant source for mocvd grown epitaxial semiconductor layers
05/25/1988	CN87107692A Method of fabricating semiconductor devices
05/25/1988	CN87102044A Chip holder for semiconductor silicon element
05/25/1988	CN86104099A Noncolloid electroplating for silver salient point electrode of p+n diode
05/25/1988	CN85107549B Diffusion isolation layer for maskless cladding process
05/24/1988	US4747078 Semiconductor memory device
05/24/1988	US4747077 Method of detecting the conductance state of a non-volatile memory device
05/24/1988	US4747076 Method of writing information into a fuse-type ROM
05/24/1988	US4746967 Semiconductor device
05/24/1988	US4746966 Logic-circuit layout for large-scale integrated circuits
05/24/1988	US4746965 Integrated semiconductor circuit device
05/24/1988	US4746964 Integrated circuits, transistors
05/24/1988	US4746963 Semiconductor devcice
05/24/1988	US4746959 One-transistor memory cell for large scale integration dynamic semiconductor memories and the method of manufacture thereof
05/24/1988	US4746958 Method and apparatus for projection printing
05/24/1988	US4746815 Electronic EC for minimizing EC pads
05/24/1988	US4746803 Method of forming a single crystal semiconductor layer from a non-single-crystalline material and apparatus for forming the same
05/24/1988	US4746800 Positioning device comprising a z-manipulator and a θ-manipulator
05/24/1988	US4746630 Multilayer, silicon dioxide and silicon nitride semiconductors
05/24/1988	US4746629 Doping, selective etching
05/24/1988	US4746628 Method for making a thin film transistor

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