| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/10/1989 | US4797054 Apparatus for loading and unloading a vacuum processing chamber |
| 01/10/1989 | US4797053 Manipulator for vacuum applications |
| 01/10/1989 | US4796562 Rapid thermal cvd apparatus |
| 01/10/1989 | CA1248641A1 Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias |
| 01/10/1989 | CA1248597A1 Special interconnect for configurable logic array |
| 01/10/1989 | CA1248403A1 Bilevel resist |
| 01/10/1989 | CA1248402A1 Method of making articles using gas functionalized plasma developed layer |
| 01/04/1989 | EP0297963A1 Method of connecting a lead to a doped region of an integrated circuit substrate by laser,and integrated circuit made by this method |
| 01/04/1989 | EP0297898A2 Method of dry etching |
| 01/04/1989 | EP0297886A2 Heterojunction bipolar transistor |
| 01/04/1989 | EP0297825A1 Light-sensitive 1,2-naphthoquinone-2-diazide-4-sulfonic acid monoesters and their use in light-sensitive mixtures |
| 01/04/1989 | EP0297821A2 Semiconductor integrated circuit device having gate array and memory |
| 01/04/1989 | EP0297799A1 Manufacture of Solar Cells |
| 01/04/1989 | EP0297778A2 Apparatus including resonant-tunneling device having multiple-peak current-voltage characteristics |
| 01/04/1989 | EP0297777A2 Ferroelectric shadow ram |
| 01/04/1989 | EP0297655A1 Semiconductor device provided with a charge transfer device |
| 01/04/1989 | EP0297648A2 Method of shaping the edges of slices of semiconductor material and corresponding apparatus |
| 01/04/1989 | EP0297559A2 Photosensor |
| 01/04/1989 | EP0297521A1 High temperature heating sputtering process |
| 01/04/1989 | EP0297511A2 Connection structure between components for semiconductor apparatus |
| 01/04/1989 | EP0297508A2 Complementary heterostructure semiconductor device |
| 01/04/1989 | EP0297506A2 Removal of particles from solid-state surfaces by laser bombardement |
| 01/04/1989 | EP0297502A2 Method of and apparatus for sputtering |
| 01/04/1989 | EP0297350A2 Static ram cell with trench pull-down transistors and buried-layer ground plate |
| 01/04/1989 | EP0297348A1 Method for chemical vapor deposition of copper, silver, and gold using a cyclopentadienyl metal complex |
| 01/04/1989 | EP0297335A2 Single tub transistor and method for its fabrication |
| 01/04/1989 | EP0297325A2 Gate turn-off thyristor and manufacturing method thereof |
| 01/04/1989 | EP0297247A1 Electron beam writing method and system using large range deflection in combination with a continuously moving table |
| 01/04/1989 | EP0297244A2 Single lead automatic clamping and bonding system |
| 01/04/1989 | EP0297161A1 Projection exposure system |
| 01/04/1989 | EP0297153A1 Novel photosensitive resin compositions |
| 01/04/1989 | EP0162061B1 Fabrication of group iii-v compound semiconductor devices having high and low resistivity regions |
| 01/04/1989 | EP0162057B1 Method of fabricating algaas semiconductor devices having high and low resistivity regions |
| 01/04/1989 | CN1030158A Method of manufacturing superconductor and superconductive circuit |
| 01/04/1989 | CN1030129A Process for treating gaseous effluents coming from manufacture of electronic components and incineration apparatus for carrying out said process |
| 01/04/1989 | CN1030094A Determination of ions in fluids |
| 01/03/1989 | USH569 Silicon substrate doped with oxygen-shields |
| 01/03/1989 | US4796228 Erasable electrically programmable read only memory cell using trench edge tunnelling |
| 01/03/1989 | US4796194 Real world modeling and control process |
| 01/03/1989 | US4796156 Self packaging chip mount |
| 01/03/1989 | US4796084 Semiconductor device having high resistance to electrostatic and electromagnetic induction using a complementary shield pattern |
| 01/03/1989 | US4796082 Thermally stable ohmic contact for gallium-arsenide |
| 01/03/1989 | US4796081 Low resistance metal contact for silicon devices |
| 01/03/1989 | US4796077 Blend with silicon carbide |
| 01/03/1989 | US4796074 Method of fabricating a high density masked programmable read-only memory |
| 01/03/1989 | US4796073 Front-surface N+ gettering techniques for reducing noise in integrated circuits |
| 01/03/1989 | US4796071 Charge coupled device delay line |
| 01/03/1989 | US4796068 Semiconductor device having ultrahigh-mobility |
| 01/03/1989 | US4796067 Semiconductor device having a superlattice structure |
| 01/03/1989 | US4795964 Method and apparatus for measuring the capacitance of complementary field-effect transistor devices |
| 01/03/1989 | US4795722 Doping, forming silicide, and etching |
| 01/03/1989 | US4795721 Walled slot devices and method of making same |
| 01/03/1989 | US4795720 Method for producing semiconductor devices and cutting fuses |
| 01/03/1989 | US4795719 Self-aligned split gate eprom process |
| 01/03/1989 | US4795718 Self-aligned contact for MOS processing |
| 01/03/1989 | US4795717 Multilayer-doping semiconductor before applying next layer |
| 01/03/1989 | US4795716 Method of making a power IC structure with enhancement and/or CMOS logic |
| 01/03/1989 | US4795694 Integrated circuits |
| 01/03/1989 | US4795679 Monocrystalline silicon layers on substrates |
| 01/03/1989 | US4795582 Surface treating composition for micro processing |
| 01/03/1989 | US4795529 Plasma treating method and apparatus therefor |
| 01/03/1989 | US4795518 Method using a multiple device vacuum chuck for an automatic microelectronic bonding apparatus |
| 01/03/1989 | US4795497 Method and system for fluid treatment of semiconductor wafers |
| 01/03/1989 | US4795299 Dial deposition and processing apparatus |
| 01/03/1989 | US4795260 Apparatus for locating and testing areas of interest on a workpiece |
| 01/03/1989 | US4795077 Bonding method and apparatus |
| 01/03/1989 | CA1248231A1 High density memory |
| 01/03/1989 | CA1248210A1 Upstream cathode assembly |
| 01/03/1989 | CA1248047A1 Method of making amorphous semiconductor alloys and devices using microwave energy |
| 01/03/1989 | CA1247947A1 Method of manufacturing semiconductor device |
| 01/03/1989 | CA1247943A1 Electrically and thermally conductive adhesive transfer tape |
| 01/03/1989 | CA1247840A1 Gauging method and apparatus for components having leads |
| 12/29/1988 | WO1988010513A1 Manufacture of solar cells |
| 12/29/1988 | WO1988010510A1 Semiconductor field oxide formation process |
| 12/29/1988 | WO1988010509A1 Method for fabricating a tape for electronic module circuits, and tape obtained according to such method |
| 12/29/1988 | WO1988010506A1 Microwave plasma generator |
| 12/29/1988 | WO1988010472A1 Moat router for integrated circuits |
| 12/29/1988 | WO1988010324A1 Improved reaction chambers and methods for cvd |
| 12/29/1988 | WO1988010322A1 Heating system for reaction chamber of chemical vapor deposition equipment |
| 12/29/1988 | WO1988010224A1 Handler for ic packages |
| 12/29/1988 | WO1988009599A3 Gold compression bonding |
| 12/29/1988 | WO1988008965A3 Temperature-measurement device for semiconductors, process for its manufacture and process for measuring the temperature of semiconductors during annealing processes |
| 12/29/1988 | DE3815569A1 Method for the selective deposition of a conductive material in the fabrication of integrated circuits |
| 12/29/1988 | DE3720465A1 Adhesion promoter for negative resist for the purpose of etching deep trenches in silicon wafers having a smooth surface, and method for preparing the adhesion promoter |
| 12/29/1988 | DE3720305A1 Semiconductor contact |
| 12/29/1988 | DE3720304A1 Structured semiconductor body |
| 12/29/1988 | DE3719746A1 Integrated logic circuit |
| 12/29/1988 | DE3719742A1 Arrangement and method for separation of the semiconductor chips contained in a wafer whilst maintaining their order |
| 12/28/1988 | EP0296997A1 Power mos transistors structure |
| 12/28/1988 | EP0296944A1 Method of processing gaseous effluents coming from the production of electronic components and incinerator for carrying out this method |
| 12/28/1988 | EP0296925A1 High cut-off frequency bipolar transistor |
| 12/28/1988 | EP0296910A2 Method of improving the corrosion resistance of aluminium contacts on semiconductors |
| 12/28/1988 | EP0296891A2 Process for self-cleaning of a reactor chamber |
| 12/28/1988 | EP0296771A2 Semiconductor device with a buried layer, and method of manufacture |
| 12/28/1988 | EP0296754A2 Method of manufacturing a semiconductor device having a trench isolation region, |
| 12/28/1988 | EP0296747A1 Integrated circuit with tub tie |
| 12/28/1988 | EP0296718A2 A coplanar and self-aligned contact structure |
| 12/28/1988 | EP0296707A1 Incorporation of dielectric layers in a semiconductor |
| 12/28/1988 | EP0296702A2 Method of forming semiconducting amorphous silicon films from the thermal decompositon of fluorohydridodisilanes |
| 12/28/1988 | EP0296681A1 Integrated circuit comprising an on-chip supply voltage reducer |