Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1989
04/04/1989US4819043 MOSFET with reduced short channel effect
04/04/1989US4819039 Particle beam deposition of glass on semiconductor, doping, annealing
04/04/1989US4819038 TFT array for liquid crystal displays allowing in-process testing
04/04/1989US4819037 Semiconductor device
04/04/1989US4819033 Illumination apparatus for exposure
04/04/1989US4818934 Apparatus for measuring characteristics of electronic devices
04/04/1989US4818902 Integrated circuit component
04/04/1989US4818885 Electron beam writing method and system using large range deflection in combination with a continuously moving table
04/04/1989US4818879 Positioning and machining apparatus having a scanner for circularly scanning an object by a light beam
04/04/1989US4818838 Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems
04/04/1989US4818835 Laser marker and method of laser marking
04/04/1989US4818728 Method of making a hybrid semiconductor device
04/04/1989US4818727 Applying zinc chromate solution to contact pads
04/04/1989US4818726 Process for curing epoxy encapsulant on integrated circuit dice
04/04/1989US4818725 Technique for forming planarized gate structure
04/04/1989US4818723 Silicide contact plug formation technique
04/04/1989US4818721 Implanting, annealing, activating, doping with beryllium
04/04/1989US4818720 Forming integrated circuit semiconductor by diffusion doping
04/04/1989US4818719 Forming electrode wiring layers with substrates of different conduction
04/04/1989US4818718 Transistor with floating and control gate electrodes formed with photoresist masking
04/04/1989US4818716 Semiconductor device and manufacturing method thereof
04/04/1989US4818715 Method of fabricating a LDDFET with self-aligned silicide
04/04/1989US4818714 Method of making a high performance MOS device having LDD regions with graded junctions
04/04/1989US4818713 Techniques useful in fabricating semiconductor devices having submicron features
04/04/1989US4818712 Aluminum liftoff masking process and product
04/04/1989US4818711 High quality oxide on an ion implanted polysilicon surface
04/04/1989US4818621 Uv rad polymerizable acrylic acid ester; dicing film for semiconductor wafers
04/04/1989US4818593 Polybenzimidazole, polybenzothiazole, or polyoxazole
04/04/1989US4818565 Method to stabilize metal contacts on mercury-cadmium-telluride alloys
04/04/1989US4818564 Method for forming deposited film
04/04/1989US4818560 Method for preparation of multi-layer structure film
04/04/1989US4818500 Two-dimensional mixing of melt material to improve homogeneity of dopant
04/04/1989US4818357 Using inert gas supplied at different partial pressures to control ratio of elements deposited
04/04/1989US4818335 Second layer of undoped oxide reduces etch rate
04/04/1989US4818334 Method of etching a layer including polysilicon
04/04/1989US4818327 Wafer processing apparatus
04/04/1989US4818326 Processing apparatus
04/04/1989US4818323 Method of making a void free wafer via vacuum lamination
04/04/1989US4818312 Method of making electronic tags
04/04/1989US4818235 Isolation structures for integrated circuits
04/04/1989US4818204 Mold for molding semiconductor devices
04/04/1989US4818169 Automated wafer inspection system
04/04/1989US4818056 Optical connector with direct mounted photo diode
04/04/1989US4817854 LED soldering method utilizing a PT migration barrier
04/04/1989US4817849 Method for bonding semiconductor laser element and apparatus therefor
04/04/1989US4817848 Compliant motion servo
04/04/1989US4817799 Disk package
04/04/1989US4817795 Robotic accessible wafer shipper assembly
04/04/1989US4817652 System for surface and fluid cleaning
04/04/1989US4817558 Thin-film depositing apparatus
04/04/1989US4817557 Process and apparatus for low pressure chemical vapor deposition of refractory metal
04/04/1989US4817556 Apparatus for retaining wafers
04/04/1989US4817277 Method of manufacturing an electrically conductive adhesive bond
04/04/1989US4817273 Burn-in board loader and unloader
04/04/1989CA1252227A1 Self-aligned silicide base contact for bipolar transistor
04/04/1989CA1252226A1 Self-aligned fabrication process for gaas mesfet devices
04/04/1989CA1252224A1 Reverse dark field alignment system for scanning lithographic aligner
04/04/1989CA1252223A1 Improvements in or relating to wafer-scale- integrated assemblies
04/04/1989CA1252222A1 Formation of self-aligned stacked cmos structures by lift-off
04/04/1989CA1252221A1 Wafer probe with mounted amplifier
03/1989
03/30/1989DE3831264A1 Verfahren zur herstellung eines bicmos-halbleiters A process for producing a BiCMOS semiconductor
03/29/1989EP0309290A1 Compound semiconductor field-effect transistor
03/29/1989EP0309281A2 Apparatus for controlling relation in position between a photomask and a wafer
03/29/1989EP0309274A1 Semiconductor device having tungsten plugs
03/29/1989EP0309272A2 Apparatus and method for sample holders and wafer cages fabricated from silicon carbide for processing semiconductor materials
03/29/1989EP0309233A2 Method of manufacturing a semiconductor device by plating and apparatus therefor
03/29/1989EP0309209A1 Laser planarization of nonrefractory metal during integrated circuit fabrication
03/29/1989EP0309118A2 Apparatus for and method of viewing surfaces
03/29/1989EP0309116A2 Fixture for an integrated circuit chip
03/29/1989EP0309109A2 Testing process for electronic devices
03/29/1989EP0309094A1 Precision slides and position encoders therefor
03/29/1989EP0308971A2 Bump and method of manufacturing the same
03/29/1989EP0308969A2 High electron mobility transistor structure
03/29/1989EP0308948A2 Patterned thin film and process for preparing the same
03/29/1989EP0308940A2 Method of manufacturing ohmic contacts having low transfer resistances
03/29/1989EP0308939A2 Method of manufacturing a MESFET with self aligned gate
03/29/1989EP0308902A2 Method for forming pattern by using langmuir-blodgett film
03/29/1989EP0308851A2 A process for the manufacture of copper thick-film conductors using an infrared furnace
03/29/1989EP0308814A2 Modification of interfacial fields between dielectrics and semiconductors
03/29/1989EP0308726A2 Wafer scale integrated circuit
03/29/1989EP0308695A2 A component for producing semi-conductor devices and process of producing it
03/29/1989EP0308660A2 Device for producing a test-compatible, largely fault tolerant configuration of redundantly implemented VLSI systems
03/29/1989EP0308658A1 Apparatus and method for evaporating metallic films
03/29/1989EP0308588A1 Semiconductor-on-insulator fabrication method
03/29/1989EP0308516A1 Method of determining end point of cleaning in an apparatus for manufacturing semiconductor devices
03/29/1989EP0308480A1 Method of manufacture of a uniphase ccd
03/29/1989EP0203931B1 Method of producing devices using nonplanar lithography
03/29/1989EP0067165B1 Improved partial vacuum boron diffusion process
03/29/1989CN1032091A Bonding wire
03/28/1989US4816896 Compliant standoff for semiconductor packages
03/28/1989US4816895 Integrated circuit device with an improved interconnection line
03/28/1989US4816893 Low leakage CMOS/insulator substrate devices and method of forming the same
03/28/1989US4816887 CMOS gate array with orthagonal gates
03/28/1989US4816884 High density vertical trench transistor and capacitor memory cell structure and fabrication method therefor
03/28/1989US4816883 Nonvolatile, semiconductor memory device
03/28/1989US4816882 Power MOS transistor with equipotential ring
03/28/1989US4816880 Junction field effect transistor
03/28/1989US4816879 Schottky-type rectifier having controllable barrier height
03/28/1989US4816776 Integrated circuit configuration and method for monitoring a co-integrated oscillator
03/28/1989US4816751 Apparatus for inspecting the operation of integrated circuit device
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