H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1988
11/02/1988	EP0289249A2 Device fabrication by X-ray lithography utilizing stable boron nitride mask
11/02/1988	EP0289246A1 Method of manufacturing MOS devices
11/02/1988	EP0289195A2 Method and apparatus for continuous throughput in a vacuum environment
11/02/1988	EP0289194A2 Method for feeding and coating articles in a controlled atmosphere
11/02/1988	EP0289174A2 Antireflection coatings for use in photolithography
11/02/1988	EP0289163A2 Silicide semiconductor element with polysilicon regions and method of manufacturing thereof
11/02/1988	EP0289131A1 Method of dry etching aluminum
11/02/1988	EP0289117A2 Method of forming crystals on a substrate
11/02/1988	EP0289114A2 Process for producing crystals on a light-transmissive substrate
11/02/1988	EP0289102A2 Method and means for bonding of lead wires for an integrated circuit device
11/02/1988	EP0289089A1 Method of manufacturing a semiconductor device having interconnections located both above a semiconductor region and above an isolation region adjoining it
11/02/1988	EP0289088A1 Charge-coupled device
11/02/1988	EP0288880A1 Single-turn induction heating coil for the floating-zone melting process
11/02/1988	EP0288804A2 A semiconductor defect monitor
11/02/1988	EP0288803A2 Personalizable semiconductor chips for analog and analog/digital circuits
11/02/1988	EP0288802A1 A multi-level integrated circuit wiring structure from a single metal deposit
11/02/1988	EP0288801A2 Probe card apparatus and method of providing same with reconfigurable probe card circuitry
11/02/1988	EP0288792A1 Method for forming vias in HgCdTe
11/02/1988	EP0288776A2 Gold alloy wire connection to copper doped aluminum semiconductor circuit interconnection bonding pad
11/02/1988	EP0288767A2 Method for forming a shielded transmission line
11/02/1988	EP0288754A2 High rate tungsten CVD process for stress-free films
11/02/1988	EP0288739A2 Method of self-aligning a trench isolation structure to an implanted well region
11/02/1988	EP0288691A1 Bipolar transistor structure with self-aligned device and isolation and fabrication process therefor
11/02/1988	EP0288688A2 Porous circuit macro for semiconductor integrated circuits
11/02/1988	EP0288681A1 Heterojunction bipolar transistor
11/02/1988	EP0288608A1 Apparatus for forming a thin film
11/02/1988	EP0288455A1 Box door actuated retainer.
11/02/1988	EP0220233A4 Target keys for wafer probe alignment.
11/02/1988	EP0185030B1 Bilevel resist
11/02/1988	EP0173690B1 Thermally-activated, shorting diode switch having non-operationally-alternable junction path
11/01/1988	USH546 Ion implantation
11/01/1988	US4782465 Semiconductor integrated circuit device with memory cells connected to a divided sub-word line
11/01/1988	US4782380 Nondiffusing
11/01/1988	US4782379 Semiconductor device having rapid removal of majority carriers from an active base region thereof at device turn-off and method of fabricating this device
11/01/1988	US4782378 Transistor having integrated stabilizing resistor and method of making thereof
11/01/1988	US4782374 Charge transfer device having a width changing channel
11/01/1988	US4782373 Self-aligned semiconductor device with non-diffusable contacts
11/01/1988	US4782340 Electronic arrays having thin film line drivers
11/01/1988	US4782236 Means for locking a workpiece to a beam-generating apparatus
11/01/1988	US4782037 Nonpeeling
11/01/1988	US4782036 Boron oxide-silicon oxide glass dope
11/01/1988	US4782034 Semiconductors
11/01/1988	US4782033 Process for producing CMOS having doped polysilicon gate by outdiffusion of boron from implanted silicide gate
11/01/1988	US4782032 Method of making self-aligned GaAs devices having TiWNx gate/interconnect
11/01/1988	US4782031 Method of making GaAs MOSFET with low source resistance yet having satisfactory leakage current by ion-implantation
11/01/1988	US4782030 Method of manufacturing bipolar semiconductor device
11/01/1988	US4782029 Nonwarping, noncracking
11/01/1988	US4782009 Method of coating and imaging photopatternable silicone polyamic acid
11/01/1988	US4782008 Plasma-resistant polymeric material, preparation thereof, and use thereof
11/01/1988	US4781968 Micro-electronics devices and methods of manufacturing same
11/01/1988	US4781945 Process for the formation of phosphosilicate glass coating
11/01/1988	US4781942 Process for the photochemical vapor deposition of siloxane polymers
11/01/1988	US4781804 Plastic from encapsulation of integrated circuits
11/01/1988	US4781775 Glass slurry
11/01/1988	US4781764 Method of removing undesired particles from a surface of a substrate
11/01/1988	US4781520 Polar-coordinate manipulator for vacuum application
11/01/1988	US4781511 Semiconductor processing system
11/01/1988	US4781494 Air-assist accumulating and transfer unit for an electronic device test handler
11/01/1988	US4781437 Display line driver with automatic uniformity compensation
11/01/1988	US4780956 Floating crown for insertion-extraction head
11/01/1988	CA1244149A1 Semiconductor ballistic electron velocity control structure
11/01/1988	CA1244147A1 Die bonding process
11/01/1988	CA1244146A1 Lead frame deflashing
11/01/1988	CA1244145A1 Process for forming planar chip-level wiring
11/01/1988	CA1244143A1 High-performance trench capacitors for dram cells
11/01/1988	CA1244100A1 Multiple input or-and circuit for fet logic
10/1988
10/27/1988	DE3812662A1 Semiconductor component with superconducting connections
10/27/1988	DE3716470A1 Patterned semiconductor body
10/27/1988	DE3716469A1 Patterned semiconductor body
10/27/1988	DE3712064A1 Apparatus for machining workpieces, in particular wafers, in a semiconductor production clean room
10/26/1988	EP0288277A2 Cassette storing a plurality of electronic components
10/26/1988	EP0288263A2 Apparatus and method for removing minute particles from a substrate
10/26/1988	EP0288233A2 System and method for detecting the center of an integrated circuit wafer
10/26/1988	EP0288166A2 Process for selective formation of III - V group compound film
10/26/1988	EP0288108A1 Electronic device manufacture
10/26/1988	EP0288075A2 Sub-booster circuit for stepping up an output voltage of main booster circuit
10/26/1988	EP0288052A2 Semiconductor device comprising a substrate, and production method thereof
10/26/1988	EP0287931A2 Semiconductor device comprising an electrode having a composite structure
10/26/1988	EP0287863A2 Power select circuit
10/26/1988	EP0287838A2 An apparatus for transporting an electrically conductive wafer
10/26/1988	EP0287811A1 Field effect transistor and method of making
10/26/1988	EP0287793A2 Integrated circuit substrate product
10/26/1988	EP0287786A2 Orthogonal axis device with linear motors for positioning and processing workpieces, in particular for bonding wires onto electronic components
10/26/1988	EP0287770A1 Semiconductor component having a control electrode
10/26/1988	EP0287769A1 High speed GaAs mesfet having refractory contacts and a self-aligned cold gate fabrication process
10/26/1988	EP0287722A1 Process for laser welding of aluminium based elements
10/26/1988	EP0287658A1 Striped-channel transistor and method of forming the same
10/26/1988	EP0287656A1 T-gate electrode for field effect transistor and field effect transistor made therewith.
10/26/1988	EP0172876B1 Deposition technique
10/26/1988	EP0135534B1 Thick film resistor circuits
10/25/1988	US4780903 X-ray source
10/25/1988	US4780854 Semiconductor integrated circuit device
10/25/1988	US4780794 Insulated layer; non short circuiting
10/25/1988	US4780765 Solid state image pick-up device
10/25/1988	US4780753 Semiconductor integrated circuit device
10/25/1988	US4780751 Semiconductor integrated circuit device
10/25/1988	US4780750 Electrically alterable non-volatile memory device
10/25/1988	US4780748 Field-effect transistor having a delta-doped ohmic contact
10/25/1988	US4780747 Projection exposure apparatus
10/25/1988	US4780606 Projection aligner method utilizing monitoring of light quantity

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