Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/1989
02/21/1989US4806503 Method for the replacement of semiconductor devices
02/21/1989US4806502 Method for doping semi-conductor material during epitaxial growth
02/21/1989US4806501 Method for making twin tub CMOS devices
02/21/1989US4806500 Method of producing a large-scale integrated MOS field-effect transistor circuit
02/21/1989US4806499 Exposing emitter region to impurity drive-in process to diffuse phosphorus
02/21/1989US4806497 Neutron irradiation, ion implantation electron or proton irradiation doping
02/21/1989US4806457 Forming check pattern with resist stripes in intervals
02/21/1989US4806448 Cyclic acetals or ketals of 8-keto esters or amides
02/21/1989US4806409 Process for providing an improved electroplated tape automated bonding tape and the product produced thereby
02/21/1989US4806321 Use of infrared radiation and an ellipsoidal reflection mirror
02/21/1989US4806202 Field enhanced tunnel oxide on treated substrates
02/21/1989US4806201 Forming integrated circuit on semiconductor surface; vapor deposition, etching dielectric layers, electrodes
02/21/1989US4806199 (RIE) Plasma process for making metal-semiconductor ohmic type contacts
02/21/1989US4806188 Sequentially firing alternating layers of conductive metallization films and dielectric tapes
02/21/1989US4806171 Apparatus and method for removing minute particles from a substrate
02/21/1989US4806059 Stacking device for uniform, especially platelike pieces
02/21/1989US4806057 Automatic wafer loading method and apparatus
02/21/1989US4805831 Bonding method
02/21/1989US4805759 Installation and method for handling delicate objects in an atmosphere having a controlled dust content
02/21/1989US4805683 Method for producing a plurality of layers of metallurgy
02/21/1989CA1250373A1 Apparatus for mounting a semiconductor chip and making electrical connections thereto
02/21/1989CA1250372A1 Microelectronics apparatus and a method of interconnecting wiring planes
02/21/1989CA1250209A1 Method of producing ii-v compound semiconductors
02/21/1989CA1250177A1 Process for preparing negative relief images
02/16/1989DE3726025A1 Clean room having handling device
02/15/1989EP0303435A2 Bipolar transistors
02/15/1989EP0303409A1 Single crystal pulling
02/15/1989EP0303404A2 Method of aligning wafers and device therefor
02/15/1989EP0303396A1 Improved laser-blown links
02/15/1989EP0303390A1 Manufacture of diodes
02/15/1989EP0303320A2 A method of forming thin, defect-free, monocrystalline layers of semiconductor materials on insulators
02/15/1989EP0303272A2 Printed circuits for electronics
02/15/1989EP0303256A2 A method for electrically connecting IC chips, a resinous bump-forming composition used therein and a liquid-crystal display unit electrically connected thereby
02/15/1989EP0303248A2 Method of forming a mask pattern and recessed-gate MESFET
02/15/1989EP0303193A2 Semiconductor integrated circuit device
02/15/1989EP0303079A2 Semiconductor element with a Schottky contact stable at a high temperature
02/15/1989EP0303061A2 Process for forming a planarized, metal-strapped polysilicon gate FET
02/15/1989EP0303050A1 Process for producing wells for CMOS-transistor circuits separated by isolation trenches
02/15/1989EP0303049A2 Optoelectronic image sensor device
02/15/1989EP0303046A1 Gate turn-off thyristor
02/15/1989EP0303030A1 Processing apparatus and method
02/15/1989EP0302946A1 Method for electrically isolating large area electrode bodies
02/15/1989EP0302885A1 Automatic wafer loading method and apparatus
02/15/1989CN1031156A Charge-coupled device
02/15/1989CN1031155A Cmos integrated circuit having top-side substrate contact and method for making same
02/15/1989CN1003337B 半导体工艺 Semiconductor technology
02/14/1989US4805187 Graph of wavelength of minimum transmittance of infrared energy and doping temperature
02/14/1989US4805184 Ridge waveguide optical devices
02/14/1989US4805178 Transition metal containing protective coating
02/14/1989US4805147 Stacked static random access memory cell having capacitor
02/14/1989US4805141 Bipolar PROM having transistors with reduced base widths
02/14/1989US4805123 Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems
02/14/1989US4805071 One step manufacture of high and low voltage capacitor segments
02/14/1989US4805005 Semiconductor device and manufacturing method of the same
02/14/1989US4805004 Semiconductor device with a planar junction and self-passivating termination
02/14/1989US4805003 GaAs MESFET
02/14/1989US4804978 Exposure control system for full field photolithography using pulsed sources
02/14/1989US4804940 Resistor and electron device employing the same
02/14/1989US4804879 Deflecting electromagnet apparatus with moveable pole piece
02/14/1989US4804869 BiMOS logical circuit
02/14/1989US4804868 BiMOS logical circuit
02/14/1989US4804851 Charged particle sources
02/14/1989US4804837 Ion implantation surface charge control method and apparatus
02/14/1989US4804810 Apparatus and method for tape bonding
02/14/1989US4804641 Applying a border of dielectric layer under compressive stress
02/14/1989US4804640 Silicon-silicon oxide-silicon and aluminum oxide-aluminum oxide regions
02/14/1989US4804637 EEPROM memory cell and driving circuitry
02/14/1989US4804636 Depositing titanium on silicon and heating in nitrogen to form silicide and nitride; patterning nitride
02/14/1989US4804635 Method of manufacture of galluim arsenide field effect transistors
02/14/1989US4804634 Integrated circuit lateral transistor structure
02/14/1989US4804633 Silicon-on-insulator substrates annealed in polysilicon tube
02/14/1989US4804612 Highly heat-resistant positive-working o-quinone diazide containing photoresist composition with novolac resin made from phenol with ethylenic unsaturation
02/14/1989US4804560 Method of selectively depositing tungsten upon a semiconductor substrate
02/14/1989US4804558 Depositing on substrate zinc compounds, organic selenium or sulfur compounds, oxidizing using halogen gases
02/14/1989US4804438 Depositing platinum and annealing under high vacuum to form silicide; annealing in oxygen; etching with aqua regia
02/14/1989US4804172 Fixture for mounting a heat sink
02/14/1989US4804132 Virgin aluminum surface provided by metallized particle piercing the oxide layer
02/14/1989US4804130 Chip carrier sealing and bonding fixture
02/14/1989US4804086 Transport container with an interchangeable inside container
02/14/1989US4803948 Heat processing apparatus for semiconductor manufacturing
02/14/1989CA1250056A1 Long life x-ray source target
02/14/1989CA1250055A1 Coating of iii-v and ii-vi compound semiconductors
02/14/1989CA1250054A1 Process for manufacturing thick-film electrical components
02/09/1989WO1989001237A1 Semiconductor base material
02/09/1989WO1989001236A1 A method of providing refilled trenches
02/09/1989WO1989001235A1 High effective barrier height transistor and method of making same
02/09/1989WO1989001187A1 Pattern-forming process utilizing radiation-induced graft polymerization reaction
02/09/1989WO1989001054A1 Surface deposition or surface treatment reactor
02/09/1989WO1989000895A1 Surface treatment to remove impurities in microrecesses
02/09/1989DE3725429A1 Monolithically integrated circuit arrangement
02/09/1989DE3725188A1 Semiautomatic substrate holder for thermal processes
02/09/1989DE3725169A1 Method for the patterned incorporation in semiconductor surfaces of dopants which determine conductivity
02/08/1989EP0302684A2 Thin film deposition process
02/08/1989EP0302659A1 Semiconductor memory device and process for producing same
02/08/1989EP0302654A2 Method of sealing an electrical feedthrough in a semiconductor device
02/08/1989EP0302647A1 Aluminum plug using insulating sidewall space
02/08/1989EP0302383A1 Method for producing low specific resistance contacts on substrates containing integrated circuits
02/08/1989EP0302354A2 Method for preparing a laminated structure from an oxide-ceramic supraconducting material
02/08/1989EP0302241A2 Voltage measurement with an electron-probe without an external trigger signal
02/08/1989EP0302204A2 Vertical trench transistor/capacitor memory cell structure and fabrication method therefor