| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/27/1989 | DE3832450A1 Method for forming field-oxide regions in a silicon substrate |
| 04/27/1989 | DE3832253A1 Latchup- und entladungsschutzeinrichtung fuer einen integrierten cmos schaltkreis Latchup- and discharge protection device for an integrated CMOS circuitry |
| 04/26/1989 | EP0313526A1 Saturation limiting system for a vertical, isolated collector PNP transistor and monolithically integrated structure thereof |
| 04/26/1989 | EP0313493A2 Method of producing defect free epitaxially grown silicon |
| 04/26/1989 | EP0313466A2 Wafer positioning apparatus |
| 04/26/1989 | EP0313456A1 Copolymers useful as multifunctional additives in lubricants, and compositions containing these copolymers |
| 04/26/1989 | EP0313455A1 Space protected against exterior pollution |
| 04/26/1989 | EP0313452A1 Process of depositing a refractory metal-silicide for integrated circuits manufacturing |
| 04/26/1989 | EP0313430A1 Device for structural testing of an integrated circuit |
| 04/26/1989 | EP0313427A1 Memory in integrated circuit |
| 04/26/1989 | EP0313250A2 Technique for use in fabricating semiconductor devices having submicron features |
| 04/26/1989 | EP0313249A1 Resistive field shields for high voltage devices |
| 04/26/1989 | EP0313230A2 VLSI chip with test circuitry |
| 04/26/1989 | EP0313229A2 VSLI chip with ring oscillator |
| 04/26/1989 | EP0313228A2 Clock distribution on vlsi chip |
| 04/26/1989 | EP0313200A2 Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems |
| 04/26/1989 | EP0313199A1 Liquid crystal display device |
| 04/26/1989 | EP0313147A1 Manufacturing process for high-frequency transistors |
| 04/26/1989 | EP0313095A2 Method for preparing hydroxysilanes and/or their oligomers |
| 04/26/1989 | EP0313082A2 Semiconductor device with bump electrode and method of manufacturing the same |
| 04/26/1989 | EP0313031A2 CCD video camera |
| 04/26/1989 | EP0313013A2 System for modeling and displaying lithographic process |
| 04/26/1989 | EP0313001A2 Test adapter for integrated circuit carrier |
| 04/26/1989 | EP0312986A1 Etchback process for tungsten-filled integrated-circuit contact holes, with a titanium nitride underlayer |
| 04/26/1989 | EP0312965A2 Method of producing a planar self-aligned heterojunction bipolar transistor |
| 04/26/1989 | EP0312955A2 Semiconductor device having an improved thin film transistor |
| 04/26/1989 | EP0312924A2 Vacuum chucking tool and system |
| 04/26/1989 | EP0312824A2 Ceramic structure with copper based conductors and method for forming such a structure |
| 04/26/1989 | EP0312802A2 Self-mounted chip carrier |
| 04/26/1989 | EP0312751A2 Positive-working radiation-sensitive composition and radiation-sensitive recording material produced therefrom |
| 04/26/1989 | EP0312694A1 Apparatus according to the principle of carousel for depositing substrates |
| 04/26/1989 | EP0312653A1 Electron image projector |
| 04/26/1989 | EP0312650A1 Process and device for material machining using a laser |
| 04/26/1989 | EP0312624A1 Photosensitive composition |
| 04/26/1989 | CN1032533A Production method suitabla for open-tube gallium diffusion quartz tube |
| 04/25/1989 | US4825453 X-ray exposure apparatus |
| 04/25/1989 | US4825418 Semiconductor memory |
| 04/25/1989 | US4825417 Sense amplifier optimized lay-out from dynamic random access memories on complementary metal oxide semicondutor |
| 04/25/1989 | US4825414 Semiconductor integrated circuit device having gate array and memory and input-output buffer |
| 04/25/1989 | US4825409 NMOS data storage cell for clocked shift register applications |
| 04/25/1989 | US4825340 Electrical conductor arrangement |
| 04/25/1989 | US4825284 Semiconductor resin package structure |
| 04/25/1989 | US4825281 Bipolar transistor with sidewall bare contact structure |
| 04/25/1989 | US4825279 Semiconductor device |
| 04/25/1989 | US4825278 Radiation hardened semiconductor devices |
| 04/25/1989 | US4825277 Filling with silicon oxynitride, covering with silicon nitride |
| 04/25/1989 | US4825276 Integrated circuit semiconductor device having improved wiring structure |
| 04/25/1989 | US4825274 Bi-CMOS semiconductor device immune to latch-up |
| 04/25/1989 | US4825273 Basic cell formed on a substrate |
| 04/25/1989 | US4825269 Double heterojunction inversion base transistor |
| 04/25/1989 | US4825268 Semiconductor memory device |
| 04/25/1989 | US4825267 Field effect transistor having self-registering source and drain regions to minimize capacitances |
| 04/25/1989 | US4825265 Transistor |
| 04/25/1989 | US4825262 Fabry-perot interferometer |
| 04/25/1989 | US4825142 CMOS substrate charge pump voltage regulator |
| 04/25/1989 | US4825107 Master slice type integrated circuit |
| 04/25/1989 | US4825093 Methods for identifying semiconductor wafer with bar code pattern thereon and methods for manufacturing semiconductor device |
| 04/25/1989 | US4825087 System and methods for wafer charge reduction for ion implantation |
| 04/25/1989 | US4825086 Apparatus for the exact mutual alignment of a mask and semiconductor wafer in a lithographic apparatus |
| 04/25/1989 | US4825082 Electron emitting apparatus |
| 04/25/1989 | US4825033 Variable shaped spot electron beam pattern generator |
| 04/25/1989 | US4824805 Epitaxial layer consisting of collector, base and emitter on substrate; etching recesses |
| 04/25/1989 | US4824804 Method of making vertical enhancement-mode group III-V compound MISFETS |
| 04/25/1989 | US4824803 Etching multilayer structure of refractory, aluminum or alloy thereof, and refractory |
| 04/25/1989 | US4824802 Filling opneing, coating with photoresist, planarizing etching |
| 04/25/1989 | US4824801 Phospho-silicate glass on polysilicon films; dielectric containing no phosphorus between aluminum and glass |
| 04/25/1989 | US4824800 Method of fabricating semiconductor devices |
| 04/25/1989 | US4824799 Dielectric on semiconductor substrate with openings above buri er |
| 04/25/1989 | US4824798 Method of introducing impurity species into a semiconductor structure from a deposited source |
| 04/25/1989 | US4824797 Highly doped p doped segments on either side of shallow n doped segment |
| 04/25/1989 | US4824796 Doping to simultaneously create source and drains; confining polycrystalline stacks with dielectric |
| 04/25/1989 | US4824795 Method for obtaining regions of dielectrically isolated single crystal silicon |
| 04/25/1989 | US4824794 Method for fabricating a bipolar transistor having self aligned base and emitter |
| 04/25/1989 | US4824793 Method of making DRAM cell with trench capacitor |
| 04/25/1989 | US4824768 From a thermally decomposable aluminum carboxylate compound |
| 04/25/1989 | US4824767 Reflowed sloped profile openings |
| 04/25/1989 | US4824766 Chemical reaction product film; plasma etching |
| 04/25/1989 | US4824763 Triamine positive photoresist stripping composition and prebaking process |
| 04/25/1989 | US4824762 Nontoxic to humans; pollution control |
| 04/25/1989 | US4824747 Method of forming a variable width channel |
| 04/25/1989 | US4824698 High temperature annealing to improve SIMOX characteristics |
| 04/25/1989 | US4824697 Method for forming a multi-layer deposited film |
| 04/25/1989 | US4824544 Large area cathode lift-off sputter deposition device |
| 04/25/1989 | US4824521 Planarization of metal pillars on uneven substrates |
| 04/25/1989 | US4824518 Molecular beam epitaxy |
| 04/25/1989 | US4824496 Method and apparatus for removing reticle guides |
| 04/25/1989 | US4824309 Vacuum processing unit and apparatus |
| 04/25/1989 | US4824254 Slit utilized as pattern for aligning |
| 04/25/1989 | US4824073 Integrated, microminiature electric to fluidic valve |
| 04/25/1989 | US4824009 Process for braze attachment of electronic package members |
| 04/25/1989 | US4824006 Die bonding apparatus |
| 04/25/1989 | US4823735 Reflector apparatus for chemical vapor deposition reactors |
| 04/25/1989 | US4823654 Wafer handling tool and method of use |
| 04/25/1989 | US4823480 Semiconductor heat-treating apparatus |
| 04/25/1989 | CA1253263A1 Back sealing of silicon wafers |
| 04/25/1989 | CA1253262A1 Mask-surrogate semiconductor process employing dopant-opaque region |
| 04/25/1989 | CA1253261A1 Double layer dielectric passivation |
| 04/25/1989 | CA1253037A1 Selective electroless plating of vias in vlsi devices |
| 04/25/1989 | CA1253021A1 Alignment and focusing system for a scanning mask aligner |
| 04/20/1989 | WO1989003591A1 Semiconducteur device and method of producing the same |