Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1989
06/13/1989US4839523 Ion implantation apparatus for semiconductor manufacture
06/13/1989US4839520 Production of pulsed electron beams
06/13/1989US4839312 Glow discharge decomposition onto matrix
06/13/1989US4839311 Etch back detection
06/13/1989US4839310 High mobility transistor with opposed-gates
06/13/1989US4839309 Fabrication of high-speed dielectrically isolated devices utilizing buried silicide outdiffusion
06/13/1989US4839306 Forming oxide by radio frequency bias sputtering
06/13/1989US4839305 Doping, masking, diffusion; silicon nitride spacers
06/13/1989US4839304 Multilayer-dielectric substrate, electrode, protective film, fillers, and electroconductive layer
06/13/1989US4839303 Multilayer; substrate, doped collector, contactors
06/13/1989US4839302 Method for fabricating bipolar semiconductor device
06/13/1989US4839301 Blanket CMOS channel stop implant employing a combination of n-channel and p-channel punch-through implants
06/13/1989US4839300 Method of manufacturing semiconductor device having trapezoidal shaped substrate sections
06/13/1989US4839219 Heat, chemical resistant
06/13/1989US4839196 Photochemical film-forming method
06/13/1989US4839145 Substrates mounted on rotatable susceptor; semiconductors
06/13/1989US4839010 Oxidation, heating of metal surface; sputtering aluminum; specularity reduction by bumps
06/13/1989US4838993 Method of fabricating MOS field effect transistor
06/13/1989US4838992 Method of etching aluminum alloys in semi-conductor wafers
06/13/1989US4838991 Dry etching of polyxylylene masking layer
06/13/1989US4838990 Using gas mixture of fluorine source, fluorosilane, bromine source, weak oxygen source
06/13/1989US4838987 Method of etching a semiconductor body
06/13/1989US4838984 Method for etching films of mercury-cadmium-telluride and zinc sulfid
06/13/1989US4838979 Apparatus for processing substrate surface
06/13/1989US4838978 Dry etching apparatus
06/13/1989US4838654 Liquid crystal display device having display and driver sections on a single board
06/13/1989US4838472 Orthogonal axis device with linear motors for positioning and bonding wires onto electronic components
06/13/1989US4838238 Internal peripheral edge type blade holding device
06/13/1989US4838201 Apparatus and process for vacuum chemical epitaxy
06/13/1989US4838088 Pressure transducer and method for fabricating same
06/13/1989US4837928 Method of producing a jumper chip for semiconductor devices
06/13/1989CA1255815A1 Semiconductor etching apparatus with magnetic array and vertical shield
06/13/1989CA1255814A1 Wafer chunck comprising a curved reference surface
06/13/1989CA1255617A1 Removing metal layer from textured mandrel and depositing photoresponsive body
06/08/1989DE3840042A1 Vorrichtung zum chemischen bedampfen mittels laser unter verwendung von lichtleitfasern Chemical vapor deposition apparatus using a laser using optical fibers
06/08/1989DE3736671C1 Method for producing semiconductor components
06/07/1989EP0319433A2 Precision alignment device
06/07/1989EP0319427A2 Nonvolatile memory element
06/07/1989EP0319215A2 Fabrication of FET integrated circuits
06/07/1989EP0319214A1 Method for making semiconductor integrated circuits using selective tungsten deposition
06/07/1989EP0319213A2 Method for fabricating semiconductor devices which include metal-containing material regions
06/07/1989EP0319207A2 A method of producing a semi-conducteur device having a disordered superlattice
06/07/1989EP0319175A2 Method of forming a solid article
06/07/1989EP0319145A2 Horizontal laminar air flow work station
06/07/1989EP0319121A1 Apparatus for producing semiconductors
06/07/1989EP0319082A1 Method of forming a thin monocrystalline layer of a semiconductor material on a substrate
06/07/1989EP0319063A2 Voltage multiplier circuit and rectifier element
06/07/1989EP0319047A2 Power integrated circuit
06/07/1989EP0319021A2 Apparatus for laser chemical vapour deposition
06/07/1989EP0318954A2 Semiconductor device having a composite insulating interlayer
06/07/1989EP0318869A1 Substrate potential detecting circuit
06/07/1989EP0318806A2 Process for peeling protective film off a wafer
06/07/1989EP0318649A2 Positive-working radiation-sensitive composistion and radiation-sensitive recording material produced therefrom for high-energy radiation
06/07/1989EP0318641A2 Process and device for the transmission of thermal energy to or from a plate-like substrate
06/07/1989EP0318555A1 Semiconductor field oxide formation process.
06/07/1989EP0318539A1 Microwave plasma generator
06/07/1989EP0175751B1 Method of fabricating vlsi cmos devices
06/07/1989CN1004456B Semiconductor device and method of producing same
06/07/1989CN1004455B Method of growth of thin film layer for use in a composite semiconductor
06/06/1989US4837794 Filter apparatus for use with an x-ray source
06/06/1989US4837793 Mass limited target
06/06/1989US4837765 Test control circuit for integrated circuit
06/06/1989US4837610 Insulation film for a semiconductor device
06/06/1989US4837609 Semiconductor devices having superconducting interconnects
06/06/1989US4837606 Vertical MOSFET with reduced bipolar effects
06/06/1989US4837605 Indium-phosphide hetero-MIS-gate field effect transistor
06/06/1989US4837536 Monolithic microwave integrated circuit device using high temperature superconductive material
06/06/1989US4837530 Wideband (DC-50 GHz) MMIC FET variable matched attenuator
06/06/1989US4837520 Fuse status detection circuit
06/06/1989US4837505 Test mode activation circuit
06/06/1989US4837461 Master slice type integrated circuit
06/06/1989US4837443 Guard ring for a differentially pumped seal apparatus
06/06/1989US4837186 Silicon semiconductor substrate with an insulating layer embedded therein and method for forming the same
06/06/1989US4837185 Pulsed dual radio frequency CVD process
06/06/1989US4837184 Process of making an electronic device package with peripheral carrier structure of low-cost plastic
06/06/1989US4837183 Controlling temperature
06/06/1989US4837182 Growth mask on substrate; forming, removal sheet
06/06/1989US4837181 ROM memory programming procedure using MOS technology with thin gate oxide and junctions
06/06/1989US4837180 Ladder gate LDDFET
06/06/1989US4837179 Method of making a LDD mosfet
06/06/1989US4837178 Method for producing a semiconductor integrated circuit having an improved isolation structure
06/06/1989US4837177 High speed switching
06/06/1989US4837176 Integrated circuit structures having polycrystalline electrode contacts and process
06/06/1989US4837175 Making a buried channel FET with lateral growth over amorphous region
06/06/1989US4837174 Implanting metal into silicon substrate; heat treatment
06/06/1989US4837173 Overlapping zone doped with germanium and zone doped with phosphorus annealing
06/06/1989US4837172 Method for removing impurities existing in semiconductor substrate
06/06/1989US4837124 Mixtures of photsensitive acid and addition polymer having imide groups blocked by labile acid; resolution; contrast
06/06/1989US4837121 Positive-working photoresists
06/06/1989US4837113 Method for depositing compound from group II-VI
06/06/1989US4837051 Forming apertures in oxide layer, adding diffusion barrier, vapor depositing silicon, doping, etching to planarize
06/06/1989US4837048 Vapor deposition using gaseous silicon compound and gaseous halogen oxidizing agent
06/06/1989US4836979 Cold compacting, annealing, working to produce a high density
06/06/1989US4836905 Processing apparatus
06/06/1989US4836902 Plasma gases; by-product ultraviolet radiation absorption baffles
06/06/1989US4836888 Method of chemically etching semiconductor substrate
06/06/1989US4836887 Chlorofluorocarbon additives for enhancing etch rates in fluorinated halocarbon/oxidant plasmas
06/06/1989US4836886 More fluorine than chlorine; majority oxygen
06/06/1989US4836885 Planarization process for wide trench isolation
06/06/1989US4836883 Quality control testing