Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1989
08/15/1989US4857142 Method and apparatus for controlling simultaneous etching of front and back sides of wafers
08/15/1989US4857141 Method of forming holes in semiconductor integrated circuit device
08/15/1989US4857140 Generating free radicals from flourine-source gas, introducing hydrogen source gas.
08/15/1989US4857138 Silicon trench etch
08/15/1989US4857137 Ion beam etching
08/15/1989US4857136 Reactor monitoring system and method
08/15/1989US4857133 Method and apparatus for bonding with consistent uniform bond thickness
08/15/1989US4857132 Modified contour of passageway reduce particle entrainment; integrated circuits
08/15/1989US4856957 Semiconductor wafer transfer apparatus with back-to-back positioning and separation
08/15/1989US4856905 Projection exposure apparatus
08/15/1989US4856904 Wafer inspecting apparatus
08/15/1989US4856766 Vacuum apparatus for holding workpieces
08/15/1989US4856702 Method for manufacturing semiconductor components
08/15/1989US4856699 Driving mechanism for a high-speed wire contacting device
08/15/1989US4856641 Apparatus and a method for carrying wafers
08/15/1989US4856544 Vessel and system for treating wafers with fluids
08/15/1989US4856456 Apparatus and method for the fluid treatment of a workpiece
08/15/1989US4856326 Apparatus for measuring an adhesion force of a thin film
08/15/1989US4856297 Transfer vessel device and method of transfer using the device
08/15/1989US4856185 Method for fastening electronic components to a substrate using a film
08/15/1989CA1258539A2 High-performance trench capacitors for dram cells
08/10/1989WO1989007367A2 Analog-to-digital converter made with focused ion beam technology
08/10/1989WO1989007358A1 Electronic appliance
08/10/1989WO1989007342A1 Zener power diode
08/10/1989WO1989007341A2 High mobility transistor with opposed gates
08/10/1989WO1989007339A1 Uses of uniaxially electrically conductive articles
08/10/1989WO1989007338A1 Uses of uniaxially electrically conductive articles
08/10/1989WO1989007337A1 Laser-machining polymers
08/10/1989WO1989007336A1 Laminar polymeric sheet
08/10/1989WO1989007335A1 Improved etching method for photoresists or polymers
08/10/1989WO1989007334A1 Ic with means for reducing esd damage
08/10/1989WO1989007333A1 Vertical transistor device fabricated with semiconductor regrowth
08/10/1989WO1989007332A2 Esd protection circuit employing channel depletion
08/10/1989WO1989004549A3 Annealing method for iii-v deposition
08/10/1989DE3841982A1 Leistungs-zener-diode Power zener diode-
08/10/1989DE3802796A1 Elektronisches geraet mit schaltmitteln zur daempfung von nach aussen dringenden hochfrequenten stoerspannungen Electronic geraet with switching forward for damping outwards urgent high frequency voltages
08/09/1989EP0327512A1 Power supply gradually developing an output voltage when switched on
08/09/1989EP0327475A1 Structure of a protection for the outputs of an integrated circuit of a MOS type
08/09/1989EP0327412A1 Passivation process of a integrated circuit
08/09/1989EP0327399A1 Method of manufacturing an uniaxially electrically conductive article
08/09/1989EP0327398A1 Laser-machining polymers
08/09/1989EP0327336A2 Electronic devices incorporating carbon films
08/09/1989EP0327316A2 Semiconductor device having composite substrate formed by fixing two semiconductor substrates in close contact with each other
08/09/1989EP0327311A2 A coating fluid for forming an oxide coating
08/09/1989EP0327210A1 Method of preventing silicide peel-off
08/09/1989EP0327192A2 Methods and apparatus for fabricating a high purity thermally-conductive polymer layer
08/09/1989EP0327152A1 Method of manufacturing a semiconductor device, in which metal silicide is provided in a self-registered manner
08/09/1989EP0327122A2 Complementary bipolar semiconductor device
08/09/1989EP0327093A2 Electron beam exposure method and apparatus
08/09/1989EP0327034A2 Process for the formation of a functional deposited film containing groups II and VI atoms as the main constituent atoms by microwave plasma chemical vapor deposition process
08/09/1989EP0326956A2 Method for connecting devices on an integrated circuit substrate to a metallization layer
08/09/1989EP0326954A2 BiCMOS power transition circuit
08/09/1989EP0326935A2 Process for producing on a surface a thin, X-rays-amorphous layer od aluminium nitride or of aluminium-silicon nitride
08/09/1989EP0326883A2 Zero power, electrically alterable, nonvolatile latch
08/09/1989EP0326879A2 Electrically-erasable, electrically-programmable read-only memory
08/09/1989EP0326877A2 Electrically-erasable, electrically-programmable read-only memory cell
08/09/1989EP0326838A1 Work piece retaining device
08/09/1989EP0326832A1 Atomic planar-doped field-effect transistor
08/09/1989EP0326824A2 Particle source for a reactive ion beam etching or plasma deposition device
08/09/1989EP0326777A1 Access protection structure for integrated circuit
08/09/1989EP0326549A1 A local oxidation of silicon process
08/09/1989EP0213197B1 A method in the manufacture of integrated circuits
08/09/1989EP0174935B1 Dissimilar superimposed grating precision alignment and gap measurement systems
08/09/1989EP0163729B1 Silicon gigabits per second metal-oxide-semiconductor device processing
08/09/1989CN1034636A Method of manufacturing thin film of oxidic superconducting material in accordance with pattern
08/08/1989US4856037 Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment
08/08/1989US4855958 Semiconductor integrated circuit device having logic macro and random access memory macro
08/08/1989US4855953 Semiconductor memory device having stacked memory capacitors and method for manufacturing the same
08/08/1989US4855952 Dram having pip capacitor inside a trench
08/08/1989US4855929 Routing method for use in wiring design
08/08/1989US4855928 Wire bonding device
08/08/1989US4855872 Leadless ceramic chip carrier printed wiring board adapter
08/08/1989US4855871 Thin film semiconductor interconnect module
08/08/1989US4855869 Chip carrier
08/08/1989US4855868 Preformed packaging arrangement for energy dissipating devices
08/08/1989US4855867 Full panel electronic packaging structure
08/08/1989US4855863 Integrated circuit having two circuit blocks therein independently energized through different power supply terminals
08/08/1989US4855806 Thin film transistor with aluminum contacts and nonaluminum metallization
08/08/1989US4855805 Nonlinear semiconductor element, liquid crystal display panel using the same and their manufacturing methods
08/08/1989US4855804 Multilayer trench isolation process and structure
08/08/1989US4855801 Transistor varactor for dynamics semiconductor storage means
08/08/1989US4855800 EPROM with increased floating gate/control gate coupling
08/08/1989US4855799 Power MOS FET with carrier lifetime killer
08/08/1989US4855798 Semiconductor and process of fabrication thereof
08/08/1989US4855797 Modulation doped high electron mobility transistor with n-i-p-i structure
08/08/1989US4855796 Beam lead mixer diode
08/08/1989US4855792 Optical alignment system for use in photolithography and having reduced reflectance errors
08/08/1989US4855775 Developing apparatus
08/08/1989US4855672 Method and process for testing the reliability of integrated circuit (IC) chips and novel IC circuitry for accomplishing same
08/08/1989US4855258 Native oxide reduction for sealing nitride deposition
08/08/1989US4855257 Forming contacts to semiconductor device
08/08/1989US4855255 Tapered laser or waveguide optoelectronic method
08/08/1989US4855254 Method of growing a single crystalline β-SiC layer on a silicon substrate
08/08/1989US4855253 Test method for random defects in electronic microstructures
08/08/1989US4855252 Process for making self-aligned contacts
08/08/1989US4855251 Method of manufacturing electronic parts including transfer of bumps of larger particle sizes
08/08/1989US4855250 Method of manufacturing a semiconductor laser with autodoping control
08/08/1989US4855249 Process for growing III-V compound semiconductors on sapphire using a buffer layer
08/08/1989US4855248 Method of making a semiconductor ROM device
08/08/1989US4855247 Process for fabricating self-aligned silicide lightly doped drain MOS devices
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