Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1991
09/12/1991DE4107329A1 Cleaning semiconductors during mfr. - applying reactive gas and using plasma produced in vessel processing substrate
09/12/1991DE4107149A1 Blocking process in implantation of energetic ions - uses locos nitride film and improves efficiency of implantation
09/12/1991DE4007428A1 Photopolymerisable mixt. sensitive to near UV and visible light
09/12/1991DE4007011A1 Space-saving test head positioner - has hollow shaft clamping to stand with reduced counterweight via pulley system
09/12/1991DE4006158A1 Verfahren zum erzeugen einer isolierten, einkristallinen siliziuminsel A method of producing an insulated monocrystalline silicon island
09/12/1991DE4006070A1 Partitioning semiconductor disk, esp. silicon - by trenches using cutting edge disk having buffer layer
09/11/1991EP0446125A1 Power semiconductor device
09/11/1991EP0446121A1 Blowing door for container of extremely clean confinement
09/11/1991EP0446112A1 Elastomer connector for integrated circuits of analogous devices, and its fabrication method
09/11/1991EP0446079A1 Industrial material with fluorine passivated film and process of manufacturing the same
09/11/1991EP0446032A2 Wet-etch process and composition
09/11/1991EP0446014A2 Top-load socket for integrated circuit device
09/11/1991EP0445981A2 Plasma etching apparatus and method
09/11/1991EP0445964A2 Apparatus and methods relating to scanning ion beams
09/11/1991EP0445937A2 Delay circuit
09/11/1991EP0445928A2 System for facilitating planar probe measurements of high-speed interconnect structures
09/11/1991EP0445909A1 Integrated circuit
09/11/1991EP0445888A2 IGBT semiconductor device with high reverse breakdown voltage and related manufaturing process
09/11/1991EP0445871A1 Apparatus for and method of projecting a mask pattern on a substrate
09/11/1991EP0445870A1 Method of repairing a defect in a lithographic mask
09/11/1991EP0445836A1 Semiconductor device having MOS transistor and method of producing the same
09/11/1991EP0445831A1 Sorting method for variable capacitance diodes
09/11/1991EP0445765A2 Semiconductor integrated circuit having an oriented resistance pattern
09/11/1991EP0445759A1 Multilayer structures with layer interconnection
09/11/1991EP0445756A1 High voltage MOS transistor and production method thereof, and semiconductor device having high voltage MOS transistor and production method thereof
09/11/1991EP0445728A1 Apparatus and method for cleaning solid surface
09/11/1991EP0445725A1 FET having U-shaped gate electrode
09/11/1991EP0445697A2 Component evaluation system
09/11/1991EP0445680A2 Positive type photoresist composition
09/11/1991EP0445654A1 Holding and positioning device for a substrate container
09/11/1991EP0445651A2 Method and device to hold and transport plate-shaped substrates
09/11/1991EP0445649A2 Process for producing a semiconductor substrate having therein isolated semiconductor regions
09/11/1991EP0445624A2 Photopolymerisable composition and recording material produced therefrom
09/11/1991EP0445596A2 Double-dome reactor for semiconductor processing
09/11/1991EP0445535A2 Method of forming an oxide film
09/11/1991EP0445533A2 Apparatus for producing compound semiconductor thin films
09/11/1991EP0445471A2 Method of forming isolation trenches in a semiconductor substrate
09/11/1991EP0445323A1 Field effect semiconductor device having current paths formed in conductive layer of semiconductor substrate
09/11/1991EP0445317A1 Semiconductor device with a fusible link and method of making a fusible link on a semiconductor substrate
09/11/1991CN1054441A 共沸溶剂组合物 Azeotropic solvent composition
09/11/1991CN1013909B Chemical ni-plating process for solar cell and silicon element
09/11/1991CN1013882B Process for producing cermet substrate with glass adhesion component
09/10/1991US5047981 Bit and block erasing of an electrically erasable and programmable read-only memory array
09/10/1991US5047949 Standard cell LSI layout method
09/10/1991US5047836 Temperature compensating contact to avoid misregistration
09/10/1991US5047832 Gold alloy layer
09/10/1991US5047831 Reduced resistance contact region for semiconductor device
09/10/1991US5047830 Field emitter array integrated circuit chip interconnection
09/10/1991US5047829 Monolithic p-i-n diode limiter
09/10/1991US5047828 PNP type lateral transistor with minimal substrate operation interference
09/10/1991US5047827 Integrated circuit resistor fabrication using focused ion beam
09/10/1991US5047826 Gigaohm load resistor for BICMOS process
09/10/1991US5047825 Semiconductor integrated circuit device having a decoder portion of complementary misfets employing multi-level conducting layer and a memory cell portion
09/10/1991US5047823 Circuit structure having a lateral bipolar transistor and its method of manufacture
09/10/1991US5047820 Semi self-aligned high voltage P channel FET
09/10/1991US5047819 Amorphous-silicon thin film transistor array substrate
09/10/1991US5047818 Semiconductor memory device having buried structure to suppress soft errors
09/10/1991US5047817 Stacked capacitor for semiconductor memory device
09/10/1991US5047815 Semiconductor memory device having a trench-stacked capacitor
09/10/1991US5047813 Semiconductor device and method of manufacturing the same
09/10/1991US5047812 Insulated gate field effect device
09/10/1991US5047811 Field effect transistor with channel formed on homojunction interface
09/10/1991US5047713 Method and apparatus for measuring a deep impurity level of a semiconductor crystal
09/10/1991US5047711 Wafer-level burn-in testing of integrated circuits
09/10/1991US5047706 Constant current-constant voltage circuit
09/10/1991US5047664 Trimming circuit
09/10/1991US5047649 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
09/10/1991US5047647 Electron beam lithography apparatus
09/10/1991US5047646 Method of correcting astigmatism of variable shaped beam
09/10/1991US5047611 Method for selectively curing a film on a substrate
09/10/1991US5047535 For production of multilayer films
09/10/1991US5047370 Method for producing compound semiconductor single crystal substrates
09/10/1991US5047369 Gelation of silica, water, and phosphoric acid, drying, dehydration, sintering, cooling
09/10/1991US5047367 Annealing, semiconductors
09/10/1991US5047366 Method of diffusing silicon into compound semiconductors and compound semiconductor devices
09/10/1991US5047365 Method for manufacturing a heterostructure transistor having a germanium layer on gallium arsenide using molecular beam epitaxial growth
09/10/1991US5047362 Method of making large-scale EPROM memory with a checker board pattern and an improved coupling factor
09/10/1991US5047360 Doped semiconductor and passivation layers
09/10/1991US5047359 Method of implanting into the sidewall of a trench by rotating the wafer
09/10/1991US5047358 Implantation and drive-in step
09/10/1991US5047357 Method for forming emitters in a BiCMOS process
09/10/1991US5047356 Low edge and back channel current leakages; doping oxidation, etching
09/10/1991US5047355 Semiconductor diode and method for making it
09/10/1991US5047176 Incombustible azeotropic like solvent compositions
09/10/1991US5047117 Photolithography Masking Techniques In Semiconductor Manufacturing
09/10/1991US5047115 Inorganic fluorine, oxidizing, and inert gas mixture
09/10/1991US5047111 Method of forming a metal silicide film
09/10/1991US5046953 Method and apparatus for mounting an integrated circuit on a printed circuit board
09/10/1991US5046909 Method and apparatus for handling semiconductor wafers
09/10/1991US5046837 Illumination system
09/10/1991US5046657 Tape automated bonding of bumped tape on bumped die
09/10/1991US5046656 Vacuum die attach for integrated circuits
09/10/1991US5046655 Device for detecting height of bonding surface
09/10/1991US5046654 Ultrasonic wire bonding apparatus
09/10/1991US5046389 Universal punch block apparatus
09/10/1991CA2037751A1 Photopolymerizable mixture and recording material produced therefrom
09/10/1991CA2037479A1 Process for making thick multilayers of polyimide
09/10/1991CA1288852C Stable ohmic contacts to thin films of p-type tellurium-containing ii-vi semiconductors
09/08/1991CA2036687A1 Component evaluation system
09/05/1991WO1991013533A1 Selectively releasing conductive runner and substrate assembly
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