Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1992
08/18/1992US5139904 Method of producing high resolution and reproducible patterns
08/18/1992US5139869 Thin dielectric layer on a substrate
08/18/1992US5139852 Used for microelectronics such as semiconductor package; heat resistance, hermetic sealing, strees relieving, noncracking and high strength
08/18/1992US5139851 Used for microelectronics such as semiconductor package; heat resistance, hermetic sealing, stree relieving, noncracking and high strength
08/18/1992US5139633 Film-forming on substrate by sputtering
08/18/1992US5139624 Method for making porous semiconductor membranes
08/18/1992US5139610 Surrounding via-defining walls with recesses which act as barriers to retain vapor deposits and also protectively cover active regions
08/18/1992US5139608 Method of planarizing a semiconductor device surface
08/18/1992US5139606 Laser bilayer etching of GaAs surfaces
08/18/1992US5139591 Laser deposition of crystalline boron nitride films
08/18/1992US5139571 Fine abrasive particles in quaternary ammonium compound slurry
08/18/1992US5139459 Clean transfer method and system therefor
08/18/1992US5139383 Device for positioning objects within a sealed chamber
08/18/1992CA1306551C Semiconductor device having tungsten plugs
08/13/1992DE4203603A1 Recrystallisation of amorphous silicon films at low temp. - uses an anneal to reduce the hydrogen and fluorine content before recrystallisation under ion-implantation
08/13/1992DE4203410A1 Lithography device for wafer structuring - has wafer support table, SXM base with reference structure, and jibs, each with STM sensor
08/13/1992DE4200763A1 Semiconductor DRAM with read=out amplifier circuit - has driver assembly for energising first read=out amplifier sections, with MISFETs in driver assembly
08/13/1992DE4103940A1 Finely-crystalline soldered joint for joining semiconductor chips to support - using solder foil, temp. of which is held just below the liquids after wetting support
08/13/1992DE4103294A1 Electrically conductive vias through ceramic substrates - are made by drawing metal from tracks into holes by capillary action using filling of holes by suitable powder
08/12/1992WO1992014261A1 Multichip module and integrated circuit substrates having planarized patterned surfaces
08/12/1992EP0498752A1 Electrostatic chuck with diamond coating
08/12/1992EP0498717A1 Buried localised oxidation process of a silicon substrate and corresponding integrated circuit
08/12/1992EP0498713A2 Process of mounting miniature electronic components with solderable leads on a flexible substrate
08/12/1992EP0498703A1 Process and device to place chips into receptacles provided in a substrate using an adhesive
08/12/1992EP0498702A1 Process and apparatus for insertion of chips into receptacles of a substrate using an intermediate film
08/12/1992EP0498663A2 Method for producing a semi conductor device using sputtering
08/12/1992EP0498653A2 A method for measuring the diameter of single crystal ingot
08/12/1992EP0498652A1 A single crystal pulling apparatus
08/12/1992EP0498642A1 A semiconductor memory device
08/12/1992EP0498622A2 Liquid vaporizer-feeder
08/12/1992EP0498604A1 Semiconductor device having a teos based spin-on-glass and process for making the same
08/12/1992EP0498580A1 Method for depositing a metal film containing aluminium by use of alkylaluminium halide
08/12/1992EP0498567A1 Mixed CMOS/BiCMOS device
08/12/1992EP0498550A1 Method of manufacturing via holes for multilayer interconnection of semiconductor devices
08/12/1992EP0498521A1 Improved surface planarizing methods for integrated circuit devices
08/12/1992EP0498499A1 Method of and device for repetitively imaging a mask pattern on a substrate
08/12/1992EP0498496A1 Lithographic device with a suspended object table
08/12/1992EP0498475A2 Method of manufacturing a semiconductor device
08/12/1992EP0498449A2 Semiconductor integrated circuit device having dynamic burn-in circuit
08/12/1992EP0498446A2 Multichip packaged semiconductor device and method for manufacturing the same
08/12/1992EP0498336A1 Common-line connection for integrated memory array
08/12/1992EP0498274A2 Electrolytic method for forming vias and through holes in copper-invar-copper core structures
08/12/1992EP0498251A2 Word line driver circuit for dynamic random access memories
08/12/1992EP0498250A1 Etching method for increased circuitized line width unitformity
08/12/1992EP0498209A1 Dry etching method of a silicon based material, without use of a chlorofluorocarbon gas
08/12/1992EP0498198A1 Hermetic device package for microelectronic frequency selection components
08/12/1992EP0498148A2 TFT LCD display control system for displaying data upon detection of VRAM write access
08/12/1992EP0498129A2 Latch and data out driver for memory arrays
08/12/1992EP0498109A1 Method for manufacturing semiconductor device having a via hole
08/12/1992EP0498101A1 Monolithic microwave IC oscillator
08/12/1992EP0498055A1 Thermal annealing of semiconductor devices
08/12/1992EP0498007A1 Method and apparatus for contactless testing
08/12/1992EP0498006A1 Superheterodyning technique in the spatial frequency domain and structure for pattern registration measurement
08/12/1992EP0497982A1 Semiconductor device and its manufacturing method
08/12/1992EP0497963A1 Mounting of electronic devices
08/12/1992EP0497948A1 Method and device for hermetic encapsulation of electronic components.
08/12/1992EP0497909A1 Cryogenic probe station
08/12/1992EP0497896A1 Non-photographic method for patterning organic polymer films.
08/12/1992EP0493411A4 Method and apparatus for aligning mating form tools
08/12/1992EP0417239A4 Method of forming contact bumps in contact pads
08/12/1992EP0205571B1 Establishing and/or evaluating alignment by means of alignment marks
08/12/1992EP0177544B1 Method of producing an isfet and same isfet
08/12/1992CA2101426A1 Multichip module and integrated circuit substrates having planarized patterned surfaces
08/11/1992USRE34025 Semiconductor device with isolation between MOSFET and control circuit
08/11/1992US5138573 Non-volatile storage cell
08/11/1992US5138520 Methods and apparatus for material deposition
08/11/1992US5138518 Method for manufacturing a selective call receiver
08/11/1992US5138439 Semiconductor device
08/11/1992US5138432 Metal/disilicide interface free of oxygen and/or fluorine contamination achieved by depositing metal on C49 titanium disilicide phase then annealing to C54 phase
08/11/1992US5138430 High performance versatile thermally enhanced IC chip mounting
08/11/1992US5138429 Precisely aligned lead frame using registration traces and pads
08/11/1992US5138427 Semiconductor device having a particular structure allowing for voltage stress test application
08/11/1992US5138424 Positive working polyamic acid/imide photoresist compositions and their use as dielectrics
08/11/1992US5138422 Semiconductor device which includes multiple isolated semiconductor segments on one chip
08/11/1992US5138421 Buffer layer having getter and layer distortion buffering ability; reduction of crystallization defects such as dislocation and oxidation-induced stacking fault
08/11/1992US5138419 Wafer scale integration device with dummy chips and relay pads
08/11/1992US5138418 Transistor structure for testing emitter-base junction
08/11/1992US5138417 High-frequency semiconductor device
08/11/1992US5138413 Piso electrostatic discharge protection device
08/11/1992US5138412 Dynamic ram, having an improved large capacitance
08/11/1992US5138410 Nonvolatile semiconductor memory device having tunnel insulating film structure
08/11/1992US5138409 High voltage semiconductor device having silicon-on-insulator structure with reduced on-resistance
08/11/1992US5138407 Transistor made of 3-5 group semiconductor materials on a silicon substrate
08/11/1992US5138406 Ion implantation masking method and devices
08/11/1992US5138405 Quasi one-dimensional electron gas field effect transistor
08/11/1992US5138403 High temperature Schottky barrier bypass diodes
08/11/1992US5138256 Method and apparatus for determining the thickness of an interfacial polysilicon/silicon oxide film
08/11/1992US5138190 Charge pump circuit
08/11/1992US5138180 Wire bonding inspecting apparatus utilizing a controlling means for shifting from one inspected area to another
08/11/1992US5138176 Projection optical apparatus using plural wavelengths of light
08/11/1992US5138115 Carrierles surface mounted integrated circuit die
08/11/1992US5138114 Hybrid/microwave enclosures and method of making same
08/11/1992US5138105 Gas separation membrane
08/11/1992US5137847 Method of producing GaAs single crystal substrate using three stage annealing and interstage etching
08/11/1992US5137846 Applying a mixture of inorganic powder and cyanate ester; curing; protective coating; integrated circuit dies
08/11/1992US5137845 Method of forming metal contact pads and terminals on semiconductor chips
08/11/1992US5137843 Isolation method for semiconductor device
08/11/1992US5137842 Stacked H-cell capacitor and process to fabricate same
08/11/1992US5137840 Vertical bipolar transistor with recessed epitaxially grown intrinsic base region
08/11/1992US5137839 Method of manufacturing a bipolar transistor having polysilicon layer which serves as an emitter electrode and passivating dangling bonds