| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/30/1996 | US5487821 Anode structure for magnetron sputtering systems |
| 01/30/1996 | US5487811 Process for preparation of semiconductor device |
| 01/30/1996 | US5487786 Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder |
| 01/30/1996 | US5487697 Polishing apparatus and method using a rotary work holder travelling down a rail for polishing a workpiece with linear pads |
| 01/30/1996 | US5487398 Rotary cleaning method with chemical solutions and rotary cleaning apparatus with chemical solutions |
| 01/30/1996 | US5487358 Apparatus for growing silicon epitaxial layer |
| 01/30/1996 | US5487354 Method for pulling a silicon single crystal |
| 01/30/1996 | US5487313 Fluid-lock fixed-volume injector |
| 01/30/1996 | CA2070257C Optical pellicle holder |
| 01/30/1996 | CA2066002C Fabrication of quantum devices in compound semiconductor layers and resulting structures |
| 01/25/1996 | WO1996002122A1 Electroless method of forming contact bumps |
| 01/25/1996 | WO1996002071A1 Packaged integrated circuit |
| 01/25/1996 | WO1996002070A2 Integrated circuit comprising a trench isolation structure and an oxygen barrier layer and method for forming the integrated circuit |
| 01/25/1996 | WO1996002069A1 Storage container for semiconductor crystal |
| 01/25/1996 | WO1996002068A1 Microelectronic mounting with multiple lead deformation |
| 01/25/1996 | WO1996002067A1 Integrated circuit capacitors and process for making the same |
| 01/25/1996 | WO1996002066A2 Novolac polymer planarization films for microelectronic structures |
| 01/25/1996 | WO1996001836A1 Self-addressable self-assembling microelectronic systems and devices for molecular biological analysis and diagnostics |
| 01/25/1996 | DE4442652A1 Three=dimensional circuit metallisation plane contact hole formation |
| 01/25/1996 | DE4438380C1 Depositing single crystalline mixed crystal layer of germanium silicide |
| 01/25/1996 | DE4425389A1 Electrically and thermally conductive motor vehicle component coupler |
| 01/25/1996 | DE4425337A1 Semiconductor circuit appts. for high power and high frequency module |
| 01/25/1996 | DE4409068A1 Oxidised silicon layer to boron-silicate glass bonding method |
| 01/25/1996 | DE19526511A1 PCB mounting applications of an encapsulated semiconductor package |
| 01/25/1996 | DE19526232A1 Fabrication of higher value MOS DRAM capacitors with increased capacitor surface area |
| 01/25/1996 | DE19525580A1 Element insulation region formation mfr. for semiconductor device |
| 01/25/1996 | DE19525388A1 Semiconductor chip electronic component with current input and output conductor |
| 01/25/1996 | DE19520053A1 Transport system for semiconductor elements |
| 01/25/1996 | DE19517062A1 Anisotrop leitender Kleber und Verfahren zur Herstellung eines anisotrop leitenden Klebers An anisotropically conductive adhesive and process for producing an anisotropically conductive adhesive |
| 01/25/1996 | CA2194376A1 Novolac polymer planarization films for microelectronic structures |
| 01/24/1996 | EP0693827A2 Quasi-static adiabatic gates |
| 01/24/1996 | EP0693784A1 Safeguard for integrated output power stages employing multiple bond-wires |
| 01/24/1996 | EP0693780A2 Method and apparatus for directly joining a chip to a heat sink |
| 01/24/1996 | EP0693779A2 Resin sealing type semiconductor device and method of making the same |
| 01/24/1996 | EP0693778A2 Semiconductor device with integral heatsink |
| 01/24/1996 | EP0693777A1 Injection moulded BGA-package |
| 01/24/1996 | EP0693775A2 Fabrication method of MOS-transistors and bipolar transistors on a semiconductor wafer |
| 01/24/1996 | EP0693774A2 Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity |
| 01/24/1996 | EP0693773A1 VDMOS power device and manufacturing process thereof |
| 01/24/1996 | EP0693772A2 Process for contacting SIPOS passivated semiconductor devices |
| 01/24/1996 | EP0693771A1 Electrostatic chuck for a substrate in a process chamber |
| 01/24/1996 | EP0693770A1 Electrostatic chuck for magnetic flux processing |
| 01/24/1996 | EP0693769A2 Plasma reactor with enhanced plasma uniformity by gas addition, reduced chamber diameter and reduced RF wafer pedestal diameter |
| 01/24/1996 | EP0693626A1 Vacuum chamber for ultra high vacuum processing at high temperatures |
| 01/24/1996 | EP0693224A1 Layered system with an electrically activatable layer |
| 01/24/1996 | EP0693223A1 Method of joining electrical contact points |
| 01/24/1996 | EP0693222A1 Method of manufacturing a silicon carbide field effect transistor |
| 01/24/1996 | EP0693221A1 Forming a layer |
| 01/24/1996 | EP0693035A1 Wafer transport device |
| 01/24/1996 | EP0594654B1 Machine tool with curved drive, especially for stamping and shaping the connecting pins of integrated circuits |
| 01/24/1996 | CN1115588A Process and apparatus for etching semiconductor wafers |
| 01/24/1996 | CN1115563A Core elements assembly and method for production and assembling same |
| 01/24/1996 | CN1115499A Semiconductor device and method for manufacturing the same |
| 01/24/1996 | CN1115497A Method for repairing a defect-generated cell using a laser |
| 01/24/1996 | CN1115496A Anti-reflective layer and method for manufacturing semiconductor device using the same |
| 01/24/1996 | CN1115495A Sub-micron bonded soi by trench planarization |
| 01/24/1996 | CN1115418A Phase shift mask and method for fabricating the same |
| 01/24/1996 | CN1115417A Phase shift mask |
| 01/24/1996 | CN1115416A Reticle and method for measuring rotation error of reticle by use of the reticle |
| 01/24/1996 | CN1115415A A reticle and a method for measuring blind setting accuracy using the same |
| 01/24/1996 | CN1115414A Photomask for the measurement of resolution of exposure equipment |
| 01/24/1996 | CN1115412A Method for fabricating a phase shift mask |
| 01/24/1996 | CN1115411A Half-tone type phase shift mask and method for fabrication thereof |
| 01/24/1996 | CN1115410A Photo mask provided with development rate measuring pattern and method for measuring development rate uniformity |
| 01/24/1996 | CN1115409A Method for forming photoresist patterns |
| 01/24/1996 | CN1115408A Half-tone type phase shift mask and method for fabricating the same |
| 01/23/1996 | US5487127 Rapid thermal heating apparatus and method utilizing plurality of light pipes |
| 01/23/1996 | US5487034 Semiconductor memory device and method for writing data therein |
| 01/23/1996 | US5487031 Three-dimensional ferroelectric integrated circuit having insulation layer between memory layers |
| 01/23/1996 | US5487029 Semiconductor memory device having a non-volatile memory composed of ferroelectric capacitors which are selectively addressed |
| 01/23/1996 | US5486975 Corrosion resistant electrostatic chuck |
| 01/23/1996 | US5486859 Charge-coupled device type solid state imaging device making best use of effective pixels and obtaining images of different two or more kinds of aspect ratios |
| 01/23/1996 | US5486851 Illumination device using a pulsed laser source a Schlieren optical system and a matrix addressable surface light modulator for producing images with undifracted light |
| 01/23/1996 | US5486772 Reliability test method for semiconductor trench devices |
| 01/23/1996 | US5486733 Bonding apparatus |
| 01/23/1996 | US5486722 For a semiconductor device |
| 01/23/1996 | US5486719 Semiconductor device including insulating film arrangement having low reflectance |
| 01/23/1996 | US5486718 High voltage planar edge termination structure and method of making same |
| 01/23/1996 | US5486717 Semiconductor memory device |
| 01/23/1996 | US5486716 Semiconductor integrated circuit device with electrostatic damage protection |
| 01/23/1996 | US5486715 High frequency MOS device |
| 01/23/1996 | US5486714 Trench EEPROM with tunnel oxide in trench |
| 01/23/1996 | US5486713 Semiconductor device having a capacitor |
| 01/23/1996 | US5486712 DRAM having peripheral circuitry in which source-drain interconnection contact of a MOS transistor is made small by utilizing a pad layer and manufacturing method thereof |
| 01/23/1996 | US5486710 Field effect transistor |
| 01/23/1996 | US5486708 Light valve device using semiconductive composite substrate |
| 01/23/1996 | US5486707 Antifuse structure with double oxide layers |
| 01/23/1996 | US5486706 Quantization functional device utilizing a resonance tunneling effect and method for producing the same |
| 01/23/1996 | US5486704 Semiconductor device and electronic device by use of the semiconductor |
| 01/23/1996 | US5486702 Scan technique to reduce transient wafer temperatures during ion implantation |
| 01/23/1996 | US5486493 Planarized multi-level interconnect scheme with embedded low-dielectric constant insulators |
| 01/23/1996 | US5486492 Thin films of high melting metals and insulating layers |
| 01/23/1996 | US5486489 Method of manufacturing a semiconductor component, in particular a buried ridge laser |
| 01/23/1996 | US5486488 Process for manufacturing semiconductor device |
| 01/23/1996 | US5486486 Process for the manufacture of an integrated voltage limiter and stabilizer in flash EEPROM memory devices |
| 01/23/1996 | US5486485 Method of manufacturing a reflective display |
| 01/23/1996 | US5486483 Method of forming closely spaced metal electrodes in a semiconductor device |
| 01/23/1996 | US5486482 Process for fabricating metal-gate CMOS transistor |
| 01/23/1996 | US5486480 Method of fabrication of protected programmable transistor with reduced parasitic capacitances |
| 01/23/1996 | US5486447 Heat resistance, storage stability |