| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/09/1996 | US5483349 Apparatus for detecting positions of marks in projection aligner wherein an auxiliary pattern is constructed to produce a signal level that is independent of the surface condition of a substrate |
| 01/09/1996 | US5483343 Wavelength compensator in a helium ambience |
| 01/09/1996 | US5483173 Current measuring structure for testing integrated circuits |
| 01/09/1996 | US5483152 Wide range power supply for integrated circuits |
| 01/09/1996 | US5483138 System and method for automated positioning of a substrate in a processing chamber |
| 01/09/1996 | US5483106 Semiconductor device for sensing strain on a substrate |
| 01/09/1996 | US5483104 Semiconductor structure |
| 01/09/1996 | US5483100 Integrated circuit package with via interconnections formed in a substrate |
| 01/09/1996 | US5483098 Semiconductor device |
| 01/09/1996 | US5483097 Film made from hydrogen containing silicon nitride film with specified hydrogen bond concentration amd silicon/nitrogen ratio limits; transmits uv radiation |
| 01/09/1996 | US5483095 Optical semiconductor device |
| 01/09/1996 | US5483094 Electrically programmable read-only memory cell |
| 01/09/1996 | US5483092 Semiconductor device having a via-hole with a void area for reduced cracking |
| 01/09/1996 | US5483091 Charge-coupled device array for spectroscopic detection |
| 01/09/1996 | US5483089 Electrically isolated MESFET |
| 01/09/1996 | US5483084 Diamond covered member and process for producing the same |
| 01/09/1996 | US5483083 Semiconductor integrated circuit device |
| 01/09/1996 | US5483082 Thin film transistor matrix device |
| 01/09/1996 | US5483077 System and method for magnetic scanning, accelerating, and implanting of an ion beam |
| 01/09/1996 | US5483056 Method of projecting exposure with a focus detection mechanism for detecting first and second amounts of defocus |
| 01/09/1996 | US5483041 For measuring thermal energy in a high temperature furnace |
| 01/09/1996 | US5482903 Powder mixture of boria, calcia, and alumina; high density, thermoconductivity |
| 01/09/1996 | US5482900 Method for forming a metallurgy system having a dielectric layer that is planar and void free |
| 01/09/1996 | US5482899 Leveling block for semiconductor demounter |
| 01/09/1996 | US5482898 Method for forming a semiconductor device having a thermal dissipator and electromagnetic shielding |
| 01/09/1996 | US5482895 Method of manufacturing semiconductor devices having silicide electrodes |
| 01/09/1996 | US5482894 Method of fabricating a self-aligned contact using organic dielectric materials |
| 01/09/1996 | US5482890 Method of fabricating quantum dot structures |
| 01/09/1996 | US5482889 Method for producing of semiconductor device having of channel stopper under field insulating layer |
| 01/09/1996 | US5482888 Method of manufacturing a low resistance, high breakdown voltage, power MOSFET |
| 01/09/1996 | US5482887 Method of manufacturing a semiconductor device with a passivated side |
| 01/09/1996 | US5482886 Method for fabricating dynamic random access memory capacitor |
| 01/09/1996 | US5482885 Method for forming most capacitor using poly spacer technique |
| 01/09/1996 | US5482883 Method for fabricating low leakage substrate plate trench DRAM cells and devices formed thereby |
| 01/09/1996 | US5482882 Multilayer polysilicon electrodes for capacitors and heat treatment |
| 01/09/1996 | US5482881 Method of making flash EEPROM memory with reduced column leakage current |
| 01/09/1996 | US5482880 Non-volatile memory cell and fabrication method |
| 01/09/1996 | US5482879 Process of fabricating split gate flash memory cell |
| 01/09/1996 | US5482878 Method for fabricating insulated gate field effect transistor having subthreshold swing |
| 01/09/1996 | US5482877 Method for making a semiconductor device having a silicon-on-insulator structure |
| 01/09/1996 | US5482876 Field effect transistor without spacer mask edge defects |
| 01/09/1996 | US5482875 Method for forming a linear heterojunction field effect transistor |
| 01/09/1996 | US5482874 Inversion implant isolation process |
| 01/09/1996 | US5482873 Method for fabricating a bipolar power transistor |
| 01/09/1996 | US5482872 Method of forming isolation region in a compound semiconductor substrate |
| 01/09/1996 | US5482871 Method for forming a mesa-isolated SOI transistor having a split-process polysilicon gate |
| 01/09/1996 | US5482870 Methods for manufacturing low leakage current offset-gate thin film transistor |
| 01/09/1996 | US5482869 Gettering of unwanted metal impurity introduced into semiconductor substrate during trench formation |
| 01/09/1996 | US5482818 Printed and integrated circuits, using computer to generate master reticle |
| 01/09/1996 | US5482817 Absorbers for photoresists for ultraviolet radiation |
| 01/09/1996 | US5482799 Defect detection; homogenous monolayer and transmitting films |
| 01/09/1996 | US5482748 Bbowl shape substrate coated with microwave plasma |
| 01/09/1996 | US5482739 Silicon nitride deposition |
| 01/09/1996 | US5482735 Method for making multi-layer ceramic packages |
| 01/09/1996 | US5482611 Physical vapor deposition employing ion extraction from a plasma |
| 01/09/1996 | US5482598 Micro channel element and method of manufacturing the same |
| 01/09/1996 | US5482566 Mixed with alkanolamine and chelate compound |
| 01/09/1996 | US5482559 Heat treatment boat |
| 01/09/1996 | US5482558 Heat treatment boat support |
| 01/09/1996 | US5482555 Liquid-phase epitaxy growth system and method for growing epitaxial layer |
| 01/09/1996 | US5482524 Atmospheric pressure, elevated temperature gas desorption apparatus |
| 01/09/1996 | US5482471 Socket apparatus for IC package testing |
| 01/09/1996 | US5482174 Method for removing copper oxide on the surface of a copper film and a method for patterning a copper film |
| 01/09/1996 | US5482161 Mechanical interface wafer container |
| 01/09/1996 | US5482068 Cleaning apparatus |
| 01/09/1996 | US5482059 Triple zone mascara brush |
| 01/09/1996 | US5481899 Pressure differential downset apparatus |
| 01/09/1996 | US5481798 Etching method for forming a lead frame |
| 01/04/1996 | WO1996000494A1 Vertical interconnect process for silicon segments |
| 01/04/1996 | WO1996000492A1 Method and device for coating printed-circuit boards, in particular for the manufacture of multi-chip-modules |
| 01/04/1996 | WO1996000452A2 Charge coupled device, and imaging device comprising such a charge coupled device |
| 01/04/1996 | DE4440000C1 Heat treatment system for semiconductor disc |
| 01/04/1996 | DE4423326A1 Back etching silicon wafer structure |
| 01/04/1996 | DE4423067A1 Insulated semiconductor substrate prodn. method |
| 01/04/1996 | DE4422913A1 Prodn. of microstructures used in the construction of microsystems |
| 01/04/1996 | DE4421843A1 Vorrichtung und Verfahren zum Ablösen von Partikeln auf Gegenständen Apparatus and method for peeling off of particles on objects |
| 01/04/1996 | DE19524027A1 Semiconductor device |
| 01/04/1996 | DE19524025A1 Substrate holder for esp. dry spinning wafer after cleaning process |
| 01/04/1996 | DE19523969A1 Component transport system for integrated circuit testing unit |
| 01/04/1996 | DE19523743A1 Prodn. of capacitor on semiconductor element |
| 01/04/1996 | DE19522942A1 Multiple substrate conveyor for semiconductor device mfr. system |
| 01/04/1996 | DE19519017A1 Method of improving structure with different component elements |
| 01/04/1996 | DE19517002A1 Semiconductor field effect transistor for SRAM or DRAM |
| 01/03/1996 | EP0690666A1 Structure and method for semiconductor processing |
| 01/03/1996 | EP0690579A2 Field programmable gate arrays |
| 01/03/1996 | EP0690575A1 Device for activating a source of bias voltage |
| 01/03/1996 | EP0690514A2 SOI transistor having a self-aligned body contact |
| 01/03/1996 | EP0690513A2 Step-cut insulated gate static induction transistors and method of manufacturing the same |
| 01/03/1996 | EP0690511A1 Compound semiconductor device and its manufacturing method |
| 01/03/1996 | EP0690509A1 Substrate contact for gate array base cell and method of forming same |
| 01/03/1996 | EP0690508A2 Buried layer in a memory array |
| 01/03/1996 | EP0690507A1 Semiconductor device and method of manufacturing the same |
| 01/03/1996 | EP0690506A1 Method of fabrication of a semiconductor device comprising at least two field-effect transistors having a different pinch-off voltage |
| 01/03/1996 | EP0690505A2 Sintered body for and manufacture of ceramic substrates |
| 01/03/1996 | EP0690504A1 Solder terminal and method of fabricating it |
| 01/03/1996 | EP0690503A1 Improved interconnect line structure and process therefor |
| 01/03/1996 | EP0690501A2 Integrated circuit package with diamond heat sink |
| 01/03/1996 | EP0690499A2 Paddleless molded plastic semiconductor chip package |
| 01/03/1996 | EP0690496A2 DRAM cell with trench capacitor |
| 01/03/1996 | EP0690495A1 Method for making circular diode chips through glass passivation |