Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1996
01/23/1996US5486427 Patterned array of uniform metal microbeads
01/23/1996US5486424 Silylated photoresist layer and planarizing method
01/23/1996US5486282 Electroetching process for seed layer removal in electrochemical fabrication of wafers
01/23/1996US5486267 Method for applying photoresist
01/23/1996US5486266 Integrated circuits
01/23/1996US5486265 Chemical-mechanical polishing of thin materials using a pulse polishing technique
01/23/1996US5486264 Laser etching of semiconductors
01/23/1996US5486263 Etching a diamond body with a molten or partially molten metal
01/23/1996US5486237 Polysilicon thin film and method of preparing polysilicon thin film and photovoltaic element containing same
01/23/1996US5486235 Plasma dry cleaning of semiconductor processing chambers
01/23/1996US5486234 Removal of field and embedded metal by spin spray etching
01/23/1996US5486132 For mounting to a tool
01/23/1996US5486080 High speed movement of workpieces in vacuum processing
01/23/1996US5485949 Capillary for a wire bonding apparatus and a method for forming an electric connection bump using the capillary
01/23/1996US5485910 Conveyor
01/23/1996US5485861 Cleaning tank
01/23/1996US5485759 Boat test apparatus
01/23/1996US5485644 Substrate treating apparatus
01/23/1996CA2031459C Surface structure of ceramics substrate and method of manufacturing the same
01/19/1996CA2151850A1 Hot-clock adiabatic gate using multiple clock signals with different phases
01/18/1996WO1996001549A1 Ternary compound film and manufacturing method therefor
01/18/1996WO1996001501A1 Lateral semiconductor structure designed to produce a temperature-compensated voltage limitation
01/18/1996WO1996001500A1 SiC FIELD-EFFECT TRANSISTORS AND METHOD OF MANUFACTURING THEM
01/18/1996WO1996001496A1 Method of manufacturing a semiconductor device with a moisture impermeable barrier layer
01/18/1996WO1996001495A1 Method, carrier and mould parts for encapsulating a chip
01/18/1996WO1996001494A1 Method of forming an ohmic contact to a iii-v semiconductor material
01/18/1996WO1996001493A1 Thin film of abo3 with excess a-site and b-site modifiers and method of fabricating integrated circuits with same
01/18/1996WO1996001483A1 Micromechanical component and process for producing the same
01/18/1996DE4432806C1 Device for holding quartz-glass hollow cylinders in optical fibre mfr.
01/18/1996DE4425258A1 Electrical module terminal bending method for e.g. diode SMD package
01/18/1996DE4424929A1 Holder used in deposition appts. for semiconductor material
01/18/1996DE2858815C2 Substrate surface prodn. for isoplanar semiconductor device
01/18/1996DE19525745A1 Verfahren zur Bildung eines Abdeckungsmusters A method for forming a resist pattern
01/18/1996DE19525576A1 Dünnfilmtransistor und Verfahren zu dessen Herstellung A thin film transistor and method of producing the
01/18/1996DE19525536A1 Integrated circuit fault analysis testing method
01/18/1996DE19523536A1 CMOS FET and complementary bipolar transistor mfr.
01/18/1996DE19517975A1 Polysilizium-Feldringstruktur für Leistungs-IC's Polysilicon field ring structure for power ICs
01/18/1996DE19509198A1 Semiconductor device for dynamic random access memory
01/17/1996EP0692826A2 Method to suppress subthreshold leakage due to sharp isolation corners in submicron FET structures
01/17/1996EP0692825A2 Analogue MISFET with threshold voltage adjuster
01/17/1996EP0692824A2 Improvements in and relating to semiconductor devices
01/17/1996EP0692821A2 Method of manufacturing semiconductor layer
01/17/1996EP0692820A1 Manufacturing one sided resin sealed semiconductor devices and a carrier used for it
01/17/1996EP0692819A2 Method of manufacturing a semiconductor device including pre-oxidation process
01/17/1996EP0692818A2 Oxygen removing method and contaminant removing method usable in semiconductor device fabricating process, and compound semiconductor device fabricating method and apparatus based on both methods
01/17/1996EP0692817A1 Wafer carrier
01/17/1996EP0692816A2 Wafer shipper and package
01/17/1996EP0692815A2 Method and apparatus for etching film layers on large substrates
01/17/1996EP0692814A1 Multi-electrode electrostatic chuck
01/17/1996EP0692799A2 Trimmable capacitor
01/17/1996EP0692556A1 K cell type vapor source and shutter
01/17/1996EP0692553A1 Vaporization sequence for multiple liquid precursors
01/17/1996EP0692551A1 Sputtering apparatus and methods
01/17/1996EP0692318A1 Method of and apparatus for cleaning workpiece
01/17/1996EP0692156A1 Electrostatic chuck with conformal insulator film
01/17/1996EP0692146A1 Charge-coupled device array for spectroscopic detection
01/17/1996EP0692141A1 Stripping, passivation and corrosion inhibition of semiconductor substrates
01/17/1996EP0692140A1 Stripping, passivation and corrosion inhibition of semiconductor substrates
01/17/1996EP0692138A1 Reactive dc sputtering system
01/17/1996EP0692137A1 Compositions and methods for providing anisotropic conductive pathways and bonds between two sets of conductors
01/17/1996EP0683709A4 Apparatus and method for polishing.
01/17/1996EP0666972A4 Gas heater for processing gases.
01/17/1996EP0619918A4 Microwave energized deposition process using a pressure lower than the minimum point pressure of the paschen curve.
01/17/1996EP0585343A4 Primary flow cvd apparatus and method
01/17/1996EP0584143B1 Process and device for manufacturing plastic mouldings having wall regions of reduced thickness
01/17/1996EP0542746B1 Elimination of etch stop undercut
01/17/1996CN1115121A Internal-connection amorphous silicon solar cell and manufacture method
01/17/1996CN1115119A Semiconductor unit and manufacture of same
01/17/1996CN1115118A Method of manufacturing semiconductor devices with semiconductor elements formed in a layer of semiconductor material provided on a support slice
01/17/1996CN1115117A Method for forming metal interconnection of semiconductor device
01/17/1996CN1115116A Method for forming a metallic barrier layer in semiconductor device
01/17/1996CN1115115A A method for making a fine annular charge storage electrode in a semiconductor device using a phase shift mask
01/17/1996CN1115098A Flash memory cells, metthod for fabricating the same and method for arraying the same
01/17/1996CN1115067A Microminiature, monolithic, variable electrical device and apparatus including same
01/17/1996CN1115044A Phase shift mask and method for fabricating the same
01/17/1996CN1030742C Two square memory cells having highly conductive word lines
01/17/1996CN1030722C Process for continuously forming large area functional deposited film by microwave PCVD method and apparatus suitable for practicing same
01/16/1996US5485495 X-ray mask, and exposure apparatus and device production using the mask
01/16/1996US5485429 Semiconductor memory device with refresh timer circuit
01/16/1996US5485420 Static-random-access memory cell and an integrated circuit having a static-random-access memory cell
01/16/1996US5485398 Method and apparatus for inspecting bent portions in wire loops
01/16/1996US5485138 Thin film resistor and method for manufacturing the same
01/16/1996US5485114 Semiconductor integrated circuit with internal compensation for changes in time delay
01/16/1996US5485103 Programmable logic array with local and global conductors
01/16/1996US5485102 Programmable logic devices with spare circuits for replacement of defects
01/16/1996US5485097 Method of electrically measuring a thin oxide thickness by tunnel voltage
01/16/1996US5485091 On a semiconductor substrate
01/16/1996US5485080 Non-contact measurement of linewidths of conductors in semiconductor device structures
01/16/1996US5485063 Motor control circuit for a wire bonding apparatus
01/16/1996US5485039 Semiconductor substrate having wiring conductors at a first main surface electrically connected to plural pins at a second main surface
01/16/1996US5485038 Microelectronic circuit substrate structure including photoimageable epoxy dielectric layers
01/16/1996US5485037 Integrated circuit package
01/16/1996US5485035 Method for planarization of an integrated circuit
01/16/1996US5485034 Semiconductor device including bipolar transistor having shallowed base
01/16/1996US5485032 Antifuse element with electrical or optical programming
01/16/1996US5485030 Dielectric element isolated semiconductor device and a method of manufacturing the same
01/16/1996US5485029 On-chip ground plane for semiconductor devices to reduce parasitic signal propagation
01/16/1996US5485028 Semiconductor device having a single crystal semiconductor layer formed on an insulating film
01/16/1996US5485027 Isolated DMOS IC technology
01/16/1996US5485026 Semiconductor integrated circuit device having improved integration and design flexibility