Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1995
12/05/1995US5472903 Isolation technology for sub-micron devices
12/05/1995US5472902 Silicon-on-insulator isolation technology using liquid phase deposition
12/05/1995US5472901 Process for formation of vias (or contact openings) and fuses in the same insulation layer with minimal additional steps
12/05/1995US5472899 Process for fabrication of an SRAM cell having a highly doped storage node
12/05/1995US5472898 Process for making a mask ROM with self-aligned coding technology
12/05/1995US5472897 Method for fabricating MOS device with reduced anti-punchthrough region
12/05/1995US5472896 Method for fabricating polycide gate MOSFET devices
12/05/1995US5472895 Method for manufacturing a transistor of a semiconductor device
12/05/1995US5472894 Method of fabricating lightly doped drain transistor device
12/05/1995US5472893 Method of making a floating gate memory device
12/05/1995US5472892 Method of making a non-volatile floating gate memory device with peripheral transistor
12/05/1995US5472890 Method for fabricating an insulating gate field effect transistor
12/05/1995US5472889 Three layer gate structure of chromium, copper, chromium; arranging in form of matrix, bonding with epoxy resin on glass substrate, filling interface with polyimide and electrically connecting
12/05/1995US5472888 Depletion mode power MOSFET with refractory gate and method of making same
12/05/1995US5472887 Method of fabricating semiconductor device having high-and low-voltage MOS transistors
12/05/1995US5472830 Non-corrosion photoresist stripping composition
12/05/1995US5472829 Method of forming a resist pattern by using an anti-reflective layer
12/05/1995US5472827 Method of forming a resist pattern using an anti-reflective layer
12/05/1995US5472826 Semiconductor device fabrication method
12/05/1995US5472825 Metal interconnect fabrication with dual plasma silicon dioxide deposition and etchback
12/05/1995US5472814 Orthogonally separated phase shifted and unphase shifted mask patterns for image improvement
12/05/1995US5472812 Forming a polysilicon and silicon nitride film on a substrate, patterning both layers by photolithography into desired shape, edge portion of silicon film is oxidized to silicon oxide transluscent region, while removing silicon nitride film
12/05/1995US5472774 Photolithography test structure
12/05/1995US5472646 Method for fabricating a transfer model optical semiconductor apparatus
12/05/1995US5472565 Topology induced plasma enhancement for etched uniformity improvement
12/05/1995US5472564 Selective etching of silicon; allowing precise control in attaining vertical or taper etching
12/05/1995US5472562 Method of etching silicon nitride
12/05/1995US5472561 Radio frequency monitor for semiconductor process control
12/05/1995US5472554 Apparatus for adhering masking film
12/05/1995US5472516 Cleaning substrates with aqueous solution containing hydrogen peroxide and ammonium hydroxide
12/05/1995US5472513 Cleaning method for semiconductor substrate
12/05/1995US5472508 Apparatus for selective chemical vapor deposition of dielectric, semiconductor and conductive films on semiconductor and metallic substrates
12/05/1995US5472507 IC wiring connecting method and apparatus
12/05/1995US5472502 Apparatus and method for spin coating wafers and the like
12/05/1995US5472488 Coating solution for forming glassy layers
12/05/1995US5472370 Method of planarizing polycrystalline diamonds, planarized polycrystalline diamonds and products made therefrom
12/05/1995US5472099 Wafer cassette
12/05/1995US5472086 Enclosed sealable purgible semiconductor wafer holder
12/05/1995US5471949 Apparatus for producing silicon single crystal
12/05/1995US5471947 Preparation of diamond films on silicon substrates
12/05/1995US5471946 Method for producing a wafer with a monocrystalline silicon carbide layer
12/05/1995US5471945 Method and apparatus for forming a semiconductor boule
12/05/1995US5471944 Method for forming crystal article
12/05/1995US5471938 Process for growing multielement compound single crystal
12/05/1995EP0693035A4 Wafer transport device
12/05/1995CA2046815C Semiconductor integrating circuit
12/03/1995CA2147537A1 Sealing arrangement for mold
11/1995
11/30/1995WO1995032604A1 Processing low dielectric constant materials for high speed electronics
11/30/1995WO1995032525A1 BaF2/GaAs ELECTRONIC COMPONENTS
11/30/1995WO1995032521A1 Method for forming solder bumps
11/30/1995WO1995032520A1 Electronic device package and its manufacture
11/30/1995WO1995032519A1 Method for passivating silicon devices at low temperature to achieve low interface state density
11/30/1995WO1995032507A1 Programmable logic device with verify circuitry for classifying fuse link states as validly closed, validly open or invalid
11/30/1995WO1995032449A1 Structure of conductive connecting portions, and liquid crystal display and electronic printer provided with the same
11/30/1995WO1995032315A1 Magnetically enhanced multiple capacitive plasma generation apparatus and related method
11/30/1995WO1995032132A1 Reinforced semiconductor wafer holder
11/30/1995WO1995032087A1 Method and installation for encasing articles
11/30/1995WO1995032073A1 Device for holding and guiding a joining component
11/30/1995WO1995028001A3 Manufacture of electronic devices comprising thin-film transistors with laterally separated drain and graded doping
11/30/1995DE4443968A1 Semiconductor device with DRAM of G bit generation
11/30/1995DE4417625A1 Vorrichtung zur Aufnahme und Führung einer Verbindungseinrichtung An apparatus for receiving and guiding a coupling device
11/30/1995DE3915472C2 Bondvorrichtung Bonding device
11/30/1995DE19519178A1 Appts. for prodn. of semiconductor layer by rapid thermal processing
11/30/1995DE19518133A1 Prodn. of gate electrode
11/30/1995DE19517555A1 Semiconductor memory matrix appts. with redundant memory cells for e.g. SRAM
11/30/1995CA2163627A1 Processing low dielectric constant materials for high speed electronics
11/29/1995EP0684650A2 SiGe thin film semiconductor device or SiGe layer structure and method of fabrication
11/29/1995EP0684648A2 Method for producing semiconductor device
11/29/1995EP0684647A1 Electronic parts having airbridge interconnection and method of manufacturing such electronic parts
11/29/1995EP0684646A1 Antifuse and method of manufacturing it
11/29/1995EP0684644A1 Method for manufacturing bump leaded film carrier type semiconductor device
11/29/1995EP0684643A1 Method of manufacturing semiconductor devices in an active layer on an support substrate
11/29/1995EP0684642A1 Method of fabrication of a porous dielectric layer for a semiconductor device
11/29/1995EP0684641A2 Semiconductor device moulding capable of accomplishing a high moisture proof
11/29/1995EP0684640A1 A gate overlapped lightly doped drain for buried channel devices
11/29/1995EP0684639A1 Method of manufacturing a bipolar transistor
11/29/1995EP0684638A2 Method for inducing damage to wafers
11/29/1995EP0684637A2 Semiconductor device having a thermal nitride film and manufacturing method thereof
11/29/1995EP0684636A1 Method of applying opaque ceramic coatings containing silica
11/29/1995EP0684635A2 High throughput optical curing process for semiconductor device manufacturing
11/29/1995EP0684634A2 Method of rough polishing semiconductor wafers to reduce surface roughness
11/29/1995EP0684633A2 Method for manufacturing a semiconductor device
11/29/1995EP0684632A2 Method of forming a film at low temperature for a semiconductor device
11/29/1995EP0684631A1 Standardized mechanical interface (SMIF) pod.
11/29/1995EP0684630A2 Workpiece transport system and method of transporting workpiece in same
11/29/1995EP0684618A2 Process of making a silicon capacitor
11/29/1995EP0684572A2 Designing semiconductor integrated circuits
11/29/1995EP0684523A1 Stage device and exposure apparatus using the same
11/29/1995EP0684521A1 Positive working photosensitive compositions
11/29/1995EP0684462A2 Thermal sensor/actuator realised in semiconductor material
11/29/1995EP0684106A2 Polishing apparatus and method to produce a hard material-coated wafer
11/29/1995EP0683924A1 Graded composition ohmic contact for p-type ii-vi semiconductors
11/29/1995EP0683922A1 Method of bonding semiconductor chips to a substrate
11/29/1995EP0683921A1 Microstructures and single mask, single-crystal process for fabrication thereof
11/29/1995EP0683902A1 Process for producing micro-structure components on a substrate
11/29/1995EP0683709A1 Apparatus and method for polishing
11/29/1995EP0532758B1 Cvd semiconductor manufacturing equipment
11/29/1995EP0216937B2 Ic card
11/29/1995CN1112731A Epitaxial overgrowth method and devices
11/29/1995CN1112730A Thin film semiconductor device for display and method of producing same
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