Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1995
12/19/1995US5477064 Thyristor
12/19/1995US5477062 Semiconductor wafer
12/19/1995US5477058 Attenuated phase-shifting mask with opaque reticle alignment marks
12/19/1995US5477057 Off axis alignment system for scanning photolithography
12/19/1995US5477056 Circular accelerator, operation method thereof, and semiconductor irradiation system
12/19/1995US5477009 Resealable multichip module and method therefore
12/19/1995US5476819 Substrate anchor for undercut silicon on insulator microstructures
12/19/1995US5476818 Semiconductor structure and method of manufacture
12/19/1995US5476817 Method of making reliable metal leads in high speed LSI semiconductors using both dummy leads and thermoconductive layers
12/19/1995US5476816 Process for etching an insulating layer after a metal etching step
12/19/1995US5476815 Manufacturing method of semiconductor device
12/19/1995US5476814 Method of manufacturing semiconductor device utilizing selective CVD method
12/19/1995US5476813 Method of manufacturing a bonded semiconductor substrate and a dielectric isolated bipolar transistor
12/19/1995US5476811 Method of growing epitaxial layers
12/19/1995US5476810 Manufacture of electronic devices comprising thin-film circuits using a metal foil as a temporary support
12/19/1995US5476809 Semiconductor device and method of manufacturing the same
12/19/1995US5476807 Method for forming fine patterns in a semiconductor device
12/19/1995US5476806 Semiconductor device and method for making thereof
12/19/1995US5476805 Method for fabricating storage electrode of dynamic random access memory cell
12/19/1995US5476803 Method for fabricating a self-spaced contact for semiconductor devices
12/19/1995US5476802 Method for forming an insulated gate field effect transistor
12/19/1995US5476801 Spacer flash cell process
12/19/1995US5476800 Method for formation of a buried layer for a semiconductor device
12/19/1995US5476799 Process for preparing semiconductor device using a tunnel oxidized layer
12/19/1995US5476798 Glow discharge deposition of high quality hydogenated silicon containing semiconductor alloy layer by maintaining substrate at temperature high enough to activate removal of undesired morphologies, low enough to prevent degradation
12/19/1995US5476751 Phenylacetates and their use in radiation sensitive compositions
12/19/1995US5476736 Projection exposure method and system used therefor
12/19/1995US5476694 Decomposing a germanium halogen compound in activation chamber; chemical interaction with second compound containing silicon and hydrogen; excitation
12/19/1995US5476606 Compositions and methods for polishing
12/19/1995US5476575 Flowing sodium nitrate between mask and cathode while applying voltage
12/19/1995US5476566 Method for thinning a semiconductor wafer
12/19/1995US5476565 Dicing-die bonding film
12/19/1995US5476548 Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring
12/19/1995US5476520 Shield assembly for semiconductor wafer supports
12/19/1995US5476414 Polishing apparatus
12/19/1995US5476413 Apparatus for polishing the periphery portion of a wafer
12/19/1995US5476359 Robotically loaded epitaxial deposition apparatus
12/19/1995US5476357 Micromanipulator
12/19/1995US5476211 Method of manufacturing electrical contacts, using a sacrificial member
12/19/1995US5476182 Etching apparatus and method therefor
12/19/1995US5476176 Reinforced semiconductor wafer holder
12/19/1995US5476174 IC carrier
12/19/1995US5476065 System for pulling-up monocrystal and method of exhausting silicon oxide
12/19/1995US5475920 Method of assembling ultra high density integrated circuit packages
12/19/1995US5475892 Semiconductor wafer particle extractor
12/19/1995US5475889 Automatically adjustable brush assembly for cleaning semiconductor wafers
12/19/1995CA2057123C Semiconductor device and method of making it
12/19/1995CA1337771C Unsaturated .beta.-keto-ester acetals and their uses
12/14/1995WO1995034106A1 Microelectronic contacts and assemblies
12/14/1995WO1995034095A1 Low resistance, stable ohmic contacts to silicon carbide, and method of making the same
12/14/1995WO1995034094A1 Trenched dmos transistor with channel block at cell trench corners
12/14/1995WO1995034093A1 Method for forming nitrogen-doped group ii-vi compound semiconductor film
12/14/1995WO1995034092A1 A method of nitridization of titanium thin films
12/14/1995WO1995034091A1 Semifinished product for electronic or opto-electronic semiconductor component
12/14/1995WO1995034083A1 Resistor fabrication
12/14/1995WO1995034025A1 Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method
12/14/1995WO1995033868A1 Method and apparatus for low temperature deposition of cvd and pecvd films
12/14/1995WO1995033867A1 Method and apparatus for producing thin films
12/14/1995WO1995033866A1 Method and apparatus for producing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
12/14/1995WO1995033865A1 Low temperature plasma-enhanced formation of integrated circuits
12/14/1995WO1995033708A1 Process for preparing biscyanoacrylates
12/14/1995DE4420024A1 Halbzeug für ein elektronisches oder opto-elektronisches Halbleiterbauelement Semi-finished for an electronic or optoelectronic semiconductor component
12/14/1995DE19521150A1 Verdrahtungsstruktur eines Halbleiterbaulementes und Verfahren zu ihrer Herstellung Wiring structure of a semiconductor component Mentes and processes for their preparation
12/14/1995DE19521142A1 Integrierte Halbleiterschaltkreisstruktur und Verfahren zur Herstellung von dieser A semiconductor integrated circuit structure and procedures for producing these
12/14/1995DE19520961A1 Verfahren zum Bilden eines ferroelektrischen Filmes A method for forming a ferroelectric film
12/14/1995DE19520782A1 Silicon carbide semiconductor device
12/14/1995DE19520768A1 Prodn. of semiconductor device with thin film resistance
12/14/1995DE19517344A1 Semiconductor memory device e.g. DRAM
12/14/1995DE19516339A1 Method of manufacturing semiconductor device having low-resistance gate electrode
12/14/1995CA2192383A1 Process for preparing biscyanoacrylates
12/14/1995CA2191458A1 Low temperature plasma-enhanced formation of integrated circuits
12/14/1995CA2191457A1 Method and apparatus for producing thin films
12/14/1995CA2191456A1 Method and apparatus for low temperature deposition of cvd and pecvd films
12/13/1995EP0687068A2 Output driver for use in semiconductor integrated circuit
12/13/1995EP0687051A1 Telephone line interface protection
12/13/1995EP0687017A1 Method of manufacturing solid state image sensing device
12/13/1995EP0687016A1 Junction field effect transistor and method of producing the same
12/13/1995EP0687015A2 Semiconductor device and method of manufacturing the same
12/13/1995EP0687014A2 Pressure contact type semiconductor device, preferably of the light triggered type
12/13/1995EP0687013A1 Bipolar transistor and method of manufacturing the same
12/13/1995EP0687011A1 Planar semiconductor device with capacitively coupled field plates
12/13/1995EP0687009A2 Multi-layer electronic circuit package with dielectric polymer layers having different optical absorption strength and method of forming it
12/13/1995EP0687008A2 Method and apparatus for improving interfacial adhesion between a polymer and a metal
12/13/1995EP0687007A2 Electronic surface mount device and method for making
12/13/1995EP0687005A2 Method of making interconnections on semiconductor devices
12/13/1995EP0687004A1 Method for fabrication of dielectrics on semiconductor devices
12/13/1995EP0687003A1 Local oxidation of silicon with sidewall masked isolation process
12/13/1995EP0687002A2 Producing method of SOI semiconductor device
12/13/1995EP0687001A2 Device isolation method for a semiconductor device
12/13/1995EP0687000A1 Method for bonding integrated circuit chips to substrates
12/13/1995EP0686999A2 Pattern formation in the fabrication of microelectronic devices
12/13/1995EP0686995A1 An ion implantation device
12/13/1995EP0686982A1 Electro-conductive oxides and electrodes using the same
12/13/1995EP0686975A1 Data output buffer circuit for semiconductor integrated circuit
12/13/1995EP0686876A2 Attenuated phase shift mask and process for fabricating such a mask
12/13/1995EP0686708A1 Film forming method and film forming apparatus
12/13/1995EP0686680A1 Isolation film of semiconductor device, coating fluid for forming the film, and process for producing the film
12/13/1995EP0686460A1 Method for chamfering notch wafer and apparatus therefor
12/13/1995EP0686454A1 Capillary and method of bonding
12/13/1995EP0686308A1 High saturation current, low leakage current fermi threshold field effect transistor
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