| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/07/2006 | US20060197086 Organic light emitting diode display and manufacturing method thereof |
| 09/07/2006 | US20060197084 Organic semiconductor device |
| 09/07/2006 | US20060197055 Slurry for CMP, polishing method and method of manufacturing semiconductor device |
| 09/07/2006 | US20060197054 CMP abrasive, liquid additive for CMP abrasive and method for polishing substrate |
| 09/07/2006 | US20060197016 Method of implanting a substrate and an ion implanter for performing the method |
| 09/07/2006 | US20060196850 Polishing slurry composition and method of using the same |
| 09/07/2006 | US20060196849 Composition and method for polishing a sapphire surface |
| 09/07/2006 | US20060196848 Use of a chemical-mechanical polishing system comprising an inorganic abrasive, a polishing additive such as aniline, and a liquid carrier, pH of 4 to 6; polishing silicon dioxide; Shallow Trench Isolation (STI); does not contain significant amounts of crosslinked polymer abrasives |
| 09/07/2006 | US20060196847 Plasma processing method and apparatus |
| 09/07/2006 | US20060196846 Plasma processing method and apparatus, and method for measuring a density of fluorine in plasma |
| 09/07/2006 | US20060196845 Quartz Tuning-Fork Resonators and Production Method |
| 09/07/2006 | US20060196844 Apparatus, system, and method for increasing data storage density in patterned media |
| 09/07/2006 | US20060196843 Process for fabricating monolithic membrane substrate structures with well-controlled air gaps |
| 09/07/2006 | US20060196605 Method and apparatus for plasma processing |
| 09/07/2006 | US20060196603 Gas baffle and distributor for semiconductor processing chamber |
| 09/07/2006 | US20060196531 Substrate processing apparatus |
| 09/07/2006 | US20060196425 Reflectors, substrate processing apparatuses and methods for the same |
| 09/07/2006 | US20060196422 Gate valve for semiconductor treatment system and vacuum container |
| 09/07/2006 | US20060196407 Apparatus Having a Photonic Crystal |
| 09/07/2006 | US20060196024 Methods and apparatus for devices having improved capacitance |
| 09/07/2006 | DE602004000228T2 Integrierte Halbleiterschaltungsanordnung mit Signalregenerator für Prüfsignale und dazugehörige automatische Entwurfs-Vorrichtung, -Verfahren und -Programme Semiconductor integrated circuit device with signal regenerator for test signals and associated automatic design apparatus, procedures and programs |
| 09/07/2006 | DE4414808B4 Verwendung einer Antireflexbeschichtungszusammensetzung und Herstellungsverfahren für eine Antireflexschicht und ein Halbleiterbauelement Use of an anti-reflective coating composition and manufacturing method for an anti-reflection layer and a semiconductor device |
| 09/07/2006 | DE3845013B4 Effecting accurate micro-manipulating - via a tube with a small tapered end in proximity to a substrate held in vibration free manner |
| 09/07/2006 | DE202006007122U1 Electrostatic substrate holder e.g. chuck, for semiconductor industry, has substrate material with layers arranged on top of each other so that blocking voltage is formed at pn-junction during inadvertent discharge over contact surfaces |
| 09/07/2006 | DE19651566B4 Chip-Modul sowie Verfahren zu dessen Herstellung und eine Chip-Karte -Chip module and method for its production and a chip card |
| 09/07/2006 | DE19605633B4 Verfahren zur Herstellung von Dioden mit verbesserter Durchbruchspannungscharakteristik Process for the preparation of diodes having improved breakdown voltage characteristic |
| 09/07/2006 | DE112004001787T5 Schutzschicht während des Einritzens Protective layer during the Einritzens |
| 09/07/2006 | DE10347622B4 Substrat mit Lötpad zur Herstellung einer Lötverbindung Substrate with solder pad for making a solder connection |
| 09/07/2006 | DE10213287B4 Verfahren zur Ausbildung einer Wolframsilizidschicht A method of forming a tungsten silicide |
| 09/07/2006 | DE102006002889A1 Erzeugen einer internen Referenzspannung zum Testen von integrierten Schaltkreisen Generating an internal reference voltage for testing of integrated circuits |
| 09/07/2006 | DE102005046987A1 Test tray for handler used for testing semiconductor device has latch operating button mounted to frame, that moves associated one of latches between latch hold position and latch release position |
| 09/07/2006 | DE102005045078A1 Feldeffekttransistoren mit einem verspannten Siliziumkanal und Verfahren zum Herstellen derselben Field effect transistors with a strained silicon channel and methods for manufacturing the same |
| 09/07/2006 | DE102005014507A1 Halbleiterspeicher mit Ladungseinfangspeicherzellen und Herstellungsverfahren dafür A semiconductor memory comprising Ladungseinfangspeicherzellen and production method thereof |
| 09/07/2006 | DE102005009725A1 Verfahren zur Integration von zwei Bipolartransistoren in einen Halbleiterkörper, Halbleiteranordnung in einem Halbleiterkörper und Kaskodenschaltung Method for the integration of two bipolar transistors in a semiconductor body, the semiconductor device in a semiconductor body and cascode |
| 09/07/2006 | DE102005009163A1 Halbleiterbauteil mit einem Halbleiterchip, der Signalkontaktflächen und Versorgungskontaktflächen aufweist, sowie Verfahren zur Herstellung des Halbleiterbauteils A semiconductor component comprising a semiconductor chip, the signal pads and supply pads, and methods for producing the semiconductor device |
| 09/07/2006 | DE102005009073A1 Verfahren zur Nachbehandlung einer Halbleiterstruktur A process for the aftertreatment of a semiconductor structure |
| 09/07/2006 | DE102005009072A1 Technik zur Metallabscheidung durch stromloses Plattieren unter Anwendung eines Aktivierungsschemas mit einem Substraterwärmungsprozess Technique for metal deposition by electroless plating using an activation scheme with a substrate heating process |
| 09/07/2006 | DE102005009024A1 Verfahren und System zum Steuern einer Substratposition in einem elektrochemischen Prozess A method and system for controlling a position of the substrate in an electrochemical process, |
| 09/07/2006 | DE102005009023A1 Gateelektrodenstruktur und Transistor mit asymmetrischen Abstandselementen und Verfahren zum Herstellen derselben Gate electrode structure and transistor having asymmetric spacers and method of manufacturing the same |
| 09/07/2006 | DE102005009019A1 Feldeffekttransistor mit Gate-Spacerstruktur und niederohmiger Kanalankoppelung Field effect transistor having gate-spacer structure and lower impedance Kanalankoppelung |
| 09/07/2006 | DE102005009000A1 Mittels Feldeffekt steuerbares Halbleiterbauelement mit verbesserter Inversdiode und Herstellungsverfahren hierfür By means of field-effect-controllable semiconductor component having improved inverse diode, and manufacturing method thereof |
| 09/07/2006 | DE102004063857A1 Wafer cutting process comprises treating a workpiece surface on its stretching table |
| 09/07/2006 | DE102004015994B9 Vorrichtung zur Vereinzelung und Positionierung von Modulbrücken Apparatus for separating and positioning module bridges |
| 09/07/2006 | DE10162908B4 Verfahren zur Herstellung einer Kondensatordielektrikumsstruktur und Kondensatordielektrikumsstruktur A process for preparing a Kondensatordielektrikumsstruktur and Kondensatordielektrikumsstruktur |
| 09/07/2006 | DE10148491B4 Verfahren zum Herstellen einer integrierten Halbleiteranordnung mit Hilfe einer thermischen Oxidation und Halbleiteranordnung A method of manufacturing an integrated semiconductor device by means of a thermal oxidation and semiconductor device |
| 09/07/2006 | DE10143515B4 Maskenanordnung für einen Abbildungsprozess, Verfahren zu deren Herstellung sowie Verfahren zum optischen Abbilden bzw. zum Herstellen eines Kompensationsbauelements A mask assembly for a mapping process, a process for their preparation and methods for optical imaging or for producing a compensation device |
| 09/07/2006 | DE10103307B4 Integrierte Halbleiterschaltung und Verfahren zu deren Initialisierung A semiconductor integrated circuit and methods for their initialization |
| 09/06/2006 | EP1699087A1 Semiconductor device and its manufacturing method |
| 09/06/2006 | EP1699086A1 Semiconductor device manufacturing method and semiconductor device |
| 09/06/2006 | EP1699085A2 III-V nitride semiconductor device and production method thereof |
| 09/06/2006 | EP1699078A1 Ic chip mounting body manufacturing method and manufacturing device |
| 09/06/2006 | EP1699077A1 Plasma processing apparatus |
| 09/06/2006 | EP1699076A1 Plasma generator and plasma etching device |
| 09/06/2006 | EP1699075A1 Method for manufacturing single-side mirror surface wafer |
| 09/06/2006 | EP1699074A1 Manufacturing method of silicon wafer |
| 09/06/2006 | EP1699073A1 Stage system, exposure apparatus and exposure method |
| 09/06/2006 | EP1699072A1 Exposure apparatus, exposure method, device producing method, and optical component |
| 09/06/2006 | EP1699071A1 Heater and heating device with heaters |
| 09/06/2006 | EP1699056A1 A semiconductor memory module and a multi-layer circuit bord for |
| 09/06/2006 | EP1698955A1 Method for dynamic alignment of substrates |
| 09/06/2006 | EP1698940A2 Exposure method and apparatus |
| 09/06/2006 | EP1698905A2 Nano-drive for high resolution positioning and for positioning of a multi-point probe |
| 09/06/2006 | EP1698904A1 Conductive contact holder, conductive contact unit and process for producing conductive contact holder |
| 09/06/2006 | EP1698645A1 Hyperbranched polymer, process for producing the same and resist composition containing the hyperbranched polymer |
| 09/06/2006 | EP1698633A1 Composition, insulating film and process for producing the same |
| 09/06/2006 | EP1698632A1 Composition, insulating film and process for producing the same |
| 09/06/2006 | EP1698460A1 Multilayer body |
| 09/06/2006 | EP1698404A1 Core for washing sponge roller |
| 09/06/2006 | EP1697997A1 Image display screen and method for controlling said screen |
| 09/06/2006 | EP1697994A1 Transistor gate electrode having conductor material layer |
| 09/06/2006 | EP1697993A2 Active matrix pixel device with photo sensor |
| 09/06/2006 | EP1697991A1 Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same |
| 09/06/2006 | EP1697990A1 Assembly of a component mounted on a transfer surface |
| 09/06/2006 | EP1697988A2 Customized microelectronic device and method for making customized electrical interconnections |
| 09/06/2006 | EP1697987A1 Electronic packaging materials for use with low-k dielectric-containing semiconductor devices |
| 09/06/2006 | EP1697986A2 Process controls for improved wafer uniformity using integrated or standalone metrology |
| 09/06/2006 | EP1697985A1 Combinations of resin compositions and methods of use thereof |
| 09/06/2006 | EP1697984A2 Method of preventing damage to porous low-k materials during resist stripping |
| 09/06/2006 | EP1697983A1 Highly efficient gallium nitride based light emitting diodes via surface roughening |
| 09/06/2006 | EP1697982A1 Method of manufacturing a trench-gate semiconductor device |
| 09/06/2006 | EP1697981A1 Process for improving the surface roughness of a semiconductor wafer |
| 09/06/2006 | EP1697980A1 Method and device for drying circuit substrates |
| 09/06/2006 | EP1697979A2 A semiconductor substrate with solid phase epitaxial regrowth with reduced depth of doping profile and method of producing same |
| 09/06/2006 | EP1697978A1 A semiconductor substrate with solid phase epitaxial regrowth with reduced junction leakage and method of producing same |
| 09/06/2006 | EP1697977A1 Method of manufacturing a semiconductor device and semiconductor device obtained with such a method |
| 09/06/2006 | EP1697976A1 Method for forming a strained si-channel in a mosfet structure |
| 09/06/2006 | EP1697975A1 Method of sealing two plates with the formation of an ohmic contact therebetween |
| 09/06/2006 | EP1697974A1 Exposure apparatus and device manufacturing method |
| 09/06/2006 | EP1697973A1 Small volume process chamber with hot inner surfaces |
| 09/06/2006 | EP1697972A2 Micro-transducer and thermal switch for same |
| 09/06/2006 | EP1697971A1 Apparatuses and methods for cleaning a substrate |
| 09/06/2006 | EP1697970A2 Selectivity control in a plasma processing system |
| 09/06/2006 | EP1697969A1 Edge wheel dry manifold |
| 09/06/2006 | EP1697967A1 Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
| 09/06/2006 | EP1697966A2 Method and device for the alternating contacting of two wafers |
| 09/06/2006 | EP1697965A1 NON-POLAR (A1, B, In, Ga)N QUANTUM WELLS |
| 09/06/2006 | EP1697561A1 Copper electrodeposition in microelectronics |
| 09/06/2006 | EP1697559A1 Method for the organised growth of nanostructures |
| 09/06/2006 | EP1697239A2 Manufacturing system and apparatus for balanced product flow with application to low-stress underfiling of flip-chip electronic devices |
| 09/06/2006 | EP1697175A1 Control unit and method for producing the same |