Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2008
09/04/2008DE102008011797A1 Circuit has static random access memory storage element with storage cell and cross coupled inverter based on multi-gate-field effect transistors
09/04/2008DE102008011648A1 SIC-Halbleitervorrichtung und Verfahren zu deren Fertigung SiC semiconductor device, and methods for their production
09/04/2008DE102008008165A1 Semiconductor device e.g. flash memory, has several voids that are formed in insulation layer such that void is provided between adjacent redistribution lines
09/04/2008DE102008006835A1 Elektronisches Bauelement und Verfahren zur Herstellung eines elektronischen Bauelements An electronic device and method for manufacturing an electronic component
09/04/2008DE102008006041A1 Halbleitervorrichtung mit einer isolierenden Sperrschicht und darauf bezogenes Verfahren A semiconductor device comprising an insulating barrier layer, and related method
09/04/2008DE102008003953A1 Method for manufacturing semiconductor element, involves implanting ions of doped material with large diffusion coefficients in semiconductor and irradiating multiple pulsed laser radiation using multiple laser irradiation devices
09/04/2008DE102007063593A1 Halbleiterbauelement Semiconductor device
09/04/2008DE102007060417A1 Rohchip- und Wafer-Fehlerklassifikationssystem und Verfahren dazu Rohchip- and wafer defect classification system and method thereof
09/04/2008DE102007036296A1 Method for surface texturizing e.g. semiconductor surface and silicon surface, involves printing etch-resistant masking network on surface for texturizing, and etching surface for texturizing
09/04/2008DE102007019565A1 Semiconductor disk one-sided polishing method for e.g. memory cell, involves providing polishing agent between polishing cloth and disk, where polishing agent has alkaline component and component dissolving germanium
09/04/2008DE102007010711A1 Circuit arrangement for measuring device, has electric contact fabricating conductive connection between substrate and microelectronic component, where part of electric contact is provided between substrate and microelectronic component
09/04/2008DE102007010710A1 Carrier system for fixing multiple substrates to be processed, has is arranged with substrate in processing unit by holding device, such that force of gravity, which has force component, points away from assigned contact area
09/04/2008DE102007010225A1 Verfahren zur Aufnahme von hochauflösenden Bildern von Defekten auf der Oberseite des Waferrandes A method for capturing high-resolution images of defects on the upper side of the wafer edge
09/04/2008DE102007010224A1 Vorrichtung zum Haltern von scheibenförmigen Objekten Apparatus for holding disc-shaped objects
09/04/2008DE102007009916A1 Verfahren zum Entfernen unterschiedlicher Abstandshalter durch einen nasschemischen Ätzprozess und Bauteil mit einer Struktur mit unterschiedlichen Abstandshaltern A method of removing different spacer by a wet chemical etching process and device having a structure with different spacers
09/04/2008DE102007009913A1 Plasmaätzprozess mit hoher Ausbeute für Zwischenschichtdielektrika Plasma etching with high yield for interlayer dielectrics
09/04/2008DE102007009912A1 Verfahren zur Herstellung einer kupferbasierten Metallisierungsschicht mit einer leitenden Deckschicht durch ein fortschrittliches Integrationsschema A process for preparing a copper-based metallization layer with a conductive outer layer by an advanced integration scheme
09/04/2008DE102007009902A1 Verfahren zum Reduzieren von Ungleichmäßigkeiten während des chemisch-mechanischen Polierens von überschüssigem Metall in einer Metallisierungsebene von Mikrostrukturbauelementen A method for reducing non-uniformities during the chemical-mechanical polishing of excess metal in a metallization of microstructure devices
09/04/2008DE102007009878A1 Vorrichtung und Verfahren zum Durchführen eines Tests von Halbleiter-Bauelementen mit optischer Schnittstelle Apparatus and method for performing a test of semiconductor devices with optical interface
09/04/2008DE102007009727A1 Method for manufacturing semiconductor component, involves preparing semiconductor substrate with active area and boundary area, which is adjacent to active area, where active area has conducting material having trenches
09/04/2008DE102007008989A1 Herstellungsverfahren für eine integrierte Halbleiterspeichervorrichtung und entsprechende Halbleiterspeichervorrichtung Manufacturing method for a semiconductor integrated memory device and corresponding semiconductor memory device
09/04/2008DE102006025843B4 Wafer-Transporteinrichtung, Prozesskammer diese enthaltend, Halbleiter-Wafer-Prozessierungssystem und Verfahren zum Prozessieren eines Halbleiter-Wafers A wafer transport device, this process chamber containing the semiconductor wafer-processing system and method for processing a semiconductor wafer
09/04/2008DE102006003393B4 Verfahren zur Kontaktierung von Bitleitungen für nicht-flüchtige Speicherzellen A method for contacting bit lines for non-volatile memory cells
09/04/2008DE102005056916B4 Verfahren zum Gestalten einer Überlagerungs-Markierung A method of designing an overlay mark
09/04/2008DE102005016925B4 Verfahren zum Herstellen eines Transistors mit einem high-k-Gate-Dielektrikum A method for manufacturing a transistor with a high-k gate dielectric
09/04/2008DE102005000727B4 Elektrisches Kontaktelement und Verfahren zu dessen Herstellung sowie Vakuum-Unterbrecher, Vakuum-Leistungsschutzschalter und Lastschalter unter Verwendung desselben The same electrical contact element and method for its preparation and vacuum interrupter, vacuum circuit breaker and circuit breaker using
09/04/2008DE102004059167B4 Filmchip und einen solchen verwendendes LCD Film chip and such-use LCD
09/04/2008DE102004057180B4 Photomasken mit Schattenelementen in denselben und dazugehörige Verfahren und Systeme Photomasks with shadow elements in the same and related methods and systems
09/04/2008DE102004025615B4 Verfahren zum Herstellen einer Festkörperelektrolytspeicherzelle A method of manufacturing a solid electrolyte storage cell
09/04/2008DE10031881B4 Halbleitereinrichtung und Verfahren zur Herstellung der Halbleitereinrichtung A semiconductor device and method of manufacturing the semiconductor device
09/03/2008EP1965618A1 Composition for removing residue from wiring board and cleaning method
09/03/2008EP1965617A2 Method for encapsulting multiple lead frames
09/03/2008EP1965438A2 Nanowires-based transparent conductors
09/03/2008EP1965437A1 Nano-scale transistor device with large current handling capability
09/03/2008EP1965436A2 Silicon carbide self-aligned epitaxial mosfet and method of manufacturing thereof
09/03/2008EP1965435A1 Semiconductor device and method for manufacturing same
09/03/2008EP1965434A2 Compound semiconductor device and doherty amplifier using compound semiconductor device
09/03/2008EP1965432A1 Insulated gate bipolar transistor and method of manufacturing the same
09/03/2008EP1965431A2 Heterojunction bipolar transistor and method for fabricating the same
09/03/2008EP1965430A2 Sic semiconductor device and method for manufacturing the same
09/03/2008EP1965428A2 Method for forming semiconductor constructions having a buried bit line
09/03/2008EP1965422A1 Circuit board apparatus for wafer inspection, probe card, and wafer inspection apparatus
09/03/2008EP1965421A2 Wiring structure, forming method of the same and printed wiring board
09/03/2008EP1965419A2 Absorber layer candidates and techniques for application
09/03/2008EP1965418A1 Formulation for removal of photoresist, etch residue and barc
09/03/2008EP1965417A1 Polishing composition, polishing method, and method for forming copper wiring for semiconductor integrated circuit
09/03/2008EP1965416A2 Free-Standing III-N layers or devices obtained by selective masking of III-N layers during III-N layer growth
09/03/2008EP1965415A2 Method for manufacturing a semiconductor device and semiconductor device manufactured therefrom
09/03/2008EP1965414A1 Exposure method, exposure apparatus, and method for manufacturing device
09/03/2008EP1965413A1 Method for manufacturing soi substrate, and soi substrate
09/03/2008EP1965412A1 Susceptor with surface roughness for high temperature substrate processing
09/03/2008EP1965411A2 Stage system and stage driving method for use in exposure apparatus
09/03/2008EP1965410A1 Single wafer etching apparatus
09/03/2008EP1965409A2 Apparatus and methods for transporting and processing substrates
09/03/2008EP1965259A2 Measurement apparatus, exposure apparatus, and device fabrication method
09/03/2008EP1965256A1 Positive photosensitive resin composition, and semiconductor device and display using same
09/03/2008EP1964179A1 Reduced-resistance finfets and methods of manufacturing the same
09/03/2008EP1964178A2 Mos transistor and a method of manufacturing a mos transistor
09/03/2008EP1964177A2 Semiconductor devices and manufacturing method thereof
09/03/2008EP1964176A1 Thinned image sensor having trench-isolated contact pads
09/03/2008EP1964173A1 Microcomponent comprising two wafers interconnected by pins and the associated interconnection process
09/03/2008EP1964170A2 Flash devices with shared word lines and manufacturing methods therefor
09/03/2008EP1964169A1 Integration of planar and tri-gate devices on the same substrate
09/03/2008EP1964167A2 Transistor with immersed contacts and methods of forming thereof
09/03/2008EP1964166A1 Process and equipment for bonding by molecular adhesion
09/03/2008EP1964164A2 Field effect transistor structure with an insulating layer at the junction
09/03/2008EP1964163A1 Flame-perforated aperture masks
09/03/2008EP1964162A2 Rotary chip attach
09/03/2008EP1964160A1 Magnetic annealing tool heat exchange system and processes
09/03/2008EP1964159A2 Electrical components and method of manufacture
09/03/2008EP1964034A2 Electrical device and film embossing manufacturing techniques
09/03/2008EP1964033A2 Method of manufacturing rfid devices
09/03/2008EP1963409A2 Coated substrates and methods for their preparation
09/03/2008EP1963048A1 Method for manufacturing microporous cmp materials having controlled pore size
09/03/2008EP1908111A4 Virtual body-contacted trigate
09/03/2008EP1766674B1 Method and device for the alternate contacting of two wafers
09/03/2008EP1711970B1 Ambipolar, light-emitting field-effect transistors
09/03/2008EP1671376A4 SPLIT POLY-SiGe/POLY-Si ALLOY GATE STACK
09/03/2008EP1668696A4 Method for separately optimizing thin gate dielectric of pmos and nmos transistors within the same semiconductor chip and device manufactured thereby
09/03/2008EP1656702B1 Method for producing vertical nano-transistor
09/03/2008EP1617967A4 Wirebonding insulated wire
09/03/2008EP1554743A4 Method and apparatus for bootstrapping a programmable antifuse circuit
09/03/2008EP1487738B1 Silicon carbide microelectromechanical devices with electronic circuitry
09/03/2008EP1483627B1 Scanning exposure apparatus and device manufacturing method using the same
09/03/2008EP1389345A4 Chip scale package with flip chip interconnect
09/03/2008EP1378006B1 Method of fabricating an oxide layer on a silicon carbide layer utilizing an anneal in a hydrogen environment
09/03/2008EP1332241B1 Electrostatically clamped edge ring for plasma processing
09/03/2008EP1292726B1 Single crystal diamond prepared by cvd
09/03/2008EP1228533B1 Method of manufacturing a bipolar transistor semiconductor device
09/03/2008EP1142014B1 A method of manufacturing a peripheral transistor of a non-volatile memory
09/03/2008EP1045439B1 Device for processing wafer
09/03/2008EP0977906A4 Metered gas control in a substrate processing apparatus
09/03/2008EP0885483B1 Push-pull power amplifier
09/03/2008CN201111112Y Intelligent filling head with vision, glue dropping and filling functions
09/03/2008CN101258617A Semiconductor light-emitting device and method for manufacturing same
09/03/2008CN101258614A Gallium-nitride-based compound semiconductor light emitting element and its manufacturing method
09/03/2008CN101258608A Semiconductor device and method of fabricating semiconductor device
09/03/2008CN101258606A Semiconductor device
09/03/2008CN101258605A Semiconductor device manufacturing method
09/03/2008CN101258604A Semiconductor device including a strained superlattice between at least one pair of spaced apart stress regions and associated methods