Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2008
12/11/2008DE19934031B4 Ohmscher Kontakt zu Halbleitervorrichtungen und ein Verfahren zur Herstellung desselben Ohmic contact to the semiconductor devices and a method of manufacturing the same
12/11/2008DE112007000389T5 Abstandswandler, Herstellungsverfahren des Abstandswandlers und Prüfkarte, die den Abstandswandler enthält Space transformer manufacturing method of the space transformer, and probe card that includes the space transformer
12/11/2008DE112007000339T5 Niederohmiges Gate für Leistungs-MOSFET-Anwendungen und Herstellungsverfahren Low impedance gate of the power MOSFET applications and manufacturing processes
12/11/2008DE112007000256T5 Verfahren zum Bonden von Messsonden und Verfahren zur Herstellung einer Messsondenkarte unter Verwendung desselben Of the same method for bonding probes and method of manufacturing a probe card using
12/11/2008DE112007000215T5 Poröses Silizium-Dielektrikum Porous silicon dielectric
12/11/2008DE112007000183T5 Hochleistungsmodul mit offener Rahmenbaugruppe High-performance module with an open frame assembly
12/11/2008DE112006003678T5 Druckregulierung in entfernt befindlichen Zonen Pressure regulation in remotely located areas
12/11/2008DE10392426B4 Halbleitervorrichtungs-Herstellungsverfahren A semiconductor device manufacturing method
12/11/2008DE10337569B4 Integrierte Anschlussanordnung und Herstellungsverfahren Integrated terminal assembly and manufacturing processes
12/11/2008DE10257669B4 Verfahren zur Herstellung einer Kondensatorelektrode A method for producing a capacitor electrode
12/11/2008DE10238560B4 Verfahren zur Verbesserung der Abbildungsqualität beim Erfassen von Defekten in Leitungsmustern einer Photomaske sowie Photomaske A method of improving the picture quality when detecting defects in wiring patterns of a photomask and photomask
12/11/2008DE10232002B4 Verfahren zur selbstjustierten selektiven Kontaktierung von Gate-Elektroden vertikaler Transistoren eines integrierten Halbleiterspeichers und integrierter Halbleiterspeicher A method for self-aligned selective contacting of gate electrodes of vertical transistors of a semiconductor integrated memory and integrated semiconductor memory
12/11/2008DE10229463B4 Halbleiteranordnung und Verfahren zu ihrer Herstellung A semiconductor device and process for their preparation
12/11/2008DE102008027193A1 Verfahren zur Herstellung einer Halbleitervorrichtung einschließlich eines Trench-bildenden Verfahrens A process for producing a semiconductor device including a trench-forming process
12/11/2008DE102008026918A1 Schneideinrichtung mit Ultraschallwandler Cutter with ultrasonic transducers
12/11/2008DE102008026516A1 Halbleitervorrichtung mit PN-Säulenschicht und Verfahren zu deren Fertigung A semiconductor device having PN column layer and methods of their production
12/11/2008DE102008025451A1 Halbleiterbauelement Semiconductor device
12/11/2008DE102008022506A1 Verfahren zur Herstellung einer elektronischen Vorrichtung mit einem harzgegossenen Gehäuse und Formungswerkzeug zur Herstellung des harzgegossenen Gehäuses A method of manufacturing an electronic device with a resin molded case and molding tool for producing the resin-molded housing
12/11/2008DE102007058454A1 Anordnungsvorrichtung für leitende Kugeln Arranging apparatus for conducting spheres
12/11/2008DE102007046430A1 Holding device for use in wafer arrangement, has coupling area that is formed such that holding device is attached at wafer frame, where electronic components are provided directly on wafer
12/11/2008DE102007033454A1 Integrierte Schaltung und Verfahren zum Herstellen einer integrierten Schaltung Integrated circuit and method for fabricating an integrated circuit
12/11/2008DE102007026292A1 Verfahren zur einseitigen Politur nicht strukturierter Halbleiterscheiben A method for unilateral polish not structured semiconductor wafers
12/11/2008DE102007025992A1 Verfahren zur Herstellung eines MEMS-Packages A method for producing a MEMS package
12/11/2008DE102007025943A1 Substrate surface processing method for manufacturing thin-film transistor in e.g. active matrix LCD, involves statistically performing spatial positioning of laser pulses in reference to local position within exposure layers
12/11/2008DE102007025942A1 Verfahren zur selektiven thermischen Oberflächenbehandlung eines Flächensubstrates Process for the selective thermal surface treatment of a substrate surface
12/11/2008DE102007024843A1 Verfahren zum Erzeugen von Strukturen in einem Resistmaterial und Elektronenstrahlbelichtungsanlagen A method for producing patterns in a resist material, and electron beam exposure systems
12/11/2008DE102007024175A1 Early failure detection method for e.g. metal oxide semiconductor FET, involves measuring direct current portion or direct current resistance at control electrode, and evaluating portion to determine failure tendency of arrangement
12/11/2008DE102006041426B4 Verfahren zur Herstellung eines Transistors und Verfahren zur Herstellung einer Speichervorrichtung A method of manufacturing a transistor and method for fabricating a memory device
12/11/2008DE102006022254B4 Halbleiterbauteil mit in Kunststoffgehäusemasse eingebetteten Halbleiterbauteilkomponenten, Anordnung für eine Mehrzahl von Halbleiterbauteilen und Verfahren zur Herstellung von Halbleiterbauteilen Semiconductor device having embedded in plastic housing compound semiconductor device components, arrangement for a plurality of semiconductor devices and methods for fabricating semiconductor components
12/11/2008DE102004046174B4 Integrierter BiCMOS-Halbleiterschaltkreis Integrated BiCMOS semiconductor circuit
12/11/2008DE102004045956B4 Ätzhalterung für ein Substrat und Ätzsystem mit einer Ätzhalterung Ätzhalterung for a substrate and etching system with a Ätzhalterung
12/11/2008DE102004044835B4 Integrierte Halbleiter-Kaskodenschaltung für Hochfrequenzanwendungen The semiconductor integrated cascode circuit for high-frequency applications
12/11/2008DE102004020915B4 Druckmessvorrichtung für Vakuumanlagen Pressure measuring device for vacuum systems
12/11/2008DE10196643B4 Herstellungsverfahren für einen Dünnschicht-Strukturkörper Manufacturing method of a thin-film structure body
12/11/2008DE10039649B4 Verfahren zur Herstellung eines keramischen Vielschichtbauelements und entsprechendes Vielschichtbauelement A process for producing a ceramic multilayer component and corresponding multilayer component
12/10/2008EP2001063A1 Organic semiconductor thin film, organic thin film transistor and method for manufacturing same
12/10/2008EP2001054A2 Methods of forming recessed access devices
12/10/2008EP2001052A2 Semiconductor device and manufacturing method thereof
12/10/2008EP2001047A1 Semiconductor device
12/10/2008EP2001046A2 Display device and method of manufacturing the same
12/10/2008EP2001045A1 Plasma cvd apparatus, method for forming thin film and semiconductor device
12/10/2008EP2001044A2 Plasma generating apparatus and plasma generating method
12/10/2008EP2001042A2 Lighting optical system, exposure system, and device production method
12/10/2008EP2001041A1 Process system and process liquid supply method
12/10/2008EP2001040A2 Machine for removing surfaces of semiconductors and particularly surfaces with integrated circuits
12/10/2008EP2000852A1 Halogenated anti-reflective coatings
12/10/2008EP2000851A1 Photomask blank, resist pattern forming process, and photomask preparation process
12/10/2008EP2000840A2 Projection optical system, exposure apparatus and device manufacturing method
12/10/2008EP2000566A2 Interlayer of orientational substrate and orientational substrate for forming epitaxial film
12/10/2008EP2000510A1 Resin composition, varnish, resin film, and semiconductor device using the resin film
12/10/2008EP2000259A2 Substrate holding apparatus, polishing apparatus, and polishing method
12/10/2008EP1999795A2 Technique for preparing precursor films and compound layers for thin film solar cell fabrication and apparatus corresponding thereto
12/10/2008EP1999792A2 Shielded gate trench(sgt) mosfet cells implemented with a schottky source contact
12/10/2008EP1999791A2 Light-emitting device using oxide semiconductor thin-film transistor and image display apparatus using the same
12/10/2008EP1999786A2 Process for fabricating a field-effect transistor with self-aligned gates
12/10/2008EP1999785A1 Method of straining a silicon island for mobility improvement
12/10/2008EP1999784A2 Plasma etch and photoresist strip process with intervening chamber de-fluorination and wafer de-fluorination steps
12/10/2008EP1999783A1 Method for fabricating a semiconductor structure, and corresponding semiconductor structure
12/10/2008EP1999782A1 Method of cleaning a semiconductor wafer
12/10/2008EP1999781A2 Dry etch stop process for eliminating electrical shorting in mram device structures
12/10/2008EP1999779A1 Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate
12/10/2008EP1999778A1 Method for separating wafers from a stack of wafers
12/10/2008EP1999513A1 Method of forming nanopattern and substrate having pattern formed using the method
12/10/2008EP1946381A4 Low capacitance scr with trigger element
12/10/2008EP1891662A4 Imprinting apparatus for forming pattern at uniform contact by additional constant pressure
12/10/2008EP1771279B1 Polishing apparatus and substrate processing method
12/10/2008EP1588407B1 Area array package with non-electrically connected solder balls
12/10/2008EP1579495A4 Method for fabrication of semiconductor device
12/10/2008EP1576040A4 Patterned polymeric structures, particularly microstructures, and methods for making same
12/10/2008EP1563572A4 Rear interconnect blade for rack mounted systems
12/10/2008EP1553638B1 Light receiving or light emitting device and its production method
12/10/2008EP1504473A4 Trench dmos transistor structure
12/10/2008EP1469508B1 Boat for heat treatment and vertical heat treatment equipment
12/10/2008EP1468453A4 High voltage power mosfet having a voltage sustaining region that includes doped columns formed by trench etching using an etchant gas that is also a doping source
12/10/2008EP1455961B1 Extrusion tool and method for manufacturing shaped article with fins
12/10/2008EP1446839A4 Trench dmos device with improved drain contact
12/10/2008EP1402580A4 Symmetric trench mosfet device and method of making same
12/10/2008EP1370709B1 Method and Apparatus for Synthesizing Diamond by Chemical Vapor Deposition
12/10/2008EP1362475B1 Photodiode cmos imager with column-feedback soft-reset
12/10/2008EP1316110B1 Electrostatic chuck with porous regions
12/10/2008EP1314182B1 System and method for removing particles entrained in an ion beam
12/10/2008EP1314181B1 Electrostatic trap for particles entrained in an ion beam
12/10/2008EP1143502B1 Method for producing semiconductor device
12/10/2008EP1124674B1 Method and device for separating into two slices a wafer of material, in particular semiconductor material
12/10/2008EP1097251B1 System and method for reducing particles in epitaxial reactors
12/10/2008EP1027725B1 Methods of forming power semiconductor devices having merged split-well body regions therein and devices formed thereby
12/10/2008CN201163621Y Crystal boat converter capable of improving transfer security
12/10/2008CN201163620Y Crystal boat converter capable of improving transfer flexibility
12/10/2008CN201163619Y Automatic box carrying mechanism of chip mounter
12/10/2008CN201163618Y Automatic material feeding mechanism of chip mounter
12/10/2008CN201163617Y Wafer transmission box
12/10/2008CN201163616Y Storage device for storing semiconductor component or light shield and its filter
12/10/2008CN201163615Y Bubble-removing bake oven apparatus for semiconductor packaging and processing
12/10/2008CN201163614Y Paster machine vision sensor controlling mechanism
12/10/2008CN201163613Y SMIF dust protector
12/10/2008CN201163612Y Auxiliary fixing element for electronic label on wafer transmission box
12/10/2008CN201162047Y Etching tank bubble apparatus and etching tank
12/10/2008CN101322255A Semiconductor light emitting element and method for manufacturing semiconductor light emitting element
12/10/2008CN101322250A Multi-operational mode transistor with multiple-channel device structure
12/10/2008CN101322249A Field effect semiconductor device including regions of superlattice