| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/16/2008 | US7464662 Compact, distributed inductive element for large scale inductively-coupled plasma sources |
| 12/11/2008 | WO2008151309A2 An ion implantation device and a method of semiconductor manufacturing by the implantation of ions derived from carborane cluster ions |
| 12/11/2008 | WO2008151255A1 Method for handling a semiconductor wafer assembly |
| 12/11/2008 | WO2008151166A1 Damascene process having retained capping layer through metallization for protecting low-k dielectrics |
| 12/11/2008 | WO2008151120A1 Method for reducing microloading in etching high aspect ratio structures |
| 12/11/2008 | WO2008151104A1 Methods of fabricating electronic devices using direct copper plating |
| 12/11/2008 | WO2008151095A2 Vacuum substrate storage |
| 12/11/2008 | WO2008151066A1 Production of metal nanoparticles |
| 12/11/2008 | WO2008151051A1 Plasma processing system esc high voltage control |
| 12/11/2008 | WO2008151009A1 Environmentally robust lighting devices and methods of manufacturing same |
| 12/11/2008 | WO2008150958A1 Method of and apparatus for laser drilling holes with improved taper |
| 12/11/2008 | WO2008150930A2 Masking high-aspect ratio structures |
| 12/11/2008 | WO2008150900A1 Gapfill extension of hdp-cvd integrated process modulation sio2 process |
| 12/11/2008 | WO2008150722A1 Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features |
| 12/11/2008 | WO2008150703A1 Reverse masking profile improvements in high aspect ratio etch |
| 12/11/2008 | WO2008150691A1 Patterned photoacid etching and articles therefrom |
| 12/11/2008 | WO2008150684A1 Method of forming a semiconductor device featuring a gate stressor and semiconductor device |
| 12/11/2008 | WO2008150683A1 Multiple millisecond anneals for semiconductor device fabrication |
| 12/11/2008 | WO2008150673A1 Pitch multiplication using self-assembling materials |
| 12/11/2008 | WO2008150651A1 Method and apparatus for dispensing a viscous material on a substrate |
| 12/11/2008 | WO2008150443A2 Method and apparatus for laser oxidation and reduction reactions |
| 12/11/2008 | WO2008150430A1 Self-aligned pillar patterning using multiple spacer masks |
| 12/11/2008 | WO2008150410A1 Enhanced transistor performance of n-channel transistors by using an additional layer above a dual stress liner in a semiconductor device |
| 12/11/2008 | WO2008150403A1 Methods of fabricating metal contact structures for laser diodes using backside uv exposure |
| 12/11/2008 | WO2008150140A2 Optofluidic maskless lithography system |
| 12/11/2008 | WO2008150055A1 Pad layout structure of semiconductor chip |
| 12/11/2008 | WO2008150032A1 Semiconductor memory device and its manufacturing method |
| 12/11/2008 | WO2008150012A1 Polishing composition |
| 12/11/2008 | WO2008149989A1 Patterning method |
| 12/11/2008 | WO2008149988A1 Patterning method |
| 12/11/2008 | WO2008149987A1 Patterning method |
| 12/11/2008 | WO2008149966A1 Positive radiation-sensitive resin composition |
| 12/11/2008 | WO2008149947A1 Positive photosensitive resin composition and method of forming cured film therefrom |
| 12/11/2008 | WO2008149937A1 Pad and method for polishing device wafer |
| 12/11/2008 | WO2008149853A1 Environment control apparatus, stage apparatus, exposure apparatus, and device production method |
| 12/11/2008 | WO2008149844A1 Film forming method and film forming apparatus |
| 12/11/2008 | WO2008149833A1 Method for manufacturing thin film transistor, method for manufacturing liquid crystal display, and method for forming electrode |
| 12/11/2008 | WO2008149808A1 Switch circuit and semiconductor integrated circuit |
| 12/11/2008 | WO2008149806A1 Method for evaluating contamination of semiconductor manufacturing apparatus |
| 12/11/2008 | WO2008149772A1 Laminated film for electronic component mounting, film carrier tape for electronic component mounting, and semiconductor device |
| 12/11/2008 | WO2008149769A1 Treating apparatus |
| 12/11/2008 | WO2008149751A1 Process for producing semiconductor device, semiconductor production apparatus, and recording medium |
| 12/11/2008 | WO2008149741A1 Method for dry cleaning plasma processing apparatus |
| 12/11/2008 | WO2008149702A1 Fluid control apparatus |
| 12/11/2008 | WO2008149701A1 Radiation-sensitive resin composition |
| 12/11/2008 | WO2008149699A1 Manufacturing method of semiconductor substrate and semiconductor device |
| 12/11/2008 | WO2008149678A1 Electronic component connecting method and joined body |
| 12/11/2008 | WO2008149650A1 Process for manufacturing polishing pad |
| 12/11/2008 | WO2008149643A1 Plasma doping apparatus and plasma doping method |
| 12/11/2008 | WO2008149635A1 Sputtering apparatus for forming thin film |
| 12/11/2008 | WO2008149625A1 Photosensitive adhesive composition, film-like adhesive, adhesive sheet, method for forming adhesive pattern, semiconductor wafer with adhesive layer, semiconductor device and method for manufacturing semiconductor device |
| 12/11/2008 | WO2008149622A1 Capacitor, resonator, filter device, communication device and electric circuit |
| 12/11/2008 | WO2008149609A1 Apparatus and method for bonding semiconductor chip |
| 12/11/2008 | WO2008149544A1 Form, microprocessed article, and their manufacturing methods |
| 12/11/2008 | WO2008149506A1 Wafer supporting glass |
| 12/11/2008 | WO2008149498A1 Organic el device and method for manufacturing the same |
| 12/11/2008 | WO2008149490A1 Cutting method and wire saw device |
| 12/11/2008 | WO2008149487A1 Method for forming silicon oxide film for soi wafer |
| 12/11/2008 | WO2008149446A1 Semiconductor production apparatus and process |
| 12/11/2008 | WO2008149402A1 Process for producing semiconductor device |
| 12/11/2008 | WO2008148882A2 Method for producing hybrid components |
| 12/11/2008 | WO2008148847A1 3d integration of vertical components in reconstituted substrates |
| 12/11/2008 | WO2008148741A1 Subassembly with glued power component |
| 12/11/2008 | WO2008148579A1 Apparatus and method for the wet chemical treatment of a product and method for installing a flow member into the apparatus |
| 12/11/2008 | WO2008148377A2 Method for the selective thermal treatment of the surface of a planar substrate |
| 12/11/2008 | WO2008130691A3 A high voltage (>100v) lateral trench power mosfet with low specific-on-resistance |
| 12/11/2008 | WO2008128897A3 Hybrid substrates and methods for forming such hybrid substrates |
| 12/11/2008 | WO2008127293A3 Memory transistor with nanodot floating gate and carbon nanotube control gate and manufacturing method thereof |
| 12/11/2008 | WO2008125543A3 Method for reducing the thickness of substrates |
| 12/11/2008 | WO2008121479A3 Method and structure for making a top-side contact to a substrate |
| 12/11/2008 | WO2008121383A3 Curled semiconductor transistor |
| 12/11/2008 | WO2008116335A3 Method of producing a wafer scale package |
| 12/11/2008 | WO2008114465A8 Method of forming solder bumps and solder bump-forming assembly |
| 12/11/2008 | WO2008114107A3 Method of fabricating a hybrid substrate |
| 12/11/2008 | WO2008112000A3 Large area integration of quartz resonators with electronics |
| 12/11/2008 | WO2008106632A3 Rf shutter |
| 12/11/2008 | WO2008098404A3 Method for manufacturing a single-crystal film, and integrated optical device comprising such a single-crystal film |
| 12/11/2008 | WO2008079449A3 Apparatus and method for polishing semiconductor wafers |
| 12/11/2008 | WO2008073776B1 Transistor gates including cobalt silicide, semiconductor device structures including the transistor gates, precursor structures, and methods of fabrication |
| 12/11/2008 | WO2007140426A3 Process chamber for dielectric gapfill |
| 12/11/2008 | WO2007111699A3 Plasma treatment of a semiconductor surface for enhanced nucleation of a metal-containing layer |
| 12/11/2008 | WO2007103685A3 Rf power transistor device with metal electromigration design and method thereof |
| 12/11/2008 | WO2007100571A3 Johnsen-rahbek electrostatic chuck driven with ac voltage |
| 12/11/2008 | WO2006043991A3 Fine-pitch electronic socket for temporary or permanent attachments |
| 12/11/2008 | US20080305721 Treating method for brittle member |
| 12/11/2008 | US20080305720 Method for Production of a Laminate Polishing Pad |
| 12/11/2008 | US20080305715 Manufacturing method of semiconductor integrated circuit device |
| 12/11/2008 | US20080305648 Method for forming inorganic silazane-based dielectric film |
| 12/11/2008 | US20080305647 Method for Manufacturing a Semiconductor Device |
| 12/11/2008 | US20080305646 Atomic layer deposition |
| 12/11/2008 | US20080305645 Method of manufacturing semiconductor device |
| 12/11/2008 | US20080305644 Method of manufacturing semiconductor device including trench-forming process |
| 12/11/2008 | US20080305643 Method For the Removal of Doped Surface Layers on the Back Faces of Crystalline Silicon Solar Wafers |
| 12/11/2008 | US20080305642 Method for forming fine pattern of semiconductor device |
| 12/11/2008 | US20080305641 Reverse masking profile improvements in high aspect ratio etch |
| 12/11/2008 | US20080305640 Method for preparing trench power transistors |
| 12/11/2008 | US20080305639 Dual damascene process |
| 12/11/2008 | US20080305638 Coating compositions for use in forming patterns and methods of forming patterns |
| 12/11/2008 | US20080305637 Method for forming fine pattern of semiconductor device |
| 12/11/2008 | US20080305636 Method of forming fine pattern employing self-aligned double patterning |