Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2010
06/17/2010WO2010068055A2 Planar gate-controlled element and method for fabricating the same
06/17/2010WO2010067974A2 Apparatus for treating multiple substrates
06/17/2010WO2010067856A1 Film-forming method, film-forming apparatus, and storage medium
06/17/2010WO2010067844A1 Polishing solution for cmp and polishing method using the polishing solution
06/17/2010WO2010067835A1 Method for manufacturing composite substrate on which wide bandgap semiconductor is laminated
06/17/2010WO2010067814A1 Substrate and method for manufacturing substrate
06/17/2010WO2010067778A1 Tantalum nitride film formation method and film formation device therefore
06/17/2010WO2010067683A1 Composition
06/17/2010WO2010067670A1 Plasma processing apparatus
06/17/2010WO2010067656A1 Normal-temperature bondong device
06/17/2010WO2010067645A1 Display device
06/17/2010WO2010067627A1 Precursor for acid-dissociable dissolution-inhibitive group and cyclic compound having acid-dissociable dissolution-inhibitive group
06/17/2010WO2010067622A1 Stereoisomeric cyclic compounds, manufacturing method therefor, compositions comprising the stereoisomeric cyclic compounds and manufacturing method therefor
06/17/2010WO2010067621A1 Cyclic compounds and photoresist compositions using same
06/17/2010WO2010067610A1 Semiconductor module, method for manufacturing semiconductor module, and portable apparatus
06/17/2010WO2010067597A1 Light source apparatus, exposure apparatus and device manufacturing method
06/17/2010WO2010067591A1 Rack and pinion system, vacuum processing device, drive control method for rack and pinion system, drive control program, and recording medium
06/17/2010WO2010067588A1 Method for reducing defect of semiconductor substrate and defect reducing device
06/17/2010WO2010067571A1 Composite oxide sintered body and sputtering target comprising same
06/17/2010WO2010067546A1 Semiconductor-sealing resin composition, method for producing semiconductor device, and semiconductor device
06/17/2010WO2010067544A1 Substrate cooling apparatus and substrate processing system
06/17/2010WO2010067538A1 Granulated epoxy resin composition for semiconductor encapsulation, semiconductor device using same, and method for manufacturing semiconductor device
06/17/2010WO2010067525A1 Semiconductor device, process for producing semiconductor device, semiconductor substrate, and process for producing semiconductor substrate
06/17/2010WO2010067520A1 Magnetoresistance effect element and magnetic memory cell and magnetic random access memory using same
06/17/2010WO2010067517A1 Method for manufacturing semiconductor device
06/17/2010WO2010067516A1 Soi wafer manufacturing method
06/17/2010WO2010067511A1 Thin film solar cell manufacturing method
06/17/2010WO2010067491A1 Semiconductor wafer testing apparatus
06/17/2010WO2010067484A1 Method for exposing semiconductor substrate and semiconductor device manufacturing system
06/17/2010WO2010067483A1 Thin film transistor and method for manufacturing the thin film transistor
06/17/2010WO2010067481A1 Semiconductor integrated circuit device and method for designing the same
06/17/2010WO2010067424A1 Catalyst chemical vapor deposition apparatus
06/17/2010WO2010067407A1 Semiconductor memory device and method for fabricating the same
06/17/2010WO2010067395A1 Method and apparatus for manufacturing semiconductor device
06/17/2010WO2010067284A2 Method and system for centering wafer on chuck
06/17/2010WO2010067214A1 Method of manufacturing a tunnel transistor and ic comprising the same
06/17/2010WO2010067159A2 Integration of a processing bench in an inline coating system
06/17/2010WO2010066630A1 Bipolar transistor having self-adjusted emitter contact
06/17/2010WO2010066366A1 Method and apparatus for manufacturing an electronic assembly, electronic assembly manufactured with the method or in the apparatus
06/17/2010WO2010066238A2 Method for the miniaturizable contacting of insulated wires
06/17/2010WO2010066126A1 Method for manufacturing split gate type flash memory
06/17/2010WO2010066081A1 Methods and apparatus for cleaning semiconductor wafers
06/17/2010WO2010049654A8 Method for producing a hybrid substrate with an embedded electrically insulating continuous layer
06/17/2010WO2010047953A3 A remote plasma clean process with cycled high and low pressure clean steps
06/17/2010WO2010047924A3 Method of making a split gate memory cell
06/17/2010WO2010039208A3 Guard ring structures and method of fabricating thereof
06/17/2010WO2010035980A3 Nonvolatile memory device and methods for recording and reading information on nonvolatile memory device
06/17/2010WO2010033378A3 Method and apparatus for metal silicide formation
06/17/2010WO2010031192A8 Methods for manufacturing ultrasound transducers and other components
06/17/2010WO2010030588A3 Implanting a solar cell substrate using a mask
06/17/2010WO2010027178A3 Deposition apparatus and deposition method using the same
06/17/2010WO2010025032A3 Method for optical proximity correction, design and manufacturing of a reticle using variable shaped beam lithography
06/17/2010WO2010024943A3 Wafer carrier with varying thermal resistance
06/17/2010WO2010024555A3 Apparatus and method for manufacturing polycrystalline silicone thin film
06/17/2010WO2010021508A3 Method for cleaning components of semiconductor equipment and apparatus for cleaning components of semiconductor equipment using the same
06/17/2010WO2010019946A4 Anti-reflective surfaces and methods for making the same
06/17/2010WO2009059128A3 Crystalline-thin-film photovoltaic structures and methods for forming the same
06/17/2010US20100152888 Arrangements for creating wafer movement control macros
06/17/2010US20100152887 Substrate processing apparatus and display method for substrate processing apparatus
06/17/2010US20100152875 Estimation apparatus and estimation method
06/17/2010US20100151771 Polishing apparatus and polishing method
06/17/2010US20100151770 Substrate polishing apparatus
06/17/2010US20100151697 Magnetic processing of operating electronic materials
06/17/2010US20100151696 Manufacturing method for semiconductor device and heat treatment apparatus
06/17/2010US20100151695 Substrate processing apparatus, substrate annealing method, and semiconductor device manufacturing method
06/17/2010US20100151694 Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures
06/17/2010US20100151693 Method for manufacturing semiconductor device comprising mutioxide
06/17/2010US20100151692 Epitaxial wafer and method of manufacturing the same
06/17/2010US20100151691 Method for improved thickness repeatability of pecvd deposited carbon films
06/17/2010US20100151690 Multi-channel developer system
06/17/2010US20100151689 Tape-based epitaxial lift off apparatuses and methods
06/17/2010US20100151688 Method to prevent thin spot in large size system
06/17/2010US20100151687 Apparatus including showerhead electrode and heater for plasma processing
06/17/2010US20100151686 High pressure bevel etch process
06/17/2010US20100151685 Methods of removing multi-layered structure and of manufacturing semiconductor device
06/17/2010US20100151684 Slurry composition for primary chemical mechanical polishing and chemical mechanical polishing method
06/17/2010US20100151683 Chemical mechanical polishing composition and methods relating thereto
06/17/2010US20100151682 Method of manufacturing semiconductor device and substrate processing apparatus
06/17/2010US20100151681 Titanium silicon nitride deposition
06/17/2010US20100151680 Substrate carrier with enhanced temperature uniformity
06/17/2010US20100151679 System for modifying small structures
06/17/2010US20100151678 Wafer Backside Grinding with Stress Relief
06/17/2010US20100151677 Etch method in the manufacture of a semiconductor device
06/17/2010US20100151676 Densification process for titanium nitride layer for submicron applications
06/17/2010US20100151675 Wiring structure and method for manufacturing the same
06/17/2010US20100151674 Structures Electrically Connecting Aluminum and Copper Interconnections and Methods of Forming the Same
06/17/2010US20100151673 Semiconductor device and manufacturing method of semiconductor device
06/17/2010US20100151672 Methods of forming metal interconnection structures
06/17/2010US20100151671 Novel air gap integration scheme
06/17/2010US20100151670 Methods Of Adding Pads And One Or More Interconnect Layers To The Passivated Topside Of A Wafer Including Connections To At Least A Portion Of The Integrated Circuit Pads Thereon
06/17/2010US20100151669 Forming abrupt source drain metal gate transistors
06/17/2010US20100151668 Method of fabricating insulation layer and method of fabricating semiconductor device using the same
06/17/2010US20100151667 Dopant implanting method and doping apparatus
06/17/2010US20100151666 Novel Methods for Making and Using Halosilylgermanes
06/17/2010US20100151665 Small electrode for phase change memories
06/17/2010US20100151664 Method of Manufacturing a Semiconductor Device
06/17/2010US20100151663 Manufacturing method of soi substrate and manufacturing method of semiconductor device
06/17/2010US20100151662 Field effect transistor and its manufacturing method
06/17/2010US20100151661 Nanostructures formed of branched nanowhiskers and methods of producing the same
06/17/2010US20100151660 Method for forming semiconductor devices with active silicon height variation
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