Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2010
09/23/2010WO2010105585A1 Substrate processing system and substrate processing method
09/23/2010WO2010105382A1 Irradiating a plate using multiple co-located radiation sources
09/23/2010WO2010105346A1 Multi-die semiconductor package with heat spreader
09/23/2010WO2010090394A3 Method for manufacturing an insulated conductive pattern
09/23/2010WO2010086363A3 Arrangement and method for measurement of the temperature and of the thickness growth of silicon rods in a silicon deposition reactor
09/23/2010WO2010084372A8 A photoresist image-forming process using double patterning
09/23/2010WO2010083995A3 Method of enhancing the strength of semiconductor wafers or chips
09/23/2010WO2010083091A3 Pulse temporal programmable ultrafast burst mode laser for micromachining
09/23/2010WO2010082992A3 Polishing pad and system with window support
09/23/2010WO2010081151A3 Memory cell having dielectric memory element
09/23/2010WO2010080655A3 Spacer formation for array double patterning
09/23/2010WO2010080318A3 Memory cells, methods of forming dielectric materials, and methods of forming memory cells
09/23/2010WO2010077847A3 Method of depositing tungsten film with reduced resistivity and improved surface morphology
09/23/2010WO2010077801A3 Methods for simultaneously forming doped regions having different conductivity-determining type element profiles
09/23/2010WO2010068813A3 Carrier head membrane
09/23/2010WO2010068598A3 A load lock for cooling wafers and a method of cooling the wafers
09/23/2010WO2010066238A3 Method for the contacting of insulated wires by applying a spherical or mushroom-shaped coating to the wire
09/23/2010US20100241386 Method of Correcting Coordinates, and Defect Review Apparatus
09/23/2010US20100241374 Failure analysis method, apparatus, and program for semiconductor integrated circuit
09/23/2010US20100241271 Wafer storing cabinet and storage control method thereof
09/23/2010US20100241261 Pattern generating method, method of manufacturing semiconductor device, and computer program product
09/23/2010US20100240285 Polishing apparatus and method of manufacturing semiconductor device using the same
09/23/2010US20100240283 Method of Chemical Mechanical Polishing
09/23/2010US20100240281 Substrate polishing metrology using interference signals
09/23/2010US20100240227 Activating dopants using multiple consecutive millisecond-range anneals
09/23/2010US20100240226 Method and apparatus for thermal treatment of semiconductor workpieces
09/23/2010US20100240225 Microwave plasma processing apparatus, microwave plasma processing method, and microwave-transmissive plate
09/23/2010US20100240224 Multi-zone semiconductor furnace
09/23/2010US20100240223 Method and apparatus for manufacturing semiconductor device
09/23/2010US20100240222 Wafer fixture for wet process applications
09/23/2010US20100240221 Methods of Forming Patterns for Semiconductor Devices
09/23/2010US20100240220 Process for stripping photoresist and removing dielectric liner
09/23/2010US20100240219 Method of treating a semiconductor substrate
09/23/2010US20100240218 Substrate etching method and system
09/23/2010US20100240217 Substrate processing method
09/23/2010US20100240216 Film formation method and apparatus utilizing plasma cvd
09/23/2010US20100240215 Multi-Sacrificial Layer and Method
09/23/2010US20100240214 Method of forming multi metal layers thin film on wafer
09/23/2010US20100240213 Method of manufacturing a semiconductor device
09/23/2010US20100240212 Method of manufacturing a semiconductor device
09/23/2010US20100240211 Semiconductor device, method of manufacturing the same, and phase shift mask
09/23/2010US20100240210 Strapping contact for charge protection
09/23/2010US20100240209 Semiconductor devices including hydrogen implantation layers and methods of forming the same
09/23/2010US20100240208 Floating gate having multiple charge storing layers, method of fabricating the floating gate, non-volatile memory device using the same, and fabricating method thereof
09/23/2010US20100240207 Methods of manufacturing charge trap type memory devices
09/23/2010US20100240206 Method of annealing a dielectric layer
09/23/2010US20100240205 Methods of fabricating three-dimensional nonvolatile memory devices using expansions
09/23/2010US20100240204 Methods for forming metal gate transistors
09/23/2010US20100240203 Silicon-based visible and near-infrared optoelectric devices
09/23/2010US20100240202 Semiconductor apparatus and manufacturing method thereof
09/23/2010US20100240201 Implantation of multiple species to address copper reliability
09/23/2010US20100240200 Substrate processing system and substrate processing method
09/23/2010US20100240199 Scalable Light-Induced Metallic to Semiconducting Conversion of Carbon Nanotubes and Applications to Field-Effect Transistor Devices
09/23/2010US20100240198 Method for fabricating semiconductor device
09/23/2010US20100240197 Semiconductor integrated circuit device and related fabrication method
09/23/2010US20100240196 Adhesive, adhesive sheet, multi-layered adhesive sheet, and production method for an electronic part
09/23/2010US20100240195 Fabrication method for device structure having transparent dielectric substrate
09/23/2010US20100240194 Method of fabricating semiconductor device
09/23/2010US20100240193 Methods of fabricating flash memory devices including substantially uniform tunnel oxide layers
09/23/2010US20100240192 Alignment mark, method of manufacturing semiconductor device, and mask set
09/23/2010US20100240191 Method of forming semiconductor device having a capacitor
09/23/2010US20100240190 Method for fabricating deep trench capacitor
09/23/2010US20100240189 Methods of Fabricating Semiconductor Devices
09/23/2010US20100240188 Method for fabricating capacitor
09/23/2010US20100240187 Integrated semiconductor structure including a heterojunction bipolar transistor and a schottky diode
09/23/2010US20100240186 Dual-SiGe Epitaxy for MOS Devices
09/23/2010US20100240185 Semiconductor device and method of manufacturing the same
09/23/2010US20100240184 Method of forming buried gate electrode
09/23/2010US20100240183 Method of manufacturing power semiconductor device
09/23/2010US20100240182 Spacer Patterns Using Assist Layer For High Density Semiconductor Devices
09/23/2010US20100240181 Method for Forming Single-Level Electrically Erasable and Programmable Read Only Memory Operated in Environment with High/Low-Voltage
09/23/2010US20100240180 Methods of Manufacturing Semiconductor Devices Having Low Resistance Buried Gate Structures
09/23/2010US20100240179 Methods of manufacturing capacitor structures and methods of manufacturing semiconductor devices using the same
09/23/2010US20100240178 Semiconductor device with improved short channel effect of a pmos and stabilized current of an nmos and method for manufacturing the same
09/23/2010US20100240177 Method of manufacturing semiconductor device
09/23/2010US20100240176 Electronic component, semiconductor device, methods of manufacturing the same, circuit board, and electronic instrument
09/23/2010US20100240175 Method for making a stacked package semiconductor module having packages stacked in a cavity in the module substrate
09/23/2010US20100240174 Via Using Zn or Zn Alloys and Its Making Method, 3D Chip Stack Packages Using Thereof
09/23/2010US20100240173 Semiconductor device and manufacturing method of the same
09/23/2010US20100240171 Method of Fabricating a Multijunction Solar Cell with a Phosphorus-Containing Nucleation Layer
09/23/2010US20100240169 Method to make electrical contact to a bonded face of a photovoltaic cell
09/23/2010US20100240165 Method for manufacturing solar cell
09/23/2010US20100240161 Method for fabricating nitride semiconductor light-emitting device
09/23/2010US20100240159 Manufacturing method of semiconductor laser element
09/23/2010US20100240157 Display device, manufacturing method thereof, and television receiver
09/23/2010US20100240156 Method for providing a non-volatile memory
09/23/2010US20100240155 Auto Feedback Apparatus for Laser Marking
09/23/2010US20100240154 Temperature control device, temperature control method, and substrate processing apparatus
09/23/2010US20100240153 Manufacture method for photovoltaic module
09/23/2010US20100240152 Current-Confined Effect of Magnetic Nano-Current-Channel (NCC) for Magnetic Random Access Memory (MRAM)
09/23/2010US20100240151 Method of double patterning and etching magnetic tunnel junction structures for spin-transfer torque MRAM devices
09/23/2010US20100239963 Exposure mask, exposure method, and method of manufacturing optical element
09/23/2010US20100239858 Film-like adhesive, adhesive sheet, and semiconductor device using same
09/23/2010US20100239818 Textured silicon substrate and method
09/23/2010US20100239782 Insulating film forming method, insulating film forming apparatus, and plasma film forming apparatus
09/23/2010US20100239758 Surface pre-treatment for enhancement of nucleation of high dielectric constant materials
09/23/2010US20100239397 Substrate transport apparatus and control method for substrate transport apparatus
09/23/2010US20100239395 Gate valve and substrate-treating apparatus including the same
09/23/2010US20100239394 Inline-type wafer conveyance device
09/23/2010US20100239157 Automated wafer defect inspection system and a process of performing such inspection
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