Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2010
09/29/2010CN101075622B 半导体器件 Semiconductor devices
09/29/2010CN101071137B Heating device quick-change device for planar pressing structure
09/29/2010CN101068032B Semiconductor strain gauge and the manufacturing method
09/29/2010CN101059661B Lithographic apparatus and device manufacturing method
09/29/2010CN101046691B Control device and method for substrate processing apparatus
09/29/2010CN101046634B Method for etching quartz on photomask plasma
09/29/2010CN101043024B Method for manufacturing semiconductor device
09/29/2010CN101026146B Power semiconductor module and its manufacturing method
09/29/2010CN101025426B Probe assembly
09/29/2010CN101023714B Plasma processing apparatus
09/29/2010CN101023713B Plasma processing apparatus
09/29/2010CN101021680B Material for forming exposure light-blocking film, multilayer interconnection structure and manufacturing method thereof, and semiconductor device
09/29/2010CN101010448B Constitutional member for semiconductor processing apparatus and method for producing same
09/29/2010CN101010260B Single-layer carbon nanotube and aligned single-layer carbon nanotube bulk structure, and their production process, production apparatus and use
09/29/2010CN101005017B Method of forming a semiconductor thin film
09/29/2010CN101000881B Image sensor testing method and apparatus
09/28/2010USRE41784 Adhesive material
09/28/2010USRE41764 Semiconductor device with compensated threshold voltage and method for making same
09/28/2010US7805649 Method and apparatus for selectively compacting test responses
09/28/2010US7805219 Carrier robot system and control method for carrier robot
09/28/2010US7804994 Overlay metrology and control method
09/28/2010US7804648 Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask
09/28/2010US7804647 Sub-resolutional laser annealing mask
09/28/2010US7804640 Composite cavity for enhanced efficiency of up-conversion
09/28/2010US7804596 Overlay key, method of forming the overlay key and method of measuring overlay accuracy using the overlay key
09/28/2010US7804584 Integrated circuit manufacturing methods with patterning device position determination
09/28/2010US7804574 Lithographic apparatus and device manufacturing method using acidic liquid
09/28/2010US7804552 Electro-optical device with light shielding portion comprising laminated colored layers, electrical equipment having the same, portable telephone having the same
09/28/2010US7804550 Liquid crystal display device and method of fabricating the same
09/28/2010US7804312 Silicon wafer for probe bonding and probe bonding method using thereof
09/28/2010US7804202 Method and apparatus for mode selection for high voltage integrated circuits
09/28/2010US7804179 Plastic ball grid array ruggedization
09/28/2010US7804175 Semiconductor structures including conductive vias continuously extending therethrough and methods of making the same
09/28/2010US7804174 TFT wiring comprising copper layer coated by metal and metal oxide
09/28/2010US7804167 Wire bond integrated circuit package for high speed I/O
09/28/2010US7804159 Semiconductor device and a method of manufacturing the same and a mounting structure of a semiconductor device
09/28/2010US7804158 Electronic device with shielding structure and method of manufacturing the same
09/28/2010US7804156 Semiconductor wafer assembly and method of processing semiconductor wafer
09/28/2010US7804152 Recessed shallow trench isolation
09/28/2010US7804148 Opto-thermal mask including aligned thermal dissipative layer, reflective layer and transparent capping layer
09/28/2010US7804144 Low-temperature grown high quality ultra-thin CoTiO3 gate dielectrics
09/28/2010US7804142 Semiconductor device and fabrication method thereof
09/28/2010US7804139 Device having conductive material disposed in a cavity formed in an isolation oxide disposed in a trench
09/28/2010US7804138 Buried guard ring and radiation hardened isolation structures and fabrication methods
09/28/2010US7804137 Field effect transistor (FET) devices and methods of manufacturing FET devices
09/28/2010US7804134 MOSFET on SOI device
09/28/2010US7804129 Recessed gate electrode MOS transistor and method for fabricating the same
09/28/2010US7804128 Nonvolatile semiconductor memory device
09/28/2010US7804125 System and method for reducing process-induced charging
09/28/2010US7804121 Flash memory device and programming and erasing methods therewith
09/28/2010US7804120 Non-volatile semiconductor memory devices
09/28/2010US7804118 Semiconductor device having plural DRAM memory cells and a logic circuit and method for manufacturing the same
09/28/2010US7804109 Heterojunction bipolar transistor and method for manufacturing the same, and power amplifier using the same
09/28/2010US7804106 P-type nitride semiconductor structure and bipolar transistor
09/28/2010US7804095 Image display device and manufacturing method for the same
09/28/2010US7804094 Process for fabricating a thin film semiconductor device, thin film semiconductor device, and liquid crystal display
09/28/2010US7804088 Semiconductor device, manufacturing method of semiconductor device, display device, and manufacturing method of display device
09/28/2010US7804084 Phase change memory elements having a confined portion of phase change material on a recessed contact
09/28/2010US7803722 Methods for forming a dielectric layer within trenches
09/28/2010US7803721 Semiconductor device and method of manufacturing same
09/28/2010US7803720 Coating process and equipment for reduced resist consumption
09/28/2010US7803719 Semiconductor device including a coupled dielectric layer and metal layer, method of fabrication thereof, and passivating coupling material comprising multiple organic components for use in a semiconductor device
09/28/2010US7803717 Growth and integration of epitaxial gallium nitride films with silicon-based devices
09/28/2010US7803716 Fabrication method of semiconductor device
09/28/2010US7803715 Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmask
09/28/2010US7803714 Semiconductor through silicon vias of variable size and method of formation
09/28/2010US7803713 Method for fabricating air gap for semiconductor device
09/28/2010US7803712 Multilevel imprint lithography
09/28/2010US7803711 Low pH barrier slurry based on titanium dioxide
09/28/2010US7803710 Method for fabricating semiconductor device capable of decreasing critical dimension in peripheral region
09/28/2010US7803709 Method of fabricating pattern in semiconductor device using spacer
09/28/2010US7803708 Method for reducing amine based contaminants
09/28/2010US7803707 Metal silicide nanowires and methods for their production
09/28/2010US7803706 Semiconductor device manufacturing method and semiconductor device
09/28/2010US7803705 Manufacturing method of semiconductor device and film deposition system
09/28/2010US7803704 Reliable interconnects
09/28/2010US7803703 Metal-germanium physical vapor deposition for semiconductor device defect reduction
09/28/2010US7803702 Method for fabricating MOS transistors
09/28/2010US7803701 Method for fabricating a semiconductor device
09/28/2010US7803700 Crystal imprinting methods for fabricating substrates with thin active silicon layers
09/28/2010US7803699 Polysilicon thin film transistor and method of fabricating the same
09/28/2010US7803698 Methods for controlling catalyst nanoparticle positioning and apparatus for growing a nanowire
09/28/2010US7803697 Highly integrated semiconductor device and method of fabricating the same
09/28/2010US7803696 Wafer dividing method
09/28/2010US7803695 Semiconductor substrate and process for producing it
09/28/2010US7803694 Process for transferring a layer of strained semiconductor material
09/28/2010US7803693 Bowed wafer hybridization compensation
09/28/2010US7803692 Manufacturing method of semiconductor device having self-aligned contact
09/28/2010US7803691 Nonvolatile memory device and method for fabricating the same
09/28/2010US7803690 Epitaxy silicon on insulator (ESOI)
09/28/2010US7803689 Semiconductor device manufactured with a double shallow trench isolation process
09/28/2010US7803688 Capacitive substrate and method of making same
09/28/2010US7803687 Method for forming a thin film resistor
09/28/2010US7803686 Methods for etching doped oxides in the manufacture of microfeature devices
09/28/2010US7803685 Silicided base structure for high frequency transistors
09/28/2010US7803684 Method of fabricating semiconductor device having a junction extended by a selective epitaxial growth (SEG) layer
09/28/2010US7803683 Method of fabricating a semiconductor device
09/28/2010US7803682 Semiconductor memory device and method for manufacturing same
09/28/2010US7803681 Semiconductor device with a bulb-type recess gate
09/28/2010US7803680 Self-aligned patterning method by using non-conformal film and etch back for flash memory and other semiconductor applications