Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2010
10/07/2010WO2010113946A1 Treatment device
10/07/2010WO2010113941A1 Method for cooling subject to be processed, and apparatus for processing subject to be processed
10/07/2010WO2010113931A1 Organic semiconductor ink composition and method for forming organic semiconductor pattern using same
10/07/2010WO2010113928A1 Method for forming silicon nitride film, method for manufacturing semiconductor memory device, and plasma cvd apparatus
10/07/2010WO2010113881A1 Substrate transfer device and substrate processing device
10/07/2010WO2010113875A1 Semiconductor fabrication apparatus and temperature adjustment method
10/07/2010WO2010113863A1 Device for supplying water containing dissolved gas and process for producing water containing dissolved gas
10/07/2010WO2010113792A1 Apparatus and method for treating etching solution
10/07/2010WO2010113779A1 Semiconductor device
10/07/2010WO2010113776A1 Signal transmission communication unit and coupler
10/07/2010WO2010113748A1 Ferromagnetic random access memory
10/07/2010WO2010113744A1 Agent for removing conductive film and method for removing conductive film
10/07/2010WO2010113715A1 Method of producing semiconductor device, and semiconductor device
10/07/2010WO2010113713A1 Semiconductor device
10/07/2010WO2010113709A1 Plasma processing apparatus and method for manufacturing solar cell using same
10/07/2010WO2010113708A1 Method of producing solar cell module
10/07/2010WO2010113703A1 Bonding device, bonding sealer amplitude measurement method, and bonding sealer amplitude calibration method
10/07/2010WO2010113700A1 Reflective photomask and reflective photomask blank
10/07/2010WO2010113675A1 Substrate cleaning device
10/07/2010WO2010113644A1 Exposure method and exposure apparatus
10/07/2010WO2010113625A1 Multi-chamber processing system
10/07/2010WO2010113616A1 Etching liquid
10/07/2010WO2010113587A1 Method for cleaning electronic material and device for cleaning electronic material
10/07/2010WO2010113584A1 Semiconductor device and method for manufacturing same
10/07/2010WO2010113576A1 System for in-situ mixing and diluting fluorine gas
10/07/2010WO2010113525A1 Exposure apparatus, exposure method and device manufacturing method
10/07/2010WO2010113518A1 Field-effect transistor
10/07/2010WO2010113501A1 Semiconductor device
10/07/2010WO2010113486A1 Holding device, transfer device, and device for transmitting torque
10/07/2010WO2010113485A1 Holding apparatus, transfer apparatus, and rotation transmitting apparatus
10/07/2010WO2010113423A1 Method for growing crystals of nitride semiconductor, and process for manufacture of semiconductor device
10/07/2010WO2010113406A1 Nitrogen-based semiconductor element and production method therefor
10/07/2010WO2010113405A1 Nitride-based semiconductor element and production method therefor
10/07/2010WO2010113399A1 Nitride semiconductor element and method for producing the same
10/07/2010WO2010113386A1 Inspection condition data generation method and inspection system of semiconductor wafer appearance inspection apparatus
10/07/2010WO2010113383A1 Semiconductor device
10/07/2010WO2010113376A1 Flexible semiconductor device and method for manufacturing same
10/07/2010WO2010113375A1 Semiconductor device and method for manufacturing same
10/07/2010WO2010113370A1 Chemically amplified resist material and method for forming pattern using same
10/07/2010WO2010113369A1 Method for manufacturing semiconductor device
10/07/2010WO2010113358A1 Plasma etching apparatus
10/07/2010WO2010113263A1 Semiconductor integrated circuit and power source voltage control method
10/07/2010WO2010113250A1 Joint quality examining device and joint quality examining method
10/07/2010WO2010113238A1 Nitride semiconductor element and method for manufacturing same
10/07/2010WO2010113237A1 Nitride semiconductor element and method for manufacturing same
10/07/2010WO2010113232A1 Examining method and examining device
10/07/2010WO2010113229A1 Semiconductor device and method of producing same
10/07/2010WO2010113163A1 Vertical organic field effect transistor and method of its manufacture
10/07/2010WO2010113089A2 Device for treating disc-like articles
10/07/2010WO2010113021A1 Method for determining the concentration profile of a dopant in semiconductors
10/07/2010WO2010112980A1 Iii-nitride light emitting device including porous semiconductor layer
10/07/2010WO2010112782A2 Electronic structure including an epitaxial layer on sintered silicon
10/07/2010WO2010112676A1 A casing of a sensor measuring oscillations, and a sensor for measuring oscillations
10/07/2010WO2010112614A1 Method and device for identifying object and for tracking objects in a production process
10/07/2010WO2010112585A1 Self-contained integrated circuit having transistors with separate threshold voltages
10/07/2010WO2010112540A1 Epitaxial methods and structures for reducing surface dislocation density in semiconductor materials
10/07/2010WO2010112412A1 Component having an overlapping laser track; method for producing such a component
10/07/2010WO2010112265A1 Cmp method
10/07/2010WO2010111973A1 Dual-stage exchange system for lithographic apparatus
10/07/2010WO2010111972A1 Dual wafer stage exchanging system for lithographic device
10/07/2010WO2010111969A1 Dual-stage exchange system for lithographic apparatus
10/07/2010WO2010111927A1 Method and device for preparing compound semiconductor film
10/07/2010WO2010111848A1 Pixel electrode device
10/07/2010WO2010111832A1 Substrate warpage-reducing structure
10/07/2010WO2010111826A1 Methods and apparatus for cleaning semiconductor wafers
10/07/2010WO2010111825A1 Electronic package and method of fabrication thereof
10/07/2010WO2010111781A1 Systems and methods for handling wafers
10/07/2010WO2010091245A3 Scribe-line through silicon vias
10/07/2010WO2010090914A3 Patterned wafer inspection system using a non-vibrating contact potential difference sensor
10/07/2010WO2010081661A3 Solution for increasing wafer sheet resistance and/or photovoltaic cell power density level
10/07/2010WO2010080732A3 Scatterometry metrology target design optimization
10/07/2010WO2010080421A4 Controlling ion energy distribution in plasma processing systems
10/07/2010WO2010078120A3 Monolithic stage positioning system and method
10/07/2010WO2010078054A3 Tunnel field effect transistor and method of manufacturing same
10/07/2010WO2010057673A3 Machining system, in particular for a clean room machining installation, and a transfer device therefor
10/07/2010WO2010052541A3 Oxidation and cleaning process for silicon wafers
10/07/2010WO2010051133A3 Semiconductor devices having faceted silicide contacts, and related fabrication methods
10/07/2010WO2010046881A3 Method of manufacturing a mos transistor
10/07/2010WO2010005592A3 Microelectronic interconnect element with decreased conductor spacing
10/07/2010WO2009068948A3 Chip capacitor
10/07/2010WO2009030284A8 Positioning device to position one or more electronic circuit boards, in particular for photovoltaic cells, in a metal-deposition unit
10/07/2010WO2008006418A8 Method for packaging components
10/07/2010US20100256811 Diagnosis system for transport robot
10/07/2010US20100256809 Vacuum processing system
10/07/2010US20100255684 Method for oxide film formation and apparatus for the method
10/07/2010US20100255683 Plasma processing apparatus
10/07/2010US20100255682 Method for thinning a bonding wafer
10/07/2010US20100255681 Slurry composition and method of fabricating damascene structure using the same
10/07/2010US20100255680 Top-Down Nanowire Thinning Processes
10/07/2010US20100255679 Lithography method and apparatus for semiconductor device fabrication
10/07/2010US20100255678 Method of depositing a uniform metal seed layer over a plurality of recessed semiconductor features
10/07/2010US20100255677 Manufacturing method of semiconductor device
10/07/2010US20100255676 Methods of Manufacturing Semiconductor Devices
10/07/2010US20100255675 Semiconductor device and method for manufacturing the same
10/07/2010US20100255674 Method of forming contact structure
10/07/2010US20100255673 Semiconductor device having elastic solder bump to prevent disconnection
10/07/2010US20100255672 Method of manufacturing semiconductor device
10/07/2010US20100255671 Nonvolatile semiconductor memory device
10/07/2010US20100255670 Nonvolatile semiconductor memory and method of manufacturing the same
10/07/2010US20100255669 Methods Of Forming Transistor Gate Constructions, Methods Of Forming NAND Transistor Gate Constructions, And Methods Forming DRAM Transistor Gate Constructions
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