Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2010
12/08/2010EP2257972A1 Methods for forming doped regions in semiconductor substrates using non-contact printing processes and dopant-comprising inks for forming such doped regions using non-contact printing processes
12/08/2010EP2257971A1 Nanofilm protective and release matrices
12/08/2010EP2257970A2 Buffer layer deposition for thin-film solar cells
12/08/2010EP2257969A2 Methods of patterning a conductor on a substrate
12/08/2010EP2257968A1 Super lattice/quantum well nanowires
12/08/2010EP2257967A1 Semiconductor wafer monitoring apparatus and method
12/08/2010EP2257946A1 Using a passive fuse as a current sense element in an electronic fuse circuit
12/08/2010EP2257854A2 Multi-photon exposure system
12/08/2010EP2174346B1 Method of transferring a layer onto a liquid material
12/08/2010EP1859483B1 Magnetic self-assembly for integrated circuit packages
12/08/2010EP1719168B1 Methods of fabricating interconnects for semiconductor components
12/08/2010EP1699073B1 Stage system, exposure apparatus and exposure method
12/08/2010EP1639649B1 Nonplanar semiconductor device with partially or fully wrapped around gate electrode and methods of fabrication
12/08/2010EP1569269B1 Epitaxial growing method and use of substrate for epitaxial growth
12/08/2010EP1435114B1 Salicided gate for virtual ground arrays
12/08/2010EP1435111B1 Method for making thin layers containing microcomponents
12/08/2010EP1234327B1 Reactor for processing a semiconductor wafer
12/08/2010CN201667329U Coating layer for electrochemical corrosion resisting electronic packaging shell
12/08/2010CN1996149B Lithographic apparatus and device manufacturing method
12/08/2010CN1996143B Method for cleaning dry film pressed on wafer
12/08/2010CN1983615B Phase-change memory device and method of manufacturing same
12/08/2010CN1975517B Display substrate, method of manufacturing the same and display panel having the same
12/08/2010CN1961401B Reciprocating drive for scanning a workpiece through an ion beam
12/08/2010CN1954267B Microelectronic cleaning composition containing halogen oxygen acids, salts and derivatives thereof
12/08/2010CN1946751B Material for forming resist protection film for liquid immersion lithography and method for forming resist pattern by using the protection film
12/08/2010CN1945816B Semiconductor apparatus and method thereof
12/08/2010CN1945443B Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for fpd
12/08/2010CN1938799B Embedded capacitors using conductor filled vias
12/08/2010CN1930261B Heat-peelable pressure-sensitive adhesive sheet and method for processing adhered using the heat-peelable pressure-sensitive adhesive sheet
12/08/2010CN1925119B Method of fabricating a semiconductor device
12/08/2010CN1922731B Semiconductor device and its manufacturing method
12/08/2010CN1921069B Laser processing apparatus utilizing laser beam to irradiate semiconductor layer
12/08/2010CN1920105B Method and apparatus for fluid processing a workpiece
12/08/2010CN1918699B Method for selective etching
12/08/2010CN1901185B Transient voltage protection apparatus, material and manufacturing methods
12/08/2010CN1897265B Interconnection device including one or more embedded vias and method of producing the same
12/08/2010CN1893014B Method for fabricating semiconductor element
12/08/2010CN1892439B Metrology apparatus, lithographic apparatus, process apparatus, metrology method and device manufacturing method
12/08/2010CN1877447B Resist composition and using method thereof
12/08/2010CN1874647B Printing routing basal lamina and semiconductor testing device
12/08/2010CN1874630B Electro-optical device
12/08/2010CN1870884B Mounting method of flexible circuit board
12/08/2010CN1851420B Electronic temperature measuring apparatus in plasma
12/08/2010CN1828413B Light sensitive paste, roast pattern formed by using same
12/08/2010CN1812054B Dual work function metal gate structure and related method of manufacture
12/08/2010CN1804567B Temperature/thickness measuring apparatus, temperature/thickness measuring method, temperature/thickness measuring system, control system and control method
12/08/2010CN1797202B Polarized radiation in lithographic apparatus and device manufacturing method
12/08/2010CN1791490B Substrate polishing apparatus
12/08/2010CN1790889B Processing method of adsorbate and electrostatic sucking method
12/08/2010CN1763511B Pattern checking device
12/08/2010CN1737208B Method and apparatus for plating semiconductor wafers
12/08/2010CN1708190B Heater and device for heating a wafer and method for fabricating the same
12/08/2010CN1677559B Magnetic-resistance random access memory and integrated circuit assembly
12/08/2010CN1671274B Flexible substrate having interlaminar junctions, and process for producing the same
12/08/2010CN1663027B Method using silicide contacts for semiconductor processing
12/08/2010CN1655057B Photosensitive semiconductor nanocrystals, photosensitive composition comprising semiconductor nanocrystals and uses thereof
12/08/2010CN1538240B Load lock device, lithographic equipment comprising the deivce and method for making substrate
12/08/2010CN1532532B Basal plate holder
12/08/2010CN1488998B Optical etching device and manufacturing method
12/08/2010CN101911841A Plasma treatment apparatus, heating device for the plasma treatment apparatus, and plasma treatment method
12/08/2010CN101911840A Asymmetrical RF drive for electrode of plasma chamber
12/08/2010CN101911322A Gan semiconductor optical element, method for manufacturing gan semiconductor optical element, epitaxial wafer and method for growing gan semiconductor film
12/08/2010CN101911298A 3-d and 3-d schottky diode for cross-point, variable-resistance material memories, processes of forming same, and methods of using same
12/08/2010CN101911297A Semiconductor constructions, NAND unit cells, methods of forming semiconductor constructions, and methods of forming NAND unit cells
12/08/2010CN101911294A Semiconductor device
12/08/2010CN101911292A Micropad formation for a semiconductor
12/08/2010CN101911289A 3-d semiconductor die structure with containing feature and method
12/08/2010CN101911287A Semiconductor memory device and method for manufacturing same
12/08/2010CN101911286A Semiconductor storage device
12/08/2010CN101911285A Semiconductor device and manufacturing method thereof
12/08/2010CN101911284A Semiconductor device and its manufacturing method
12/08/2010CN101911283A Laser chalcogenide phase change device and method
12/08/2010CN101911282A Pivot arm assembly for semiconductor wafer handling robots and method for making the same
12/08/2010CN101911281A Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
12/08/2010CN101911280A Method for attaching protection tape and apparatus for attaching protection tape
12/08/2010CN101911279A Workpiece support with fluid zones for temperature control
12/08/2010CN101911278A Workpiece support with fluid zones for temperature control
12/08/2010CN101911277A Arrangements and methods for determining positions and offsets
12/08/2010CN101911276A Systems and methods for calibrating end effector alignment using at least a light source
12/08/2010CN101911275A Vacuum processing device, vacuum processing method, and computer-readable storage medium
12/08/2010CN101911274A Transfer robot diagnosis system
12/08/2010CN101911273A The proble pin composed in one body and the method of making it
12/08/2010CN101911272A Method and apparatus for ultrasonic bonding
12/08/2010CN101911271A Electronic component
12/08/2010CN101911270A A heat sink and method of forming a heatsink using a wedge-lock system
12/08/2010CN101911269A Flexible semiconductor device and method for manufacturing same
12/08/2010CN101911268A Heavily doped region in double-diffused source MOSFET (LDMOS) transistor and a method of fabricating the same
12/08/2010CN101911267A Semiconductor device and method for manufacturing same
12/08/2010CN101911266A Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium
12/08/2010CN101911265A Electronic member wherein barrier-seed layer is formed on base
12/08/2010CN101911264A Electronic member wherein barrier-seed layer is formed on base
12/08/2010CN101911263A Method of etching a high aspect ratio contact
12/08/2010CN101911262A Heated showerhead assembly
12/08/2010CN101911261A Cyclic nucleation process
12/08/2010CN101911260A Dicing/die bonding film
12/08/2010CN101911259A Dicing/die bonding film
12/08/2010CN101911258A Semiconductor device manufacturing method
12/08/2010CN101911257A ULSI micro-interconnect member having ruthenium electroplating layer on barrier layer
12/08/2010CN101911256A Laser anneal method and device
12/08/2010CN101911255A Particle beam assisted modifcation of thin film materials