Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2010
12/07/2010US7848563 Method and apparatus for inspecting a defect of a pattern
12/07/2010US7848372 Modular diode laser assembly
12/07/2010US7848077 Electrostatic chuck device
12/07/2010US7848076 Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing
12/07/2010US7848075 Electrostatic chuck with heater
12/07/2010US7847939 Overlay measurement target
12/07/2010US7847928 Inspection device and inspection method
12/07/2010US7847916 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
12/07/2010US7847905 FFS mode LCD and method of manufacturing the same
12/07/2010US7847566 Configurable prober for TFT LCD array test
12/07/2010US7847418 Semiconductor device
12/07/2010US7847411 Electronic device and method of manufacturing the same
12/07/2010US7847409 Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner
12/07/2010US7847407 Semiconductor device with interface peeling preventing rewiring layer
12/07/2010US7847406 Solder alloy material layer composition, electroconductive and adhesive composition, flux material layer composition, solder ball transferring sheet, bump and bump forming process, and semiconductore device
12/07/2010US7847403 Semiconductor device having no cracks in one or more layers underlying a metal line layer
12/07/2010US7847401 Methods, systems and structures for forming semiconductor structures incorporating high-temperature processing steps
12/07/2010US7847397 Nanoparticles with covalently bonded stabilizer
12/07/2010US7847393 Conductive connecting pins for a package substrate
12/07/2010US7847388 Method of manufacturing a semiconductor device
12/07/2010US7847378 Compliant wirebond pedestal
12/07/2010US7847376 Semiconductor device and manufacturing method of the same
12/07/2010US7847371 Electronic component
12/07/2010US7847369 Radio frequency power semiconductor device comprising matrix of cavities as dielectric isolation structure
12/07/2010US7847367 Semiconductor devices having a gate electrode and methods of fabricating the same
12/07/2010US7847366 Well for CMOS imager
12/07/2010US7847359 MEMS device, MEMS device module and acoustic transducer
12/07/2010US7847358 High performance strained CMOS devices
12/07/2010US7847357 High performance CMOS devices comprising gapped dual stressors with dielectric gap fillers, and methods of fabricating the same
12/07/2010US7847355 Semiconductor device including transistors with silicided impurity regions
12/07/2010US7847354 Semiconductor device with multiple transistors formed in a partially depleted semiconductor-on-insulator substrate
12/07/2010US7847349 Single-cycle FFT butterfly calculator
12/07/2010US7847342 Non-volatile semiconductor storage device and method of manufacturing the same
12/07/2010US7847340 Semiconductor device and method for manufacturing the same
12/07/2010US7847331 Nonvolatile semiconductor memory device
12/07/2010US7847330 Four vertically stacked memory layers in a non-volatile re-writeable memory device
12/07/2010US7847328 Capacitor electrode, method for manufacturing the same, and semiconductor device
12/07/2010US7847326 Backside illuminated image sensor
12/07/2010US7847325 comprising silicon substrate layer, bottom oxide layer, Fullerene (spherical, elliptical) layer on bottom oxide layer forming mask, top oxide layer on Fullerene layer, and gate layer on top oxide layer
12/07/2010US7847324 MOS transistor and semiconductor integrated circuit
12/07/2010US7847322 Semiconductor memory device and method of manufacturing the same
12/07/2010US7847321 Semiconductor device and manufacturing method thereof
12/07/2010US7847319 Semiconductor device and method for fabricating the same
12/07/2010US7847314 Gallium nitride-based compound semiconductor light-emitting device
12/07/2010US7847299 Semiconductor device and method of manufacturing the same
12/07/2010US7847295 Thin film transistor, display device using thereof and method of manufacturing the thin film transistor and the display device
12/07/2010US7847294 Semiconductor device and method of manufacturing the same
12/07/2010US7847293 Growth of reduced dislocation density non-polar gallium nitride
12/07/2010US7847272 Electron beam exposure mask, electron beam exposure method, and electron beam exposure system
12/07/2010US7847218 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
12/07/2010US7847213 Method and apparatus for modifying an intensity profile of a coherent photonic beam
12/07/2010US7847187 zinc-tellurium intermetallics, nitrides; sputtering, electrodeposition, electroless deposition
12/07/2010US7847180 Nanostructure and photovoltaic cell implementing same
12/07/2010US7846852 Method for manufacturing capacitor embedded in interposer
12/07/2010US7846851 Method and apparatus for a two-step resist soft bake to prevent ILD outgassing during semiconductor processing
12/07/2010US7846850 Method of fabricating insulation layer and method of fabricating semiconductor device using the same
12/07/2010US7846849 Frequency tripling using spacer mask having interposed regions
12/07/2010US7846848 Cluster tool with integrated metrology chamber for transparent substrates
12/07/2010US7846847 Method of separating layers of material
12/07/2010US7846846 Method of preventing etch profile bending and bowing in high aspect ratio openings by treating a polymer formed on the opening sidewalls
12/07/2010US7846845 Integrated method for removal of halogen residues from etched substrates in a processing system
12/07/2010US7846844 Method for fabricating saddle type fin transistor
12/07/2010US7846843 Method for manufacturing a semiconductor device using a spacer as an etch mask for forming a fine pattern
12/07/2010US7846842 chemical-mechanical polishing mixture of a cationic abrasive, a cationic acrylamide-diallyldimethylammonium chloride copolymer and water; pH of 6 or less; selectivity for removal of silicon nitride over removal of silicon oxide
12/07/2010US7846841 Method for forming cobalt nitride cap layers
12/07/2010US7846840 Method for forming tungsten materials during vapor deposition processes
12/07/2010US7846839 Film forming method, semiconductor device manufacturing method, semiconductor device, program and recording medium
12/07/2010US7846838 Method for producing an electronic component
12/07/2010US7846837 Through substrate via process
12/07/2010US7846836 Method of forming a conductive structure in a semiconductor device and method of manufacturing a semiconductor device
12/07/2010US7846835 Contact barrier layer deposition process
12/07/2010US7846834 Interconnect structure and method for Cu/ultra low k integration
12/07/2010US7846833 Manufacture method for semiconductor device suitable for forming wirings by damascene method and semiconductor device
12/07/2010US7846832 Semiconductor device and fabrication method thereof
12/07/2010US7846831 Method of forming a metal bump on a semiconductor device
12/07/2010US7846830 Semiconductor device and method for manufacturing same
12/07/2010US7846829 Stacked solder balls for integrated circuit device packaging and assembly
12/07/2010US7846828 Semiconductor device and method for fabricating the same
12/07/2010US7846827 Method for manufacturing semiconductor device for preventing occurrence of short circuit between bit line contact plug and storage node contact plug
12/07/2010US7846826 Method of manufacturing a semiconductor device with multilayer sidewall
12/07/2010US7846825 Method of forming a contact hole and method of manufacturing a semiconductor device having the same
12/07/2010US7846824 Methods for forming a titanium nitride layer
12/07/2010US7846823 Masking paste, method of manufacturing same, and method of manufacturing solar cell using masking paste
12/07/2010US7846822 Methods for controlling dopant concentration and activation in semiconductor structures
12/07/2010US7846821 Multi-angle rotation for ion implantation of trenches in superjunction devices
12/07/2010US7846820 Nitride semiconductor device and process for producing the same
12/07/2010US7846819 Method of synthesizing nanoscale filamentary structures, and electronic components comprising such structures
12/07/2010US7846818 Controlled process and resulting device
12/07/2010US7846817 Method for manufacturing semiconductor device
12/07/2010US7846816 Method for producing a multilayer structure comprising a separating layer
12/07/2010US7846814 Semiconductor layer structure and method of making the same
12/07/2010US7846813 Method and apparatus for bonded substrates
12/07/2010US7846812 Methods of forming trench isolation and methods of forming floating gate transistors
12/07/2010US7846811 Process for manufacturing a high-quality SOI wafer
12/07/2010US7846810 Method of measuring warpage of rear surface of substrate
12/07/2010US7846809 Method for forming capacitor of semiconductor device
12/07/2010US7846808 Method for manufacturing a semiconductor capacitor
12/07/2010US7846806 System and method for providing a self aligned silicon germanium (SiGe) heterojunction bipolar transistor using a mesa emitter-base architecture
12/07/2010US7846805 Self-aligned vertical PNP transistor for high performance SiGe CBiCMOS process
12/07/2010US7846804 Method for fabricating high tensile stress film
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