Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2010
12/01/2010EP2256781A1 Toroidal Plasma Chamber
12/01/2010EP2256718A2 El display device and electronic apparatus
12/01/2010EP2256555A1 Lithographic apparatus and device manufacturing method
12/01/2010EP2256552A1 Negative resist composition and patterning process using the same
12/01/2010EP2256171A1 Methods for chemical-mechanical planarization of copper
12/01/2010EP2256123A2 Cyclic siloxane compound, a material for forming Si-containing film, and its use
12/01/2010EP2255891A1 Coat film forming method and coat film forming apparatus
12/01/2010EP2255390A1 Method for manufacturing a silicon surface with pyramidal structure
12/01/2010EP2255387A1 Integrated nitride and silicon carbide-based devices and methods of fabricating integrated nitride-based devices
12/01/2010EP2255386A1 Method for fabricating through-substrate vias
12/01/2010EP2255385A1 Controlled temperature implantation
12/01/2010EP2255384A2 Ceramic paddle
12/01/2010EP2255383A2 Connection component with hollow inserts and method for making same
12/01/2010EP2255382A2 Hermetically-sealed packages for electronic components having reduced unused areas
12/01/2010EP2255381A1 Self-repair integrated circuit and repair method
12/01/2010EP2255379A2 Silicon carbide polishing method utilizing water-soluble oxidizers
12/01/2010EP2255378A1 Stretchable and foldable electronic devices
12/01/2010EP2255377A2 Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithography
12/01/2010EP2255376A1 Ultra high density capacity comprising pillar-shaped capacitors formed on both sides of a substrate
12/01/2010EP2255250A1 Positive resist composition and pattern forming method using the same
12/01/2010EP2255211A1 Method and apparatus for interrogating electronic components
12/01/2010EP2255023A2 Modified sputtering target and deposition components, methods of production and uses thereof
12/01/2010EP2254940A1 Heatsinks of thermally conductive plastic materials
12/01/2010EP2254825A1 Integrated carrier for microfluidic device
12/01/2010EP2115481B1 Sensor package
12/01/2010EP1896629B1 Method for forming a dielectric film and novel precursors for implementing said method
12/01/2010EP1711550B1 Adamantyl monomers and polymers for low-k-dielectric applications
12/01/2010EP1687841B1 Formation of lattice-tuning semiconductor substrates
12/01/2010EP1677341B1 Exposure apparatus, exposure method, and method for manufacturing device
12/01/2010EP1573745B1 Programmable interconnect cell for configuring a field programmable gate array
12/01/2010EP1330838B1 Control trimming of hard mask for transistor gate
12/01/2010EP1159214B1 In/out load port transfer mechanism
12/01/2010EP1118124B1 Bipolar transistor and method for producing same
12/01/2010EP1112594B1 Vertical bipolar transistor and method for the production thereof
12/01/2010EP0797763B1 Scanning system for inspecting anomalies on surfaces
12/01/2010CN201663162U Trench MOS device with schottky diode integrated in unit cell
12/01/2010CN201663152U Crystal grain picking device
12/01/2010CN201663151U Full automatic silicon chip loading and unloading machine
12/01/2010CN201663150U Multi-core packaging machine
12/01/2010CN201659378U Electronic welding tool
12/01/2010CN1983026B Polymer for hardmask of semiconductor device and composition containing the same
12/01/2010CN1977220B Lower layer film forming composition for lithography including naphthalene ring having halogen atom
12/01/2010CN1976041B Non-volatile semiconductor memory device and method for manufacturing the same
12/01/2010CN1976027B Semiconductor structure and method of forming passive circuit element
12/01/2010CN1971418B Photosensitive resin precursor composition
12/01/2010CN1955338B Vaporizer and semiconductor processing system
12/01/2010CN1949523B Non-volatile memory devices and methods of forming the same
12/01/2010CN1949081B A lithographic apparatus
12/01/2010CN1913123B Method of fabricating trench isolation of semiconductor device
12/01/2010CN1879205B Process for improving the surface roughness of a semiconductor wafer
12/01/2010CN1871697B Liquid composition, process for producing the same, film of low dielectric constant, abradant and electronic component
12/01/2010CN1867504B Free ball bearing and supporting table
12/01/2010CN1847980B Low voltage treating device
12/01/2010CN1827244B Cleaning method and device
12/01/2010CN1800981B Photosensitive resin composition, thin film panel made with photosensitive composition, and method for manufacturing thin film panel
12/01/2010CN1787040B Tape carrier package on reel and plasma display device using the same
12/01/2010CN1758138B Multi-exposure semiconductor fabrication mask sets and methods of fabricating such multi-exposure mask sets
12/01/2010CN1749853B Transparent substrate for mask blank and mask blank
12/01/2010CN1664686B Thin film transistor arraying panel and its manufacture method
12/01/2010CN1654289B Base plate conveying device
12/01/2010CN1577106B Lithographic apparatus and device manufacturing method
12/01/2010CN101904011A Thin film semiconductor device and field effect transistor
12/01/2010CN101904010A Reverse-conducting semiconductor device and method for manufacturing such a reverse-conducting semiconductor device
12/01/2010CN101903998A Method for forming trenches with wide upper portion and narrow lower portion
12/01/2010CN101903997A Sheet sticking apparatus and sheet sticking method
12/01/2010CN101903996A Method and apparatus for controlling temperature of a substrate
12/01/2010CN101903995A Method for producing semiconductor chips and corresponding semiconductor chip
12/01/2010CN101903994A Downhole tool
12/01/2010CN101903993A Method for forming semiconductor thin film and method for manufacturing thin film semiconductor device
12/01/2010CN101903992A Improved manufacturing method for planar independent-gate or gate-all-around transistors
12/01/2010CN101903991A Methods for isolating portions of a loop of pitch-multiplied material and related structures
12/01/2010CN101903990A High yield and high throughput method for the manufacture of integrated circuit devices of improved integrity, performance and reliability
12/01/2010CN101903989A Fabrication of a silicon structure and deep silicon etch with profile control
12/01/2010CN101903988A Etching agent, etching method and liquid for preparing etching agent
12/01/2010CN101903987A Methods for particle removal by single-phase and two-phase media
12/01/2010CN101903986A Apparatus for particle removal by single-phase and two-phase media
12/01/2010CN101903985A Materials for particle removal by single-phase and two-phase media
12/01/2010CN101903984A Passivation layer formation by plasma clean process to reduce native oxide growth
12/01/2010CN101903983A Adhesive sheet for bonding wafer and wafer processing method
12/01/2010CN101903982A Structure and method for forming hybrid substrate
12/01/2010CN101903981A Removal of surface dopants from a substrate
12/01/2010CN101903980A Stage structure and heat treatment apparatus
12/01/2010CN101903979A Composite showerhead electrode assembly for a plasma processing apparatus
12/01/2010CN101903978A Protective layer for implant photoresist
12/01/2010CN101903977A Photoresist double patterning
12/01/2010CN101903976A Method and system for fabricating three-dimensional structures with sub-micron and micron features
12/01/2010CN101903975A Information processing device, information processing method, and program
12/01/2010CN101903974A Method for manufacturing thin film multilayer device, method for manufacturing display device, and thin film multilayer device
12/01/2010CN101903959A Copper conductor film and manufacturing method thereof, conductive substrate and manufacturing method thereof, copper conductor wiring and manufacturing method thereof, and treatment solution
12/01/2010CN101903561A Liquid material vaporization apparatus
12/01/2010CN101903558A Erosion resistant yttrium comprising metal with oxidized coating for plasma chamber components
12/01/2010CN101903437A Film-like resin composition for encapsulation filling, method for manufacturing semiconductor package or semiconductor device using the same, and semiconductor device
12/01/2010CN101903285A Method of component assembly on a substrate
12/01/2010CN101903284A Charging apparatus
12/01/2010CN101903131A CMP pad dressers
12/01/2010CN101902903A Electronic parts installation apparatus
12/01/2010CN101902884A Method for making composite material circuit board structure
12/01/2010CN101902131A Supply power adjusting apparatus and semiconductor manufacturing apparatus
12/01/2010CN101902015A Semiconductor device and method of fabricating the same
12/01/2010CN101902014A Nitride semiconductor wafer, nitride semiconductor chip, and method of manufacture of nitride semiconductor chip
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