| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/15/2011 | US7887875 Method to reduce photoresist poisoning |
| 02/15/2011 | US7887873 Gasification monitor, method for detecting mist, film forming method and film forming apparatus |
| 02/15/2011 | US7887712 Laser machining system and method |
| 02/15/2011 | US7887711 Method for etching chemically inert metal oxides |
| 02/15/2011 | US7887710 Crystallization difference of film enlarged to enhance stability of selective etch a transparent conductive film without any mask; thin film transistor formed at an intersection between the gate line and the data line; protective film covering gate line, data line and thin film transistor; not pixel area |
| 02/15/2011 | US7887670 Gas introducing mechanism and processing apparatus for processing object to be processed |
| 02/15/2011 | US7887669 Vacuum processing apparatus |
| 02/15/2011 | US7887665 Expanding method and expanding device |
| 02/15/2011 | US7887637 Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning |
| 02/15/2011 | US7887635 Printing head for nano patterning |
| 02/15/2011 | US7887632 Process for producing monocrystal thin film and monocrystal thin film device |
| 02/15/2011 | US7887628 Chemical vapor deposited diamond having a thickness of >2 mm of high purity/quality; single impurity of not greater than 1 ppm and a total impurity content of not greater than 5 ppm; high value electron mobility, wide band gap device; anvils |
| 02/15/2011 | US7887394 Double-disc grinding machine, static pressure pad, and double-disc grinding method using the same for semiconductor wafer |
| 02/15/2011 | US7887305 Flexible tank and a chemical liquid supply apparatus using the same |
| 02/15/2011 | US7887277 Reticle storage pod (RSP) transport system utilizing FOUP adapter plate |
| 02/15/2011 | US7886910 Front opening wafer carrier with path to ground effectuated by door |
| 02/15/2011 | US7886808 Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus |
| 02/15/2011 | US7886798 Expanding method and expanding device |
| 02/15/2011 | US7886796 Chip bonding tool and related apparatus and method |
| 02/15/2011 | US7886689 Plasma processing apparatus |
| 02/15/2011 | US7886688 Plasma processing apparatus |
| 02/15/2011 | US7886687 Plasma processing apparatus |
| 02/15/2011 | US7886686 Installation for the vacuum treatment in particular of substrates |
| 02/15/2011 | US7886685 Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
| 02/15/2011 | CA2588035C Scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s), and method of making article using combustion cvd |
| 02/15/2011 | CA2495013C Catheter securement device |
| 02/15/2011 | CA2406006C Particle deposition apparatus and method for forming nanostructures |
| 02/15/2011 | CA2370878C Chip carrier for a chip module and method of manufacturing the chip module |
| 02/10/2011 | WO2011017716A2 Seasoning plasma processing systems |
| 02/10/2011 | WO2011017694A1 Optimized halo or pocket cold implants |
| 02/10/2011 | WO2011017693A1 Pressurized treatment of substrates to enhance cleaving process |
| 02/10/2011 | WO2011017623A1 High breakdown voltage embedded mim capacitor structure |
| 02/10/2011 | WO2011017622A1 Low temperature ion implantation |
| 02/10/2011 | WO2011017618A1 Cold implant for optimized silicide formation |
| 02/10/2011 | WO2011017598A2 Formation of silicon oxide using non-carbon flowable cvd processes |
| 02/10/2011 | WO2011017501A2 Cvd apparatus |
| 02/10/2011 | WO2011017487A2 Methods and apparatus for high-throughput formation of nano-scale arrays |
| 02/10/2011 | WO2011017341A2 Ladder-type oligo-p-phenylene-containing copolymers with high open-circuit voltages and ambient photovoltaic activity |
| 02/10/2011 | WO2011017339A2 Methods of selectively depositing an epitaxial layer |
| 02/10/2011 | WO2011017333A2 Apparatus and method for low-k dielectric repair |
| 02/10/2011 | WO2011017226A2 Compound lift pin tip with temperature compensated attachment feature |
| 02/10/2011 | WO2011017222A2 Method and apparatus for dry cleaning a cooled showerhead |
| 02/10/2011 | WO2011017179A2 Systems, methods and materials including crystallization of substrates via sub-melt laser anneal, as well as products produced by such processes |
| 02/10/2011 | WO2011017154A2 Silicon wafer sawing fluid and process for the use thereof |
| 02/10/2011 | WO2011017119A2 Wet etching methods for copper removal and planarization in semiconductor processing |
| 02/10/2011 | WO2011017060A2 Dual temperature heater |
| 02/10/2011 | WO2011016940A2 Methods of fabricating transistors including self-aligned gate electrodes and source/drain regions |
| 02/10/2011 | WO2011016741A2 Amorphous multicomponent dielectric based on the mixture of high band gap and high k materials, respective devices and manufacture |
| 02/10/2011 | WO2011016651A2 Photocurable resin composition for imprint lithography and method for manufacturing an imprint mold using same |
| 02/10/2011 | WO2011016643A2 Pipe-heating device |
| 02/10/2011 | WO2011016641A2 Substrate for ball grid array semiconductor package and fabrication method thereof |
| 02/10/2011 | WO2011016630A2 Panel equilibrium adjusting device and a panel attaching device comprising the same |
| 02/10/2011 | WO2011016607A1 Pickup apparatus and led chip classification apparatus including same |
| 02/10/2011 | WO2011016549A1 Resin mold for imprinting and method for producing same |
| 02/10/2011 | WO2011016525A1 Plasma etching apparatus and plasma etching method |
| 02/10/2011 | WO2011016512A1 Process for production of semiconductor device, and apparatus for production of semiconductor device |
| 02/10/2011 | WO2011016427A1 Energy application device and energy application method |
| 02/10/2011 | WO2011016392A1 Method for manufacturing silicon carbide semiconductor device |
| 02/10/2011 | WO2011016369A1 Pneumatic levitation-type substrate conveying device |
| 02/10/2011 | WO2011016337A1 Processing liquid for suppressing pattern collapse of fine metal structure, and method for producing fine metal structure using same |
| 02/10/2011 | WO2011016331A1 Sheet for processing semiconductor |
| 02/10/2011 | WO2011016323A1 Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method using same |
| 02/10/2011 | WO2011016307A1 Apparatus and method for mounting electronic component |
| 02/10/2011 | WO2011016304A1 Epitaxial substrate for semiconductor element, method for manufacturing epitaxial substrate for semiconductor element, and semiconductor element |
| 02/10/2011 | WO2011016300A1 Member having semiconductor element mounted thereon, and semiconductor device using the member |
| 02/10/2011 | WO2011016296A1 Laser machining method |
| 02/10/2011 | WO2011016283A1 Semiconductor powder and process for producing same |
| 02/10/2011 | WO2011016266A1 Pulse-modulated high-frequency power control method and pulse-modulated high-frequency power source device |
| 02/10/2011 | WO2011016255A1 Exposure apparatus, exposure method, and device manufacturing method |
| 02/10/2011 | WO2011016254A1 Moving body apparatus, exposure apparatus, exposure method, and device manufacturing method |
| 02/10/2011 | WO2011016242A1 Semiconductor device and method for manufacturing same |
| 02/10/2011 | WO2011016237A1 Device for pressure-bonding component and method for pressure-bonding component |
| 02/10/2011 | WO2011016223A1 Heat treatment apparatus and method for manufacturing semiconductor device |
| 02/10/2011 | WO2011016219A1 Epitaxial substrate for electronic devices and manufacturing method for said epitaxial substrate |
| 02/10/2011 | WO2011016217A1 Cu-Al ALLOY POWDER, ALLOY PASTE UTILIZING SAME, AND ELECTRONIC COMPONENT |
| 02/10/2011 | WO2011016196A1 Method for manufacturing semiconductor memory |
| 02/10/2011 | WO2011016148A1 Adhesive sheet for fixing mold, and adhesive tape for fixing mold, and process for producing fine structure |
| 02/10/2011 | WO2011016121A1 Film-forming apparatus |
| 02/10/2011 | WO2011016097A1 Wafer tray and testing apparatus |
| 02/10/2011 | WO2011016096A1 Testing device and testing method |
| 02/10/2011 | WO2011016090A1 Phase interpolator, semiconductor device, and method for testing the same |
| 02/10/2011 | WO2011015942A2 Ohmic electrode and method of forming the same |
| 02/10/2011 | WO2011015732A1 Ohmic connection using widened connection zones in a portable electronic object |
| 02/10/2011 | WO2011015440A1 A nanomesh sram cell |
| 02/10/2011 | WO2011015394A1 Semiconductor arrangement and method for producing it |
| 02/10/2011 | WO2011015393A1 Semiconductor arrangement comprising a schottky diode |
| 02/10/2011 | WO2011002705A3 Hollow gst structure with dielectric fill |
| 02/10/2011 | WO2010132716A3 Anodized showerhead |
| 02/10/2011 | WO2010123666A3 Method and apparatus for growing a thin film onto a substrate |
| 02/10/2011 | WO2010117898A3 Methods, devices, and systems relating to memory cells having a floating body |
| 02/10/2011 | WO2010114961A3 Plasma processing apparatus |
| 02/10/2011 | WO2010005592A8 Microelectronic interconnect element with decreased conductor spacing |
| 02/10/2011 | US20110034215 Semiconductor Device and Method for Manufacturing the Same |
| 02/10/2011 | US20110034106 Polishing apparatus |
| 02/10/2011 | US20110034047 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Composites and Conductive Elastomer Interconnects in Microelectronic Packaging |
| 02/10/2011 | US20110034040 Localized anneal |
| 02/10/2011 | US20110034039 Formation of silicon oxide using non-carbon flowable cvd processes |
| 02/10/2011 | US20110034038 Methods and devices for forming nanostructure monolayers and devices including such monolayers |
| 02/10/2011 | US20110034037 Method for manufacturing semiconductor device and method for cleaning semiconductor substrate |
| 02/10/2011 | US20110034036 Method of manufacturing semiconductor device |