| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/08/2011 | US7883909 Method to measure ion beam angle |
| 02/08/2011 | US7883908 Method for fabricating semiconductor component having encapsulated through wire interconnect (TWI) |
| 02/08/2011 | US7883907 Parameter measurement using multi-layer structures |
| 02/08/2011 | US7883905 Process for producing a BST thin-film capacitor having increased capacity density and reduced leakage current density |
| 02/08/2011 | US7883837 Transparent electrically conductive film and process for producing the same |
| 02/08/2011 | US7883835 Method for double patterning a thin film |
| 02/08/2011 | US7883834 Method for forming pattern |
| 02/08/2011 | US7883823 Photomask and method for manufacturing a semiconductor device using the photomask |
| 02/08/2011 | US7883779 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| 02/08/2011 | US7883764 Fine resinous structure, fabrication thereof, and polymerizable resin-precursor composition |
| 02/08/2011 | US7883750 Thin films and a method for producing the same |
| 02/08/2011 | US7883739 selectively depositing a dielectric layer upon another dielectric layer and selectively depositing a metal layer adjacent to dielectric layer; a microelectronic topography is formed which includes a metal feature and an adjacent dielectric portion comprising lower and upper layers |
| 02/08/2011 | US7883655 Molding apparatus for manufacturing a semiconductor device and method using the same |
| 02/08/2011 | US7883639 stabilized cyclic alkene composition comprising cyclic alkenes and antioxidant compound to reduce or eliminate residue formation upon evaporation of such compositions; used to form dielectric films |
| 02/08/2011 | US7883633 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 02/08/2011 | US7883630 FIB milling of copper over organic dielectrics |
| 02/08/2011 | US7883629 Technique for patterning differently stressed layers formed above transistors by enhanced etch control strategies |
| 02/08/2011 | US7883628 Method of reducing the surface roughness of a semiconductor wafer |
| 02/08/2011 | US7883602 Electrode assembly for the removal of surface oxides by electron attachment |
| 02/08/2011 | US7883601 Apparatus and method for controlling relative particle speeds in a plasma |
| 02/08/2011 | US7883600 RF supply system and plasma processing apparatus |
| 02/08/2011 | US7883598 Apparatus and method for manufacturing liquid crystal display devices, method for using the apparatus, and device produced by the method |
| 02/08/2011 | US7883583 Vaporization apparatus with precise powder metering |
| 02/08/2011 | US7883581 Substrate processing apparatus and method of manufacturing semiconductor device |
| 02/08/2011 | US7883579 Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus |
| 02/08/2011 | US7883397 Substrate retainer |
| 02/08/2011 | US7883394 Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
| 02/08/2011 | US7883343 Method of manufacturing solar cell |
| 02/08/2011 | US7882800 Ring mechanism, and plasma processing device using the ring mechanism |
| 02/08/2011 | US7882624 Method of forming electronic package having fluid-conducting channel |
| 02/08/2011 | US7882623 Apparatus for removing interconnects to separate two parts of a workpiece |
| 02/03/2011 | WO2011014864A2 Buffered storage and transport device for tool utilization |
| 02/03/2011 | WO2011014779A1 A mask health monitor using a faraday probe |
| 02/03/2011 | WO2011014446A1 Anisotropic nanotube fabric layers and films and methods of forming same |
| 02/03/2011 | WO2011014434A2 Bond and probe pad distribution and package architecture |
| 02/03/2011 | WO2011014409A1 System-in packages |
| 02/03/2011 | WO2011014406A1 Transistor-based memory cell and related operating methods |
| 02/03/2011 | WO2011014379A1 Methods and apparatus for process abatement with recovery and reuse of abatement effluent |
| 02/03/2011 | WO2011014328A2 Light-up prevention in electrostatic chucks |
| 02/03/2011 | WO2011014281A1 Surface treatment of silicon |
| 02/03/2011 | WO2011014206A1 Process, voltage, and temperature sensor |
| 02/03/2011 | WO2011014156A1 Reconfigurable multilayer circuit |
| 02/03/2011 | WO2011014129A1 A transistor arrangement and a method of forming a transistor arrangement |
| 02/03/2011 | WO2011013961A2 Method for forming a gapless semiconductor thin film |
| 02/03/2011 | WO2011013937A2 Pretreatment method using a sputtering system, and pretreatment apparatus used in a roll-to-roll sputtering apparatus |
| 02/03/2011 | WO2011013936A2 Roll-to-roll sputter system comprising a plurality of chambers, and method for using same |
| 02/03/2011 | WO2011013894A1 Cmp polishing pad having pores formed therein, and method for manufacturing same |
| 02/03/2011 | WO2011013893A2 Cmp polishing pad and method for manufacturing same |
| 02/03/2011 | WO2011013812A1 Semiconductor device production apparatus and semiconductor device production method |
| 02/03/2011 | WO2011013811A1 Semiconductor device production apparatus and semiconductor device production method |
| 02/03/2011 | WO2011013810A1 Semiconductor device production method and semiconductor device production apparatus |
| 02/03/2011 | WO2011013754A1 Led equipment purpose wafer, method for manufacturing same, and led-equipped structure using led equipment purpose wafer |
| 02/03/2011 | WO2011013746A1 Film-forming apparatus |
| 02/03/2011 | WO2011013702A1 Plasma processing device and plasma processing method |
| 02/03/2011 | WO2011013697A1 Film-forming apparatus |
| 02/03/2011 | WO2011013683A1 Wiring structure and display apparatus having wiring structure |
| 02/03/2011 | WO2011013682A1 Wiring structure, method for manufacturing wiring structure, and display device provided with wiring structure |
| 02/03/2011 | WO2011013664A1 Photosensitive resin composition, photosensitive resin laminate, and method for forming resist pattern |
| 02/03/2011 | WO2011013657A1 Method for producing compound semiconductor, method for manufacturing photoelectric conversion device, and solution for forming semiconductor |
| 02/03/2011 | WO2011013633A1 Planar antenna member and plasma processing device equipped with same |
| 02/03/2011 | WO2011013630A1 Composition for forming resist underlayer film for nanoimprint lithography |
| 02/03/2011 | WO2011013616A1 Method for selective oxidation, device for selective oxidation, and computer-readable memory medium |
| 02/03/2011 | WO2011013600A1 Semiconductor device, method for manufacturing semiconductor device, and display device |
| 02/03/2011 | WO2011013561A1 Semiconductor device and method for manufacturing the same |
| 02/03/2011 | WO2011013556A1 Method for cutting object to be processed |
| 02/03/2011 | WO2011013549A1 Method for cutting processing target |
| 02/03/2011 | WO2011013527A1 Bonding wire for semiconductor |
| 02/03/2011 | WO2011013522A1 Semiconductor device and manufacturing method thereof |
| 02/03/2011 | WO2011013502A1 Semiconductor device and manufacturing method thereof |
| 02/03/2011 | WO2011013500A1 Semiconductor device and method for manufacturing same |
| 02/03/2011 | WO2011013459A1 Plasma processing apparatus |
| 02/03/2011 | WO2011013458A1 Plasma processing apparatus, method for using plasma processing apparatus, and method for cleaning plasma processing apparatus |
| 02/03/2011 | WO2011013417A1 Thin film transistor and method for manufacturing same |
| 02/03/2011 | WO2011013407A1 Matrix substrate, method for manufacturing same, and display device |
| 02/03/2011 | WO2011013385A1 Plasma treatment apparatus and method for manufacturing magnetic recording medium |
| 02/03/2011 | WO2011013383A1 Cleaning pad for test probe and method of cleaning test probe |
| 02/03/2011 | WO2011013380A1 Manufacturing method of semiconductor apparatus and semiconductor apparatus |
| 02/03/2011 | WO2011013374A1 Semiconductor device and manufacturing method therefor |
| 02/03/2011 | WO2011013364A1 Method for producing semiconductor element |
| 02/03/2011 | WO2011013363A1 Fine-structure manufacturing method |
| 02/03/2011 | WO2011013356A1 Wafer surface processing method |
| 02/03/2011 | WO2011013348A1 Method for adhering protection tape, and protection tape used in the method |
| 02/03/2011 | WO2011013342A1 Pattern evaluation method, device therefor, and electron beam device |
| 02/03/2011 | WO2011013338A1 Conveyor system and setting method therefor |
| 02/03/2011 | WO2011013337A1 Conveyor system and storage equipment |
| 02/03/2011 | WO2011013326A1 Liquid resin composition and semiconductor device formed using same |
| 02/03/2011 | WO2011013322A1 Semiconductor device |
| 02/03/2011 | WO2011013317A1 Method of creating template for matching, as well as device for creating template |
| 02/03/2011 | WO2011013316A1 Pattern shape selection method and pattern measuring device |
| 02/03/2011 | WO2011013306A1 Semiconductor device |
| 02/03/2011 | WO2011013290A1 Method for manufacturing semiconductor device |
| 02/03/2011 | WO2011013280A1 Method for heat treating silicon wafer |
| 02/03/2011 | WO2011013271A1 Method for manufacturing semiconductor device, and plasma doping apparatus |
| 02/03/2011 | WO2011013270A1 Semiconductor device |
| 02/03/2011 | WO2011013231A1 Probe card holding apparatus and prober |
| 02/03/2011 | WO2011013080A1 Leakage control in field effect transistors based on an implantation species introduced locally at the sti edge |
| 02/03/2011 | WO2011013061A1 Batch processing system in an in-line facility |
| 02/03/2011 | WO2011012559A2 Post ion implant stripper for advanced semiconductor application |
| 02/03/2011 | WO2011012475A1 Composition for metal plating comprising suppressing agent for void free submicron feature filling |
| 02/03/2011 | WO2011012291A1 Test system for detecting defects of form and/or positional defects of wafers |