Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2011
02/16/2011CN101978485A Probe wafer, probe device, and testing system
02/16/2011CN101978484A Support device for resonator
02/16/2011CN101978483A In-situ cavity integrated circuit package
02/16/2011CN101978482A Systems and devices including multi-gate transistors and methods of using, making, and operating the same
02/16/2011CN101978481A Temperature measurement and control of wafer support in thermal processing chamber
02/16/2011CN101978480A Multilayer wiring, semiconductor device, substrate for display and display
02/16/2011CN101978479A Method and apparatus of a substrate etching system and process
02/16/2011CN101978478A Method for processing a substrate, method for manufacturing a semiconductor chip, and method for manufacturing a semiconductor chip having a resin adhesive layer
02/16/2011CN101978477A Method for film formation, apparatus for film formation, and computer-readable recording medium
02/16/2011CN101978476A Closed loop control and process optimization in plasma doping processes using a time of flight ion detector
02/16/2011CN101978475A Shielded lid heater assembly
02/16/2011CN101978474A Tunable ground planes in plasma chambers
02/16/2011CN101978473A Susceptor with roll-formed surface and method for making same
02/16/2011CN101978472A Nanofilm protective and release matrices
02/16/2011CN101978471A Substrate processing apparatus and method
02/16/2011CN101978470A Method for manufacturing a layer of gallium nitride or gallium and aluminum nitride
02/16/2011CN101978469A Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference
02/16/2011CN101978468A Reflective mask blank for EUV lithography
02/16/2011CN101978467A Process for producing soi wafer
02/16/2011CN101978466A Electrostatic chuck assembly with capacitive sense feature, and related operating method
02/16/2011CN101978320A Photosensitive resin composition, film for photosensitive resin spacer, and semiconductor device
02/16/2011CN101978241A Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program
02/16/2011CN101978102A Process for producing zno single crystal, self-supporting zno single-crystal wafer obtained by the same, self-supporting wafer of mg-containing zno mixed single crystal, and process for producing mg-containing zno mixed single crystal for use in the same
02/16/2011CN101978095A Coaxial microwave assisted deposition and etch systems
02/16/2011CN101978093A Deposition apparatus and electronic device manufacturing method
02/16/2011CN101978018A Method for preparing cerium oxide, cerium oxide prepared therefrom and cmp slurry comprising the same
02/16/2011CN101978017A Method for preparing cerium carbonate
02/16/2011CN101977976A Heatsinks of thermally conductive plastic materials
02/16/2011CN101977873A Ceria material and method of forming same
02/16/2011CN101977831A Non-contact carrier device
02/16/2011CN101976711A Method for making solar batteries by adopting ion injection method
02/16/2011CN101976685A Transistor structure with etch stop layer and manufacturing method thereof
02/16/2011CN101976683A Insulated gate bipolar transistor and manufacturing method thereof
02/16/2011CN101976682A Silicon transverse device on N-type insulator for improving current density and preparation process thereof
02/16/2011CN101976681A P-type silicon-on-insulator transverse device for improving current density and preparation process thereof
02/16/2011CN101976680A Semiconductor structure for increasing integration density of high-voltage integrated circuit device and manufacturing method
02/16/2011CN101976677A Phase change random access memory array based on ZnO schottky diodes and manufacturing method thereof
02/16/2011CN101976675A Phase change memory using wide band gap semiconductor diode as gating tube and method
02/16/2011CN101976669A Memory cell, memory device and manufacturing method of memory cell
02/16/2011CN101976668A Device for controlling light-emitting diode (LED) by silicon-based MOS tube, array and manufacturing method thereof
02/16/2011CN101976664A Semiconductor packaging structure and manufacture process thereof
02/16/2011CN101976660A Silicon-on-insulator (SOI) substrate silicon wafer with heat-radiating structure and preparation method thereof
02/16/2011CN101976658A Passivation layer and production method thereof
02/16/2011CN101976657A Substrate structure for semiconductor device fabrication and method for fabricating the same
02/16/2011CN101976656A Preparation methods of thin film transistor array and liquid crystal display
02/16/2011CN101976655A Thin film transistor substrate of liquid crystal display panel and manufacturing method thereof
02/16/2011CN101976654A Method for enhancing radiation resistant characteristic of LDMOS (Laterally Diffused Metal Oxide Semiconductor)
02/16/2011CN101976653A Chip picking and transferring device and transferring method thereof
02/16/2011CN101976652A Semiconductor packaging structure and manufacture process thereof
02/16/2011CN101976651A Stack semiconductor package manufacturing method
02/16/2011CN101976650A Thin film transistor and manufacture method thereof
02/16/2011CN101976649A Preparation method of OLED panel polycrystalline silicon
02/16/2011CN101976648A Process for plasma fluorination of advanced gate dielectric
02/16/2011CN101976647A Method for controlling thickness of silica in crystalline silicon solar cell
02/16/2011CN101976646A Substrate processing method, program, computer-readable recording medium, and substrate processing system
02/16/2011CN101976045A Panel quality virtual measurement method and system for TFT-LCD etching process
02/16/2011CN101975506A Slow dip-coating infrared drying process of silicon polished wafer
02/16/2011CN101974735A Inductively coupled plasma processing apparatus
02/16/2011CN101974298A Method for processing metal surface by using argon plasma
02/16/2011CN101973011A Crystal curing press head applied to electronic tag back-off encapsulation equipment
02/16/2011CN101972978A Novel chemical mechanical polishing device
02/16/2011CN101728403B Back-illuminated mercury cadmium telluride long-wave light-guide type infrared flat-panel detector
02/16/2011CN101728257B Preparation method of gate dielectric/ metal gate integrated structure
02/16/2011CN101651148B ZnO group heterojunction and preparation method thereof
02/16/2011CN101645399B Voltage stabilizing diode manufacturing process
02/16/2011CN101640186B Manufacturing method of isolated gate bipolar transistor integrated fast recovery diode
02/16/2011CN101601127B Conductive bump, method for producing the same, and electronic component mounted structure
02/16/2011CN101599462B Production method of high and low voltage devices based on thin epitaxy
02/16/2011CN101593740B Conductive clip for semiconductor device package
02/16/2011CN101593693B Method for preparing high-voltage SIDAC
02/16/2011CN101587895B Gate pole sensitive triggering unidirectional thyristor chip and preparation method thereof
02/16/2011CN101587291B Method of screen printing fine mask on silicon chip surface based on UV curing process
02/16/2011CN101569003B Semiconductor device and method for manufacturing the same
02/16/2011CN101567405B Solar silicon chip detecting machine platform and detecting method
02/16/2011CN101566768B Pixel structure for thin film transistor liquid crystal display and manufacturing method thereof
02/16/2011CN101562129B Method of making inverted trapezoidal cross-section structure by S18 series of positive photoresist
02/16/2011CN101552254B Multilayer wiring substrate, semiconductor package, and methods of manufacturing semiconductor package
02/16/2011CN101542020B Electrolysis apparatus and electrolysis method for sulfuric acid, and apparatus for processing substrate
02/16/2011CN101539470B Electrostatic capacitance diaphragm vacuum gauge and vacuum processing apparatus
02/16/2011CN101536165B Trench gate fet with self-aligned features
02/16/2011CN101526705B Liquid crystal display panel, thin film transistor substrate and manufacturing process thereof
02/16/2011CN101523575B Plasma oxidizing method, plasma processing apparatus
02/16/2011CN101515575B Rectification circuit lead frame copper strip and manufacturing method thereof
02/16/2011CN101515547B Method for manufacturing hyperconjugation VDMOS device
02/16/2011CN101510512B Heating apparatus, heating method, and semiconductor device manufcaturing method
02/16/2011CN101506952B Oxide film forming method and apparatus therefor
02/16/2011CN101477964B Preparation for organic electroluminescence display
02/16/2011CN101471251B Methods for forming quantum dots and forming gate using the quantum dots
02/16/2011CN101470426B Fault detection method and system
02/16/2011CN101465374B MOS device with integrated schottky diode in active region contact trench
02/16/2011CN101452884B Multi device and method of manufacturing the same
02/16/2011CN101447453B Method for preventing gate oxide damage of a trench MOSFET during wafer processing
02/16/2011CN101438385B Exposure apparatus and device manufacturing method
02/16/2011CN101424848B TFT-LCD pixel structure and method for manufacturing same
02/16/2011CN101412494B Substrate support device
02/16/2011CN101404258B Method of manufacturing wafer level package
02/16/2011CN101393243B Test system and method with self detecting function
02/16/2011CN101388350B Tinning method for SMD stamp-mounting-paper diode
02/16/2011CN101383360B Image sensor and method for manufacturing same
02/16/2011CN101378632B Production method for wiring and vias