| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/03/2011 | WO2011012263A1 Holding arrangement for an optical element |
| 02/03/2011 | WO2011012083A1 Light-emitting diode with high light efficiency and encapsulation method thereof |
| 02/03/2011 | WO2011011974A1 Flexible circuit module |
| 02/03/2011 | WO2011011955A1 Repeatedly and intelligently gripping and releasing device with multiple jaws |
| 02/03/2011 | WO2011011954A1 Apparatus with nested support pin assemblies |
| 02/03/2011 | WO2011011953A1 Clamping systerm for base plate |
| 02/03/2011 | WO2010144273A3 A masking apparatus for an ion implanter |
| 02/03/2011 | WO2010138278A3 Integrated circuit device with deep trench isolation regions for all inter-well and intra-well isolation and with a shared contact to a junction between adjacent device diffusion regions and an underlying floating well section |
| 02/03/2011 | WO2010135220A3 Systems and methods for optimizing looping parameters and looping trajectories in the formation of wire loops |
| 02/03/2011 | WO2010132371A3 Multi-stage substrate cleaning method and apparatus |
| 02/03/2011 | WO2010129207A3 Polishing silicon carbide |
| 02/03/2011 | WO2010128783A3 Apparatus and method for manufacturing a polycrystalline silicon thin film |
| 02/03/2011 | WO2010126902A3 Temperature control of chemical mechanical polishing |
| 02/03/2011 | WO2010126901A3 Method of making and apparatus having windowless polishing pad and protected fiber |
| 02/03/2011 | WO2010126793A3 Formation of raised source/drain on a strained thin film implanted with cold and/or molecular carbon |
| 02/03/2011 | WO2010126304A3 Method for surface treatment of solar cell |
| 02/03/2011 | WO2010124261A3 Substrate pretreatment for subsequent high temperature group iii depositions |
| 02/03/2011 | WO2010096473A3 Semiconductor chip with reinforcement layer |
| 02/03/2011 | WO2010091283A3 Memory device having self-aligned cell structure |
| 02/03/2011 | WO2010090781A3 Method and apparatus for minimizing contamination in semiconductor processing chamber |
| 02/03/2011 | US20110029938 Pattern creating method, computer program product, and method of manufacturing semiconductor device |
| 02/03/2011 | US20110029937 Pattern evaluating method, pattern generating method, and computer program product |
| 02/03/2011 | US20110029685 Information processing method and information processing apparatus for transmitting data generated by device manufacturing apparatus |
| 02/03/2011 | US20110029124 Program controlled dicing of a substrate using a pulsed laser beam |
| 02/03/2011 | US20110029122 Coating and developing system, method of controlling coating and developing system and storage medium |
| 02/03/2011 | US20110028299 Tio2-containing silica glass for optical member for euv lithography |
| 02/03/2011 | US20110028073 Cmp polishing slurry and polishing method |
| 02/03/2011 | US20110028005 Vertical boat for heat treatment and method for heat treatment of silicon wafer using the same |
| 02/03/2011 | US20110028004 Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method |
| 02/03/2011 | US20110028003 Substrate processing with reduced warpage and/or controlled strain |
| 02/03/2011 | US20110028002 Semiconductor device and method of manufacturing the same |
| 02/03/2011 | US20110028001 Substrate processing apparatus and method |
| 02/03/2011 | US20110028000 Methods of etching silicon-containing films on silicon substrates |
| 02/03/2011 | US20110027999 Etch method in the manufacture of an integrated circuit |
| 02/03/2011 | US20110027998 Method of Manufacturing A Nano Structure By Etching, Using A Substrate Containing Silicon |
| 02/03/2011 | US20110027997 Polishing liquid for cmp and polishing method |
| 02/03/2011 | US20110027996 Slurry composition for a chemical mechanical polishing process, method of polishing an object layer and method of manufacturing a semiconductor memory device using the slurry composition |
| 02/03/2011 | US20110027995 Cleaning solution for substrate for semiconductor device |
| 02/03/2011 | US20110027994 Polishing slurry for cmp |
| 02/03/2011 | US20110027993 Methods of forming fine patterns of semiconductor device |
| 02/03/2011 | US20110027992 Memory device with improved data retention |
| 02/03/2011 | US20110027991 Interconnect Structure for Semiconductor Devices |
| 02/03/2011 | US20110027990 Semiconductor chip and method of manufacturing the same |
| 02/03/2011 | US20110027989 Increased density of low-k dielectric materials in semiconductor devices by applying a uv treatment |
| 02/03/2011 | US20110027988 Method for forming buried word line in semiconductor device |
| 02/03/2011 | US20110027987 Method and apparatus for manufacturing semiconductor device |
| 02/03/2011 | US20110027986 Low cost method of fabrication of vertical interconnections combined to metal top electrodes |
| 02/03/2011 | US20110027985 Semiconductor device having aerial wiring and manufacturing method thereof |
| 02/03/2011 | US20110027984 Process of forming an electronic device including a conductive stud over a bonding pad region |
| 02/03/2011 | US20110027983 Method for Manufacturing a Semiconductor Device |
| 02/03/2011 | US20110027982 Semiconductor device |
| 02/03/2011 | US20110027981 Nonvolatile semiconductor storage device and method for manufacturing same |
| 02/03/2011 | US20110027980 Semiconductor device and manufacturing method thereof |
| 02/03/2011 | US20110027979 Dielectric film, method of manufacutring semiconductor device using dielectric film, and semiconductor manufacturing apparatus |
| 02/03/2011 | US20110027978 Methods for fabricating non-planar semiconductor devices having stress memory |
| 02/03/2011 | US20110027977 Deposition of ruthenium or ruthenium dioxide |
| 02/03/2011 | US20110027976 Method of forming chalcogenide thin film |
| 02/03/2011 | US20110027975 Substrate for growing a iii-v light emitting device |
| 02/03/2011 | US20110027974 Indium surfactant assisted hvpe of high quality gallium nitride and gallium nitride alloy films |
| 02/03/2011 | US20110027973 Method of forming led structures |
| 02/03/2011 | US20110027972 Method of cutting a substrate and method of manufacturing a semiconductor device |
| 02/03/2011 | US20110027971 Method of cutting a substrate, method of processing a wafer-like object, and method of manufacturing a semiconductor device |
| 02/03/2011 | US20110027970 Method for dicing wafer and process for manufacturing liquid-discharging head using the dicing method |
| 02/03/2011 | US20110027969 Method for producing semiconductor substrate |
| 02/03/2011 | US20110027968 Semiconductor device |
| 02/03/2011 | US20110027967 Method for insertion bonding and device thus obtained |
| 02/03/2011 | US20110027966 Method for Fabricating Isolation Layer in Semiconductor Device |
| 02/03/2011 | US20110027965 Semiconductor device and manufacturing method thereof |
| 02/03/2011 | US20110027964 Doping method for semiconductor device |
| 02/03/2011 | US20110027963 Method of manufacturing semiconductor device |
| 02/03/2011 | US20110027962 Trench decoupling capacitor formed by rie lag of through silicon via (tsv) etch |
| 02/03/2011 | US20110027961 Semiconductor Component and Method of Manufacture |
| 02/03/2011 | US20110027960 Methods of Forming Strontium Titanate Films |
| 02/03/2011 | US20110027959 Tunnel Field-Effect Transistors with Superlattice Channels |
| 02/03/2011 | US20110027958 Methods of Forming Silicide Regions and Resulting MOS Devices |
| 02/03/2011 | US20110027957 Method of doping semiconductors |
| 02/03/2011 | US20110027956 Method of Fabricating a Device Using Low Temperature Anneal Processes, a Device and Design Structure |
| 02/03/2011 | US20110027955 Source/Drain Carbon Implant and RTA Anneal, Pre-SiGe Deposition |
| 02/03/2011 | US20110027954 Method to improve transistor tox using si recessing with no additional masking steps |
| 02/03/2011 | US20110027953 Laminated Stress Overlayer Using In-SITU Multiple Plasma Treatments for Transistor Improvement |
| 02/03/2011 | US20110027952 Formation of a channel semiconductor alloy by depositing a hard mask for the selective epitaxial growth |
| 02/03/2011 | US20110027951 Shared gate for conventional planar device and horizontal cnt |
| 02/03/2011 | US20110027949 Semiconductor device and method of manufacturing the same |
| 02/03/2011 | US20110027948 Method for manufacturing a finfet device |
| 02/03/2011 | US20110027947 Printing method for high performance electronic devices |
| 02/03/2011 | US20110027946 Horizontal Coffee-Stain Method Using Control Structure To Pattern Self-Organized Line Structures |
| 02/03/2011 | US20110027945 Substrate for mounting device and method for producing the same, semiconductor module and method for producing the same, and portable apparatus provided with the same |
| 02/03/2011 | US20110027944 Method of forming electrical connections |
| 02/03/2011 | US20110027943 Stud Bumps as Local Heat Sinks During Transient Power Operations |
| 02/03/2011 | US20110027942 Semiconductor package |
| 02/03/2011 | US20110027941 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 02/03/2011 | US20110027940 Method for fabricating copper-containing ternary and quaternary chalcogenide thin films |
| 02/03/2011 | US20110027939 Methods of Forming Variable Resistance Memory Cells, and Methods of Etching Germanium, Antimony, and Tellurium-Comprising Materials |
| 02/03/2011 | US20110027933 Method of texturing solar cell and method of manufacturing solar cell |
| 02/03/2011 | US20110027930 Low Temperature Wafer Level Processing for MEMS Devices |
| 02/03/2011 | US20110027929 Method of fabricating micro-electromechanical system microphone structure |
| 02/03/2011 | US20110027927 Light-emitting diode cutting method and product thereof |
| 02/03/2011 | US20110027925 Surface emitting laser, method for producing surface emitting laser, and image forming apparatus |
| 02/03/2011 | US20110027924 Surface emitting laser, method for manufacturing surface emitting laser, and image forming apparatus |
| 02/03/2011 | US20110027921 Method for manufacturing semiconductor light emitting device |