Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2011
02/09/2011CN101396765B Laser machining device
02/09/2011CN101389461B Method of manufacturing a semiconductor device and a semiconductor device produced thereby
02/09/2011CN101388330B Semiconductor manufacture device and method by heating substrate
02/09/2011CN101385124B Maintenance method, exposure method and apparatus, and device manufacturing method
02/09/2011CN101382737B Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
02/09/2011CN101360589B Multijoint robot
02/09/2011CN101359899B Thin film semiconductor device and manufacturing method
02/09/2011CN101345228B Substrate for mounting device, manufacturing method thereof, semiconductor module and portable equipment
02/09/2011CN101345214B Semiconductor device and method for manufacturing the same
02/09/2011CN101334802B Method for verifying pattern of semiconductor device
02/09/2011CN101315910B GaAs semiconductor substrate and fabrication method thereof
02/09/2011CN101303536B Exposure apparatus and device producing method
02/09/2011CN101285970B Liquid crystal display device and method of fabricating the same
02/09/2011CN101281375B Method for removing micro-air blister / particulate in liquid, liquid supplier and uses thereof
02/09/2011CN101267002B Non-volatile memory element and its fabrication method
02/09/2011CN101253021B Method of improving nanotopography on surface of wafer and wire saw device
02/09/2011CN101252132B Semiconductor memory device and fabrication process thereof
02/09/2011CN101243542B Substrate support having brazed plates and resistance heater
02/09/2011CN101241871B Observation apparatus and method for manufacturing electronic device
02/09/2011CN101239457B Elastomer-modified chemical mechanical polishing pad
02/09/2011CN101228617B Method for forming titanium nitride layer
02/09/2011CN101211922B Capacitor having tapered cylindrical storage node and method for manufacturing the same
02/09/2011CN101168275B Resin mold casting device
02/09/2011CN101162686B Heat treatment apparatus
02/09/2011CN101154598B Method of manufacturing semiconductor apparatus
02/09/2011CN101154052B Light source for exposure, exposure device, exposure method and method for manufacturing panel substrate
02/09/2011CN101140425B Exposing device, exposing method and method for manufacturing display panel substrate
02/09/2011CN101058713B Polishing slurry and polishing method
02/09/2011CN101058481B Organic EL coating device and method
02/09/2011CN101055430B Lithographic apparatus, lens interferometer and device manufacturing method
02/09/2011CN101045852B Sealing material tablet, method of manufacturing the tablet and electronic component device
02/09/2011CN101034663B Method and structure for improved alignment in mram integration
02/09/2011CN101032024B Gate stacks
02/08/2011USRE42128 Compositions for removing residue from a substrate and use thereof
02/08/2011USRE42118 Projection system for EUV lithography
02/08/2011USRE42115 Mechanism for fixing probe card
02/08/2011US7886130 Field programmable gate array and microcontroller system-on-a-chip
02/08/2011US7885789 Recipe parameter management system and recipe parameter management method
02/08/2011US7885782 Method in an integrated circuit (IC) manufacturing process for identifying and redirecting ICs mis-processed during their manufacture
02/08/2011US7884909 Transflective liquid crystal display device and fabricating method thereof
02/08/2011US7884875 Camera module having lower connection portions defining a chip region and engaging upper connection portions of a lens structure and method of fabricating the same
02/08/2011US7884719 Radio frequency identification (RFID) tag lamination process
02/08/2011US7884488 Semiconductor component with improved contact pad and method for forming the same
02/08/2011US7884485 Semiconductor device interconnect systems and methods
02/08/2011US7884480 Semiconductor device and method of manufacturing same
02/08/2011US7884479 Top layers of metal for high performance IC's
02/08/2011US7884471 Solder bump and related intermediate structure having primary and secondary portions and method of manufacturing same
02/08/2011US7884459 Semiconductor device suitable for a stacked structure
02/08/2011US7884440 Semiconductor integrated circuit
02/08/2011US7884427 Applying epitaxial silicon in disposable spacer flow
02/08/2011US7884426 Layout design method of semiconductor integrated circuit having well supplied with potential different from substrate potential
02/08/2011US7884425 Non-volatile memory devices
02/08/2011US7884423 Semiconductor device and fabrication method thereof
02/08/2011US7884415 Semiconductor memory device having multiple air gaps in interelectrode insulating film
02/08/2011US7884414 Semiconductor memory device and method of fabrication of the same
02/08/2011US7884412 System and method of forming a split-gate flash memory structure including partial circular sidewalls of the floating gates and control gates
02/08/2011US7884410 Nonvolatile memory devices and methods of fabricating the same
02/08/2011US7884409 Semiconductor device and method of fabricating the same
02/08/2011US7884407 Semiconductor device, its manufacturing method and electronic apparatus thereof
02/08/2011US7884405 Method for production of MRAM elements
02/08/2011US7884403 Magnetic tunnel junction device and memory device including the same
02/08/2011US7884384 Light emitting diode device and fabrication method thereof
02/08/2011US7884382 Rules for efficient light sources using phosphor converted LEDs
02/08/2011US7884375 Solar cell, uneven surface on an insulation layer as a screen mesh pattern, and manufacturing method thereof
02/08/2011US7884373 Gallium nitride layer with diamond layers
02/08/2011US7884370 Organic light emitting diode display and method for manufacturing the same
02/08/2011US7884369 Wiring and method of manufacturing the same, and wiring board and method of manufacturing the same
02/08/2011US7884367 Semiconductor device and manufacturing method thereof, SOI substrate and display device using the same, and manufacturing method of the SOI substrate
02/08/2011US7884366 Thin film transistor array panel and method for manufacturing the same
02/08/2011US7884365 Thin film transistor array panel and manufacturing method thereof
02/08/2011US7884361 Pattern-print thin-film transistors with top gate geometry
02/08/2011US7884360 Thin-film device and method of fabricating the same
02/08/2011US7884359 Integrally gated carbon nanotube ionizer device
02/08/2011US7884353 Semiconductor structures employing strained material layers with defined impurity gradients and methods for fabricating same
02/08/2011US7884352 Single-crystal semiconductor layer with heteroatomic macronetwork
02/08/2011US7884349 Selection device for re-writable memory
02/08/2011US7884303 Laser thin film poly-silicon annealing optical system
02/08/2011US7884286 Multilayer printed circuit board
02/08/2011US7884036 Methods for treating substrates in preparation for subsequent processes
02/08/2011US7884035 Method of controlling film uniformity and composition of a PECVD-deposited A-SiNx : H gate dielectric film deposited over a large substrate surface
02/08/2011US7884034 Method of manufacturing semiconductor device and substrate processing apparatus
02/08/2011US7884033 Method of depositing fluids within a microelectric topography processing chamber
02/08/2011US7884032 Thin film deposition
02/08/2011US7884031 Semiconductor device
02/08/2011US7884030 Gap-filling with uniform properties
02/08/2011US7884029 Solar cell, solar module and system and fabrication method thereof
02/08/2011US7884028 Method of removing material layer and remnant metal
02/08/2011US7884027 Method of manufacturing semiconductor device
02/08/2011US7884026 Method of fabricating dual damascene structure
02/08/2011US7884025 Plasma process uniformity across a wafer by apportioning ground return path impedances among plural VHF sources
02/08/2011US7884024 Apparatus and method for optical interference fringe based integrated circuit processing
02/08/2011US7884023 System and method for using siliciding PECVD silicon nitride as a dielectric anti-reflective coating and hard mask
02/08/2011US7884022 Multiple deposition for integration of spacers in pitch multiplication process
02/08/2011US7884021 Planarization of a layer over a cavity
02/08/2011US7884020 Polishing cloth and method of manufacturing semiconductor device
02/08/2011US7884019 Poison-free and low ULK damage integration scheme for damascene interconnects
02/08/2011US7884018 Method for improving the selectivity of a CVD process
02/08/2011US7884017 Thermal methods for cleaning post-CMP wafers
02/08/2011US7884016 Liner materials and related processes for 3-D integration
02/08/2011US7884015 Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods