| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/12/2011 | US7977123 Arrangements and methods for improving bevel etch repeatability among substrates |
| 07/12/2011 | US7977122 Fluidic device containing 3D structures |
| 07/12/2011 | US7977121 Method and composition for restoring dielectric properties of porous dielectric materials |
| 07/12/2011 | US7977039 Rinse treatment method, developing treatment method and developing apparatus |
| 07/12/2011 | US7976901 Polishing sheet and manufacturing method of elastic plastic foam sheet |
| 07/12/2011 | US7976785 Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus |
| 07/12/2011 | US7976718 System and method for selective etching of silicon nitride during substrate processing |
| 07/12/2011 | US7976716 Semiconductor device manufacturing method |
| 07/12/2011 | US7976674 Embedded multi-inductive large area plasma source |
| 07/12/2011 | US7976673 RF pulsing of a narrow gap capacitively coupled reactor |
| 07/12/2011 | US7976672 Plasma generation apparatus and work processing apparatus |
| 07/12/2011 | US7976671 Mask etch plasma reactor with variable process gas distribution |
| 07/12/2011 | US7976635 Dual substrate loadlock process equipment |
| 07/12/2011 | US7976634 Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems |
| 07/12/2011 | US7976632 Vacuum processing apparatus |
| 07/12/2011 | US7976631 Multi-gas straight channel showerhead |
| 07/12/2011 | US7975646 Device for depositing a coating on an internal surface of a container |
| 07/12/2011 | US7975376 Method of manufacturing a semiconductor device |
| 07/12/2011 | CA2442815C Buffer circuit having reduced leakage current and method of reducing leakage current in a field programmable device |
| 07/12/2011 | CA2389314C Methods and apparatus for the electronic, homogeneous assembly and fabrication of devices |
| 07/12/2011 | CA2328593C Chemically assembled nano-scale devices |
| 07/07/2011 | WO2011082371A2 Mobile electrostatic carriers for thin wafer processing |
| 07/07/2011 | WO2011082183A2 Wafer test cassette system |
| 07/07/2011 | WO2011082180A2 Test systems and methods for testing electronic devices |
| 07/07/2011 | WO2011082179A1 Apparatus and methods of mixing and depositing thin film photovoltaic compositions |
| 07/07/2011 | WO2011082116A1 Methods for processing silicon on insulator wafers |
| 07/07/2011 | WO2011082079A1 Method for the preparation of a multi-layered crystalline structure |
| 07/07/2011 | WO2011082065A2 Link processing with high speed beam deflection |
| 07/07/2011 | WO2011082020A2 Shadow ring for modifying wafer edge and bevel deposition |
| 07/07/2011 | WO2011081941A2 Surface passivation techniques for chamber-split processing |
| 07/07/2011 | WO2011081921A2 Atomic layer etching with pulsed plasmas |
| 07/07/2011 | WO2011081834A1 Pinning and affixing nano-active material |
| 07/07/2011 | WO2011081831A2 Hermetic electrical feedthrough |
| 07/07/2011 | WO2011081811A2 Tamper resistant fuse design |
| 07/07/2011 | WO2011081741A2 Electrical coupling of wafer structures |
| 07/07/2011 | WO2011081645A2 Adjusting substrate temperature to improve cd uniformity |
| 07/07/2011 | WO2011081512A2 Cleaning method for removing post via etch residue |
| 07/07/2011 | WO2011081503A2 Chemical mechanical polishing slurry compositions and polishing method using the same |
| 07/07/2011 | WO2011081438A2 Memory having three-dimensional structure and manufacturing method thereof |
| 07/07/2011 | WO2011081322A2 Composition for the bottom layer of a resist, and method using same to manufacture a semiconductor integrated circuit device |
| 07/07/2011 | WO2011081321A2 Composition for the bottom layer of a resist, and method using same to manufacture a semiconductor integrated circuit device |
| 07/07/2011 | WO2011081309A2 Resistance change memory device, and manufacturing method and driving method for same |
| 07/07/2011 | WO2011081245A1 Hydrogen sensor, and method for fabricating same |
| 07/07/2011 | WO2011081220A1 Substrate case and substrate accommodation apparatus |
| 07/07/2011 | WO2011081213A1 Method for soldering surface-mount component and surface-mount component |
| 07/07/2011 | WO2011081210A1 Tantalum carbide-coated carbon material and manufacturing method for same |
| 07/07/2011 | WO2011081203A1 Method for manufacturing a magnetoresistive element |
| 07/07/2011 | WO2011081202A1 Method for manufacturing an electronic component, electronic component, plasma treatment device, control program, and recording medium |
| 07/07/2011 | WO2011081195A1 Semiconductor film and photoelectric conversion device |
| 07/07/2011 | WO2011081146A1 Sos substrate with reduced stress |
| 07/07/2011 | WO2011081130A1 Semiconductor wafer, semiconductor device, and semiconductor device manufacturing method |
| 07/07/2011 | WO2011081109A1 Polishing liquid for cmp and polishing method using the same |
| 07/07/2011 | WO2011081095A1 Mounting method and mounting device |
| 07/07/2011 | WO2011081093A1 Mounting method and mounting device |
| 07/07/2011 | WO2011081087A1 Scanning electron microscope |
| 07/07/2011 | WO2011081067A1 Fine structure, method for producing fine structure, and polymerizable resin composition for production of fine structure |
| 07/07/2011 | WO2011081062A1 Liquid immersion member, method for manufacturing liquid immersion member, exposure apparatus, and device manufacturing method |
| 07/07/2011 | WO2011081052A1 Lsi, fail-safe lsi for railways, electronic device, and electronic device for railways |
| 07/07/2011 | WO2011081051A1 Magnetic memory cell and magnetic memory |
| 07/07/2011 | WO2011081049A1 Mounting table structure and processing apparatus |
| 07/07/2011 | WO2011081009A1 Method for manufacturing semiconductor device |
| 07/07/2011 | WO2011081000A1 Memory device and semiconductor device |
| 07/07/2011 | WO2011080999A1 Semiconductor device |
| 07/07/2011 | WO2011080998A1 Semiconductor device |
| 07/07/2011 | WO2011080992A1 Positive-type photosensitive resin composition |
| 07/07/2011 | WO2011080978A1 Ruthenium complex mixture, method for producing same, composition for forming film, ruthenium-containing film and method for producing same |
| 07/07/2011 | WO2011080957A1 Thin film transistor, method for manufacturing same, and display apparatus |
| 07/07/2011 | WO2011080933A1 Coating device for substrate and substrate-coating method |
| 07/07/2011 | WO2011080927A1 Magnetron sputtering device and method for manufacturing electronic components |
| 07/07/2011 | WO2011080897A1 Drive device and conveyance device |
| 07/07/2011 | WO2011080883A1 Electro-mechanical converter, spatial optical modulator, exposure device, and methods for manufacturing them |
| 07/07/2011 | WO2011080876A1 Plasma doping apparatus |
| 07/07/2011 | WO2011080873A1 Pattern measuring condition setting device |
| 07/07/2011 | WO2011080863A1 Photosensor element, photosensor circuit, thin-film transistor substrate, and display panel |
| 07/07/2011 | WO2011080857A1 Process for production of semiconductor device, and plasma doping device |
| 07/07/2011 | WO2011080827A1 Wiring structure and method for forming same |
| 07/07/2011 | WO2011080672A2 Fan-out chip scale package |
| 07/07/2011 | WO2011080629A2 Improved ultrasonic cleaning fluid, method and apparatus |
| 07/07/2011 | WO2011080419A1 Method for making holes using a fluid jet |
| 07/07/2011 | WO2011080023A2 Spin-on formulation and method for stripping an ion implanted photoresist |
| 07/07/2011 | WO2011079918A2 Conductor structural element and method for producing a conductor structural element |
| 07/07/2011 | WO2011079605A1 Transistor and manufacturing method thereof |
| 07/07/2011 | WO2011079604A1 Semiconductor device and manufacturing method thereof |
| 07/07/2011 | WO2011079602A1 Semiconductor device and method for producing the same |
| 07/07/2011 | WO2011079596A1 Mosfet structure and the manufactring method thereof |
| 07/07/2011 | WO2011079595A1 Fin transistor structure and fabrication method thereof |
| 07/07/2011 | WO2011079594A1 Semiconductor device and method of manufacturing the same |
| 07/07/2011 | WO2011079586A1 Field effect transistor device with improved carrier mobility and method for fabricating the same |
| 07/07/2011 | WO2011079582A1 Method for producing nmosfet with improved carrier mobility |
| 07/07/2011 | WO2011049671A4 Apparatus and methods for brush and pad conditioning |
| 07/07/2011 | WO2011047210A3 Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system |
| 07/07/2011 | WO2011044115A3 Method for thin film thermoelectric module fabrication |
| 07/07/2011 | WO2011043866A4 Roller assembly for a brush cleaning device in a cleaning module |
| 07/07/2011 | WO2011037869A3 Methods of forming wire bonds for wire loops and conductive bumps |
| 07/07/2011 | WO2011037743A3 Method and structure for forming high-performance fets with embedded stressors |
| 07/07/2011 | WO2011034751A3 Hot wire chemical vapor deposition (cvd) inline coating tool |
| 07/07/2011 | WO2011034335A3 Plasma-processing apparatus |
| 07/07/2011 | WO2011034293A3 Heating pipe for an exhaust line, and exhaust line structure for a semiconductor manufacturing process |
| 07/07/2011 | WO2011031431A3 Semiconductor devices with field plates |
| 07/07/2011 | WO2011031028A3 Resist stripper composition for forming copper-based wiring |