| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/20/2011 | CN102129959A Wafer cleaning device and method for cleaning wafer by using same |
| 07/20/2011 | CN102129958A Apparatus for controlling temperature of electrostatic chuck comprising two-stage refrigerant fluid channel |
| 07/20/2011 | CN102129957A Cleaning method |
| 07/20/2011 | CN102129956A Leaked liquid collecting and treating device |
| 07/20/2011 | CN102129955A Method and apparatus for separating adhesive tape |
| 07/20/2011 | CN102129954A Wafer back cleaning device for decreasing defocusing probability during exposure |
| 07/20/2011 | CN102129953A Multistep program consistency management method and device |
| 07/20/2011 | CN102129900A Method of making a thin film resistor |
| 07/20/2011 | CN102129169A Auxiliary pattern filling method and device |
| 07/20/2011 | CN102129164A Method and system for judging mask defects |
| 07/20/2011 | CN102129143A Pixel array substrate and manufacturing method thereof |
| 07/20/2011 | CN102127817A Preparation method of nanowire array with Si/NiSi nuclear shell structure |
| 07/20/2011 | CN102127752A Gas treatment systems |
| 07/20/2011 | CN102127744A Ion implanter driving mechanism with alarm function and alarm method thereof |
| 07/20/2011 | CN102127391A Radiation-proof composite material and preparation method thereof |
| 07/20/2011 | CN102127373A Chemical and mechanical polishing composition for high-removal and low-scratch silicon chip and preparation method thereof |
| 07/20/2011 | CN102127371A Preparation method and use method of polishing solution for silicon carbide |
| 07/20/2011 | CN102127370A Coated metal oxide particles for CMP |
| 07/20/2011 | CN102126612A Position correcting device |
| 07/20/2011 | CN102126259A 切削装置和切削方法 Cutting apparatus and cutting method |
| 07/20/2011 | CN102126181A Chemical mechanical polishing method |
| 07/20/2011 | CN102126175A Method for producing a semiconductor wafer |
| 07/20/2011 | CN102126174A Method and device for controlling use hours of polishing pad |
| 07/20/2011 | CN101901789B Internal insulation type plastic semiconductor element and preparation method thereof |
| 07/20/2011 | CN101866832B Method for intermittently growing single-layer Ge quantum dots with high dimensional homogeneity on buffer layer by landfill |
| 07/20/2011 | CN101826503B Sinking pad and multi-bump pad lead frame structure and method for carving before plating |
| 07/20/2011 | CN101814443B Chip design method for multi-chip module of high-performance processor with optical interface |
| 07/20/2011 | CN101814439B Process for preparing low thermal resistance ceramic copper-clad plate used for IGBT (Insulated Gate Bipolar Transistor) module |
| 07/20/2011 | CN101800175B Plasma etching method of silicon-containing insulating layer |
| 07/20/2011 | CN101789385B Portal type silicon chip transfer mechanism |
| 07/20/2011 | CN101789382B Method for preparing titanium, nickel and silver multilayer metal power semiconductor electrode |
| 07/20/2011 | CN101783299B MOS (Metal Oxide Semiconductor) formation method and threshold voltage adjustment method thereof |
| 07/20/2011 | CN101777556B Trench large-power MOS part and manufacturing method thereof |
| 07/20/2011 | CN101777504B System level packaging method of flip chip and attached passive element on support plate chip |
| 07/20/2011 | CN101762916B Array substrate, liquid crystal display panel and manufacturing methods thereof |
| 07/20/2011 | CN101752393B Image sensor filter and manufacture method thereof |
| 07/20/2011 | CN101752286B Method for making shallow groove |
| 07/20/2011 | CN101752239B Polishing method for reducing liquid corrosion pits on chemical and mechanical polished surface of silicon substrate material |
| 07/20/2011 | CN101750900B Method for determining photoetching procedure causing low yield rate in the unit of exposure area |
| 07/20/2011 | CN101740509B Method for forming picture element structure |
| 07/20/2011 | CN101740427B Bond head for heavy wire bonder |
| 07/20/2011 | CN101740397B Method for preparing ZnO (zinc oxide)-based thin film transistor by using metal organic chemical vapor deposition |
| 07/20/2011 | CN101740383B Method for manufacturing integrated PNP differential pair tube |
| 07/20/2011 | CN101740378B Copper chemical mechanical polishing method |
| 07/20/2011 | CN101728307B Method for manufacturing shallow trench isolation structure |
| 07/20/2011 | CN101728304B Method for reducing electric leakage of trench isolation |
| 07/20/2011 | CN101728288B Direct die attach utilizing heated bond head |
| 07/20/2011 | CN101728255B Method for manufacturing gate on wafer |
| 07/20/2011 | CN101728240B Multifunctional throw rotating mechanism |
| 07/20/2011 | CN101707185B Method for electroplating lead frame |
| 07/20/2011 | CN101702401B Preparation and batch processed encapsulation method of GaN-based LED thin film device |
| 07/20/2011 | CN101699629B Silicon transistor with double super-shallow isolation structures and manufacturing method thereof |
| 07/20/2011 | CN101685827B Memory device and its manufacturing method |
| 07/20/2011 | CN101685775B Method for manufacturing element |
| 07/20/2011 | CN101685251B Camera lens calibration method and system |
| 07/20/2011 | CN101673675B Method for implementing ohm contact below intrinsic gallium arsenide surface 77 K |
| 07/20/2011 | CN101661941B TFT-LCD array substrate structure and preparation method thereof |
| 07/20/2011 | CN101656231B Method for manufacturing semiconductor device integrated with CMOS component and BJT component |
| 07/20/2011 | CN101656199B Semiconductor manufacturing system, processing system, interface system, container, carrier, and adsorption plant |
| 07/20/2011 | CN101655666B Photoetching method and system |
| 07/20/2011 | CN101655640B Thin film transistor array substrate and methods for manufacturing and repairing same |
| 07/20/2011 | CN101652843B Method for forming silicon nitride film, method for manufacturing nonvolatile semiconductor memory device, nonvolatile semiconductor memory device and plasma processing apparatus |
| 07/20/2011 | CN101640194B Semiconductor device and method of designing the same |
| 07/20/2011 | CN101636826B Semiconductor arrangement with trench capacitor and method for production thereof |
| 07/20/2011 | CN101632158B Cleaning kit for composite showerhead electrode of plasma reaction chamber and method therefor |
| 07/20/2011 | CN101632151B Configuration of high-voltage semiconductor power device to achieve three dimensionalcharge coupling |
| 07/20/2011 | CN101615590B Method for preparing silicon-on-insulator material using selective corrosion process |
| 07/20/2011 | CN101615575B Baffle plate and substrate processing apparatus |
| 07/20/2011 | CN101615567B Substrate treatment apparatus |
| 07/20/2011 | CN101606229B Dicing tape and semiconductor device manufacturing method |
| 07/20/2011 | CN101604705B Fin grids transistor surrounded with grid electrodes and manufacturing method thereof |
| 07/20/2011 | CN101598902B Lithographic apparatus and device manufacturing method |
| 07/20/2011 | CN101589460B Mobility enhancement in sige heterojunction bipolar transistors |
| 07/20/2011 | CN101587907B Production method of low junction capacitance overvoltage protection thyristor apparatus chip |
| 07/20/2011 | CN101587303B Lithographic apparatus and device manufacturing method |
| 07/20/2011 | CN101577239B Fully-automatic diode combing machine |
| 07/20/2011 | CN101577211B Reaction chamber component resisting plasma corrosion, preparation method thereof and plasma reaction chamber comprising same |
| 07/20/2011 | CN101572285B Light-emitting device packageing and method for fabricating the same |
| 07/20/2011 | CN101567392B Thin-film transistor |
| 07/20/2011 | CN101567388B P-channel power MIS field effect transistor and switching circuit |
| 07/20/2011 | CN101567367B Semiconductor device |
| 07/20/2011 | CN101567303B Laser film engraving equipment and scribing method |
| 07/20/2011 | CN101552237B Semiconductor device and method of fabricating the same |
| 07/20/2011 | CN101536153B Method of manufacturing a FET gate |
| 07/20/2011 | CN101535171B A sealing structure and a method of manufacturing the same |
| 07/20/2011 | CN101526300B Method for removing moisture from a substrate coated with a transparent electrode |
| 07/20/2011 | CN101515560B A method for forming a shallow trench isolation region |
| 07/20/2011 | CN101510514B Substrate for mounting electronic part and electronic part |
| 07/20/2011 | CN101499458B Test structure and method for detecting disc trap and corrosion caused by CMP |
| 07/20/2011 | CN101496156B Parallelism adjusting mechanism of probe card |
| 07/20/2011 | CN101493655B Exposure method |
| 07/20/2011 | CN101488489B Conductive line structure and the method of forming the same |
| 07/20/2011 | CN101488453B Structure and method to fabricate MOSFET with short gate |
| 07/20/2011 | CN101484276B Polishing liquid for cmp and polishing method |
| 07/20/2011 | CN101471240B Adhesive sheet, dicing tape intergrated type adhesive sheet, and semiconductor device producing method |
| 07/20/2011 | CN101465304B Method for preparing convex point capable of avoiding blue tape appearance |
| 07/20/2011 | CN101464634B Lithographic apparatus, workbench system and its control method |
| 07/20/2011 | CN101456154B Multiple zone carrier head with flexible membrane |
| 07/20/2011 | CN101452888B Method for forming tunnel oxidation layer window in EEPROM |
| 07/20/2011 | CN101441987B Substrate cleaning device and method |