| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/20/2011 | CN101430502B Method of correcting mask pattern, method of manufacturing semiconductor device, and semiconductor device |
| 07/20/2011 | CN101414614B Image sensor device and fabrication method thereof |
| 07/20/2011 | CN101409245B Automatic control silicon chip check system |
| 07/20/2011 | CN101409211B Substrate processing apparatus and method of cleaning the same |
| 07/20/2011 | CN101369545B Heating block and wire bonding method using the same |
| 07/20/2011 | CN101354529B Photomask data generation method, photomask generation method, exposure method, and device manufacturing method |
| 07/20/2011 | CN101353786B Foundation and manufacture method and chemical vapor deposition device having the foundation |
| 07/20/2011 | CN101350364B Method for preparing nano zinc oxide field-effect transistor |
| 07/20/2011 | CN101339146B Automatic optical detector |
| 07/20/2011 | CN101338976B Cooling device for sheet treated product and heat treatment system mounting the device |
| 07/20/2011 | CN101326630B A method of forming a layer over a surface of a first material embedded in a second material in a structure for a semiconductor device |
| 07/20/2011 | CN101325176B Manufacturing method of semiconductor device |
| 07/20/2011 | CN101315946B Semiconductor device, and method for fabricating thereof |
| 07/20/2011 | CN101303531B A wafer chuck and a method of forming a wafer chuck |
| 07/20/2011 | CN101292345B Field effect transistors (fets) with inverted source/drain metallic contacts, and method of fabricating same |
| 07/20/2011 | CN101285865B Method and apparatus for detecting tip position of probe, alignment method, and probe apparatus |
| 07/20/2011 | CN101283441B Polishing slurry for CMP and polishing method |
| 07/20/2011 | CN101281897B Matrix type structure for testing integrality of gate oxic horizon |
| 07/20/2011 | CN101246863B Conductive structure for semiconductor integrated circuit and method for forming the same |
| 07/20/2011 | CN101236971B Thin film transistor substrate and display device therefor |
| 07/20/2011 | CN101236894B Substrate processing apparatus |
| 07/20/2011 | CN101228624B Dry etchback of interconnect contacts |
| 07/20/2011 | CN101226876B Method for joining adhesive tape and apparatus using the method |
| 07/20/2011 | CN101221911B Packaging micro devices |
| 07/20/2011 | CN101221910B Method of manufacturing flat panel display device |
| 07/20/2011 | CN101220463B Process for chemical vapor deposition and semiconductor structure |
| 07/20/2011 | CN101211903B RF module package structure and its forming method |
| 07/20/2011 | CN101211878B Interconnection structure and its forming method |
| 07/20/2011 | CN101192531B Method for processing polysilazanes film |
| 07/20/2011 | CN101192507B Phosphoric acid solution exchanging method in semiconductor integrated circuit production |
| 07/20/2011 | CN101192008B Coating method and coating device |
| 07/20/2011 | CN101183666B Method of manufacturing side wall of self-alignment source drain of embedded type flash memory |
| 07/20/2011 | CN101174609B Semiconductor integrated circuit and method of manufacturing the same |
| 07/20/2011 | CN101170055B Integrated method for removal of halogen residues from etched substrates by thermal process |
| 07/20/2011 | CN101162738B Non-volatility memory and manufacturing method thereof |
| 07/20/2011 | CN101153407B Parts for substrate processing apparatus and protection film forming method |
| 07/20/2011 | CN101133682B Method for etching having a controlled distribution of process results |
| 07/20/2011 | CN101123268B Display device and manufacturing method thereof |
| 07/20/2011 | CN101058711B Grinding fluid for metal and grinding method |
| 07/20/2011 | CN101045364B Printing apparatus and printing method |
| 07/20/2011 | CN101042992B Vertical plasma processing apparatus for semiconductor process |
| 07/20/2011 | CN101038444B System and method for moving a component, lithographic apparatus and device manufacturing method |
| 07/19/2011 | US7984390 Data processing method in semiconductor device, program of the same, and manufacturing method of semiconductor device |
| 07/19/2011 | US7983516 Zinc oxide diodes for optical interconnections |
| 07/19/2011 | US7983471 Pattern inspection apparatus and method |
| 07/19/2011 | US7983056 Semiconductor device |
| 07/19/2011 | US7983018 Plasma processing system ESC high voltage control and methods thereof |
| 07/19/2011 | US7983017 Electrostatic chuck and method of forming |
| 07/19/2011 | US7982851 Method for measuring flare amount, mask for measuring flare amount, and method for manufacturing device |
| 07/19/2011 | US7982850 Immersion lithographic apparatus and device manufacturing method with gas supply |
| 07/19/2011 | US7982692 Active matrix substrate, electro-optical device, and electronic device |
| 07/19/2011 | US7982574 Integrated transformer |
| 07/19/2011 | US7982558 Integrated single-crystal MEMS device |
| 07/19/2011 | US7982417 Stage unit, exposure apparatus, and device manufacturing method |
| 07/19/2011 | US7982385 Display device with a plurality of picture elements and electronic device with display device |
| 07/19/2011 | US7982317 Semiconductor device, semiconductor device module, and method for manufacturing the semiconductor device module |
| 07/19/2011 | US7982314 Semiconductor integrated circuit device |
| 07/19/2011 | US7982312 Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning |
| 07/19/2011 | US7982310 Semiconductor device, method of manufacturing thereof, circuit board and electronic apparatus |
| 07/19/2011 | US7982309 includes a substrate including an active area and a gas phase deposited packaging material encapsulating the active area |
| 07/19/2011 | US7982296 Methods and devices for fabricating and assembling printable semiconductor elements |
| 07/19/2011 | US7982293 Multi-chip package including die paddle with steps |
| 07/19/2011 | US7982289 Wafer and a method for manufacturing a wafer |
| 07/19/2011 | US7982284 Semiconductor component including an isolation structure and a contact to the substrate |
| 07/19/2011 | US7982283 Semiconductor device and method for manufacturing the same |
| 07/19/2011 | US7982281 Method of manufacturing a semiconductor device, method of manufacturing a SOI device, semiconductor device, and SOI device |
| 07/19/2011 | US7982279 Method of manufacturing stacked-type semiconductor device |
| 07/19/2011 | US7982272 Thin-film semiconductor device and method for manufacturing the same |
| 07/19/2011 | US7982270 Semiconductor device including memory cell and anti-fuse element |
| 07/19/2011 | US7982269 Transistors having asymmetric strained source/drain portions |
| 07/19/2011 | US7982267 Projector including display device |
| 07/19/2011 | US7982265 Trenched shield gate power semiconductor devices and methods of manufacture |
| 07/19/2011 | US7982263 Semiconductor device having a plurality of misfets formed on a main surface of a semiconductor substrate |
| 07/19/2011 | US7982262 NAND memory device with inversion bit lines |
| 07/19/2011 | US7982258 Flash memory device and method for manufacturing the device |
| 07/19/2011 | US7982252 Dual-gate non-volatile ferroelectric memory |
| 07/19/2011 | US7982217 Semiconductor device and its test method |
| 07/19/2011 | US7982215 TFT substrate and method for manufacturing TFT substrate |
| 07/19/2011 | US7982214 Voltage-operated layered arrangement |
| 07/19/2011 | US7982208 Non-polar (Al,B,In,Ga)N quantum well and heterostructure materials and devices |
| 07/19/2011 | US7982203 CMOS-process-compatible programmable via device |
| 07/19/2011 | US7982190 Radiation detector and method for producing the same |
| 07/19/2011 | US7982188 Apparatus and method for wafer pattern inspection |
| 07/19/2011 | US7982160 Photonic clock stabilized laser comb processing |
| 07/19/2011 | US7982126 Photovoltaic module with improved heat transfer and recovery potential |
| 07/19/2011 | US7982039 N-type semiconductors and related devices |
| 07/19/2011 | US7981817 Method for manufacturing semiconductor device using multiple ion implantation masks |
| 07/19/2011 | US7981816 Impurity-activating thermal process method and thermal process apparatus |
| 07/19/2011 | US7981815 Semiconductor device producing method and substrate processing apparatus |
| 07/19/2011 | US7981814 Replication and transfer of microstructures and nanostructures |
| 07/19/2011 | US7981812 Methods for forming ultra thin structures on a substrate |
| 07/19/2011 | US7981811 Semiconductor device and method for manufacturing same |
| 07/19/2011 | US7981810 Methods of depositing highly selective transparent ashable hardmask films |
| 07/19/2011 | US7981809 Film formation method and apparatus for semiconductor process |
| 07/19/2011 | US7981808 Method of forming a gate dielectric by in-situ plasma |
| 07/19/2011 | US7981807 Manufacturing method of semiconductor device with smoothing |
| 07/19/2011 | US7981806 Method for forming trench and method for fabricating semiconductor device using the same |
| 07/19/2011 | US7981805 Method for manufacturing resistance change element |
| 07/19/2011 | US7981804 Manufacturing method of semiconductor device |
| 07/19/2011 | US7981803 Method of forming micro pattern of semiconductor device |